6
1 s Embedded DRAM mbedded DRAM Innovations that fit by Siemens Semiconductors 2nd Edition 1997 2 Published by Semiconductor Group Siemens Aktiengesellschaft Ordering No. B165-H7072-G1-X-7600 Printed in Germany WS 07972. 21-873 Global PartnerChip for Systems on Silicon Siemens AG Österreich Erdberger Lände 26 1030 Wien S (++43)-1-1707-35611 Fax (++43)-1-1707-55973 Email: elisabeth.schwarz@ siemens.at Siemens Ltd., Head Office 544 Church Street Richmond (Melbourne), Vic. 3121 S (03) 4207111 y 30425 Fax (03) 4 2073 09 Email: [email protected] Siemens Electronic Components Benelux Charleroisesteenweg116/ Chaussée de Charleroi 116 B-1060 Brussel/Bruxelles S (+32) 2-536 23 48 Fax (+32) 2-536 28 57 Email: [email protected]. siemens.scn.400net.nl ICOTRON S.A. Indústria de Componentes Eletrônicos Avenida Mutinga, 3650-6 o andar 05150 São Paulo-SP S (011) 8 33-2211 y 11-81 001 Fax (011) 8 31-40 06 Siemens Electric Ltd. Electronic Components Division 1180 Courtney Park Drive Mississauga, Ontario L5T 1P2 S (416) 9 05-819-80 00 Fax (416) 9 05-819-57 44 Siemens Schweiz AG Bauelemente Freilagerstraße 28 8047 Zürich S (01) 4 95-3111 Fax (01) 495-5065 Email:alois.bachmann@zrh1. siemens-albis.scn.arcom.ch Siemens AG Salzufer 6–8 10587 Berlin S (030) 38 63-26 26 Fax (030) 38 63-24 90 Siemens AG Lahnweg 10 40219 Düsseldorf S (0211) 399-2930 Fax (0211) 3 99-14 81 Siemens AG Lindenplatz 2 20099 Hamburg S (040) 28 89-38 19 Fax (040) 28 89-30 92 Siemens AG Werner-von-Siemens-Platz 1 30880 Laatzen (Hannover) S (0511) 8 77-22 22 Fax (0511) 877-2078 Siemens AG Halbleiter Distribution Richard-Strauss-Straße 76 81679 München S (089) 9221-3133 Fax (089) 9221-2071 Siemens AG Von-der-Tann-Straße 30 90439 Nürnberg S (0911) 6 54-76 02 Fax (0911) 654-7624 Siemens AG Weissacher Straße 11 70499 Stuttgart S (0711) 1 37 28 64 Fax (0711) 1 37 24 48 Siemens A/S Borupvang 3 2750 Ballerup S 44774477 y 1258 222 Fax 44774017 Email: bjarne.jensen@div2. cph1.siemens.scn.400net.dk Siemens S.A. Dpto. Componentes Ronda de Europa, 5 28760 Tres Cantos-Madrid S (+34) 1-514 8000 Fax (+34) 1-514 7015 Email: [email protected] Siemens S.A. 39/47, Bd. Ornano 93527 Saint-Denis CEDEX 2 S (1) 49 22 3100 y 234 077 Fax (1) 49 22 3970 Siemens plc Siemens House Oldbury Bracknell Berkshire RG12 8FZ S (0344) 39 60 00 Fax (0344) 39 66 32 Email: [email protected] Siemens AE Paradissou & Artemidos P.O.B. 61011 15110 Amaroussio/Athen S (01) 6 86 4111 y 216 292 Fax (01) 6 86 42 99 Siemens Components Ltd 23/F., Tai Yau Building 181 Johnston Road, Wanchai Hong Kong S (852) 28 32 05 00 Fax (852) 28 27 84 21 Siemens S.p.A. Semiconductor Sales Via dei Valtorta, 48 20127 Milano S (02) 6676-1 Fax (02) 66 76-43 95 Siemens Ltd. Head Office 134-A, Dr.Annie Besant Road, Worli P.O.B. 6597 Bombay 400018 S (022) 4 938786 y 1175142 Fax (022) 4 94 02 40 Siemens Ltd. Electronic Components Division 8 Raglan Road Dublin 4 S (01) 6 68 47 27 y 93744 Fax (01) 68 46 33 Email: [email protected] A AUS B BR CDN CH D DK E F GB GR HK I Siemens Components K.K. Shinjuku Koyama Bldg. 2F 30-3, 4-Chome Yoyogi, Shibuya-ku Tokyo 151 S (81) 3-53 88 85 25 Fax (81) 3-33 76 97 92 Siemens A/S Østre Aker vei 90 Postboks10, Veitvet 0518 Oslo 5 S (02) 63 30 00 y 78 477 Fax (02) 63 38 05 Siemens Electronic Components Benelux Postbus 16068 NL-2500 BB Den Haag S (+31) 70-333 24 29 Fax (+31) 70-333 28 15 Siemens S.A. Estrada Nacional117, Km 2,6 Alfragide 2700 Amadora S (01) 4170011 y 62 955 Fax (01) 4172870 Siemens Sp. z.o.o. ul. Stawki 2 POB 276 00-950 Warszawa S 6 35 16 19 y 825 554 Fax 6 35 52 38 Tai Engineering Co., Ltd. 6th Fl., Central Building 108, Chung Shan North Road, Sec. 2 P.O. Box 68-1882 Taipei 10449 S (02) 5 23 4700 y 27860 taiengco Fax (02) 5 367070 Siemens Ltd. Asia Tower Bldg, 10th floor 726 Yeoksam-dong, Kangnam-ku CPO Box 3001, Seoul 135-080 Korea S (822) 527 77 40 Fax (822) 5 27 77 79 Siemens AG 1. Donskoj pr., 2 Moskva 117419 S (095) 2 37-6476, -6911 y 414 385 Fax (095) 2 37-6614 Siemens Components Österögatan 1 Box 46 S-164 93 Kista S (08) 7 03 35 00 y 11672 Fax (08) 703 35 01 Siemens Oy P.O.B. 60 02601 Espoo S (0) 51051, y 124 465 Fax (0) 5105 23 98 Siemens Components Pte. Ltd. 166 Kallang Way Singapore 1334 S (65) 840 06 00 Fax (65) 742 10 80 SIMKO Ticaret ve Sanayi A.S. Meclisi Mebusan Cad. No.125 P.K.1001, 80007 Karaköy 80040 Findikli S (01) 2 5109 00 y 24 233 sies tr Fax (01) 2 52 4134 Siemens Components, Inc. Integrated Circuit Division 10950 North Tantau Avenue Cupertino, CA 95014 S (408) 777-45 00 Fax (408) 777-49 77 Siemens Ltd. Siemens House, P.O.B. 4583 Johannesburg 2000 S (011) 652 20 00 y 450 091 Fax (011) 6522711 J NL P N PL RC SF S SGP TR ZA USA RUS IND IRL ROK 06/97 Internet-address: http://www.siemens.de/Semiconductor

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11

s

EmbeddedDRAM

mb

ed

de

dD

RAM

Innovations that fitby Siemens Semiconductors

2nd Edition 1997

2

Published by Semiconductor Group

Siemens Aktiengesellschaft Ordering No. B165-H7072-G1-X-7600Printed in GermanyWS 07972. 21-873

Global PartnerChip for Systems on Silicon

Siemens AG ÖsterreichErdberger Lände 261030 WienS (++43)-1-1707-35611Fax (++43)-1-1707-55973Email: [email protected]

Siemens Ltd., Head Office544 Church StreetRichmond (Melbourne), Vic. 3121S (03) 4 20 7111 y 30 425Fax (03) 4 2073 09Email:[email protected]

Siemens Electronic ComponentsBeneluxCharleroisesteenweg 116/Chaussée de Charleroi 116B-1060 Brussel/BruxellesS (+32) 2-536 23 48Fax (+32) 2-536 28 57Email: [email protected]

ICOTRON S.A.Indústria de ComponentesEletrônicosAvenida Mutinga, 3650-6o andar05150 São Paulo-SPS (011) 8 33-2211y 11-81001Fax (011) 8 31-40 06

Siemens Electric Ltd. Electronic Components Division1180 Courtney Park DriveMississauga, Ontario L5T 1P2S (416) 9 05-8 19-80 00Fax (416) 9 05-819-57 44

Siemens Schweiz AG BauelementeFreilagerstraße 28 8047 Zürich S (01) 4 95-3111Fax (01) 495-5065Email:[email protected]

Siemens AG Salzufer 6–8 10587 Berlin S (030) 38 63-26 26Fax (030) 38 63-24 90

Siemens AG Lahnweg 10 40219 Düsseldorf S (0211) 3 99-29 30 Fax (0211) 3 99-14 81

Siemens AG Lindenplatz 2 20099 Hamburg S (040) 28 89-38 19 Fax (040) 28 89-30 92

Siemens AG Werner-von-Siemens-Platz 1 30880 Laatzen (Hannover)S (0511) 8 77-22 22 Fax (0511) 877-2078

Siemens AG Halbleiter Distribution Richard-Strauss-Straße 76 81679 München S (089) 92 21-3133 Fax (089) 92 21-2071

Siemens AG Von-der-Tann-Straße 30 90439 Nürnberg S (0911) 6 54-76 02 Fax (0911) 6 54-76 24

Siemens AG Weissacher Straße 1170499 Stuttgart S (0711) 1 37 28 64Fax (0711) 137 24 48

Siemens A/S Borupvang 32750 Ballerup S 44 77 4477y 1258 222Fax 44774017Email: [email protected]

Siemens S.A.Dpto. Componentes Ronda de Europa, 5 28760 Tres Cantos-Madrid S (+34) 1-514 8000 Fax (+34) 1-514 7015Email: [email protected]

Siemens S.A. 39/47, Bd. Ornano93527 Saint-Denis CEDEX 2 S (1) 49 22 3100y 234 077 Fax (1) 49 22 3970

Siemens plc Siemens House Oldbury Bracknell Berkshire RG12 8FZ S (0344) 39 60 00 Fax (0344) 39 66 32 Email: [email protected]

Siemens AE Paradissou & Artemidos P.O.B. 6101115110 Amaroussio/Athen S (01) 6 86 4111y 216 292 Fax (01) 6 86 42 99

Siemens Components Ltd23/F., Tai Yau Building181 Johnston Road, WanchaiHong Kong S (852) 28 32 05 00Fax (852) 28 27 84 21

Siemens S.p.A. Semiconductor Sales Via dei Valtorta, 48 20127 Milano S (02) 66 76-1 Fax (02) 6676-43 95

Siemens Ltd. Head Office 134-A, Dr. Annie Besant Road,Worli P.O.B. 6597 Bombay 400018 S (022) 4 93 87 86y 1175142 Fax (022) 4 94 02 40

Siemens Ltd. Electronic Components Division 8 Raglan Road Dublin 4 S (01) 6 68 47 27y 93 744 Fax (01) 68 46 33 Email: [email protected]

A

AUS

B

BR

CDN

CH

D

DK

E

F

GB

GR

HK

I

Siemens Components K.K.Shinjuku Koyama Bldg. 2F 30-3, 4-ChomeYoyogi, Shibuya-ku Tokyo 151 S (81) 3-53 88 85 25Fax (81) 3-33 76 97 92

Siemens A/S Østre Aker vei 90 Postboks 10, Veitvet 0518 Oslo 5 S (02) 63 30 00y 78 477 Fax (02) 63 38 05

Siemens Electronic ComponentsBeneluxPostbus 16068 NL-2500 BB Den Haag S (+31) 70-333 24 29Fax (+31) 70-333 28 15

Siemens S.A. Estrada Nacional 117, Km 2,6 Alfragide 2700 Amadora S (01) 417 0011y 62 955 Fax (01) 4172870

Siemens Sp. z.o.o.ul. Stawki 2POB 27600-950 WarszawaS 6 351619y 825 554Fax 6 35 52 38

Tai Engineering Co., Ltd. 6th Fl., Central Building 108, Chung Shan North Road,Sec. 2 P.O. Box 68-1882 Taipei 10449 S (02) 5 23 47 00 y 27860 taiengco Fax (02) 5 367070

Siemens Ltd. Asia Tower Bldg, 10th floor726 Yeoksam-dong, Kangnam-kuCPO Box 3001, Seoul 135-080KoreaS (822) 527 77 40Fax (822) 527 7779

Siemens AG1. Donskoj pr., 2Moskva 117419S (095) 2 37-64 76, -6911y 414 385 Fax (095) 2 37-6614

Siemens Components Österögatan 1 Box 46 S-164 93 Kista S (08) 7 03 35 00y 11672 Fax (08) 703 35 01

Siemens Oy P.O.B. 6002601 EspooS (0) 51051, y 124 465 Fax (0) 5105 23 98

Siemens Components Pte. Ltd. 166 Kallang Way Singapore 1334 S (65) 840 06 00Fax (65) 742 10 80

SIMKO Ticaret ve Sanayi A.S. Meclisi Mebusan Cad. No. 125 P.K.1001, 80007 Karaköy 80040 FindikliS (01) 2 5109 00y 24 233 sies tr Fax (01) 2 52 4134

Siemens Components, Inc. Integrated Circuit Division 10950 North Tantau Avenue Cupertino, CA 95014 S (408) 7 77-45 00 Fax (408) 777-49 77

Siemens Ltd. Siemens House, P.O.B. 4583 Johannesburg 2000 S (011) 652 20 00y 450 091 Fax (011) 652 27 11

J

NL

P

N

PL

RC

SF

S

SGP

TR

ZA

USA

RUS

IND

IRLROK

06/97

Internet-address:

http://www.siemens.de/Semiconductor

A Success Story

Over the past few years, Siemenshas established technical leadershipin the production of DRAMs.Siemens began its MEGA programin the 80s in order to accelerate itsproduction of 1 M and 4 M DRAMs.

Siemens is now the sole DRAMmanufacturer in Europe, providing itscustomers with both 16 M and 64 MDRAMs. 256 M and 1 G memorydevices will be available in 1998 and2000, respectively.

Based on these programs, majorinvestments in new factories inDresden, Germany and NorthTyneside, UK allowed us to increaseour production. To speed up theglobalization of our chip productionwe entered into joint ventures withMosel Vitelic (Taiwan) and Motorola(USA).

In addition to the standard DRAMproduct spectrum Siemens nowoffers embedded DRAM solutions tothe world market.

New requirements for higher datatransmission speed, low powerdissipation and higher integrationlead to technologies based onDRAM which allow the integrationof both DRAM and logic.

These newest technologies offer thecustomer significant advantagesconcerning• system cost• performance with focus on

bandwidth and reduced powerconsumption

• design flexibility

Siemens employs and continuouslyimproves the technologies requiredfor embedded DRAM solutions.

Embedded DRAM:

DRAM plus additional Metal

Layers

Embedded DRAM technology usesthe 64 MBit and the 256 MBit trenchcapacitor DRAM process, with one ortwo metal layers added. This bringsyou leading-edge DRAM qualitytogether with high-performancelogic.

This way, our embedded DRAMtechnology roadmap directly followsour advanced DRAM technologies.The know-how from standard DRAM production goes straight intoembedded DRAM product quality.

The advantages of a trench cell forembedded DRAM are compelling:The capacitor lies below the surfaceof the silicon, giving a much moreplanar die than with stackedcapacitors. Adding one or two metallayers allows us to efficientlyintegrate high-performance logicwith up to five interconnect layers,together with uncompromizeddynamic memory.

As the capacitor is buried in the die,while the metal layers lie on top, it is much less sensitive to spurious signals than a stacked capacitorwould be. As a result, more fastswitching logic functions may beintegrated with less effect onmemory operation.

3

DRAM and Logic integratedD

RAM

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Embedded DRAM Technology Roadmap

The latest Technology

Dresden Fab building

North Tyneside Fab building

Trench based DRAM by Siemens

Conventional stack based DRAM

19970.35 µm

0.24 µm

0.20 µm

0.18 µm

1998

1999

2000

2001

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65

WE

ARE

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ed

Siemens Semiconductor Group hasbeen working with embedded DRAMproducts since 1989 and is able toprovide the latest technologies (whichdirectly follow the DRAM technologies)and wafer capacity to produce chipswith embedded DRAM.

The first products were designed forconsumer TV applications. One exampleis the Quarter PIP (Picture in Picture)shown in the photo. It is used tocreate insert pictures on TV screens.The embedded DRAM of this deviceis 330 Kbit in size.

Another example is the VoiceEngine.This product, which is dedicated tovoice processing applications(recognition, storage, synthesis)contains 1Mbit embedded DRAM, a 16 bit fixpoint DSP and 15 k gatescustomized logic as well as ROMand SRAM. The chip photo is shownoverleaf. The VoiceEngine is pro-cessed in the Dresden fab on the0.35 micron embedded DRAMtechnology. Production ramp up willbegin in the 1st quarter 1998.

Upcoming products using this tech-nology are - among others - devicesfor HDD and graphics applicationswhich contain controller cores,ROM, customized logic and from1Mbit to 24 Mbit of embedded DRAM.

We are preparedFor your embedded DRAM solutions

QPIP VoiceEngine

DRAM cores customized logic DRAM cores

SRAM DSP ROM

5 6

87

Typical applications include signalprocessing or graphics devices whichbenefit from the large bandwidth ofthe embedded DRAM. Unified memory architectures offerthe advantage that all data is avail-able for input, output and the processor.They benefit from the wide internalinterface because the total memorybandwidth is dynamically sharedamong the different tasks using ahigh-speed arbiter.

Devices with separate customizedmemory blocks for each functionallow independent memory accesswhich ensures simultaneous processoroperation and access to the input andoutput buffers. The flexible embeddedDRAM organization implements therequired memory block size for eachunit.

Figure it outFI

GU

REi

t

ou

t

Cutting customized eDRAMs

Memory structure of a sample applicationwith unified memory block

line bufferfor X-Y-scaling

controldata

interface(PCI bus)

datainput

datainput

ECCinput buffer

outputbuffer

dataoutput

dataoutput

unified memory

512

local data for processor

Z-buffer

RAMDAC

frame buffer arbiter

frame buffer (front&back buffer)

analog output

video data input

interface(PCI bus)

control data

texture memory

bank 0

bank 7

off-screen buffer(fonts, display lists,etc.)

Memory structure of a DVD device with separated memory blocks

Memory structure of a 3D graphics application with separated memory blocks

VideoEngine

2D GraphicsAccelerator

3D GraphicsAccelerator

Processor

controldata

interface

hig

h-s

pee

d a

rbit

er

LogicLogicCD

– high bandwidth with wide on-chip buses

– parallel access to separated memory

blocks

– reduced power consumption

– customized DRAM size

– reduced chip count and board space

– simplified board layout and test

– less EMI problems

Processor

Logic

Logic

DRAM

109

BU

ILD

it

u

p

Three programmable pipeline

stages

The synchronous Modular embeddedDRAM interface provides fast pagemode access.

A special feature is the programmablepipeline depth of one, two or threestages. Different pipeline optionsoptimize the timing of the buildingblock. The timing with two pipelinestages and a clock frequency of100 MHz is optimized for randomaccess with 30 ns random accesstime and 20 ns precharge time.Operation with three pipeline stagesenables higher clock frequencies ofmore than 133 MHz and acceleratesthe page access, resulting in lessthan 7 ns column access time.

One building block with 7 ns cycle time achieves data rates of up to8.5 Gbit/s in page mode. Multipleblocks configurations enable largedata buses with up to 512 bit buswidth. This results in a maximumbus throughput rate of 8.5 Gbyte/s.

100 MHz clock

Command

Row address

Column address

Data out

READ0 READ1 READ2ACTIV PRECH ACTIV READ3

ADR X ADR Y

ADR 0 ADR 1 ADR 2 ADR 3

DAT 1 DAT 2

10 ns

DAT 0

READ1 READ2 ACTIV

ADR X

READ0

ADR 1 ADR 2 ADR 0

PRECH ACTIV

ADR X

ADR 3

READ3

7 ns

DAT 1 DAT 0 DAT 2

133 MHz clock

Command

Row address

Column address

Data out

Build it up

Modular embedded DRAM or

standard DRAM Cores

Siemens embedded DRAM is basedon two complementary approaches:

• Modular embedded DRAM providescustomized memory blocks from256 Kbit to 48 Mbit

• Standard DRAM cores such as EDO,SDRAM or SGRAM may be inte-grated straight away.

Standard DRAM cores such as the16 Mbit EDO-DRAM provide optimi-zed die size while Modular embeddedDRAM gives best possible designflexibility. A customized interface isavailable for both options. Modularembedded DRAM includes thefollowing features:

• 256 Kbit building block• Customized memory size up to

48 Mbit in 0.24 µm technology• Flexible memory organization accor-

ding to the application• 8.5 Gbyte/s maximum bandwith

with an up to 512 bits wide bus• Small chip area: 4.1 mm2 for

2Mbit with a 128 bit interface in the0.24 µm technology

• Low power: less than 1 mW/MHzper active building block

• High-speed operation: 7 ns pagemode cycle time

• Optional test controller for built-inself test.

On high-integration blocks

Modular embedded DRAM: 256 Kbit building block with interface

Different configurations of 2 Mbit memory using Modular embedded DRAM

Key features of embedded DRAM options

Modular embedded DRAM timing with two pipeline stages

Increased throughput using three pipeline stages

Modular embedded DRAM standard DRAM core

technology 0.35 µm 0.24 µm 0.24 µm

building block size 256 kbit 256 kbit/1 Mbit 8 Mbit …64 Mbit

max. memory block size 16 Mbit 48 Mbit

die area for 2 Mbit (mm2) 8.8 4.1 2.8

power consumption per building block (mW/MHz) 1.5 1 1

max. clock frequency (MHz) 83 >133 166

page mode cycle time (ns) 12 <7 6

max bandwith (Gbyte/s with 512 bit interface) 5.3 >8.5 10.6

1211

Design FlowD

ESIG

NF

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w

For fast time to market

Design and manufacturing

Siemens provides production capacityand technology together with a designand foundry service which can betailored precisely to customer's needs:

Design service:Siemens does the design of thecustomized embedded DRAM. Any kind of customer specific logiccan be added by the customer.Depending on the customer's needs,standard cells through DSP coresand µC cores can be provided.Different entry points to the designflow are supported as well as elec-trical and timing verification.

Foundry service:Siemens manufactures the embeddedDRAM product. Different steps offoundry service are offered to chosefrom. Packaging and testing can be provided as required.

Further information is available onrequest in our Acquisition Package.