Dipartimento diElettronica,

Informazione e Bioingegneria

Sensors and Detectors

Laboratory

S. Dellea, F. Giacci, G. Langfelder, A. Longoni

Dissemination and exploitation: WP8 status

27/11/14

Confidential

Erlangen – November 26-27th 2014

2Outline• WP7: characterization and operation of run#1 devices

Setups• Electromechanical and temperature characterization• Characterization in-operation

Measurements• Mode-split variation understanding, modelling and solutions• Wafer-level Q-factor characterization• Temperature stability of the modes and Q-factor variations with T• Sensitivity and linearity, quadrature and its compensation• Resolution (ARW) and Allan variance: stability over vibrations and temperature fluctuations

• WP3: design of run#2 devices Consumer gyroscopes

• Summary of hints from run#1 characterization• Details and motivations of layouts and current status

Medical gyroscopes• Design considerations derived from the medical specifications• Designed devices (FEM simulations)• Details and motivations of layouts and current status

• WP8: dissemination Conferences and journals Other events

Erlangen – November 26-27th 2014

Overview of the dissemination activityThe dissemination activity was relevant during this third year of the project, reflecting the progress, the novelty and the quality of the results obtained from the first run of the project. We report below the details of works published in scientific journals or as conference proceedings of international conferences.

 

Publication #1

Giacomo Langfelder, Stefano Dellea, Patrice Rey, Audrey Berthelot, Antonio Longoni, INVESTIGATION OF THE FATIGUE ORIGIN AND PROPAGATION IN SUBMICROMETRIC SILICON PIEZORESISTIVE LAYERS, Proc. of MEMS 2014, San Francisco, CA, USA, January 26 - 30, 2014, pp. 640-643.

Publication #2

Yannick Deimerly, Patrice Rey, Philippe Robert, Tarik Bourouina, Guillaume Jourdan, ELECTROMECHANICAL DAMPING IN MEMS ACCELEROMETERS: A WAY TOWARDS SINGLE CHIP GYROMETER ACCELEROMETER CO-INTEGRATION, Proc. of MEMS 2014, San Francisco, CA, USA, January 26 - 30, 2014, pp. 725-728.

Publication #3

Giacomo Langfelder, Stefano Dellea, Audrey Berthelot, Patrice Rey, Alessandro Tocchio, Antonio Francesco Longoni, ANALYSIS OF MODE-SPLIT OPERATION IN MEMS BASED ON PIEZORESISTIVE NANOGAUGES, IEEE Journal of Microelectromechanical systems, in press, doi: 10.1109/JMEMS.2014.2324032, URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6832453&isnumber=4357932.

 

Publication #4

Stefano Dellea, Giacomo Langfelder, and Antonio Francesco Longoni, FATIGUE IN NANOMETRIC SINGLE-CRYSTAL SILICON LAYERS AND BEAMS, IEEE Journal of Microelectromechanical systems, in press, doi: 10.1109/JMEMS.2014.2352792, URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6898815&isnumber=4357932.

Publication #5

G. Langfelder, S. Dellea, , N. Aresi, A. Longoni, LINEARITY OF PIEZORESISTIVE NANO-GAUGES FOR MEMS SENSORS. In Procedia Engineering, proc. of Eurosensors 2014, Brescia, Italy, September 7-10 2014.

 

Publication #6

Stefano Dellea, Federico Giacci, Antonio Longoni, Patrice Rey, Audrey Berthelot, Giacomo Langfelder, LARGE FULL SCALE, LINEARITY AND CROSS-AXIS REJECTION IN LOW-POWER 3-AXIS GYROSCOPES BASED ON NANOSCALE PIEZORESISTORS, Accepted as oral presentation at MEMS2015, January 18-22 2015, Estoril, Portugal, www.mems2015.org.

Invited talk #1: the following invited talk was given at a scientifically relevant event, promoted by Invensense, a very well-known company in the field of inertial sensors. The one-day event featured distinguished speakers from renowned universities and was a very good dissemination and advertising chance for the NIRVANA project.

Giacomo Langfelder, MINIATURIZED SENSORS FOR ULTRA-LOW-POWER INERTIAL MEASUREMENT UNITS, Milano, Italy, October 11th 2014, http://www.cvent.com/events/advances-in-mems/agenda-72f5ac0a65d643d89a01c4cc80f9f72b.aspx

 

Invited talk #2: within the SINANO Doctoral School, the following invited talk was given, which discussed, among other technologies, the NIRVANA activities in the field of magnetic sensors.

Giacomo Langfelder, TOWARDS ALL-MEMS 9-AXIS INERTIAL MEASUREMENT UNITS: APPROACHES AND CHALLENGES IN THE DESIGN OF MAGNETOMETERS, Bertinoro (FC), Italy, August 29th 2014, http://sinano2014.arces.unibo.it/node/23

3

Erlangen – November 26-27th 2014

Published papers / conference presentations

• 2 published papers• 3 published conference proceedings• 1 accepted conference presentation

4

Erlangen – November 26-27th 2014

Ph. D. summer school

• The following invited talk was given, which discussed, among other technologies and options, the NIRVANA activities in the field of magnetic sensors.

5

Erlangen – November 26-27th 2014

Invensense 1-day seminar

• The following invited talk was given at a scientifically relevant event, promoted by Invensense, a very well-known company in the field of inertial sensors. The one-day event featured distinguished speakers from renowned universities and was a very good dissemination and advertising chance for the NIRVANA project.

6

Erlangen – November 26-27th 2014

References for WP3, WP7 and WP8 presentations

[1] V. Kempe, "Inertial MEMS principle and practice – Chapter 8 – Gyroscopes," Ed. Cambridge university Press, 2011.

[2] C. Acar, A. Shkel, “MEMS Vibratory Gyroscopes”, MEMS Reference Shelf, Springer, 2009.

[3] Neul, R.; Gomez, U.-M.; Kehr, K.; Bauer, W.; Classen, J.; Doring, C.; Esch, E.; Gotz, S.; Hauer, J.; Kuhlmann, B.; Lang, C.; Veith, M.; Willig, R.; , "Micromachined Angular Rate Sensors for Automotive Applications," Sensors Journal, IEEE , vol.7, no.2, pp.302-309, Feb. 2007.

[4] Ezekwe, C.D.; Boser, B.E.; , "A Mode-Matching ΔΣ Closed-Loop Vibratory-Gyroscope Readout Interface with a 0.004°/s/√Hz Noise Floor over a 50Hz Band," Solid-State Circuits Conference, 2008. ISSCC 2008. Digest of Technical Papers. IEEE International, pp.580-637, 3-7 Feb. 2008.

[5] Sharma, A.; Zaman, M.F.; Ayazi, F.; , "A Sub-0.2 hr Bias Drift Micromechanical Silicon Gyroscope With Automatic CMOS Mode-Matching," Solid-State Circuits, IEEE Journal of , vol.44, no.5, pp.1593-1608, May 2009.

[6] Prandi, L.; Caminada, C.; Coronato, L.; Cazzaniga, G.; Biganzoli, F.; Antonello, R.; Oboe, R.; , "A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout," Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2011 IEEE International, pp.104-106, 20-24 Feb. 2011.

[7] Acar, C.; Schofield, A.R.; Trusov, A.A.; Costlow, L.E.; Shkel, A.M.; , "Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications," Sensors Journal, IEEE , vol.9, no.12, pp.1895-1906, Dec. 2009.

[8] G. Langfelder, G. Laghi, P. Minotti, A. Tocchio, and A. Longoni, “Off-resonance, low-pressure operation of Lorentz force MEMS magnetometers,” Industrial Electronics, IEEE Transactions on, 2014, in press.

[9] Bongsang Kim; Hopcroft, M.A.; Candler, R.N.; Jha, C.M.; Agarwal, Manu; Melamud, R.; Chandorkar, Saurabh A.; Yama, G.; Kenny, T.W., "Temperature Dependence of Quality Factor in MEMS Resonators," Microelectromechanical Systems, Journal of , vol.17, no.3, pp.755,766, June 2008.

[10] Robert, P.; Nguyen, V.; Hentz, S.; Duraffourg, L.; Jourdan, G.; Arcamone, J.; Harrisson, S.; , "M&NEMS: A new approach for ultra-low cost 3D inertial sensor," Sensors, 2009 IEEE, pp.963-966, 25-28 Oct. 2009

[11] Walther, A.; Savoye, M.; Jourdan, G.; Renaux, P.; Souchon, F.; Robert, P.; Le Blanc, C.; Delorme, N.; Gigan, O.; Lejuste, C.; , "3-Axis gyroscope with Si nanogage piezo-resistive detection," Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on , vol., no., pp.480-483, Jan. 29 2012-Feb. 2 2012.

[12] G. Langfelder, S. Dellea, A. Berthelot, P. Rey, A. Tocchio, A. F. Longoni, “Analysis of Mode-Split Operation in MEMS Based on Piezoresistive Nanogauges”, IEEE Journal of Microelectromechanical systems, 2014, in press.

[13] Buffa, C.; Tocchio, A.; Langfelder, G.; , "A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems," Instrumentation and Measurement, IEEE Transactions on , vol.61, no.7, pp.2012-2021, July 2012.

[14] ITMEMS s.r.l., Milano, Italy. (2014, May). MEMS Characterization Platform, MCP-A-04, Product Data-Sheet [Online]. Available: http://www.itmems.it.

[15] Invensense ITG-3701 Product Specification Revision 1.0, product datasheet available online at http://www.invensense.com/mems/gyro/documents/PS-ITG-3701.pdf.

[16] L3G3200D MEMS motion sensor: 3-axis digital output gyroscope, product datasheet available online at http://www.st.com/st-web-ui/static/active/en/resource/technical/document/datasheet/DM00043564.pdf.

[17] Maxim MAX21001 Ultra-Accurate, Automotive, 3-Axis Digital Output Gyroscope, product datasheet available online at http://datasheets.maximintegrated.com/en/ds/MAX21001.pdf.

[18] Weinberg, M.S.; Kourepenis, A.; , "Error sources in in-plane silicon tuning-fork MEMS gyroscopes," Microelectromechanical Systems, Journal of , vol.15, no.3, pp. 479- 491, June 2006.

[19] http://www.qualtre.com/technology.html.

[20] S. Dellea, G. Langfelder, A. Longoni, Fatigue in Nanometric Single-Crystal Silicon Layers and Beams, IEEE Journal of Microelectromechanical systems, 2014, in press.

[21] Tatar, E., "Quadrature Error Compensation And Its Effects On The Performance Of Fully Decoupled Mems Gyroscopes," Thesis Submitted To The Graduate School Of Natural And Applied Sciences Of Middle East Technical University, September 2010.

[22] Sang Won Yoon; Sang Woo Lee; Perkins, N.C.; Najafi, K.; , "Vibration Sensitivity of MEMS Tuning Fork Gyroscopes," Sensors, 2007 IEEE, pp.115-119, 28-31 Oct. 2007.

[23] G. K. Fedder, "MEMS gyroscope theory and design," Tutorial at the 2012 International Frequency Control Symposium (IFCS), Baltimore (MD), May 21-24, 2012.

[24] M. Saukoski, L. Aaltonen, K. A. I. Halonen, "Zero-Rate Output and Quadrature Compensation in Vibratory MEMS Gyroscopes," IEEE Sensors Journal, Vol. 7, N. 12, December 2007.

[25] A. Shkel, F. Zeng, “An electronic prosthesis mimicking the dynamic vestibular function”, Audiol Neurotol 2006; 11: 113-122.

[26] T. G. Constandinou, J. Georgiou, C. Toumazou, “A Neural Implant ASIC for the Restoration of Balance in Individuals with Vestibular Dysfunction”, IEEE International Symposium on Circuits and Systems, ISCAS 2009, pp.641,644, 24-27 May 2009.

7