Cold Cathodes Presentation

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    Cold CathodeMPG400, PEG100 Product Presentationby Markus Truniger

    tijc24d1

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    2

    Source: MPE Garching D

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    Cold Cathode Measurement Gauges

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    Two Cold Cathode principles(Basic Cross-Field Gauge Geometries)

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    Penning vs. Inverted Magnetron

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    Plasma of the Cold Cathode Gauges

    The pictures show the plasmas which ignite after applying a highvoltage of ~ 3kV in different cold cathode gauges.

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    Pressure Ranges (mbar) MPG40X PEG100

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    MPG40X Inverted Magnetron Pirani Gauge

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    MPG40X Inverted Magnetron Pirani Gauge

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    Combined Gauge System

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    Specification MPG400 / 401

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    Specification MPG400 / 401

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    Dimensions MPG40X

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    Pirani MagnetElectronics

    Pole Disk

    Chamber

    MPG40X Build-Up

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    MPG40X Magnetical Shield

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    Spare Parts MPG40X

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    PEG100

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    PEG100 Penning Gauge

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    Specification PEG100

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    Specification PEG100 –D and -P

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    Dimensions PEG100

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    Spare Parts PEG100

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    Electrical connections

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    Controller for MPG40x and PEG100 FCC / FCC

    VGC401 VGC402 VGC403

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    Visionary Technology

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