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Team 14 Joe Grady James Crow Hongyu Chen Prakalp Sudhakar Victor Villagomez Client/Faculty Advisor: Dr. Gary Tuttle. Diffusion Furnace Controller Design . - PowerPoint PPT Presentation
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DIFFUSION FURNACE CONTROLLER DESIGN
Team 14 Joe GradyJames CrowHongyu ChenPrakalp SudhakarVictor Villagomez
Client/Faculty Advisor: Dr. Gary Tuttle
PROBLEM STATEMENTThe objective of the senior design project is to design a new set of temperature
controllers to use on a set of diffusion furnaces located at the Microelectronics
Research Center.
The project goals include:
• Temperature calibration of the furnaces
• Implementing of new temperature controllers into the current furnace system
• Providing a computer interface so that temperature of the furnaces can be
controlled and monitored remotely.
SYSTEM OVERVIEW
FUNCTIONAL REQUIREMENTS
• Controller must have a temperature tolerance within +/- 1 degree Celsius
• Controller must be digital and programmable (∆T/ ∆t)
• Controller must have communication capability
• Controller must be able to sample and store information for every cycle
• Controller must be able to control temperatures independently of each section
FUNCTIONAL REQUIREMENTS
• Software must be able to monitor and control the parameters of the temperature controller
• Software must be able to support simultaneous use by multiple students
• Software must be able to display graphs of the process
• Software needs to be accessed online via web browser
• Graphical interface of the software must be user-friendly
• Error checking and deviation
NON-FUNCTIONAL REQUIREMENTS
• The new controllers need to be placed where the old ones were so they need to able to fit within a certain space
• Connectors must be compatible with the new controller
• All the schematics and layout designs need to be of industry standards for future reference.
RISKS AND MITIGATIONS• Group might possibly lose members• No way to verify that the wafer is
placed in the correct oven• The amount of inputs on the CN616
controller will not allow us to use all of thermocouples used in the current set-up.
BUDGET
Parts and Materials: a) Suitable controller(s) b) Miscellaneous parts c) Poster
Without Labor$1,250.00$50.00$50.00
With Labor$1,250.00$50.00$50.00
Services:a)Website Upkeep (for 1 year) $60.00 $60.00Labor ($12.50 per hour):a)Crow, James b)Villagomez, Victorc)Sudhakar, Prakalpd)Grady, Joee)Chen, Hongyu
$1125.00$1125.00$1125.00$1125.00$1125.00
Parts and Materials: a) Suitable controller(s) b) Miscellaneous parts c) Poster
Without Labor$620.00$0.00$0.00
With Labor$620.00$0.00$0.00
Services:a)Website Upkeep (for 1 year) $0.00 $0.00Labor ($12.50 per hour):a)Crow, James b)Villagomez, Victorc)Sudhakar, Prakalpd)Grady, Joee)Chen, Hongyu
$375.00$375.00$375.00$375.00$375.00
Current Expenses
Total Expected Expenses
SCHEDULE – 1ST SEMESTER
SOFTWARE ARCHITECTURE
SOFTWARE ARCHITECTURE – SEQUENCE DIAGRAM
SOFTWARE ARCHITECTURE – USE CASES
SOFTWARE OVERVIEW
USER INTERFACE
All text field have a
acceptable range
SOFTWARE TEST PLAN
Simulation• CubicTest Tools
A graphical Eclipse plug-in For writing Selenium and Watir tests.
• Catus A simple framework for unit testing server-side code. It use JUnits and extends it.
• JMeter A full multithreading framework allows concurrent sampling. GUI interface for user friendly.
SOFTWARE TEST PLAN
What to test
• Website Application Module (user side)• Internet Server Module (between the server and the
website)• Communication Module (between server and controller)Metrics & Hypothesis
• Assume all hardware are working correctly • Test extreme cases --- like negative values and value out of range• Match corresponding protocols to the parameters
PROTOTYPE IMPLEMENTATION OF SERIAL COMMUNICATION
• Baud Rate = 4800• Data Bits = 8• Parity = N• Stop = 1
Operating Protocol• Controllers do not initiate
communication, Command Module does.
• All communication is in ASCII format
• To start communication Command Module sends alert code followed by ID
SCHEMATIC – OLD CONTROLLER
HARDWARE INTERFACE ISSUES
• SCR data sheets are unavailable and we are required to create test to determine the characteristics of the SCR.
• To control the SCR pairs we will need an op-amp interface circuit between the CN616 controller and the SCR’s gates.
THERMOCOUPLE INTERFACING
RS-232 INTERFACING
PROTOTYPE SCR INTERFACING
Omega CN616 – 1 output SCR
Pair
HARDWARE TEST PLAN
• Isolate a single SCR for characteristic testing to get its turn-on gate voltage
• Use this information to help interface the CN616 controller to the SCR circuit
• Test a single furnace with both a single thermocouple and the SCR circuit connected to the controller. Using a thermometer to compare controller measured temperature and actual temperature.
HARDWARE TEST PLANThermocouple
• Connect the master thermocouple pair (J2) to the CN616 controller input (Z2).
• Check that the 120VAC line voltage is properly connected to the CN616 controller, if so power it on.
• Once the CN616 is powered on set the controller’s 4th digit in the 4 digit model code to 6 as shown in Figure 4-2 below. This will correspond to an S-type thermocouple.
Figure 4-2, Function Setting
• Connect a multi-meter with the red lead connected to the thermocouples red wire and the black lead to ground to verify that the voltages are between 0-40mV.
HARDWARE TEST PLANSCR • Connect the center SCR gates to the op-amp circuits output’s
and then connect the op-amp circuit’s input to the CN616 controller output (Z2)
• Check that both the master thermocouple pair (J2) is connected to the CN616 controller input (Z2) and that the 120VAC line voltage is properly connected to the CN616 controller, if so power it on.
• Use CN616 manual, pages 33-34 to set the temperature to 1000° Celsius at a ramp up time of 20 minutes.
• Connect a multi-meter in series with the output of the CN616 and the op-amp circuit input to verify that the current does not exceed 10mA.
CURRENT PROJECT STATUS
• Thermocouple, AC line power, RS 232 have been all successfully interfaced and verified compatible.
• The tests have been developed for creating the SCR characteristics.
• The Op-amp interface circuit between the CN616 controller output and the input to the SCR gate has been designed and is in the process of being debugged.
• The software design module is setup.• The core test cases have been written, there is
need for more test cases.• The controller can already be tested for
communication
SCHEDULE – 2ND SEMESTER
RESOURCES
Professor• Thorough knowledge about current
microcontrollers, and advice for digital microcontrollers
User Manuals• Manual for current analog microcontrollers• Manual for new digital microcontroller.Manufacturers• Websites to purchase new digital
microcontrollers• Omega.com – New microcontroller• Easysw.com – Serial Programming Guide
QUESTIONS ?