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1
Chapter 10
2
3
CVD vs.
SiO2SiO2
SiSi Si
4
CVD vs.
CVD
5
- (PMD)- (IMD)
(STI) (PD) (ARC)
6
USGW
P
NP
BPSG
p+ p+n+n+ USG
W
Metal 2, AlCu
P
1, AlCu
AlCu
STI STI
PMD ILD1
IMD ILD2
ARCPD1
PD2
WCVD
TiNCVD
CMOS
7
STIN:
= 1 + 1 + 1 + (N1) + 1 = N + 3
STI
PMD IMD PD
8
(CVD) (Chemical Vapor Deposition)
9
CVD
Si () SiH4 () SiCl2H2 (DCS)
Si () SiCl3H (TCS) SiCl4 (Siltet) LPCVD SiH4, O2 SiO2 () PECVD SiH4, N2O
PECVD Si(OC2H5)4 (TEOS), O2
LPCVD TEOS
APCVD&SACVDTM TEOS, O3 (ozone)
Oxynitride SiH4, N2O, N2, NH3
PECVD SiH4, N2, NH3 Si3N4 LPCVD SiH4, N2, NH3 LPCVD C8H22N2Si (BTBAS) W () WF6 (), SiH4, H2 WSi2 WF6 (), SiH4, H2
TiN Ti[N (CH3) 2]4 (TDMAT) Ti TiCl4 Cu
10
CVD
.
11
CVD
12
13
14
CVD
APCVD
LPCVD
PECVD
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(APCVD)
CVD APCVD APCVD(O3-TEOS) STI PMD
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N2 N2
APCVD
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(LPCVD) 0.1 ~ 1 Torr
(650C)(IMD)
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19
(PECVD)
1 ~ 10 Torr
(IMD)
20
RF
(PECVD)
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(Step Coverage)
CVD (Aspect ratio) (Conformality) (Overhang)
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a
b
c
d
CVD
= b/a = d/a
= b/c = (c - b)/b
= h/w
h
w
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AB
C
270
90
180
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A: 270, C: 90 A
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27
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APCVD
LPCVD
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PSG
,
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: //()
CVD ()
O3-CVDCVD CVD()
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PMD: (zero tolerance)
IMD: k()
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PMD
W CVD
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W CVD
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//
AlCu
AlCu
AlCu
USG
USG
USG
35
36
37
38
l
CVD
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(physisorption) (chemisorption)
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2 eV IMDPD PECVD (10 to 20 eV)
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0.5 eV
400 C
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43
CVD
(SiH4)
(tetra-ethyl-oxy-silane, TEOS ,Si(OC2H5)4)
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CVD : CVD
PECVD PMD (DARC) CVD
LPCVD CVD
W CVD WSix
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CVD :
(), ,
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H
Si
H
H
H
Si
H
H
H H
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CVD:
, SiH3,
SiH2, SiH, ,
48
CVD : (TEOS)
(tetra-ethyl-oxy-silane, TEOS ,Si(OC2H5)4)
TEOS
49
Si
H
H
H H
H
H H
H
C
C
O
O
H
H H
H
C
C
C C O C CO
HH HH
H HH H
TEOS
50
TEOS
,, PMD IMD CVD TEOS
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1
3
10
30
100
10 20 30 40 50 60 70 80 90 100 110
()
(C)
1
3
10
30
100
TEOS
52
TEOS
168 C (H2O)100 C
, ,
53
MFC
TEOS
54
TEOS
MFC MFM
55
LFC
MFC
TEOS
TEOS, TEOS
56
100%
57
SiH4 3x10-43x10-5
SiH3 0.04 0.08
SiH2 0.15
SiH 0.94
TEOS 10-3
WF6 10-4
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TEOS
TEOS
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Ea
C.R. = A exp (-Ea/kT)
60
1/T
lnD
.R.
= -Ea/k
61
.
D.R. = C.R. [B] [C] []
62
= D dn/dx [B] [C] []
63
64
CVD
()