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C. T.-C. Nguyen and R. T. Howe, Polysilicon …ctnguyen/Research/...C. T.-C. Nguyen and R. T. Howe, Polysilicon microresonators for signal processing, Digest of Papers, Government

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C. T.-C. Nguyen and R. T. Howe, “Polysilicon microresonators for signal processing,” Digest of Papers, Government Microcircuit and Applications Conference, San Diego, CA, Aug. 15, 1994, pp. 195-198.