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Data SheetDS-TMF-5850E-MFC-eng-euApril, 2008
Models 5850E/5863E
1
Brooks® E-series MFC/MFM
Mass Flow Sensor Model 5863E
DESIGN FEATURES•Accuratemeasurementandcontrol•Wideflow-&pressurerange•Fastresponsetocommandchanges•Corrosionresistantnormallyclosed-,or normallyopenedcontrolvalve•SubminiatureD-connectorelectricalinterfaceforRFIimmunity
•CEcertified
OPTIONS:•Ultracleantechnology,allmetalsealed. PleaseaskforPDS:5964or5850EM•Fastresponseorsoftstart•Normallyopened-,orclosedcontrolvalve•Mechanicallyandelectricallyinterchangeablewithothermassflowcontrollers
•(Optionally)certifiedforuseinzone2 environmentaccordingtoNEN3410, NEN-EN50014,DIN57165andVDE0165
DESCRIPTIONTheBrooksmodels5850E-5863Emassflowmetersandmassflowcontrollersaccuratelymeasuresandcontrolsgasflows.Theheartofthesystemisaverystableflowsensorwhichproducesanelectricoutputsignallinearwithflowrateusedforindicatingand/orrecording.TheBrooksmassflowcontrollersaccuratelymeasureandcontrolgasflowsfasttocommandchanges,virtuallywithoutovershoot.ThesemassflowcontrollersprovideanexclusivePIDcontrolloop,whichhasbeenbalancedtomatchuniquesensor/valvecharacteristics.Thecomputerdesignedcontrolvalvesallowstableoperationoverawidevarietyofflowandpressureconditions.Theactualflowdynamicsarecontrolled,resultinginamuchsmoothertransitiontosteady-stateflowintheshortestperiodoftime.
Mass Flow Controller Model 5850E
Mass Flow Controller Model 5851E
2
SPECIFICATIONSCertification CEcertified
PERFORMANCEAccuracy ±1%fullscaleincludinglinearity
measuredatcalibratedconditionsRepeatability ±0,25%ofrateRangeability 50to1Flowranges Anyfullscalerangefrom3mln/
minto1000ln/min.(Nitrogenequivalent.)
Mountingattitude ±0,5%fullscalemax.deviation
fromsensitivityspecifiedaccuracyafterrezeroing
Temperature Zero : lessthan±0,075%fullsensitivity scale/°C Span : lessthan±1,0%full
scaleshiftfromoriginalcalibrationover10-50°Crange
RATINGSMax.operatingpressure • 100bar • Model5860E300bar • Model5850E,5861E optional300barDifferential • Models5850Eand5851Epressure typical1bar • Model5853 0,5barto20bar • Models5860E,5861Eand5863,
50mbaratmaxfullscaleTemperature Ambient/gas0-65°CLeakintegrity Outboard:1x10-9mbar.l/sHelium
Electrical SpecificationsMASS FLOW CONTROLLERS
MASS FLOW METERS
NOTE:Tolerancetotheaboverequirements:±5%
Materialsof Wettedpartsstainlesssteelwithconstruction Viton®,Buna-N®orPTFE/
Kalrez®Mechanical • ¼”,½”,1”,1½”NPT(F)connections • ¼”,½”-¾”or1”Tube
compression • ¼”,½”,¾”VCOor½”VCR Option:FlangedDIN-orANSItype
available;pleaserefertoorderinginformation
Electrical • 15-pinsD-typeconnector(goldplatedconnectionscontacts)with3m,6mor12mcable
MASS FLOW CONTROLLER FAST RESPONSE PERFORMANCEThecurvesinfigure1displaystheM.F.C.outputsignalandactualtransitionalflowtosteady-statewhengasflowentersintoaprocesschamber,underastepresponsecommandcondition.
LOW COMMAND VALVE INHIBITAvarietyofprocesscontrolsystemsdonotalwaysprovideatrue”zero”commandvalue.Thisresultsinthemassflowcontrollertryingtomatchitsoutputsignaltoitscommandedvalue,whichopenstheM.F.C.andpermitsundesiredgasflow.
Figure 1: Response performance
MODELS POWER SUPPLY SETPOINT OUTPUT REQUIREMENvTS INPUT SIGNALS
5850E and +15Vdc,35mA 0-5Vdc 0-5Vdc 5853E and 2000Ohm minload –15Vdc,180mA inputresist. 2000Ohm
5851E and +15Vdc,350mA 0-5Vdc 0-5Vdc 5850E 300 bar and 2000Ohm minload –15Vdc,350mA inputresist. 2000Ohm
MODEL POWER SUPPLY OUTPUT SIGNALS
5860E, 5861E +15Vdc@25mA 0-5Vdcinto2000Ohm and 5863E and (orgreater)load –15Vdc@15mA 0-5Vdcinto2000Ohm (orgreater)load
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TheBrooksmassflowcontrollereliminatesthisundesiredflowconditionthroughitsuniqueLOWCOMMANDVALVEINHIBIT,whichprovidessuperiorprocessstability.WithLowCommandValveInhibitthevalveisautomaticallydriventothefullclosedpositionwhenthecommandvalueislessthan1%offullscale.
INTERNAL COMMAND RESETTheBrooksmassflowcontrollerprovidestheexclusivefeatureofINTERNALCOMMANDRESET.Iteliminatesovershootandundershootoscillationsandreachescommandedsteady-stateflowcontrolveryrapidly.Theresultisadecreasedgassettlingtimeandvastlyimprovedsetpointcontrol(seefigure2).
SELECTABLE SOFT STARTProcessesrequiringinjectionofgasescanbeadverselyaffectedbyexessiveinitialgasflow.Thisovershootcanresultinprocessdamagefromexplosionorinitialpressureimpact.TheseproblemsarevirtuallyeliminatedwiththeSOFTSTARTfeature(seefigure3)
SELECTABLE VALVE OVERRIDEGashandlingsafetypracticesmustbegivenconsiderationinmanyprocesses.
SinceM.F.C.’sareanintegralpartofthegassystem, itwasmandatorytotakethesepracticesintoourdesignstandards.
IndependentofcommandsetpointvaluesthecontrolvalvecanbefullyopenedorclosedviatheVALVEOVERRIDEFEATUREbysimplyprovidingavoltagesignalthroughtheinterconnectionwiring.Thisisusefulforshutdownorsystempurgerequirements.
Accessories•ForMicroprocessorbasedReadOutandControlelectronics,pleaserefertothePDS0152/0154.
•Standardsignalcablesareavailable.Pleaserefer totheorderinginformationatpage6/7.
Referencetofigures:1,2and3
•Theblackcurverepresentsan(external)commandsetpointchange
•Thebluecurverepresentstheflowrateoutputsignalofthemassflowsensor/controller
Figure 3: Soft-start enabled
Figure 2: The M.F.C valve closed to normal operation
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CONNECTIONS A
9/16”-18UNF 76
1/4”TUBECOMPR. 128
1/8”TUBECOMPR. 123
1/4”VCR 124
1/4”VCO 116
1/4”NPT 116
6mmTUBECOMPR. 128
DIMENSIONS
MODEL 5853E
CONNECTIONS Build-in Dimensions: (mm) ’X’ model 5853
1/2”TB.COMPR. 267
3/4”TB.COMPR. 267
1”TB.COMPR. 276
1/2”VCO 250
CONNECTIONS Build-in Dimensions: (mm) ’X’ model 58533/4”VCO 257
1/2”VCR 322
0,5”,1”,1,5”NPTor11/16”-12 199
FLANGETYPEDIN DN15 PN40DIN DN25 PN40DIN DN40 PN40DIN DN50 PN40ANSI 0,5” 150LBSANSI 0,5” 300LBSANSI 1” 150LBSANSI 1” 300LBSANSI 1,5” 150LBSANSI 1,5” 300LBSANSI 2” 150LBSANSI 2” 300LBS
CONNECTIONS A A with filter
9/16”-18UNF 94 130
1/4”TUBECOMPR. 145 181
3/8”TUBECOMPR. 148 184
1/4”VCR 141 177
1/4”VCO 133 169
1/4”NPT 134 170
6mmTUBECOMPR. 145 181
10mmTUBECOMPR. 148 184
MODEL 5850E
MODEL 5851E
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DIMENSIONS
MODEL 5860E
MODEL 5863E
MODEL 5861E
CONNECTIONS Build-in Dimensions: (mm) ’X’ model 5863
1/2”TB.COMPR.. 223
3/4”TB.COMPR. 223
1”TB.COMPR. 232
1/2”VCO 206
CONNECTIONS Build-in Dimensions: (mm) ’X’ model 58633/4”VCO 213
1/2”VCR 210
0,5”,1”,1,5”NPTor11/16”-12 155
FLANGETYPEDIN DN15 PN40DIN DN25 PN40DIN DN40 PN40DIN DN50 PN40ANSI 0,5” 150LBSANSI 0,5” 300LBSANSI 1” 150LBSANSI 1” 300LBSANSI 1,5” 150LBSANSI 1,5” 300LBSANSI 2” 150LBSANSI 2” 300LBS
CONNECTIONS A
9/16”-18UNF 59
1/4”TUBECOMPR. 110
1/8”TUBECOMPR. 105
1/4”VCR 106
CONNECTIONS A
1/4”VCO 98
1/4”NPT 99
6mmTUBECOMPR. 110
CONNECTIONS ”A” dim in mm ”A” dim in mm
9/16”-18UNF 80 116
1/4”TUBECOMPR. 131 167
3/8”TUBECOMPR. 134 170
1/4”VCR 128 164
1/4”VCO 120 156
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THERMAL MASS "E" SERIES5850/5851BASE MODEL NUMBER5850E/B1
5851E/B1
ABCDZ
12
J
AB
Z
123
456789
ABCDEFZ
DESCRIPTIONMASS FLOW CONTROLLER, MAX. 100 BARFULL SCALE RANGES FROM 10mln/min* UPTO 30 ln/min N2
FULL SCALE RANGES FROM 10mln/min UPTO 100ln/min N2MASS FLOW CONTROLLER, MAX 100 BAR
O-RING/VALVE SEAT MATERIALVITONBUNATEFLON/KALREZ (KALREZ ONLY FOR SENSOR 0-RINGS AND VALVE SEAT)KALREZSPECIFYVALVE TYPENORMALLY CLOSEDNORMALLY OPENED (ONLY 5850E)ELECTRICAL CONNECTIONSCARD EDGE15-PINS SUB "D" CONNECTORZONE II CERTIFIEDSPECIFYMECHANICAL CONNECTIONSWITHOUT ADAPTERS (9/16"-18" UNF)1/4" TUBE COMPRESSION FITTINGS1/8" TUBE COMPRESSION FITTINGS (ONLY FOR 5850E)3/8" TUBE COMPRESSION FITTINGS (ONLY FOR 5851E)1/4" VCR1/4" VC01/4" NPT6 mm TUBE COMPRESSION FITTINGS10 mm TUBE COMPRESSION FITTINGS (ONLY FOR 5850/51E)SPECIFYINTERCONNECTION CABLE
MOUNTING C.E. BRACKET0 NO CABLE
MATING CONNECTOR ONLY1,5m. FLAT CABLE WITH C.E. CONNECTOR AT ONE SIDE3m. ROUND CABLE WITH MATING "D" CONNECTOR6m. ROUND CABLE WITH MATING "D" CONNECTOR12m. ROUND CABLE WITH MATING "D" CONNECTORSPECIFY
5850E/B1 A 1 B 3 E = TYPICAL MODEL NUMBER
ACCESSOIRES & OPTIONS* FOR FLOWRANGES > 3 mln/min. 10 mln/min. N2, ADD:- FOR GASES WICH CLOG AND CONTAMINATE THE MFC EASILY, AN ANTI-CLOG LAMINAR FLOW ELEMENT
MUST BE ORDERED, FOR FLOWRANGES UPTO 3460 mln/min N2 ADD.:- HEATING PAD- INTERCONNECTION CABLE; ADD PER METER
7
B
THERMAL MASS "E" SERIES5853BASE MODEL NUMBER5853E/-
1234567890
A
C
12
AB
O0A0B0C0D0E0F0Z0
5853E/- 5 A1 B 1F D0 =
DESCRIPTIONMASS FLOW CONTROLLER, MAX 100 BARMAX. F.S. FLOW RANGE
UP TO 200 ln/min.UP TO 300 ln/min.UP TO 400 ln/min.UP TO 500 ln/min.UP TO 600 ln/min.UP TO 700 ln/min.UP TO 800 ln/min.UP TO 900 ln/min.
UP TO 1000 ln/min.
100 ln/min.
O-RING MATERIALVITONPTFE/BUNAPTFE/KALREZCONTROL VALVE TYPENORMALLY CLOSED MIN. DIFF. 2 BAR, MAX. DIFF. 20 BARNORMALLY CLOSED MIN. DIFF. 0,5 BAR, MAX. DIFF. 2 BARELECTRICAL CONNECTIONS0-5Vdc 0-5Vdc CE-CONN. E-SERIES0-5Vdc 0-5Vdc "D"-CONN. E-SERIESMECHANICAL CONNECTIONS9/16" - 18UNF. (100 ln/min max.)1 1/16" - 12SAE/MS9/16" TO 1/2" TUBE COMPRESSION FITTINGS1 1/16" TO 1/2" TUBE COMPRESSION FITTINGS3/4" TUBE COMPRESSION FITTINGS1" TUBE COMPRESSION FITTINGS1/2" NPT (F)1" NPT (F)11/2" NPT (F)1/2" VCO (100 ln/min max.)3/4" VCO1/2" VCR (100 ln/min max.)1/2" BSP (F)1" BSP (F)DIN DN 15 PN40DIN DN 25 PN40DIN DN 40 PN40DIN DN 50 PN40ANSI 1/2" 150 LBSANSI 1/2" 300 LBSANSI 1" 150 LBSANSI 1" 300 LBSANSI 11/2" 150 LBSANSI 11/2" 300 LBSANSI 2" 150 LBSANSI 2" 300 LBSSPECIFYINTERCONNECTION CABLEWITHOUT MATING CONNECTOR
C.E. BRACKETWITH MATING CONNECTORC.E. CONNECTOR WITH 1.5m. FLAT CABLE3M. SIGNAL CABLE WITH 15-PINS SUB "D" CONNECTOR6M. SIGNAL CABLE WITH 15-PINS SUB "D" CONNECTOR12M. SIGNAL CABLE WITH 15-PINS SUB "D" CONNECTORSPECIFYTYPICAL MODEL NUMBER
ACCESSOIRES & OPTIONS* CERTIFIED FOR USE IN ZONE 2, HAZARDOUS AREA** STANDARD CABLE; ADD PER METER
1A1B1C1D1E1F1G1H1J1K1L1M1N1O2A2B2C2D3A3B3C3D3E3F3G3H9Z
8
J
THERMAL MASS "E" SERIES5860/5861BASE MODEL NUMBER5860E/-1
5861E/-1
ABCDZ
AB
Z
123
456789
A
BDEFZ
DESCRIPTIONMASS FLOW METER (VOLTAGE), F.S. RANGES FROM 10 mln/min*UPTO 30 ln/min (N2 EQUIVALENT) MAXIMUM OPERATING PRESSURE 300 BAR
UPTO 100 ln/min (N2 EQUIVALENT) MAXIMUM OPERATING PRESSURE 100 BAR*MASS FLOW METER (VOLTAGE), F.S. RANGES FROM 20 ln./min
O-RING MATERIALVITONBUNATEFLON (KALREZ O-RINGS FOR THE SENSOR ASSEMBLY)KALREZSPECIFY
ELECTRICAL CONNECTIONSCARD EDGE 0-5Vdc15-PINS SUB "D" 0-5VdcZONE 2 CERTIFIEDSPECIFYMECHANICAL CONNECTIONSWITHOUT ADAPTERS (9/16-18 UNF)1/4" TUBE COMPRESSION FITTINGS1/8" TUBE COMPRESSION FITTINGS ONLY FOR 58603/8" TUBE COMPRESSION FITTINGS ONLY FOR 58611/4" VCR1/4" VC01/4" NPT6 mm TUBE COMPRESSION FITTINGS10 mm TUBE COMPRESSION FITTINGS (ONLY FOR 5860/61E)SPECIFYINTERCONNECTION CABLENO CABLE
MATING CONNECTOR ONLY3m. ROUND CABLE WITH MATING "D" CONNECTOR6m. ROUND CABLE WITH MATING "D" CONNECTOR12m. ROUND CABLE WITH MATING "D" CONNECTORSPECIFY
5860E/-1 A B 7 D = TYPICAL MODEL NUMBER
ACCESSOIRIES & OPTIONS* FOR FLOWRANGES > 3 mln/min. 10 mln/min. N2, ADD:- FOR LOW-LINE PRESSURES AND FOR GASES WICH CLOG AND CONTAMINATE THE MFM EASILY, AN
ANTI-CLOG LAMINAR FLOW ELEMENT MUST BE ORDERED. FOR FLOWRANGES UPTO 3460 mln/min N2 ADD- HIGH PRESSURE RATING: 300 BAR FOR MODEL 5861- STANDARD CABLE: ADD PER METER- HEATING PAD
0C.E. Bracket
9
B0
THERMAL MASS "E" SERIES5863EBASE MODEL NUMBER5863E/-
1234567890
A0
C0
AB
0ABCDEFZ
5853E/- 5 A1 B 1F D0 =
DESCRIPTIONMASS FLOW SENSOR, MAX 100 BAR
MAX. F.S. FLOW RANGE
UP TO 200 ln/min.UP TO 300 ln/min.UP TO 400 ln/min.UP TO 500 ln/min.UP TO 600 ln/min.UP TO 700 ln/min.UP TO 800 ln/min.UP TO 900 ln/min.
UP TO 1000 ln/min.
100 ln/min.
O-RING MATERIALVITONPTFE/BUNAPTFE/KALREZELECTRICAL OUTPUT0-5Vdc CE-conn0-5Vdc "D"-connMECHANICAL CONNECTIONS9/16" - 18UNF. (100 ln/min max.)1 1/16" - 12SAE/MS9/16" TO 1/2" TUBE COMPRESSION FITTINGS1 1/16" TO 1/2" TUBE COMPRESSION FITTINGS3/4" TUBE COMPRESSION FITTINGS1" TUBE COMPRESSION FITTINGS1/2" NPT (F)1" NPT (F)11/2" NPT (F)1/2" VCO (100 ln/min max.)3/4" VCO1/2" VCR (100 ln/min max.)1/2" BSP (F)1" BSP (F)
DIN DN 15 PN40DIN DN 25 PN40DIN DN 40 PN40DIN DN 50 PN40ANSI 1/2" 150 LBSANSI 1/2" 300 LBSANSI 1" 150 LBSANSI 1" 300 LBSANSI 11/2" 150 LBSANSI 11/2" 300 LBSANSI 2" 150 LBSANSI 2" 300 LBSSPECIFYINTERCONNECTION CABLEWITHOUT MATING CONNECTORC.E. BRACKETWITH MATING CONNECTORC.E. CONNECTOR WITH 1.5m. FLAT CABLE3M. SIGNAL CABLE WITH 15-PINS SUB "D" CONNECTOR6M. SIGNAL CABLE WITH 15-PINS SUB "D" CONNECTOR12M. SIGNAL CABLE WITH 15-PINS SUB "D" CONNECTORSPECIFY
TYPICAL MODEL NUMBER
ACCESSOIRES & OPTIONS
* CERTIFIED FOR USE IN ZONE 2, HAZARDOUS AREA* STANDARD CABLE; ADD PER METER
1A1B1C1D1E1F1G1H1J1K1L1M1N1O2A2B2C2D3A3B3C3D3E3F3G3H9Z
Data SheetDS-TMF-5850E-MFC-eng-eu
April, 2008Models 5850E/5863E
10
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Data SheetDS-TMF-5850E-MFC-eng-euApril, 2008
Models 5850E/5863E
11
THIS PAGE WAS INTENTIONALLY
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Data SheetDS-TMF-5850E-MFC-eng-eu
April, 2008Models 5850E/5863E
12
E-Mail [email protected]
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