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8/19/2019 Cold Cathodes Presentation
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Cold CathodeMPG400, PEG100 Product Presentationby Markus Truniger
tijc24d1
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Source: MPE Garching D
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Cold Cathode Measurement Gauges
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Two Cold Cathode principles(Basic Cross-Field Gauge Geometries)
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Penning vs. Inverted Magnetron
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Plasma of the Cold Cathode Gauges
The pictures show the plasmas which ignite after applying a highvoltage of ~ 3kV in different cold cathode gauges.
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Pressure Ranges (mbar) MPG40X PEG100
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MPG40X Inverted Magnetron Pirani Gauge
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MPG40X Inverted Magnetron Pirani Gauge
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Combined Gauge System
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Specification MPG400 / 401
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Specification MPG400 / 401
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Dimensions MPG40X
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Pirani MagnetElectronics
Pole Disk
Chamber
MPG40X Build-Up
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MPG40X Magnetical Shield
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Spare Parts MPG40X
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PEG100
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PEG100 Penning Gauge
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Specification PEG100
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Specification PEG100 –D and -P
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Dimensions PEG100
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Spare Parts PEG100
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Electrical connections
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Controller for MPG40x and PEG100 FCC / FCC
VGC401 VGC402 VGC403
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Visionary Technology
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