Delayed Line Items Revisions to SEMI S8-0308 E, SAFETY ...downloads.semi.org/web/wstdsbal.nsf/de4d7939711aeedf8825753e… · case, only publicly available information on the contents

Background Statement for SEMI Draft Document #5009 Delayed Line Items Revisions to SEMI S8-0308E, SAFETY GUIDELINES FOR ERGONOMICS ENGINEERING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

Note 1: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note 2: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background Statement

This ballot consists of 10 line items. Each line item is shown as a separate delayed revisions section.

Line item 1 – Add hand-object coupling point definition to SEMI S8, Section 5, “Terminology.” This term is used several times in the SESC checklist so it should be defined.

Line item 2 – Move pictograms from Related Information 7 to Appendix 1, SESC checklist and delete Appendix 3 Handle Design Diagrams.

Much of the information contained within RI-7 duplicates the SESC checklist and it is difficult to synchronize these two sections whenever updates are made. Consolidating these two sections will make the document less confusing for the reader and will make updates easier. The pictograms moved from RI-7 were modified slightly to improve clarity and consistency. Checkmark columns “Actual” and “Conforms/Does Not Conform” have been consolidated to conserve space with checkboxes used for conformance status. The illustrations in Appendix 3 Handle Design Diagrams are no longer necessary since the pictograms moved from RI-7 provide the same information.

Line item 3 – Change SESC Section 6.5-6.5.2 “pliers handle” recommendations to “squeeze handle” recommendations. Section 6.5-6.5.2 provides design guidance for pliers which are rarely, if ever, part of a semiconductor manufacturing equipment system. The section title has been changed to the broader term “squeeze handle” which encompassed items such as water sprayers found on wet process machines and triggers found on some hand controls.

Line item 4 – Expand SESC Section 7.1 Full Body clearance to include equipment operation, not just maintenance and service activities. The criteria are separated into two parts: full body clearance for walking and crawling and full body clearance for work activities.

Line item 5 – Change SESC Section 8.3.1, Lateral distance from display to input device to accommodate the use of large displays.

Line item 6 – Add recommendations for horizontal distance from input device to display to accommodate visual limits of a diverse workforce while using a computer system.

Line item 7 – Update character height design criteria in Sections 8.3.2 and 8.3.3. The original source for the current recommended minimum “Asian” character height is unknown so this criterion should be updated to be consistent with known design guidelines. Maximum distance recommendations for displays should be removed since a maximum viewing distance is only limited by the size of the display.

Line item 8 – Add provisions to SESC Section 9 for infrequently used and critical controls on equipment lower than 838 mm (33 in.) and placement of controls outside of recommended reach ranges for postures other standing or sitting adopted during maintenance tasks.

Line item 9 – Add work surface thickness criteria to SESC Section 10.2.8 for keyboards and controls integrated into equipment enclosures.

Line item 10 – Change angle of maximum recommended neck rotation in Related Information section R1-2 from 45°

to 35° to be consistent with the source.

Please forward a courtesy copy of any comments or negatives against the ballot to Paul Schwab at [email protected] and Ron Macklin at [email protected].

As this is a technical ballot, all votes of reject must be accompanied by reasons (negatives) and also be sent to SEMI staff before the balloting deadline or they will be considered abstention votes. If you have any comments on the ballot (suggestions or questions that you do not believe are technical negatives) please clearly indicate them as COMMENTS to assist us with reducing the administrative overhead in handling them during the task force and committee meetings.

Review and Adjudication Information

Task Force Review Committee Adjudication

Group: Ergonomics Task Force NA EHS Committee

Date: Tuesday, April 3, 2012 Thursday, April 5, 2012

Time & Timezone: 4:00 PM -5:30 PM (PST) 9:00 AM – 6:00 PM (PST)

Location: SEMI Headquarters SEMI Headquarters

City, State/Country: San Jose, CA San Jose, CA

Leaders: Paul Schwab (Texas Instruments)

Ron Macklin (R. Macklin Associates)

Sean Larsen (Lam Research AG)

Eric Sklar (Safety Guru)

Chris Evanston (Salus Engineering)

James Beasley (ISMI)

Standards Staff: Paul Trio (SEMI NA) 408.943.7041 [email protected]

Paul Trio (SEMI NA) 408.943.7041 [email protected]

This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation. Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

Additional Background Information for the Document

The proposed changes add design recommendations to fill gaps in the original SEMI-S8 document and are intended to improve usability of the guidelines. The proposed changes were developed during SEMI-S8 Task Force activities which have been ongoing since the last revision in March of 2008.

Respectfully,

Paul Schwab and Ron Macklin,

SEMI-S8 Task Force Co-Leaders

Safety Checklist for SEMI Draft Document #5009 Delayed Line Items Revisions to SEMI S8-0308E, SAFETY GUIDELINES FOR ERGONOMICS ENGINEERING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

Developing/Revising Body

Name/Type: Ergonomics Task Force

Technical Committee: Environmental Health and Safety

Region: North America

Leadership

Position Last First Affiliation

Leader: Schwab Paul Texas Instruments, Inc. Leader: Macklin Ron R. Macklin Associates, LLC Editor: Sklar Eric Safety Guru, LLC

Documents, Conflicts, and Consideration

Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee

# and Title Manner of Consideration

ANSI/HFES 100: 2007, Human Factors Engineering of Computer Workstations, Human Factors and Ergonomics Society (Section 5.2.4.3, pg 23).

Line items 5 and 7, display viewing angle.

Diffrient, Niels, et al. Humanscale 7/8/9: A Portfolio of Information. . Cambridge, Mass.: MIT Press, 1991.

Line item 7, display offset head rotation. Line item 10, head rotation

EN 894-2: 1997, Safety of Machinery: Ergonomics Requirements for the Design of Displays and Control Actuators, Part 2: Displays, European Committee for Standardization, Geneva.

Line item 7, display offset head rotation.

Harrison, Catherine R., and Kathleen M. Robinette. CAESAR: Summary Statistics for the Adult Population (Ages 18-65) of the United States of America. Wright-Patterson AFB, Ohio: Air Force Research Laboratory, Human Effectiveness Directorate, Crew System Interface Division, 2002.

Line item 4, body clearance dimensions. Recommendations within this document were compared to other documents listed in this section. The task force selected criteria that meet the majority of the referenced documents, that are the most conservative, or that are most appropriate for the semiconductor industry.

Hertzberg, H., Emanuel, I., Alexander, M., 1956. The Anthropometry of Working Positions. 1. A Preliminary Study, WADC Technical Report 54-520. Wright-Patterson Air Force Base, Ohio.

Line item 4, body clearance dimensions. Recommendations within this document were compared to other documents listed in this section. The task force selected criteria that meet the majority of the referenced documents, that are the most conservative, or that are most appropriate for the semiconductor industry.

ISO 9241-303 Ergonomics of Human-System Interaction -- Part 303: Requirements for Electronic Visual Displays. Geneva, Switzerland: International Organization for Standardization, 2008.

Line item 7, comparison data for Japanese character heights.

JIS Z 8513 AMD 1 Ergonomics - Office Work With Visual Display Terminals (VDTs) - Visual Display Requirements: Japanese Standards Association, 2006.

Line item 7, basis for recommended Japanese Kanji character heights.

# and Title Manner of Consideration

Konz, S. "Vision at the Workplace: Part I -- Guidelines for the Practitioner." Ergonomics Guidelines and Problem Solving. Eds. Anil Mital, Ãsa Kilbom and Shrawan Kumar eds. Amsterdam, Netherlands: Elsevier, 2000.

Line item 5, display distance

Kroemer, K. H. E. 1999, 'Engineering Anthropometry', in Occupational Ergonomics Handbook, eds. W. Karwowski & W. S. Marras, CRC Press, Boca Raton.

Line item 6, horizontal display. Formula for anthropometry regression equation used to calculate distance.

Military Standard 1472D, 1994, Human Engineering Design Criteria for Military Systems, Equipment and Facilities, United States Department of Defense, Washington, D.C.

Line item 7, lateral offset of input device in anthropometry relation to display.

SEMI S2- S002-00-0310b Environmental Health and Safety Guideline for Semiconductor Manufacturing Equipment

All line items. Reviewed to avoid direct conflicts.

SEMI S8-0308E Safety Guidelines For Ergonomics Engineering of Semiconductor Manufacturing Equipment

All line items. Base document for changes.

VanCott, Harold P., and Robert G. Kinkade. Human Engineering Guide to Equipment Design. . Ed. U.S. Department of Defense. Washington, D.C.: U.S. Government Printing Office, 1972.

Line item 4, clearance dimensions.

Recommendations within this document were compared to other documents listed in this section. The task force selected criteria that meet the majority of the referenced documents, that are the most conservative, or that are most appropriate for the semiconductor industry.

Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline

# and Title Inconsistency with This Safety Guideline # and Title Inconsistency with This Safety Guideline

None known None known

Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical

# and Title Nature of Conflict with This Safety Guideline

None known None known

Participants and Contributors

Name Affiliation

Lindy Austin Salus Engineering International Steve Baldwin Lewis Bass

Joe Barsky Intertek – GS3 Ron Birrell TUVSUD America

Stephan Braun TUV Reinland Steve Brody Brooks Automation Paul Bueder Estec Solutions

Lauren Crane KLA-Tencor, Applied Materials Alan Crockett KLA-Tencor

Mark D'Agostino Varian Nigusu Ergete Intertek Chris Evanston Salus Engineering International Mark Fessler TEL

Mark Frankfurth Cymer

Participants and Contributors

Name Affiliation

Rowland Funk Salus Engineering International Andrew Giles Estec Solutions

Cliff Greenberg Nikon Ed Guild IBM

Mark Harralson Intel James Hayford AMAT, Semitool Stan Hughes AMAT

Shigehito Ibuka TEL Chris Illerhaus CI Industrial Safety Consulting, LLC

Ken Kapur KLA-Tencor Andrew Kiley Varian Mark Krauss System Development-ESH Alan Krov TEL

Paul Kryska Novellus Ken Kuwatani TUV-SUD Sean Larsen Lam Research AG, Cymer

Kyle Leboults Xactix Ron Macklin R. Macklin Associates

Supika Mashiro TEL Raymond McDaid LAM

Ken Mills Estec Solutions Abraham Nesbitt Intertek

James Oswalt Mattson Bill Petry IBM Corporation

Bert Planting ASML Sunny Rai Intertek

Steven Roberge Axcelis Technologies, Inc. Paul Schwab Texas Instruments, Inc. Kharel Shristi KLA-Tencor

Eric Sklar Safety Guru, LLC Conrad Tan Lewis Bass

Paul Trio SEMI North America Stephen Werner Intel Corporation

Carl Wong AMAT Byron Yakimow Cymer

The content requirements of this checklist are documented in § 14.2 of the Regulations Governing SEMI Standards Committees.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 6 Doc. 5009 SEMI

Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943

LETTER (YELLOW) BALLOT

DRAFTDocument Number: 5009

Date: 2/10/2012

SEMI Draft Document #5009 Delayed Line Items Revisions to SEMI S8-0308E, SAFETY GUIDELINES FOR ERGONOMICS ENGINEERING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT (Effective July 2012)

NOTICE: Per ¶ 3.4.4.3.1 of the SEMI Standards Procedure Guide, the purpose, scope, limitations, and terminology sections of SEMI S8 are provided below.

1 Purpose

1.1 These guidelines provide ergonomics design principles and considerations for semiconductor manufacturing equipment.

1.2 The purpose of these guidelines is to promote compatibility between the user and the equipment in the manufacturing environment. The following general principles are integral to the ergonomics design and evaluation of equipment:

1.2.1 The equipment should be designed to optimize safety by distributing tasks. Tasks should be distributed among hardware, software, and users to make the best use of their respective capabilities and to minimize limitations and hazards. Appropriate distribution of tasks will also optimize performance.

1.2.2 Equipment should be designed to minimize potential for errors and mishaps, by conforming to users’ expectations.

1.2.3 The equipment design should reduce fatigue and injury by fitting the equipment to the expected body size, strength, and range of motion characteristics of the user population. Such design will also facilitate task performance.

2 Scope

2.1 The guidelines address safety aspects of ergonomics engineering in the design of semiconductor manufacturing equipment. It should be noted that in order to ensure comprehensive coverage of potential safety hazards, some guidelines also address general design goals for effective human-machine performance. The guidelines apply to the design, operation, maintenance, and service of semiconductor manufacturing equipment, as well as, to a limited extent, equipment installation (see ¶ 7.3).

NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 International, national, and local standards, codes, and regulations must be consulted to ensure that equipment meets regulatory requirements.

3.2 Human factors data compiled in references and specifications are influenced by the population from which they were drawn and the reason they were collected. Human factors design criteria are sometimes based on studies using few subjects or are context-specific. Ergonomics experts should be consulted where data development or interpretation is required.

3.3 The equipment design should incorporate reasonable accommodations for users with special needs, such as left-handedness and color blindness. Where feasible the design should also accommodate users with hearing or vision impairments and/or physical disabilities. It should be understood that although designing for the target user population will accommodate some users with special needs, these guidelines cannot anticipate and fully accommodate all such users.

3.4 Existing models and subsystems that meet previous versions of SEMI S8 should continue to meet the guidelines of SEMI S8 in force at the time of design. Models with redesigns that significantly affect the ergonomic design of the equipment should include conformance to the latest version of SEMI S8 for the redesign.

NOTE 1: Conformance with this document is believed to be a suitable substitute for conformance with its predecessors.






Date: 2/10/2012

3.5 Conformance with the guidelines in Appendix 1 (SESC) constitutes conformance with SEMI S8.

4 Referenced Standards and Documents

4.1 SEMI Standards and Safety Guidelines

SEMI E95 — Specification for Human Interface for Semiconductor Manufacturing Equipment

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S2 — Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

4.2 CEN/CENELEC Standards1

4.2.1 European Norm (EN) standards are listed herein for application to semiconductor manufacturing equipment to be used in the European Union (EU). As EN standards are intended for use with a broad range of industrial and consumer products, conflicts with SEMI safety guidelines are likely. Additionally, provisional EN (prEN) standards are subject to revision prior to adoption.

EN 894-2 — Safety/Ergonomics for Displays

EN 894-3 — Safety/Ergonomics for Control Actuators

EN 60204-1 — Safety of Machinery – Electrical Equipment of Machines, Part 1 – Specification for General Requirements

4.3 Military Standard2

MIL-STD-1472 — Human Engineering Design Criteria for Military Systems, Equipment, and Facilities

4.4 NFPA Standard3

NFPA 79 — Electrical Standard for Industrial Machinery

4.5 ISO Standard4

ISO 9241 — Ergonomic Requirements for Office Work with Visual Display Terminals

4.6 Other Standards and Documents

Humanscale, The MIT Press, Massachusetts Institute of Technology, Cambridge, MA 02142, 1974

ANSI/IES RP75 — Practice for industrial lighting

Waters, Thomas, et al., Application Manual for the Revised NIOSH Lifting Equation, U.S. Department of Health and Human Services (NIOSH), Cincinnati, OH, 1994.

A. Mital, A.S. Nicholson, M.M. Ayoub: A Guide to Manual Materials Handling, Taylor and Francis, London, 1993.

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 MAWL — Maximum Acceptable Weight of Lift

5.1.2 MMH — Manual Material Handling

1 European committee for standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat: rue de Stassart 35, B-1050 Brussels, Belgium. http://www.cenelac.org 2 United States Military Standards, Available through the Naval Publications and Forms Center, 5801 Tabor Avenue, Philadelphia, PA 19120-5099, USA. Telephone: 215.697.3321 3 National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02269, USA. http://www.nfpa.org 4 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30; http://www.iso.ch






Date: 2/10/2012

5.1.3 SESC — Supplier Ergonomics Success Criteria (see Appendix 1)

5.2 Definitions

5.2.1 administrative controls — administrative controls modify the way in which a job is performed without involving equipment design. They are non-engineering controls which include: job rotation, job enlargement, work-rest scheduling, micro-breaks, and stretching exercises. Engineering controls are preferred over administrative controls.

5.2.2 anthropometric considerations — design considerations based upon anthropometric (e.g., size and strength) limitations of user personnel.

5.2.3 anthropometry — description of the physical measurement of humans (e.g., size and strength).

5.2.4 cognitive — relating to human information processing, perception, and attention.

5.2.5 critical controls and displays — controls and displays which prevent the equipment from entering, or indicate that equipment is entering an unsafe condition in which hazards to personnel or damage to equipment may occur. Emergency Off (EMO) switches, interlock defeat indicators, and malfunction alarms are examples of critical controls and displays.

5.2.6 cumulative trauma disorder — a disorder which results from the accumulation of stresses (e.g., forces, repetitive movements, etc.) to a body part over a period of time.

5.2.7 duration — the length of time of a cycle or the entire task, which represents the time of exposure to single or multiple risk factors.

5.2.8 emergency off (EMO) — a control circuit which, when activated, places the equipment into a safe shutdown condition.

5.2.9 engineering control — a method to eliminate or mitigate a hazard through equipment design.

5.2.10 ergonomic-related hazard — an equipment or workplace condition that creates stress to the user that contributes to the risk of developing either an acute injury or a cumulative trauma disorder.

5.2.11 ergonomic issues — those issues dealing with the user’s physical and cognitive needs, capabilities, and human performance limitations in relation to the design of machines, tasks, and other features of the human’s working environment.

5.2.12 ergonomics — the study of human mental and physical capability in relation to the working environment and the equipment operated by the worker.

5.2.13 excessive reach — a reach which may result in biomechanical or other stress to the user.

5.2.14 extended reach — a reach which requires either stretching, stooping, crouching, bending forward at the waist greater than 20°, or shoulder flexion or abduction greater than 45°.

5.2.15 force — the mechanical effort to accomplish a specific movement or exertion. These include: static exertions, which produce no motion but have significant duration; dynamic exertions, which are motions including lifting, pushing, pulling; and contact stress, which is localized pressure exerted against the skin by an external force.

5.2.16 frequency — how often a task is performed over time.

5.2.17 frequently used — used in processing or job cycle at least once every hour. Multiple tool operation by a single operator should be considered.

5.2.18 human error — errors which include: failure to perform a required function; performing a function that has an undesirable consequence; failure to recognize and correct a hazardous condition; or inadequate or incorrect response to a contingency.

5.2.19 inadvertent actuation — accidental or unintentional activation or deactivation of a control.

5.2.20 infrequently used — used in processing or job cycle less frequently than once every hour. Multiple tool operation by a single operator should be considered.






Date: 2/10/2012

5.2.21 installation — the activities performed after the equipment is received at a user site through preparation for initial service, including transportation, lifting, uncrating, placement, leveling, and facilities fit up.

5.2.22 lateral pinch — grip in which the object is held between the thumb and the side of the index finger (often referred to as key grip).

5.2.23 maintenance — planned or unplanned activities intended to keep equipment in good working order.

5.2.24 mock up — a full size physical model of the equipment, generally made of relatively inexpensive materials, used for human factors evaluation.

5.2.25 neutral posture — the position of the human body in which the joints are least stressed. Generally, the body in its neutral position is standing erect with the eyes looking forward, and the arms hanging by the sides.

5.2.26 non-neutral (awkward) postures — the position of a joint(s) away from its neutral, or least stressed, posture.

5.2.27 normal line of sight — the line extending from the eyes, perpendicular to the intraocular line and 15° below the horizontal position of the eye.

5.2.28 operation — consists of functions by which the operator causes the equipment to perform its intended purpose; these may include loading product and setting or manipulating external controls.

5.2.29 operator — a user that interacts with the equipment only to the degree necessary for the equipment to perform its intended function.

5.2.30 override — to take precedence over the current control system state.

5.2.31 palmar pinch — grip where the fingers press against the palm of the hand, with the object held between the fingers and the palm. Thumb is not used (e.g., picking up a sheet of plywood).

5.2.32 personal protective equipment (PPE) — equipment and clothing worn to reduce potential for personal injury from hazards associated with the task to be performed (e.g., chemical gloves, respirators, safety glasses, etc.). In the context of this document, cleanroom attire (e.g., gloves, smocks, booties, hoods) is not considered personal protective equipment.

5.2.33 power grip — a grip in which the fingers and thumb wrap entirely around the handle such that the thumb contacts or overlaps the index finger.

5.2.34 postural stress — stress occurring when a body position places undue load on the muscles, tendons, nerves, and blood vessels, or produces pressure on a joint.

5.2.35 primary viewing area — the 30° cone around the normal line of site (15° above, below, and to either side of the line of sight).

5.2.36 problem tasks — tasks which have been defined as presenting ergonomically incorrect conditions that are likely to cause biomechanical stresses or injury to personnel, misoperation, or damage to equipment or the product.

5.2.37 risk factors — those elements of the design which allow an increased potential for injury/illness to personnel, or for damage to equipment, environment, or product.

5.2.38 semiconductor manufacturing equipment — equipment used in the design, development, manufacture, assembly, measurement and test of semiconductors, and associated semiconductor support processes.

5.2.39 service — unplanned activities intended to return equipment, which has failed, to good working order.

5.2.40 static posture — a fixed position, with minimal movement of the particular body parts.

5.2.41 stooping — bending the head and shoulders, or the general body, forward and downward from an erect position.

5.2.42 task — a group of related job elements performed within the work cycle and directed toward a specific objective.

5.2.43 task analysis — an analytical process employed to determine the specific actions required of the user when operating, maintaining, or servicing equipment, or doing work on single or multiple tools. Within each task, steps






Date: 2/10/2012

are described in terms of the perception, decision-making, memory storage, posture, and biomechanical requirements, as well as the expected errors.

5.2.44 tip pinch — grip in which the object is held between the tips of the thumb and index finger.

5.2.45 user — person interacting with the equipment. Users may include operators, maintainers, service personnel, and others.

5.2.46 user population — a specific cross section of persons that may reasonably be expected to interact with the equipment to perform operation, maintenance, or service tasks.

5.2.47 validation testing — testing to confirm effectiveness of design. An item’s “effectiveness” is viewed in terms of its functional design, specific to SEMI S8.

5.2.48 WIP nest — a storage structure for Work in Process (WIP).

5.2.49 work environment — the location where semiconductor devices and associated support processes are designed, developed, manufactured, assembled, measured, and tested.

5.2.50 workplace layout — the physical arrangement of equipment in the facility.

5.2.51 workspace — the available area where the user is expected to operate, maintain, and service the equipment.

5.2.52 workstation — the location where equipment controls and displays are found or the location of loading/unloading of material.

5.2.53 work surface — a (typically horizontal) surface provided for the location of input devices, handwriting, assembly work, etc. that is part of a seated or standing workstation.






Date: 2/10/2012

Line Item 1 DELAYED REVISIONS 1 (Effective July 2012) Add Definition for Hand-object Coupling

NOTICE: Unless otherwise noted, all materials to be added are underlined and all materials to be deleted are strikethrough.

D1-1 Add Definition for Hand-object Coupling to Section 5, “Terminology” and Re-number All Subsequent Definitions

5.2.18 hand-object coupling point — center of the interface between the hand and a handle, hand-hold, or object. For the purposes of measuring, this is the intersection of a line through the third knuckle of the hand and center of the grip along the axis of the metacarpophalangeal (knuckle) joints as the hand gasps a handle or object (see Figure 1).

NOTE: If it is not possible to observe material handling during the assessment then the center of the handle/hand grip, center of the anticipated hand grasp location or the estimated center-of-gravity of the object may be used as the coupling point.

Power Grip, Vertical Orientation

Power Grip, Horizontal Orientation

Hook Grip Side Grip

Figure 1

Hand-Object Coupling Point Examples






Date: 2/10/2012

Line Item 2 DELAYED REVISIONS 2 (Effective July 2012) Addition of Pictograms to Appendix 1 SESC Checklist

NOTICE: Unless otherwise noted, all materials to be added are underlined and all materials to be deleted are strikethrough. Text within the pictogram cells will be deleted along with the pictograms.

D2-1 Add Pictograms to Appendix 1, SESC Checklist

D2-1.1 Changes to layout of checklist table. Add a column with pictograms from SEMI S8 Related Information 7 as shown below. “Actual” and “Conformance” columns are combined into one “Actual /Conforms?” column with an actual measurement blank and “Yes/No/ N/A” (Not Applicable) checkboxes in the appropriate sections.

D2-1.2 Text within Section (number), Indicator Acceptance, and Criteria Metric Units (US Customary Units) columns within the SESC checklist has not been changed except the reference to Appendix 3 in the Section 6 Handle Design heading, which has been deleted. Some words have been moved or copied from the “Indicator” column to the “Acceptance Criteria” column to improve readability. Notes #1, #2, and #4 at the end of Appendix 1 have been removed and inserted into the appropriate sections. Note #3 has been changed to Note #1. To maintain readability of the ballot document, text within the proposed pictogram cells has not been underlined.

APPENDIX 1 SUPPLIER ERGONOMIC SUCCESS CRITERIA (SESC)

NOTICE: The material in this appendix is an official part of SEMI S8 and was approved by full letter ballot procedures on November 21, 2006.

Pictograms and text within the pictogram cells are provided for illustrative purposes only and are not normative. Also, the pictograms are not intended to depict every possible application of the guidelines.

Table A1-1 Supplier Ergonomic Success Criteria Checklist

Section 1: Manual Material Handling

Section Indicator Acceptance Criteria

Metric Units (US Customary Units)

Actual/

Conforms?

1.1 Potentially hazardous manual material handling tasks performed as part of operations, maintenance, or service are analyzed utilizing appropriate procedures.

NOTE: Two hand lifting or lowering tasks should be analyzed:

if the object being handled weighs more than 44.5 N (10 lbf);

OR, if the object weighs more than 22.2 N (5 lbf) and the anticipated frequency is greater than 1 lift every 5 minutes.

See Appendix 2 for further information.

Analysis and results documentation. Table A2-2, Appendix 2, or the equivalent, should be used to document 2-hand lift/lower analysis.

Actual

Conforms?

Yes

No

N/A






Date: 2/10/2012

Section 2: Product Loading in a Standing Posture

(Applicable to all media other than wafer cassettes including JEDEC trays, magazines and reticle cassettes.)

Section Indicator

Acceptance Criteria


Reference

Pictogram

Actual/

Conforms?

2.1 Clearance provided for finger thickness.

Minimum 38 mm (1.5 in.)

Actual

Conforms?

Yes

No

N/A

2.2 Clearance provided for hand thickness.

Minimum 76 mm (3 in.)

Actual

Conforms?

Yes

No

N/A

2.3 Reach distance measured from the leading edge of the tool or obstruction to the hand/product coupling point(s).

Maximum 330 mm (13 in.)

Actual

Conforms?

Yes

No

N/A

2.4 Vertical coupling point of hand to product in load position.



Actual

Conforms?

Yes

No

N/A

Finger clearances

One hand Two hands

Hand clearance

Reach distance

Vertical coupling height






Date: 2/10/2012

Section 3: Wafer Cassette Loading

Section Indicator

Acceptance Criteria


Reference

Pictogram

Actual/

Conforms?

3.1 Wafer cassette loading should not require greater than 10° cassette rotation in any axis.

NOTE: Unless otherwise specified, you should assume that 200 mm or smaller wafers are transported in the vertical orientation and that 300 mm wafers are transported in the horizontal orientation.

Less than 10° rotation in any axis.

Actual

Conforms?

Yes

No

N/A

3.2 Load port height, vertical distance from standing surface (150–200 mm wafers).



Actual

Conforms?

Yes

No

N/A

3.3 Maximum lip height in front of cassette load port over which the cassette is lifted (150–200 mm wafer cassettes only). Measure lip height from the load surface.

Maximum 30 mm (1.2 in.)

Actual

Conforms?

Yes

No

N/A

3.4 Reach distance from the leading edge of the tool or obstruction to the coupling point(s) on a rotation device or the product grasp point.


Actual

Conforms?

Yes

No

N/A

3.5 Minimum hand clearance on either side of the cassette, measured from the side of the cassette to the nearest adjacent object.


Actual

Conforms?

Yes

No

N/A

Rotation about the X-axis

maximum 10º

Wafer cassette shown in the

manual carrying orientation

Rotation about the Y-

axis: maximum 10º

Rotation about the Z-axis: maximum 10º

Load port height

Lift-over lip above load port

Reach distance

Hand clearance






Date: 2/10/2012

Section 4: Work in Process Storage (specific to wafer cassettes)

Section Indicator

Acceptance Criteria

Metric Units

(US Customary Units)

Reference

Pictogram

Actual/

Conforms?

4.1 Integral wafer cassette/lot box storage shelf height (150 and 200 mm [6 in. and 8 in.] wafer cassette/lot boxes only).

Maximum (1 item deep) 1520 mm (60 in.)

Maximum (2 item deep) 1220 mm (48 in.)


Actual

Conforms?

Yes

No

N/A

Section 5: Manual Wafer Cassette Rotation Device Design

Section Indicator

Acceptance Criteria

Metric Units


Reference

Pictogram

Actual/

Conforms?

5.1 Handle height, couple point for hand(s) from standing surface.



Actual

Conforms?

Yes

No

N/A

5.2 Hand grip(s) shall allow for a full “power grip” similar to grabbing a rung on a ladder or holding a pistol.

Allows for a full power grip in either pronated (palm facing down) or neutral (handshake position) posture.

Actual

Conforms?

Yes

No

N/A

5.3 Single hand lift force Maximum 37.8 N (8.5 lbf). This value includes a 15% capacity reduction due to cleanroom glove use.

Wrist deviation reduces further strength capacity by 15%.

Actual

Conforms?

Yes

No

N/A

5.4 Two hand lift force Maximum 64.5 N (14.5 lbf). This value includes a 15% capacity reduction due to cleanroom glove use.

Wrist deviation reduces further strength capacity by 15%.

Actual

Conforms?

Yes

No

N/A

Maximum shelf height, 1 item deep

Maximum shelf height, 2 items deep

Minimum shelf height

Maximum handle height

Minimum handle height

Power grip examples

Neutral grip Pronated grip






Date: 2/10/2012

Section 6: Handle Design

(Handle dimensions are correct for use of bare hand or use of typical cleanroom gloves).

NOTE: See Appendix 3 for depiction of handle types.


Metric Units


Reference

Pictogram

Actual/

Conforms?

6.1 Handle surface finish All edges radiused

Conforms?

Yes

No

N/A

6.2 Cylindrical Handle

6.2.1 Cylindrical handle diameter



Actual

Conforms?

Yes

No

N/A

6.2.2 Cylindrical handle length Minimum 127 mm (5 in.)

Actual

Conforms?

Yes

No

N/A

6.3 Circular or Triangular Handle

6.3.1 Circular or triangular handle diameter



Actual

Conforms?

Yes

No

N/A

6.3.2 Circular or triangular handle height (thickness)



Actual

Conforms?

Yes

No

N/A

6.4 Ball Handle

6.4.1 Ball handle diameter Maximum 63 mm (2.5in.)


Actual

Conforms?

Yes

No

N/A

6.5 Pliers Handle

Diameter

Length

Diameter

Thickness

Diameter






Date: 2/10/2012


Metric Units


Reference

Pictogram

Actual/

Conforms?

6.5.1 Pliers handle grip span Maximum 89 mm (3.5in.) open

Minimum 38 mm (1.5 in.) closed

Actual

Conforms?

Yes

No

N/A

6.5.2 Pliers handle grip length Minimum 127 mm (5 in.)

Actual

Conforms?

Yes

No

N/A

6.6 Pistol Grip Handle

6.6.1 Pistol grip handle diameter


Minimum 38mm (1.5 in.)

Actual

Conforms?

Yes

No

N/A

6.6.2 Pistol grip handle length


Actual

Conforms?

Yes

No

N/A

6.7 Enclosed Handles

NOTE: Handle diameter refers to the surface of the handle presented to the inside of the curled fingers. Enclosed handles need not be made solely from cylindrical stock.

6.7.1 Enclosed handle, full hand power grip (suitcase handle).

Width (W)

Depth (D)

Diameter (d)

Width, minimum 127 mm (5 in.)

Depth, minimum 45 mm (1.75 in.)

Diameter, maximum 25 mm (1 in.)

Actual

Conforms?

Yes

No

N/A

6.7.1.1 Diameter, requiring no greater than 71 N (16 lbf) force.

Minimum 6.3 mm (0.25 in.)

Actual

Conforms?

Yes

No

N/A





Handle span

Handle length

Diameter

Length

Depth

Width

Diameter






Date: 2/10/2012


Metric Units


Reference

Pictogram

Actual/

Conforms?

6.7.2 Enclosed handle, three fingers.

Width (W)

Depth (D)

Diameter (d)

Width, minimum 90 mm (3.5 in.)


Diameter, minimum 6.3 mm (0.25 in.)

Force, maximum 71 N (16 lbf)

Actual

Conforms?

Yes

No

N/A

6.7.3 Enclosed handle, two fingers.

Width (W)

Depth (D)

Diameter (d)




Force, maximum 51 N (11.5 lbf)

Actual

Conforms?

Yes

No

N/A

6.7.4 Enclosed handle, one finger.

Width (W)

Depth (D)

Diameter (d)

Force




Force, maximum 27 N (6 lbf)

Actual

Conforms?

Yes

No

N/A

6.8 Hook Grasp Handle

6.8.1 Hook grasp handle (four fingers).

Opening length (L)

Opening width (W)

Depth (d)

Lip length (l)

Opening length, minimum 90 mm (3.5 in.)

Opening width, minimum 38 mm (1.5 in.)

Depth, minimum 50 mm (2 in.)

Lip length, minimum 50 mm (2 in.)

Actual

Conforms?

Yes

No

N/A

6.8.2 Hook grasp handle pull force (four fingers)

Maximum 80 N (18 lbf)

6.9 Finger Pull Handle

6.9.1 Finger pull handles (four fingers)

Opening length (L)

Opening width (W)

Depth (d)

Lip length (l)

Opening length, minimum 90 mm (3.5 in.)

Opening width, minimum 25 mm (1 in.)


Lip length, minimum 19 mm (0.75 in.)

Actual

Conforms?

Yes

No

N/A

6.9.2 Finger pull handles pull force (four fingers)

Maximum 9.8 N (2.2 lbf)

Depth

Width

Diameter

Depth

Width

Diameter

Depth

Width

Diameter

Depth

Opening length

Lip length

Opening width

Depth

Opening length

Opening width






Date: 2/10/2012

Section 7: Maintainability and Serviceability



Reference

Pictogram

Actual/

Conforms?

7.1 Minimum lighting level in routine maintenance areas is required where the operator has to read information, use a hand tool, or make a connection. This provision can be met by providing integral lighting or portable lighting which can be temporarily attached such that it does not have to be hand held.

Minimum 300 lux (30 fc)

Actual

Conforms?

Yes

No

N/A

7.2 Full Body Clearance

NOTE: Clearances should be approached from a task analysis point of view. Clearances should be provided based on the nature of the tasks performed in the designated area.

7.2.1 Any posture: upper body clearance (shoulder width)


Actual

Conforms?

Yes

No

N/A

7.2.2 Standing

A. Overhead clearance, minimum 1980 mm (78 in.)

B. Forward horizontal clearance#1, minimum 690 mm (27 in.)

Actual

Conforms?

Yes

No

N/A

7.2.3 Sitting-on-floor A. Overhead clearance, minimum 1000 mm (39 in.)


C. Working height, minimum 280 mm (11 in.)

Actual

Conforms?

Yes

No

N/A

7.2.4 Squatting A. Overhead clearance, minimum 1220 mm (48 in.)


C. Working height, minimum 460 mm (18.1 in.)

Actual

Conforms?

Yes

No

N/A

B

A

B

A

C

B

A

C






Date: 2/10/2012



Reference

Pictogram

Actual/ Conforms?

7.2.5 Kneeling

A. Overhead clearance (from floor), minimum 1450 mm (57 in.)



Actual

Conforms?

Yes

No

N/A

7.2.6 Kneeling crawl

A. Overhead clearance measured from floor, minimum 740 mm (29 in.)


Actual

Conforms?

Yes

No

N/A

7.2.7 Stooping




Actual

Conforms?

Yes

No

N/A

7.2.8 Supine lying on back

A. Height (overhead), minimum 430 mm (17 in.)

B. Length (forward), minimum 1980 mm (78 in.)

Actual

Conforms?

Yes

No

N/A

7.2.9 Prone or crawl space A. Height (overhead), minimum 510 mm (20 in.)


Actual

Conforms?

Yes

No

N/A

7.3 Hand/Arm Clearance NOTE: Where appropriate to do so, dimensions have been adjusted for the use of cleanroom gloves

7.3.1 Clearance provided for finger access round (diameter) or square.

One finger access, minimum 32 mm (1.25 in.)

2, 3, or 4 finger twist of small knob, minimum object diameter + 58 mm (2.3 in.)

Actual

Conforms?

Yes

No

N/A

B

A

C

B

A

B

A

C

B

A

B

A

Opening for 2 - 4 fingers

Opening for single finger






Date: 2/10/2012



Reference

Pictogram

Actual/ Conforms?

7.3.2 Clearance provided for flat hand wrist access.

Height, palm thickness, minimum 89 mm (3.5 in.)

Width, palm width, minimum 114 mm (4.5 in.)

Actual

Conforms?

Yes

No

N/A

7.3.3 Clearance provided for fist to wrist access.

Height (fist thickness), minimum 89 mm (3.5 in.)

Width (fist width), minimum 127 mm (5 in.)

Actual

Conforms?

Yes

No

N/A

7.3.4 Clearance provided for two hands arm to shoulders access (does not ensure visual access).

Reach, maximum 610 mm (24 in.)

Width, minimum 483 mm (19 in.)

Height, minimum 114 mm (4.5 in.)

Actual

Conforms?

Yes

No

N/A

7.3.5 Clearance provided for two hands, hand to wrist access (does not ensure visual access).

Reach, maximum 203 mm (8 in.)

Width, minimum 191 mm (7.5 in)

Height, minimum 114 mm (4.5 in.)

Actual

Conforms?

Yes

No

N/A

7.3.6 Clearance provided for one arm to shoulder access (does not ensure visual access).


Actual

Conforms?

Yes

No

N/A

7.3.7 Clearance provided for one arm to elbow access, diameter, or square area (does not ensure visual access).


Actual

Conforms?

Yes

No

N/A

7.4 Maintenance and Service Access

Width

Height

Width

Height

Width

Height

Reach

Width

Height

Reach

Clearance

Clearance

Clearance

Clearance






Date: 2/10/2012



Reference

Pictogram

Actual/ Conforms?

7.4.1 Enclosures or covers must, unless fully removable, be self-supporting, in the open position, and not require manual support during maintenance. Exceptions may be allowed for self-closing doors for fire safety or compliance reasons.

Supports present

Conforms?

Yes

No

N/A

7.4.2 Access covers should be equipped with full-handed grasp areas or other means for opening them.

Handles present, refer to § 6 for design criteria.

Conforms?

Yes

No

N/A

7.4.3 Height of access cover handle over the entire range of motion required for operation or maintenance. There should be no greater than a 254 mm (10 in.) deep obstruction in front of the handle.

Maximum 1700 mm (67 in.).

Actual

Conforms?

Yes

No

N/A

7.5 Replaceable Components

7.5.1 Serviceable components are replaceable as modular packages, and are configured for rapid removal and replacement.

Serviceable components configured as described.

Conforms?

Yes

No

N/A

7.5.2 Serviceable components should not be stacked directly on one another (i.e., a lower layer should not support an upper layer).

Serviceable components independently accessible.

Conforms?

Yes

No

N/A

7.5.3 Heavy components (objects which have a lifting index of 0.5 or greater, see SESC, § 1.0) or bulky components (greater than 36 inches in length) requiring frequent removal/installation should include guide/locating aids to assist in positioning.

Guide/locating pins present.

Conforms?

Yes

No

N/A

Maximum handle height over entire range of motion

Distance of obstruction in front of handle

Locating pins

An example of locating pins






Date: 2/10/2012



Reference

Pictogram

Actual/ Conforms?

7.5.4 Cables, connectors, plugs, and receptacles should be labeled, keyed, color coded, or otherwise configured to make connection easier and prevent cross connection. This feature is assessed only if a SEMI S2 assessment is not being conducted.

Identification present, keyed where needed.

Conforms?

Yes

No

N/A

7.5.5 Circuit boards mounted in a card cage configuration should have gripping or ejecting aids for mounting and removal.

Finger access, gripping, or ejecting aids available.

Conforms?

Yes

No

N/A

Section 8: Display Location



Reference

Pictogram

Actual/

Conforms?

8.1 Location for Operator Primary Interface, Standing Station

8.1.1 Height of video display terminal (single monitor). Does not include touchscreens, measured from floor to center of screen.



Actual

Conforms?

Yes

No

N/A

8.1.2 Height of video display terminal (stacked monitors). Does not include touchscreens, measured from floor to top line of the top monitor.

The primary monitor in a stacked configuration is the bottom monitor.


Actual

Conforms?

Yes

No

N/A

Hand tool

Eject levers

Handgrips

Several examples of circuit board removal devices

Measure to center of display

Measure to top line of stacked display






Date: 2/10/2012



Reference

Pictogram

Actual/

Conforms?

8.1.3 Height of infrequently used video display terminal (viewed briefly less often than once per hour) measured to top line of monitor.


Conforms?

Yes

No

N/A

8.1.4 Height of very infrequently used video display terminal (viewed briefly less often than once per day) measured to top line of monitor.


Conforms?

Yes

No

N/A

8.1.5 Height of infrequently viewed visual signal measured to the top of the signal. This guideline does not apply to light towers.


Conforms?

Yes

No

N/A

8.1.6 Height of touch screen monitor.

See § 9 for horizontal reach criteria.

Maximum 1470 mm (58 in.) measured from floor to uppermost active pad on screen.

Minimum 910 mm (36 in.) measured from floor to lowest active pad on the screen.

Conforms?

Yes

No

N/A

8.1.7 Tilt angle of touch screen monitor between 1041 mm (41 in.) and 1219 mm (48 in.) in height to top of screen.

Upward minimum 30º

Conforms?

Yes

No

N/A

8.1.8 Tilt angle of touch screen monitor less than 1041 mm (41 in.) in height to top of screen.

Upward minimum 45º

Conforms?

Yes

No

N/A

8.2 Location for Operator Primary Interface, Seated Station

NOTE: A seated station is where a short cylinder office-style chair is used.

Measure to top line of display

Measure to top line of display

Visual signal height

Maximum height, top of active area

Minimum height, bottom of active area

30°

Touch screen with active area 1041 mm (41 in.) to 1219 mm (48 in.) above floor

45°

Touch screen with active area 910 mm (36 in.) to 1041 mm (41 in.) above floor






Date: 2/10/2012



Reference

Pictogram

Actual/

Conforms?

8.2.1 Height of video display terminal (single monitor). Does not include touchscreens, measured from the underside of the work surface to the centerline of monitor.



Conforms?

Yes

No

N/A

8.2.2 Height of video display terminal (stacked monitors), does not include touchscreens, measured from the underside of the work surface to the top line of top monitor.




Conforms?

Yes

No

N/A

8.2.3 Tilt angle of video display terminal greater than 1397 mm (55 in.) from underside of work surface to top of display.

Note: This line item becomes significant in the event that the maximum height criteria cannot be met.

Downward minimum 15 degrees

Conforms?

Yes

No

N/A


Maximum 397 mm (15.5 in.) measured from the underside of work surface to highest active pad on the screen.

Minimum 77 mm (3.5 in.) measured from underside of work surface to lowest active pad on the screen.


Conforms?

Yes

No

N/A

8.3 Display Characteristics

8.3.1 Lateral distance from the centerline of the display to the centerline of the input device(s). See MIL-STD-1472 for a depiction of this.


Conforms?

Yes

No

N/A

8.3.2 Character height (Specific to Chinese, Korean and Japanese characters).

Character height is greater than or equal to the viewing distance divided by 143.

Recommended viewing distance is between 457 mm (18 in.) and 762 mm (30 in.).

Conforms?

Yes

No

N/A

Display height

Underside of work surface

Maximum display height

Minimum display height


15°


1397 mm (55 in.) height to top of display

Maximum height of active area

Minimum height of active area

Lateral distance between monitor and input device

Viewing distance

Character height






Date: 2/10/2012



Reference

Pictogram

Actual/

Conforms?

8.3.3 Character height (All characters other than Chinese, Korean and Japanese).

Character height is greater than or equal to the viewing distance divided by 215.


Conforms?

Yes

No

N/A

Section 9: Hand Control Location

Hand Control Location (These criteria only apply to controls, tools, and materials accessed for routine production operation and maintenance).



Actual/

Conforms?

9.1 Standing station

NOTE: A standing station is one where the operator can assume a standing posture or a seated posture in a tall stool which places the operator at approximately the same stature.

9.1.1 Vertical location of very infrequently used controls (controls used less often than once every 24 hours) measured from the standing surface to the centerline of the control.



Conforms?

Yes

No

N/A

Viewing distance

Character height

Maximum height

Minimum height






Date: 2/10/2012



Actual/

Conforms?

9.1.2 Location of infrequently used and/or critical controls. Maximum reaches are indicated for various heights. Reaches are measured from the leading edge of the equipment or obstacle. Controls should not be located above 1638 mm (64.5 in.) or below 838 mm (33 in.). Interpolate for intermediate values.

Controls should not be located above 1638 mm (64.5 in.) or below 838 mm (33 in.).

Height Horizontal reach

1638 mm (64.5 in.) 254 mm (10 in.)

1524 mm (60 in.) 368 mm (14.5 in.)

1422 mm (56 in.) 432 mm (17 in.)

1321 mm (52 in.) 470 mm (18.5 in.)

1219 mm (48 in.) 483 mm (19 in.)

1118 mm (44 in.) 470 mm (18.5 in.)

1016 mm(40 in.) 394 mm (15.5 in.)

914 mm (36 in.) 292 mm (11.5 in.)

838 mm (33 in.) 178 mm (7 in.)

Conforms?

Yes

No

N/A

9.1.3 Location of frequently used controls. Maximum reaches are indicated for various heights. Reaches are measured from the leading edge of the equipment or obstacle. Controls should not be located above 1270 mm (50 in.) or below

940 mm (37 in.). Interpolate for intermediate values.

Controls should not be located above 1270 mm (50 in.) or below 940 mm (37 in.).


1270 mm (50 in.) 292 mm (11.5 in.)

1219 mm (48 in.) 330 mm (13 in.)

1168 mm (46 in.) 368 mm (14.5 in.)

1118 mm (44 in.) 394 mm (15.5 in.)

1067 mm (42 in.) 406 mm (16 in.)

1016 mm (40 in.) 394 mm (15.5 in.)

940 mm (37 in.) 318 mm (12.5 in.)

Conforms?

Yes

No

N/A

9.2 Seated station

NOTE: A seated station is one where a short cylinder office-style chair is used.

Conforms?

Yes

No

N/A

Height Leading edge of equipment or obstacle

Horizontal reach

Height

Leading edge of equipment or obstacle

Horizontal Reach

Height adjustable office-style chair






Date: 2/10/2012



Actual/

Conforms?

9.2.1 Location of infrequently used and/or critical controls. Maximum reaches are indicated for various heights. Reaches are measured from the leading edge of the work surface or obstacle. Heights are measured from the underside#1 of the work surface. Controls should not be located above 724 mm (28.5 in.) or below −140 mm (−5.5 in.). Interpolate for intermediate values.

Controls should not be located greater than 724 mm (28.5 in.) above or 140 mm (5.5 in.) below the underside of the work surface.


724 mm (28.5 in.) 356 mm (14 in.)

597 mm (23.5 in.) 432 mm (17 in.)

495 mm (19.5 in.) 470 mm (18.5 in.)

394 mm (15.5 in.) 483 mm (19 in.)

292 mm (11.5 in.) 483 mm (19 in.)

191 mm (7.5 in.) 470 mm (18.5 in.)

89 mm (3.5 in.) 445 mm (17.5 in.)

-13 mm (-0.5 in.) 381 mm (15 in.)

-140 mm (-5.5 in.) 254 mm (10 in.)

Actual

Conforms?

Yes

No

N/A

9.2.2 Location of frequently used controls. Maximum reaches are indicated for various heights. Reaches are measured from the leading edge of the work surface or obstacle. Heights are measured from the underside#1 of the work surface. Controls should not be located above 394 mm (15.5 in.) or below 89 mm (3.5 in.). Interpolate for intermediate values.

Controls should not be located greater than 394 mm (15.5 in.) above or less than 89 mm (3.5 in.) above the underside of the work surface.


394 mm (15.5 in.) 330 mm (13 in.)

343 mm (13.5 in.) 368 mm (14.5 in.)

292 mm (11.5 in.) 394 mm (15.5 in.)

241 mm (9.5 in.) 406 mm (16 in.)

191 mm (7.5 in.) 419 mm (16.5 in.)

140 mm (5.5 in.) 419 mm (16.5 in.)

89 mm (3.5 in.) 419 mm (16.5 in.)

Actual

Conforms?

Yes

No

N/A

Maximum height above underside of work surface or obstacle

Minimum height measured from underside of work surface

Maximum horizontal reach

Maximum height measured from above underside of work surface

Minimum height measured from underside of work surface

Maximum horizontal reach






Date: 2/10/2012

Section 10: Workstation Design



Reference

Pictogram

Actual/

Conforms?

10.1 Standing Station

NOTE: A standing station is one where the operator can assume a standing posture or a seated posture in a tall stool which places the operator at approximately the same stature.

10.1.1 Work surface edge radius where the operator can assume a static posture in contact with the edge.

Minimum 6.4 mm (0.25 in.) radius

Actual

Conforms?

Yes

No

N/A

10.1.2 Height of keyboard, trackball, or mouse (to home row, top of ball/mouse).



Actual

Conforms?

Yes

No

N/A

NOTE: In applications where input devices (keyboard, trackball, or mouse) are used more like machine controls (intermittent one finger entry on the keyboard, intermittent short term use of the mouse or trackball) than for standard typing (continuous use of keyboard for entry of long character strings, extended use of trackball or mouse in graphical environment), it is appropriate to use the height and reach locations described in § 9, Hand Control Location (standing station).

10.1.3 Height of microscope eyepieces. Should be adjustable through at least this range.

Range includes 1270 mm (50 in.) to 1730 mm (68 in.)

Actual

Conforms?

Yes

No

N/A

10.2 Seated Station

NOTE: A seated station is one where a height-adjustable, office-style chair is used.

10.2.1 Height of keyboard, trackball, or mouse. (measured to home row and top of ball/mouse from the underside of the work surface).

Maximum 87 mm (3.5 in.) Minimum 37 mm (1.5 in.)

Actual

Conforms?

Yes

No

N/A NOTE: In applications where input devices (keyboard, trackball, or mouse) are used more like machine controls (intermittent one finger entry on the keyboard, intermittent short term use of the mouse or trackball) than for standard typing (continuous use of keyboard for entry of long character strings, extended use of trackball or mouse in graphical environment), it is appropriate to use the height and reach locations described in § 9 of this table, Hand Control Location (seated station).

Work surface edge radius

Keyboard and input device height

Microscope eyepiece height

Height of keyboard, trackball and mouse






Date: 2/10/2012



Reference

Pictogram

Actual/

Conforms?

10.2.2 Vertical leg clearance. Minimum 673 mm (26.5 in.)

Actual

Conforms?

Yes

No

N/A

10.2.3 Horizontal leg clearance, depth at knee level.


Actual

Conforms?

Yes

No

N/A

10.2.4 Horizontal leg clearance, depth at foot level.

Minimum 660 mm (26 in.) depth clearance at a minimum vertical range of 419 mm (16.5 in.) to 673 mm (26.5 in.) below the underside of the work surface.

Conforms?

Yes

No

N/A

10.2.5 Horizontal leg clearance, width.


Actual

Conforms?

Yes

No

N/A

10.2.6 Equipment integrated microscope: Height of microscope eyepiece measured from underside of work surface to center of eyepiece. Must be adjustable with the entire range.

Range includes 495 mm (19.5 in.) to 658 mm (25.9 in.).

Actual

Conforms?

Yes

No

N/A

NOTE: The intent of the change of reference from the floor to the underside of the work surface is to allow for higher work surfaces in situations where there is a specific advantage, and to ensure in those cases that the other design features are located appropriately for the higher work surface.

Stand-alone (table top) microscopes:

Height of microscope eyepiece measured from the top of the work surface to center of eyepiece. Must be adjustable with the entire range.

Range includes 445 mm (17.5 in.) to 607 mm (23.9 in.).

Actual

Conforms?

Yes

No

N/A

Vertical leg clearance

Horizontal leg clearance, knee level

Horizontal foot clearance, foot level

673 mm (26.5 in.) min.

419 mm (16.5 in.) max.

Horizontal leg clearance width measurement

Vertical measurement from underside of leg opening to microscope eyepiece


Table surface to microscope eyepiece vertical measurement






Date: 2/10/2012



Reference

Pictogram

Actual/

Conforms?

10.2.7 Microscope eyepiece location in relation to leading edge of workstation.

Eye pieces are flush with or protrude horizontally beyond the leading edge of the workstation toward the user (applicable at all eyepiece height adjustment settings).

Actual

Conforms?

Yes

No

N/A

10.2.8 Thickness of work surface.


Actual

Conforms?

Yes

No

N/A


Minimum 6 mm (0.25 in.) radius

Actual

Conforms?

Yes

No

N/A

#1 #1 A standing station is one where the operator can assume a standing posture or a seated posture in a tall stool which places the operator at approximately the same stature.

#2 #2 A seated station is one where a short cylinder office style chair is used.

#3 #1 Distance measured away from the equipment or obstruction for body clearance in the given posture.

#3 #4 The intent of the change of reference from the floor to the underside of the work surface is to allow for higher work surfaces in situations where there is a specific advantage, and to ensure in those cases that the other design features are located appropriately for the higher work surface.

NOTICE: SEMI makes no warranties or representations as to the suitability of the safety guideline(s) set forth herein for any particular application. The determination of the suitability of the safety guideline(s) is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials or equipment mentioned herein. These safety guidelines are subject to change without notice.

By publication of this safety guideline, Semiconductor Equipment and Materials International (SEMI) takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this safety guideline. Users of this safety guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.

Measurement

Leading edge of workstation

Work surface thickness

Radius of work surface edge






Date: 2/10/2012

D2-2 Delete Related Information 7

D2-2.1 Delete Related Information 7 as shown below.

RELATED INFORMATION 7 SEMI S8 SUPPLIER ERGONOMIC SUCCESS CRITERIA (SESC) CHECKLIST APPLICATIONS GUIDE

NOTICE: This related information is not an official part of SEMI S8 and was derived by the EHS Ergonomics Task Force. This related information was approved for publication by full letter ballot on September 3, 2003.

5.1 Purpose

1.1.1 This section is provided as a companion to the SEMI S8 Supplier Ergonomic Success Criteria (SESC) checklist as an aid to help equipment designers and evaluators understand how to apply the checklist when designing equipment or assessing machine designs or prototypes.

1.1.2 This applications guide follows the numbering scheme of the SESC checklist. When appropriate, notes, illustrations and diagrams have been added to clarify each item.

5.2 For the purpose of this document, “weight” is defined as the force of gravity and units are specified in Newtons (N), and pound-force (lbf.). One lbf. is the force of gravity on a one-pound mass (lb.) and 9.81 N is the force of gravity on a one-kilogram mass (kg.).

#4

Table R7-1 Supplier Ergonomic Success Criteria Checklist Applications Guide

Section 1: Manual Material Handling

Section Indicator

1.1 Potentially hazardous manual material handling tasks performed as part of operations, maintenance, or service are analyzed utilizing appropriate procedures.

NOTE: Two hand lifting or lowering tasks should be analyzed:

if the object being handled weighs more than 44.5 N (10 lbf);

OR, if the object weighs more than 22.2 N (5 lbf) and the anticipated frequency is greater than 1 lift every 5 minutes.

See Appendix 2 for further information.

Acceptance criterion: Analysis and results documentation. Table A2-2, Appendix 2, or the equivalent, should be used to document 2-hand lift/lower analysis.


Section Indicator Figure

2 Product Loading in a Standing Posture

(Applicable to all media other than wafer cassettes including JEDEC trays, magazines and reticle cassettes.)

#5

NOTE A: The criteria of this section should be applied only to production operations where media will be loaded and unloaded by people.

NOTE B: This guideline may also be applied to manually loaded FOUPs.

NOTE C: A load port is the surface upon which the machine operator places the media or the base of the media when it is placed on a machine arm or in a receptacle.

NOTE D: Coupling point is the center of a handle or the center of the large middle knuckle of the hand when it grasps an object.






Date: 2/10/2012



2.1 Clearance provided for finger thickness.

Acceptance criterion: minimum 38 mm (1.5 in.)

#6

NOTE: Minimum clearance should be provided for the finger clearance for the hand when it is in the orientation used to grip the item. If the object is grasped from the sides, there should be finger clearance on both sides. If the object is grasped from above and below, such as when inserting or removing a reticle container, there should be minimum finger clearance above and below the object.

Finger clearance


One hand Two hands

2.2 Clearance provided for hand thickness.

Acceptance criterion: minimum 76 mm (3 in.) Hand clearance

Minimum 76 mm(3.0 in.)

2.3 Reach distance measured from the leading edge of the tool or obstruction to the hand/product coupling point(s).

Acceptance criterion: maximum 330 mm (13 in.)

#7

NOTE: Reach distances should be measured from the leading edge of the machine housing or any obstruction between the machine operator and the load port. Obstructions include keyboard trays, drip trays, anti-vibration platforms and machine load-bearing pads.

Reach distance

Maximum 330 mm(13 in.)

2.4 Vertical coupling point of hand to product in load position.

Acceptance criteria: maximum 1010 mm (40 in.)

minimum 890 mm (35 in.)

#8

NOTE: Machine height variables such as the presence of load-bearing pads, anti-vibration platforms, casters or the adjustment of leveling feet should be specified when measuring the load port height.

Vertical coupling


Minimum 890 mm(35 in.)



3 NOTE A: The criteria of this section should only be applied to production operations where production materials will be loaded and unloaded by people.

NOTE B: A load port is the surface upon which the machine operator places the wafer cassette or the base of the wafer cassette when it is placed on a machine arm or in a receptacle.

NOTE C: Coupling point is the center of a handle or the large middle knuckle of the hand when it grasps an object.






Date: 2/10/2012



3.1 Wafer cassette loading should not require greater than 10° cassette rotation about any axis. Unless otherwise specified, you should assume that 200 mm or smaller wafers are transported in the vertical orientation and that 300 mm wafers are transported in the horizontal orientation.

Acceptance criteria: less than 10° rotation about any axis.

#9

NOTE: Manual and powered wafer cassette rotation devices are a means to provide controlled rotation of wafer cassettes. See § 5, “Manual Wafer Cassette Rotation Device Design” for design recommendations.

Wafer cassette shown in the manual carrying orientation

Rotation aboutthe Z-axis

Maximum 100

Rotation about the Y-axis

Maximum 100

Rotation aboutthe X-axis

Maximum 100

3.2 Load port height, vertical distance from standing surface (150–200 mm wafers).



#10

NOTE: Machine height variables such as the presence of load bearing pads, anti-vibration platforms, casters or the adjustment of leveling feet should be specified when measuring the load port height.

Maximum 960 mm(38 in)


3.3 Maximum lip height in front of cassette load port over which the cassette is lifted (150–200 mm wafer cassettes only). Measure lip height from the load surface.

Acceptance criterion: maximum 30 mm (1.2 in.)

#11

NOTE: For machines where the wafer cassette is loaded on a machine arm, measure the vertical distance from the base of the wafer cassette when it’s on the arm to the highest obstruction the wafer cassette must be lifted over when loading or unloading.

Lift-over lipheight above theload port

Maximum 30 mm(1.2 in.)

3.4 Reach distance from the leading edge of the tool or obstruction to the coupling point(s) on a rotation device or the product grasp point.


#12

NOTE: Reach distances should be measured from the leading edge of the machine housing or any obstruction between the machine operator and the load port. Obstructions include keyboard trays, drip trays, anti-vibration platforms and machine load-bearing pads.

Reach distanceMaximum

330 mm (13 in.)

3.5 Minimum hand clearance on either side of the cassette, measured from the side of the cassette to the nearest adjacent object.

Acceptance criterion: minimum 76 mm (3 in.)

#13

NOTE: Clearance must be provided on both sides of the cassette.

Handclearance

Minimum76.0 mm(3.0 in.)






Date: 2/10/2012

Section 4: Work in Process Storage (specific to wafer cassettes)


4.1 Integral wafer cassette/lot box storage shelf height (150 and 200 mm wafer cassette/lot boxes only).

Acceptance criteria: maximum (1 box deep) 1520 mm (60 in.)

maximum (2 boxes deep) 1220 mm (48 in.)


1-box deep

Maximum 1520

mm (60 in.)

2-boxes deep

Maximum 1220

mm (48 in.)


Section 5: Manual Wafer Cassette Rotation Device Design


5 NOTE A: Some machines process wafers horizontally. 150–200mm wafers are normally carried vertically, so to load these machines, the operator must rotate the wafer cassette to orient the wafers for processing.

NOTE B: Manual rotation of wafer cassettes can increase stress on the machine operator’s upper extremities, which may lead to physical strain over time and/or damage to wafers, especially if the wafer cassettes do not have handles.

NOTE C: Manual and powered wafer cassette rotation devices are a way to provide controlled rotation of wafer cassettes as a means to reduce the machine operator’s physical stress and lower the potential for wafer damage.

Manual handlingorientation for a

150-200 mm

wafer cassette

Machine handlingorientation for a

150-200 mm

wafer cassette

5.1 Handle height, couple point for hand(s) from standing surface.

Acceptance criteria: maximum 1206 mm (47.5 in.)


#14

NOTE: Coupling point is the center of a handle or the large middle knuckle of the hand when it grasps an object.

Handle

height

Maximum1206 mm

(47.5 in.)

Minimum838 mm(33 in.)

5.2 Hand grip(s) shall allow for a full “power grip” similar to grabbing a rung on a ladder or holding a pistol.

Acceptance criterion: allows for a full power grip in either pronated (palm facing down) or neutral (handshake position) posture.

#15

NOTE A: Acceptable handle types include cylindrical, circular, triangular, or enclosed.

NOTE B: See § 6 for handle design recommendations.

Power Grips

5.3 Single hand lift force

Acceptance criterion: maximum 37.8 N (8.5 lbf). This value includes a 15% capacity reduction due to cleanroom glove use.

5.4 Two hand lift force

Acceptance criterion: maximum 64.5 N (14.5 lbf). This value includes a 15% capacity reduction due to cleanroom glove use.






Date: 2/10/2012



6 (Handle dimensions are correct for use of bare hand or use of typical cleanroom gloves).

NOTE A: A recommended practice for selecting a handle design is to first determine the force requirements before choosing a handle design that is best suited for the intended forces, motions and environment. Handle design recommendations for various hand forces and handgrips are located in ¶¶ 6.2–6.6.

NOTE B: Handles should anticipate the use of gloved hands.

6.1 Handle Surface Finish:

Acceptance criterion: all edges radiused

6.2 Cylindrical Handle

6.2.1 Cylindrical handle diameter (D).


minimum 25 mm (1 in.) Length

Diameter

6.2.2 Cylindrical handle length (L)


6.3 Circular or Triangular Handle

6.3.1 Circular or triangular handle diameter (D)


minimum 50 mm (2 in.) Thickness

Diameter

6.3.2 Circular or triangular handle height (thickness) (H)


minimum 19 mm (0.75 in.)

6.4 Ball Handle

6.4.1 Ball handle diameter

Acceptance criteria: maximum 63 mm (2.5in.)


Diameter

6.5 Pliers Handle

6.5.1 Pliers handle grip span (S)

Acceptance criteria: maximum 89 mm (3.5in.) open

minimum 38 mm (1.5 in.) closed

Handle

Span

Handle

Length

6.5.2 Pliers handle grip length (L)


6.6 Pistol Grip Handle

6.6.1 Pistol grip handle diameter (D)


minimum 38mm (1.5 in.) Length

Diameter

6.6.2 Pistol grip handle length (L)







Date: 2/10/2012



6.7 Enclosed Handles

NOTE: Handle diameter refers to the surface of the handle presented to the inside of the curled fingers. Enclosed handles need not be made solely from cylindrical stock.

6.7.1 Enclosed handle, full power grip (suitcase handle)

Width (W): minimum 127 mm (5 in.)

Depth (D): minimum 45 mm (1.75 in.)

Diameter (d): maximum 25 mm (1 in.)

Width

DepthDiameter

6.7.1.1 Diameter requiring no more than 71 N (16 lbf.) force

Diameter: minimum 6.3 mm (0.25 in.)


Diameter: minimum 13 mm (0.50 in.)


Diameter: minimum 19 mm (0.75 in.)

6.7.2 Enclosed handle (three fingers)

Width (W): minimum 90 mm (3.5 in.)


Diameter (d): minimum 6.3 mm (0.25 in.)

Force: maximum 71 N (16 lbf.) Width

DepthDiameter

6.7.3 Enclosed handle (two fingers)




Force maximum: 51 N (11.5 lbf.) Width

DepthDiameter

6.7.4 Enclosed handle (one finger)




Force: maximum 27 N (6 lbf.) Width

DepthDiameter

6.8 Hook Grasp Handle

6.8.1 Hook Grasp Handle (four fingers)

Opening length (L): minimum 90 mm (3.5 in.)

Opening width (W): minimum 38 mm (1.5 in.)

Depth (d): minimum 50 mm (2 in.)

Lip length (l): minimum 50 mm (2 in.)

Opening

Width

Opening Length

Lip

LengthOpening

Depth

6.8.2 Hook grasp handle pull force (four fingers)

Pull force: maximum 80 N (18 lbf.)






Date: 2/10/2012



6.9 Finger Pull Handle

6.9.1 Finger pull Handle (four fingers)

Opening length (L): minimum 90 mm (3.5 in.)

Opening width (W): minimum 25 mm (1 in.)

Depth (d): minimum 19mm (0.75 in.)

Lip length (l): minimum 19mm (0.75 in.)

Opening

Width

Opening Length

Lip

LengthOpening

Depth

6.9.2 Finger pull handles pull force (four fingers)

Pull force: maximum 9.8 N (2.2 lbf.)

#16




Acceptance criterion: minimum 300 lux (30 fc)


#17

NOTE A: Forward horizontal distances are measured away from the equipment or obstruction for body clearance in a given posture.

NOTE B: Clearances should be provided based on the nature of the tasks performed in the designated area.

NOTE C: When determining the appropriate working space required for a given task, first define the working height. Once this is known, determine the posture(s) associated with the working height and use §§ 7.2.1–7.2.9 to determine the minimum working area for that posture.

NOTE D: Minimum working heights are used to determine postures for sustained activities (tasks which take longer than 5 minutes or have a total duration of greater than 1 hour per shift).


A. Acceptance criterion: minimum 610 mm (24 in.) A

7.2.2 Standing

B. Overhead clearance: minimum 1980 mm (78 in.)

C. Forward horizontal clearance: minimum 690 mm (27 in.)

C

B






Date: 2/10/2012



7.2.3 Sitting-on-Floor

D. Overhead clearance: minimum 1000 mm (39 in.)

E. Forward horizontal clearance: minimum 690 mm (27 in.)

F. Working height: minimum 280 mm (11 in.)

E

D

F

7.2.4 Squatting

G. Overhead clearance: minimum 1220 mm (48 in.)

H. Forward horizontal clearance: minimum 790 mm (31 in.)

I. Working height: minimum 460 mm (18.1 in.)

H

G

I

7.2.5 Kneeling

J. Overhead clearance (from floor): minimum 1450 mm (57 in.)

K. Forward horizontal clearance: minimum 1220 mm (48 in.)

L. Working height: minimum 640 mm (25.2 in.)

K

J

L

7.2.6 Kneeling Crawl

M. Overhead clearance measured from floor: minimum 740 mm (29 in.)

N. Forward horizontal clearance: minimum 1520 mm (60 in.) N

M

7.2.7 Stooping

O. Overhead clearance: minimum 1450 mm (57 in.)

P. Forward horizontal clearance: minimum 1020 mm (40 in.)

Q. Working height: minimum 640 mm (25.2 in.)

P

O

Q

7.2.8 Supine lying on back

R. Height (overhead): minimum 430 mm (17 in.)

S. Length (forward): minimum 1980 mm (78 in.)

S

R






Date: 2/10/2012



7.2.9 Prone or crawl space

T. Height (overhead): minimum 510 mm (20 in.)

U. Length (forward): minimum 2440 mm (96 in.)

U

T

7.3 Hand/arm clearance (NOTE: where appropriate to do so, adjustments have been made for cleanroom gloves.)

#18

NOTE A: Access openings should have smooth edges.

NOTE B: If hinged doors are used, they should not interfere with access.

7.3.1 Clearance provided for finger access round (diameter) or square

One finger: minimum 32 mm (1.25 in.)

2, 3 or 4 finger twist of small knob: minimum object diameter + 58 mm (2.3 in.)

Single

Finger

2 – 4

Fingers

7.3.2 Clearance provided for flat hand wrist access

Height, palm thickness: minimum 89 mm (3.5 in.)

Width, palm width: minimum 114 mm (4.5 in.) Width

Height

7.3.3 Clearance provided for fist to wrist access

Height (fist thickness): minimum height 89 mm (3.5 in.)

Width (fist width): minimum width 127 mm (5 in.)

Width

Height

7.3.4 Clearance provided for two hands arm to shoulders access (does not ensure visual access)

Reach maximum 610 mm (24 in.)

Width: minimum 483 mm (19 in.)

Height: minimum 114 mm (4.5 in.)

Width

Height

Reach

7.3.5 Clearance provided for two hands, hand to wrist access (does not ensure visual access)

Reach: maximum 203 mm (8 in.)

Width: minimum 191 mm (7.5 in)

Height: minimum 114 mm (4.5 in.)

Width

Height

Reach






Date: 2/10/2012



7.3.6 Clearance provided for one arm to shoulder access (does not ensure visual access)

Minimum clearance 132 mm (5.2 in.)

Clearance

7.3.7 Clearance provided for one arm to elbow access, diameter, or square area (does not ensure visual access)

Minimum 119 mm (4.7 in.) Clearance

7.4 Maintenance and Service Access

7.4.1 Enclosures or covers must, unless fully removable, be self-supporting, in the open position, and not require manual support during maintenance. Exceptions may be allowed for self-closing doors for fire safety or compliance reasons.

Acceptance criterion: supports present

7.4.2 Access covers should be equipped with full-handed grasp areas or other means for opening them.

Acceptance criterion: handles present, refer to § 6 for design criteria

7.4.3 Height of access cover handle over the entire range of motion required for operation or maintenance.

There should be no greater than a 254 mm (10 in.) deep obstruction in front of the handle.


Obstruction infront of handle

Maximum 254

mm (10 in.)

Handle heightover entirerange of motion

Maximum 1700

mm (67 in.)

7.5 Replaceable Components

7.5.1 Serviceable components are replaceable as modular packages, and are configured for rapid removal and replacement.

Acceptance criterion: serviceable components configured as described

7.5.2 Serviceable components should not be stacked directly on one another (i.e., a lower layer should not support an upper layer).

Acceptance criterion: serviceable components independently accessible

7.5.3 Heavy components (objects which have a lifting index of 0.5 or greater, see SESC, § 1) or bulky components (greater than 36 inches in length) requiring frequent removal/installation should include guide/locating aids to assist in positioning.

Acceptance criterion: guide/locating pins present

Locating pins

Example of locating pins






Date: 2/10/2012



7.5.4 Cables, connectors, plugs, and receptacles should be labeled, keyed, color coded, or otherwise configured to make connection easier and prevent cross connection. This feature is assessed only if a SEMI S2 assessment is not being conducted.

Acceptance criterion: identification present, keyed where needed

7.5.5 Circuit boards mounted in a card cage configuration should have gripping or ejecting aids for mounting and removal.

Acceptance criterion: finger access, gripping, or ejecting aids available

Hand tool Eject levers

Handgrips

Circuit board removal device examples

#19



8 Display Location

#20

NOTE: Angle-adjustable displays allow the user optimize the viewing angle to control glare and maximize comfort.

8.1 Location for operator primary interface, standing station.

#21

NOTE: A standing station is one where the operator can assume a standing posture or use a tall stool or chair which places the operator at approximately the same height as a standing posture.

8.1.1 Height of video display terminal (single monitor). Does not include touchscreens, measured from floor to center of screen.



#22

NOTE: The display user should be able to view a display while maintaining a near-neutral posture.

Single monitor



8.1.2 Height of video display terminal (stacked monitors). Does not include touchscreens, measured from floor to top line of the top monitor.


The primary monitor in a stacked configuration is the bottom monitor. Top stackedmonitor







Date: 2/10/2012



8.1.3 Height of infrequently used video display terminal (viewed briefly less often than once per hour) measured to top line of monitor.

Acceptance criterion: maximum 1680 mm (66 in.) Infrequently usedmonitor

Maximum 1680 mm

(66 in.)

8.1.4 Height of very infrequently used video display terminal (viewed briefly less often than once per day) measured to top line of monitor.

Acceptance criterion: maximum 1880 mm (74 in.) Very infrequentlyused monitorMaximum 1880 mm(74 in.)

8.1.5 Height of infrequently viewed visual signal measured to the top of the signal. This guideline does not apply to light towers.


Visual signal height

Maximum 2130 mm

(84 in.)


Acceptance criteria: maximum 1470 mm (58 in.), measured from floor to uppermost active pad on screen

minimum 910 mm (36 in.), measured from floor to lowest active pad on the screen.


NOTE: Touch screen design recommendations also apply to light pen operated systems.

Top of active area

Maximum height 1470 mm (58.0”)

Bottom of active area

Minimum height

910 mm (36.0”)

8.1.7 Tilt angle of touch screen monitor between 41 and 48 inches in height to top of screen.

Acceptance criterion: upward minimum 30°

#23

NOTE A: Angle adjustment is recommended to accommodate users of varying heights and to reduce glare under different lighting conditions.

NOTE B: The angle of visibility for flat panel display touch screens varies depending upon which display technology is used (e.g., passive vs. active matrix) so providing angle adjustment will allow users to set the display angle for maximum visibility and comfort.

00

300

450

1370 mm (54.0”)

1220 mm (48.0”)

1042 cm (41.0”)

910 mm (36.0”)

8.1.8 Tilt angle of touch screen monitor less than 41 inches in height to top of screen.

Acceptance criterion: upward minimum 45°

8.2 Location for operator primary interface, seated station

NOTE: A seated station where a short cylinder office-style chair is used.






Date: 2/10/2012



8.2.1 Height of video display terminal (single monitor). Does not include touchscreens, measured from the underside of the work surface to the centerline of monitor.

Acceptance criteria: maximum 517 mm (20.5 in.), minimum 267 mm (10.5 in.)

#24

NOTE: The display user should be able to view a display while maintaining a near-neutral posture.

Display height



8.2.2 Height of video display terminal (stacked monitors), does not include touchscreens, measured from the underside of the work surface to the top line of top monitor.

Acceptance criteria: maximum 727 mm (28.5 in.), minimum 267 mm (10.5 in.).


Minimum height 267 mm (10.5 in.)

Maximum height 727 mm (28.5 in.)

Downward tilt of top monitor Minimum 15

0 if

above 727 mm (28.5 in) from underside

of WS

8.2.3 Tilt angle of video display terminal greater than 727 mm (28.5 in.) in height to top of screen measured from the underside of the work surface. This criterion applied only if the maximum height criterion (8.2.2) is not met.

Acceptance criterion: downward minimum 15°.

8.2.4 Height of touch screen monitor

Acceptance criteria: maximum 397 mm (15.5 in.) measured from the underside of work surface to highest active pad on the screen, minimum 77 mm (3.5 in.) measured from underside of work surface to lowest active pad on the screen.

See § 9 of this table for horizontal reach criteria.

#25

NOTE: Touch screen design recommendations also apply to light pen operated systems.

Active touch

pad area

Minimum 77

mm (3.5 in.)

Maximum 397

mm (15.5 in.)

8.3 Display Characteristics

8.3.1 Lateral distance from the centerline of the display to the centerline of the input device(s).


#26

NOTE: If several input devices are used (i.e., keyboard and mouse) the centerline of the input device farthest from the display should be measured.

Lateral distancebetween monitorand input device

Maximum 320 mm(12.6 in.)

8.3.2 Character height (Specific to Chinese, Korean and Japanese characters.)

Acceptance criterion: character height is greater than or equal to the viewing distance divided by 143


Viewing distance 457-

762 mm (18-30 in.)

Character height =viewing distance

divided by 143






Date: 2/10/2012



8.3.3 Character height (All characters other than Chinese, Korean and Japanese.)

Acceptance criterion: character height is greater than or equal to the viewing distance divided by 215


Viewing distance 457-

762 mm (18-30 in.)

Character height = viewing distance

divided by 215

#27



9 Hand Control Location (These criteria only apply to controls, tools, and materials accessed for routine production operation and maintenance.)

9.1 Standing Station

#28

NOTE: A standing station is one where the machine operator can assume a standing posture or a seated posture in a tall stool, which places the operator at approximately the same stature.

9.1.1 Vertical location of very infrequently used controls (controls used less often than once every 24 hours) measured from the standing surface to the centerline of the control.

Acceptance criteria: maximum 1640 mm (64.5 in.), minimum 0 mm (0 in.).

Minimum 0 mm(0 in.)

Maximum 1640

mm (64.5 in.)

9.1.2 Location of infrequently used and/or critical controls. Maximum reaches are indicated for various heights. Reaches are measured from the leading edge of the equipment or obstacle.

Acceptance criteria: controls should not be located above 1638 mm (64.5 in.) or below 838 mm (33 in.).

#29

NOTE A: Interpolate for intermediate values.

NOTE B: Reach distances should be measured from the leading edge of the machine housing or obstructions between the machine operator and the control. Obstructions include keyboard trays, drip trays, machine anti-vibration pads and load-bearing pads.

NOTE C: See Figure 9.1.2 for maximum recommended reaches.

Minimum 838

mm (33 in.)

Maximum 483

mm (19 in.)

Maximum 1638

mm (64.5 in.)






Date: 2/10/2012



9.1.3 Location of frequently used controls. Maximum reaches are indicated for various heights. Reaches are measured from the leading edge of the equipment or obstacle.

Acceptance criteria: controls should not be located above 1270 mm (50 in.) or below 940 mm (37 in.).

#30


NOTE B: Reach distances should be measured from the leading edge of the machine housing or obstructions to the center of the control. bstructions include keyboard trays, drip trays, machine load bearing pads and anti-vibration pads.

NOTE C: See Figure 9.1.3 for maximum recommended reaches.

Minimum 940

mm (37 in.)

Maximum 406

mm (16 in.)

Maximum 1270

mm (50 in.)

9.2 Seated Station

NOTE: A seated station is one where a short cylinder office-style chair is used).

9.2.1 Location of infrequently used and/or critical controls. Maximum reaches are indicated for various heights. Reaches are measured from the leading edge of the work surface or obstacle.

Acceptance criteria: controls should not be located greater than 724 mm (28.5 in.) above or 140 mm (5.5 in.) below the underside of the work surface.

#31


NOTE B: See Figure 9.2.1 for maximum recommended reaches.

Maximum 140

mm (5.5 in.)

Maximum 483

mm (19 in.)

Maximum 724

mm (28.5 in.)

9.2.2 Location of frequently used controls. Maximum reaches are indicated for various heights. Reaches are measured from the leading edge of the work surface or obstacle.

Acceptance criteria: controls should not be located greater than 394 mm (15.5 in.) above or less than 89 mm (3.5 in.) above the underside of the work surface.

#32


NOTE B: See Figure 9.2.2 for maximum recommended reaches.

Minimum 89

mm (3.5 in.)

Maximum 419

mm (16.5 in.)

Maximum 394

mm (15.5 in.)

#33






Date: 2/10/2012

Section 9: Hand Control Location Figures

Coordinates given for hand control locations. Height (vertical measurement from standing surface to center of control), Depth (horizontal measurement from leading edge of work surface to the center of control)

Height and depth of controls

1638, 254 mm (64.5, 10 in.)

1524, 368 mm (60, 14.5 in.)

1422, 432 mm (56, 17 in.)

1321, 470 mm (52, 18.5 in.)

1219, 483 mm (48, 19 in.)

1118, 470 mm (44, 18.5 in.)

1016, 394 mm (40, 15.5 in.)

914, 292 mm (36, 11.5 in.)

838, 178 mm (33, 7 in.)


Figure 9.1.2 Infrequently used Standing Control Reaches

Height and depth of controls

1270, 292 mm (50, 11.5 in.)

1219, 330 mm (48,13 in.)

1168, 368 mm (46, 14.5 in.)

1118, 394 mm (44, 15.5 in.)

1067, 406 mm (42, 16 in.)

1016, 394 mm (40, 15.5 in.)

940, 318 mm (37, 12.5 in.)


Figure 9.1.3

Frequently used Standing Control Reaches

724, 356 mm (28.5, 14 in.)

597, 432 mm (23.5, 17 in.)

495, 470 mm (19.5, 18.5 in.)

394, 483 mm (15.5, 19 in.)

292, 483 mm (11.5, 19 in.)

191, 470 mm (7.5, 18.5 in.)

89, 445 mm (3.5, 17.5 in.)

-13, 381 mm (-0.5, 15 in.)

-140, 254 mm (-5.5, 10 in.)

Underside of Work Surface Leading edge

Figure 9.2.1

Infrequently used Seated Control Reaches

394, 330 mm (15.5, 13 in.)

343, 368 mm (13.5, 14.5 in.)

292, 394 mm (11.5, 15.5 in.)

241, 406 mm (9.5, 16 in.)

191, 419 mm (7.5, 16.5 in.)

140, 419 mm (5.5, 16.5 in.)

89, 419 mm (3.5, 16.5 in.)

Underside of Work Surface Leading edge

Figure 9.2.2

Frequently used Seated Control Reaches



10.1 Standing Station (A standing station is one where the operator can assume a standing posture or a seated posture in a tall stool, which places the operator at approximately the same stature.)

#34

NOTE: If a tall stool, chair or sit/lean stool is used, it is assumed that the seat is user height-adjustable.

Stand Sit Sit/Lean






Date: 2/10/2012




Acceptance criterion: minimum 6.4 mm (0.25 in.) radius

#35

NOTE: This recommendation applies to both horizontal and vertical surfaces where the equipment operator can assume a static posture.



10.1.2 Height of keyboard, trackball, or mouse (to home row, top of ball/mouse).

NOTE: In applications where input devices (keyboard, trackball, or mouse) are used more like machine controls (intermittent one finger entry on the keyboard, intermittent short term use of the mouse or trackball) than for standard typing (continuous use of keyboard for entry of long character strings, extended use of trackball or mouse in graphical environment), it is appropriate to use the height and reach locations described in § 9, Hand Control Location (standing station).

Acceptance criteria: maximum 1020 mm (40 in.), minimum 970 mm (38 in.).

#36

NOTE: The home row of a keyboard is the row with the “F” and “J” typing home keys.

Keyboard, mouseand trackball height



10.1.3 Height of microscope eyepieces. Must be adjustable.

Acceptance criterion: Range includes 1270 mm (50 in.) to 1730 mm (68 in.)

#37

NOTE A: Measured from standing surface to center of the eyepiece.

NOTE B: Both height-adjustable eyepieces and adjustable tables may be used to meet this recommendation. If a height-adjustable table is used, the SESC checklist should be used to determine the appropriate machine load port heights and locations for displays and controls at the maximum and minimum table heights.



10.2 Seated Station (A seated station where a short cylinder office-style chair is used.)

#38

NOTE: A height-adjustable chair is assumed.

NOTE: In the event that non-traditional work surfaces, such as articulating arms to support input devices, are used, the underside of the work surface will be defined by horizontal clearance criteria: 20” depth from the leading edge and 24” wide centered laterally on the input devices.

Height-adjustable,

office style chair






Date: 2/10/2012



10.2.1 Height of keyboard, trackball, or mouse (measured to home row and top of ball/mouse from the underside of the work surface).

#39

NOTE: In applications where input devices (keyboard, trackball, or mouse) are used more like machine controls (intermittent one finger entry on the keyboard, intermittent short term use of the mouse or trackball) than for standard typing (continuous use of keyboard for entry of long character strings, extended use of trackball or mouse in graphical environment), it is appropriate to use the height and reach locations described in § 9 of this table, Hand Control Location (seated station).


NOTE: The home row of a keyboard is the row with the “F” and “J” keys for a standard QWERTY style keyboard.

Height of key-board, trackball and mouse


10.2.2 Vertical leg clearance.

Acceptance criterion: minimum 673 mm (26.5 in.) Vertical legclearance

Minimum 673 mm(26.5 in.)

10.2.3 Horizontal leg clearance, depth at knee level.

Acceptance criterion: minimum 508 mm (20 in.). Horizontal kneeclearance


10.2.4 Horizontal leg clearance, depth at foot level.

Acceptance criteria: minimum 660 mm (26 in.) depth clearance at a range that includes 419 mm (16.5 in.) to 673 mm (26.5 in.) below the underside of the work surface at a minimum.

Horizontal foot clearance


Range from 419 mm (16.5 in) to 673 mm (26.5 in) at minimum

10.2.5 Horizontal leg clearance: width.


Horizontal legclearance, width







Date: 2/10/2012



10.2.6 Equipment integrated microscope:

Height of microscope eyepiece measured from underside of the work surface to center of eyepiece. Must be adjustable with the entire range. Acceptance criterion: Range includes 495 mm (19.5 in.) to 658 mm (25.9 in.).

Stand-alone (table top) microscope:

Height of microscope eyepiece measured from the top of the work surface to center of eyepiece. Must be adjustable with the entire range. Acceptance criterion: Range includes 445 mm (17.5 in.) to 607 mm (23.9 in.).

Equipment integrated microscope

Underside of leg opening to microscope eyepiece vertical measurement

Stand-alone microscope

Table surface to microscope eyepiece vertical

measurement

10.2.7 Microscope eyepiece location in relation to leading edge of workstation.

Acceptance criteria: Eyepieces are flush with or protrude beyond the leading edge of the workstation toward the user (applicable at all eyepiece height adjustment settings).

Microscope eyepiece flush with, or extends beyond, leading edge of workstation


Acceptance criterion: minimum 6 mm (0.25 in.) radius

#40

NOTE: This recommendation applies to both horizontal and vertical surfaces where the equipment operator can assume a static posture.



NOTICE: SEMI makes no warranties or representations as to the suitability of the safety guideline(s) set forth herein for any particular application. The determination of the suitability of the safety guideline(s) is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials or equipment mentioned herein. These safety guidelines are subject to change without notice.

By publication of this safety guideline, Semiconductor Equipment and Materials International (SEMI) takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this safety guideline. Users of this safety guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.






Date: 2/10/2012

D2-3 Delete Appendix 3

D2-3.1 Delete Appendix 3 as shown below.

APPENDIX 3-1 HANDLE DESIGN DIAGRAMS

NOTICE: The material in this appendix is an official part of SEMI S8 and was approved by full letter ballot procedures.

R40-1 A3-1Handle Design

A3-1.1 The following diagrams are intended to clarify the criteria described in § 6 of Appendix 1.

A3-1.1 Cylindrical Handle

Figure A3-1

Cylindrical Handle

D - Handle diameter

L - Handle length

#41

A3-1.2 Circular Handle, or Triangular Handle

Figure A3-2

Circular Handle, or Triangular Handle

D - Handle diameter

H - Handle height (thickness)

A3-1.1.2 Pliers Handle

Figure A3-3

Pliers Handle






Date: 2/10/2012

L - Handle length

S - Handle grip span

A3-1.1.4 Pistol Grip Handle

Figure A3-4

Pistol Grip Handle

D - Handle diameter

L - Handle length

1.1.1.1Enclosed Handle

Figure A3-5

Enclosed Handle

D - Handle depth

W - Handle width

d - Handle diameter

1.1.1.2Hook Grasp Handle, or Finger Pull Handle

Figure A3-6

Hook Grasp Handle, or Finger Pull Handle

W - Handle opening width

L - Handle opening length

l - Handle lip length

d - Handle depth






Date: 2/10/2012

Line Item 3 DELAYED REVISIONS 3 (Effective July 2012) Change Pliers Handle Criteria to “Squeeze Handle” Criteria


D3-1 Delete Appendix 1, Sections 6.5-6.5.2 Design Recommendations for Pliers Handles and Replace (OPTIONAL Before Effective Date)

D3-1.1 Delete text as shown, replace with text and pictograms as shown. Add a line for entry of actual measurements and insert check boxes for “Yes”, “No”, and “N/A” (not applicable). The design criteria have not changed; only expanded to also apply to squeeze action handles other than pliers.


Metric Units (US Customary Units) Actual

Conforms/Does

Not Conform/

Not Applicable

6.5 Pliers Handle

6.5.1 Pliers handle grip span (S) maximum 89 mm (3.5 in.) open

minimum 38 mm (1.5 in.) closed

6.5.2 Pliers handle length (L) minimum 127 mm (5 in.)

D3-2 Add Sections 6.5-6.5.2 Design Recommendations for Squeeze Handles (OPTIONAL Before Effective Date)



Reference

Pictogram

Actual/

Conforms?

6.5 Squeeze Grip Handle

6.5.1 Squeeze grip handle grip span

Handle sections need not be cylindrical.

Measurement taken at the maximum grip span of handle measured at the user’s middle finger.

Maximum 89 mm (3.5 in.) open

Minimum 38 mm (1.5 in.) closed

Actual

Conforms?

Yes

No

N/A

6.5.2 Squeeze grip handle grip length.

Minimum 127 mm (5 in.) Actual

Conforms?

Yes

No

N/A

Length

Pivoting motion handle

Grip span

Grip length

Grip length

Grip span

Parallel motion handle






Date: 2/10/2012

Line Item 4 DELAYED REVISIONS 4 (Effective July 2012) Add Design Criteria to SESC Section 7, “Full Body Clearance”


D4-1 Re-name Section 7 and Move Lighting Criteria (OPTIONAL Before Effective Date)

D4-1.1 Change section “7” to “Section 7: Clearance criteria applicable to operations, service, and maintenance tasks.”

D4-1.2 Move 7.1 maintenance lighting criteria to a new Section 7.6.1 as shown below and add a new Section 7.6 header “Lighting for Maintenance Activities.”



7.6 Lighting for Maintenance Activities

7.6.1 Minimum lighting level in routine maintenance areas is required where the operator has to read information, use a hand tool, or make a connection. This provision can be met by providing integral lighting or portable lighting which can be temporarily attached such that it does not have to be hand held.


D4-2 Add Recommendations for Whole Body Clearance

D4-2.1 Delete sections 7-7.2.9 and replace with new sections 7-7.2.9 below.

D4-2.2 For this section of the table, “Actual” and “Conformance” columns are combined into one “Actual / Conforms” column with “Yes / No / N/A” (Not Applicable) checkboxes after each section.



Conforms/Does

Not Conform/

Not Applicable

7 Maintainability and Serviceability




NOTE: Clearances should be approached from a task analysis point of view. Clearances should be provided based on the nature of the tasks performed in the designated area.



7.2.2 Standing: overhead clearance, measured from the floor

forward horizontal clearance#3








Date: 2/10/2012



Conforms/Does

Not Conform/

Not Applicable

7.2.3 Sitting-on-Floor: overhead clearance, measured from the floor


working height




7.2.4 Squatting: overhead clearance, measured from the floor


working height




7.2.5 Kneeling: overhead clearance, measured from the floor


working height




7.2.6 Kneeling Crawl: overhead clearance, measured from the floor




7.2.7 Stooping: overhead clearance, measured from the floor


working height




7.2.8 Supine (lying on back): height

length



7.2.9 Prone or crawl space: height

length



Section 7: Clearance Criteria Applicable to Operations, Service, and Maintenance Tasks

Equipment may extend into the envelope of recommend clearance provided that the assessor captures in the assessment report a rationale demonstrating that the impinging object will not interfere with the task or tasks for which clearance is being evaluated. The rationale should give consideration to at least the following points;

• 95th percentile North American body dimensions,

• Line-of-sight vision required throughout the task(s),

• Anticipated body motions (e.g. turning, reaching) during the task(s).

Clearance criteria for design and assessment should include consideration of the tools and materials identified by the supplier to be moved and used in the course of the task, and personal protective equipment required by the supplier to be worn by workers during the task(s).

These criteria are limited to the machine structure as provided, and installed per supplier instructions.






Date: 2/10/2012

Section Indicator

Acceptance Criteria


Reference

Pictogram

Actual/

Conforms?

7.1 Full Body Clearance for Walking and Crawling

NOTE: Dimensions do not include space for carried items or personal protective equipment. Additional room should be provided for anticipated carrying of items or wearing protective clothing or equipment.

7.1.1 Walking clearance A. Vertical clearance, minimum 1980 mm (78 in.)

B. Passage width, minimum 610 mm (24 in.)

C. Walking surface width (maintenance activity only), minimum 381 mm (18 in.)

D. Elbow/hip clearance height, maximum height of sloped area 1080 mm (42.5 in.)

Actual

Conforms?

Yes

No

N/A

7.1.2 Moving sideways (maintenance activity only)


B. Forward horizontal clearance, minimum 560 mm (22 in.)

Actual

Conforms?

Yes

No

N/A

7.1.3 Kneeling crawl (maintenance activity only)



C. Elbow clearance, minimum 635 mm (25 in.)

Actual

Conforms?

Yes

No

N/A

7.2 Full Body Clearance for Work Activities

NOTE: Clearances should be provided based on the nature of the tasks performed in the designated area. Minimum working heights are used to determine postures for activities that involve manual and visual activity lasting longer than 5 minutes or have a total duration of greater than 1 hour per shift. When determining the appropriate working space required for a given task, first estimate where the hands, tools and equipment must be, the line of sight needed, and if the body will be supported (e.g., sitting on a stool) for the envisioned task. Once this is done, estimate the posture(s) that will be associated with the task and use §§ 7.2.1–7.2.9 to determine the minimum working area for that posture.

7.2.1 Any posture: horizontal clearance for upper body.


Actual

Conforms?

Yes

No

N/A

A

C

B

A

D

A

B

A

B C






Date: 2/10/2012

Section Indicator

Acceptance Criteria


Reference

Pictogram

Actual/

Conforms?

7.2.2 Standing while performing manual work


B. Forward horizontal clearance at working height, minimum 690 mm (27 in.)


D. Lower body clearance, minimum 550 mm (22 in.)

Actual

Conforms?

Yes

No

N/A

7.2.3 Stooping




Actual

Conforms?

Yes

No

N/A

7.2.4 Kneeling

A. Overhead clearance (from floor), minimum 1450 mm (57 in.)



Actual

Conforms?

Yes

No

N/A

7.2.5 Sitting




Actual

Conforms?

Yes

No

N/A

7.2.6 Squatting




Actual

Conforms?

Yes

No

N/A

7.2.7 Sitting-on-floor




Actual

Conforms?

Yes

No

N/A

B

A

D

C

B

A

C

B

A

C

B

A

C

B

A

C

B

A

C






Date: 2/10/2012

Section Indicator

Acceptance Criteria


Reference

Pictogram

Actual/

Conforms?

7.2.8 Supine, lying on back

If a mechanic’s creeper will be used then add height of creeper to the vertical clearance.



Actual

Conforms?

Yes

No

N/A

7.2.9 Prone, lying on stomach

If a mechanic’s creeper will be used then add height of creeper to the vertical clearance.



Actual

Conforms?

Yes

No

N/A

D4-3 Add References

D4-3.1 Add reference below to SEMI S8, section 8, “Related Documents” and re-number subsequent references appropriately.

Harrison, Catherine R., and Robinette, Kathleen M. CAESAR: Summary Statistics for the Adult Population (Ages 18-65) of the United States of America. Wright-Patterson AFB, Ohio: Air Force Research Laboratory, Human Effectiveness Directorate, Crew System Interface Division, 2002.

B

A

B

A






Date: 2/10/2012

Line Item 5 DELAYED REVISIONS 5 (Effective July 2012) Change Recommendations for Laterally Offset Display


D5-1 Update Display/Keyboard Lateral Distance Recommendations

D5-1.1 Delete section 8.3.1 and replace with new section 8.3.1 shown below. Add pictogram column with a pictogram and combine “actual” and “conforms” columns into one column with conformance checkboxes.



Conforms/Does

Not Conform/

Not Applicable

8.3.1 Lateral distance from the centerline of the display to the centerline of the input device(s). See MIL-STD-1472 for a depiction of this.

maximum 320 mm (12.6 in.)



Reference

Pictogram

Actual/

Conforms?

8.3.1 Lateral distance from the centerline of the display to the center of the keyboard home row, which is typically the midpoint between the “G” and “H” keys on a keyboard with a standard “QWERTY” key layout.

When practical, off-center displays should be angled perpendicular to the user’s line of sight to minimize image distortion.

Calculate maximum lateral offset distance using the following formula: (KD+EK) * tan 350 = LD

KD = Forward distance from keyboard home row to display.

EK = 304 mm (12.0 in.) Constant forward distance from eye to keyboard home row.

LD = Maximum recommended lateral distance to center of display.

Examples of maximum recommended offset dimensions using the provided formula.

Keyboard home row to display

distance

Maximum offset

229mm (9.0 in.) 373mm (14.7 in.)

300mm (11.8 in.) 423mm (16.6 in.)

350mm (13.8 in.) 458mm (18.0 in.)

400mm (15.7 in.) 493mm (19.4 in.)

Actual

Conforms?

Yes

No

N/A


ANSI/HFES 100: Human Factors Engineering of Computer Workstations. Human Factors and Ergonomics Society, 2007.

EN 894-2: 1997 Safety of Machinery: Ergonomics Requirements for the Design of Displays and Control Actuators, Part 2: Displays. Geneva: European Committee for Standardization, 1997.

KD Keyboard Home Row

to Display

EK Eye to Keyboard Home Row

LD Lateral Distance from Keyboard to Center of Display

350

Plan view






Date: 2/10/2012

Line Item 6 DELAYED REVISIONS 6 (Effective July, 2012) Change Display Recommendations


D6-1 Provide Recommendations for Horizontal Distance from Keyboard Home to Display

D6-1.1 Add new section 8.3.2 as shown below. Re-number subsequent sections under this heading.

Section Indicator

Acceptance Criteria


Reference

Pictogram

Actual/

Conforms?

8.3.2 Display distance. Measure horizontal distance from keyboard home row or center of input device in the home position to the display.

Applies to seated and standing workstations.

This recommendation does not apply to applications where input devices (keyboard, trackball, or mouse) are used more like machine controls (intermittent one finger entry on the keyboard, intermittent short term use of the mouse or trackball) than for standard typing (continuous use of keyboard for entry of long character strings, extended use of trackball or mouse in a graphical environment).


Actual

Conforms?

Yes

No

N/A


Kroemer, K. H. E. 1999, 'Engineering Anthropometry', in Occupational Ergonomics Handbook, eds. W. Karwowski & W. S. Marras, CRC Press, Boca Raton.

Horizontal distance from home row of keyboard or center of input device to display






Date: 2/10/2012

Line Item 7 DELAYED REVISIONS 7 (Effective July 2012) Change Display Recommendations


D7-1 Update Display Character Height Recommendations

D7-1.1 Delete sections 8.3.2 and 8.2.3 and replace with new sections 8.3.3 and 8.3.4 shown below. The original source for the recommended “Asian” character heights in the current version of the SESC checklist is not known so this dimension should be updated to align it with current standards. The vision arc should be the requirement since this is the measure used in other design guidelines. Linear dimensions are provided in parentheses.



Conforms/Does

Not Conform/

Not Applicable

8.3.2 Character height (Specific to Chinese, Korean, and Japanese characters.)

Character height is greater than or equal to the viewing distance divided by 143. Recommended viewing distance is between 457 mm (18 in.) and 762 mm (30 in.)

8.3.3 Character height (All characters other than Chinese, Korean, and Japanese.)

Character height is greater than or equal to the viewing distance divided by 215. Recommended viewing distance is between 457 mm (18 in.) and 762 mm (30 in.)



Reference

Pictogram

Actual/

Conforms?

8.3.3 Character height (specific to Chinese, Korean, and Japanese characters).

Minimum 25 minutes of arc (character height is greater than or equal to the viewing distance divided by 137.5).

Minimum recommended viewing distance is 500 mm (19.7 in.).

Actual

Conforms?

Yes

No

N/A

8.3.4 Character height (all characters other than Chinese, Korean, and Japanese).

Minimum 16 minutes of arc (character height is greater than or equal to the viewing distance divided by 215).

Minimum recommended viewing distance is 500 mm (19.7 in.).

Actual

Conforms?

Yes

No

N/A

D7-1.2 Add reference shown below to SEMI S8, Section 4, “Referenced Standards and Documents” and re-number subsequent sections appropriately.

JIS Z 8513 — Ergonomics -- Office Work With Visual Display Terminals (VDTs) -- Visual Display Requirements (Amendment 1)

Viewing distance

Character height

Viewing angle

Viewing distance

Character Height

Viewing angle






Date: 2/10/2012

Line Item 8 DELAYED REVISIONS 8 (Effective July 2012) Add Criteria for Critical Controls on Equipment


D8-1 Add Criteria to SESC Section 9.1.2 for Critical Controls on Equipment Lower than 838 Mm (33 In) and Postures Other than Sitting or Standing during Maintenance Activities (OPTIONAL Before Effective Date)


Hand Control Location (These criteria only apply to controls, tools, and materials accessed from standing and seated postures for routine production operation and maintenance tasks).

These criteria do not apply to equipment lower than 838 mm (33 in.) such as pumps and other support equipment.

Infrequently used or critical controls may be located outside the stated reach ranges if their location makes them more readily accessible for postures other than sitting or standing adopted during maintenance activities anticipated by the supplier.






Date: 2/10/2012

Line Item 9 DELAYED REVISIONS 9 (Effective July 2012) Add Work Surface Thickness Criteria


D9-1 Add Work Surface Thickness Criteria to SESC Section 10.2 for Different Types of Input Device Configurations (OPTIONAL Before Effective Date)

D9-1.1 Add sections 10.2.8-10.2.12 as shown below and renumber subsequent sections. Only need to be applied to depth of work surface in section 10.2.3.



Reference

Pictogram

Actual/

Conforms?

10.2.8 Thickness of work surface.

Only needs to be applied to depth of work surface in section 10.2.3 of this table.


Actual

Conforms?

Yes

No

N/A

10.2.9 Thickness of work surface used for an enclosed keyboard.



Actual

Conforms?

Yes

No

N/A

10.2.10 Maximum work surface thickness for non-keyboard applications.



Actual

Conforms?

Yes

No

N/A

10.2.11 For work surfaces thicknesses greater than 75 mm (3 in.), arm support surface should be present in front of primary controls used by each hand.

Arm support surface should be present in front of primary controls.

Conforms?

Yes

No

N/A


Work surfaces less than or equal to 51 mm (2.0 in.) thick, minimum 6 mm (0.25 in.) radius.

Work surfaces greater than 51 mm (2.0 in.) thick, minimum 13 mm (0.5 in.) radius.

Actual

Conforms?

Yes

No

N/A

Thickness of work surface



Arm support surface

Radius of work surface edge






Date: 2/10/2012

Line Item 10 DELAYED REVISIONS 10 (Effective July 2012) Update Related Information 1-2, “Neutral and Awkward Postures”


D10-1 Change Angle of Maximum Recommended Neck Rotation in “Related Information,” R1-2 (OPTIONAL Before Effective Date)

D10-1.1 Change maximum head rotation angle to 35° as follows below. Neck rotation angle of 45° in SEMI S8, “Related Information,” R1-2 is incorrect. The original source material (Humanscale 7/8/9, 1991), recommends a maximum 45° angle for comfort associated with vehicle operation but recommends a 35° range for general comfort (50% of maximum joint range of motion). ANSI/HFES 100 Human Factors Engineering of Computer Workstations recommends that multiple-display configurations should not require users to look more than 35° to either side to avoid excessive twisting of the neck and torso. EN 894-2 recommends that head rotation for acceptable display monitoring should not exceed 35°. WADC TR 56-171 states “In no case should the line of sight to the plane of the display be more than 45° from the perpendicular.”

13. Head rotation >45°

>35°

Neck rotation is turning the neck (e.g., looking to the side).

D10-1.2 Add references below to SEMI S8, section 4, “Related Documents” and re-number subsequent references appropriately.

ANSI/HFES 100: Human Factors Engineering of Computer Workstations. Human Factors and Ergonomics Society, 2007.

EN 894-2: 1997 Safety of Machinery: Ergonomics Requirements for the Design of Displays and Control Actuators, Part 2: Displays. Geneva: European Committee for Standardization, 1997.

NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.

By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.