eetop.cn_Sentaurus Process ÖÐÎĽéÉܼ°Ê¹ÓÃ

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    17-1 !"#$%&'()* Sentaurus Process 

    !"#$%&'()*+,-./0123#45"#$%,"#6-.7

    85&'9:;()23?@ABC5D"#$%&'()*+EFGHIJ

    KLMN5JK$OPQRST/0,CUVWXYZGHJK[6,&'*+\1]A^_`5JKLab,cdef/ghijkl,m[6()Lnopb`q

    rA 

    st5uXvwxabystz{|}ab~5•!()"#'#,$%&'

    l()@*|+,-).%/O0l;19O2345678wx0l[2]9:;<

    =A>uX8wxy?{@vAB"#$%C,"#Dab~ab5EFGHI;J

    K()&:L,MNO)PQRST,()L:&'4cd5ghiU|GVW8w

    x0lAXYZ"#()cd([ Sentaurus Process\\]^IJKw6,:&'4cd*+_`5#aBCbacd,"#$%()Lno([A 

    17-1-1 Sentaurus Process%&+'(%,-.[3] 

    Sentaurus Process V Synopsys Inc.bXef,XYZ TCAD ()Lno([5

    ;g&haijZ"#$%&:Lnopb5VBCbacd,JKL"#()no

    ([A 

    Sentaurus Process Vklam"#$%&:LnopnCbao')bapq,

    !ryYr)sr)tr~()Lno([ASentaurus Process 'uBZJKL"#

    $%()&:5o'qr8wx0l,noeBv5wXPQxvAByULSI~"#

    $%,()Lyvcd5:z{G|}"#$%&'()Lcd)()L~D•!

    "#$L%N,&/'IA 

    Sentaurus Process  ()I Avanti  , TSUPREM  *+()Lno([)Taurus

    Process *+()Lno([; ISE , Dios *+()Lno([5,Yr)-r1t

    rno"#X.YN/501234()Lno([567868B9,W:;5<

    =I!>[email protected])cCIBDEFFGHIJayPDB~5awKULM

    ?BDEF;ABBD,NOPQR2. AB)cCIYrBvST5f([yInspect~1sr)trBvST5f([yTecplot SV~AInspectULIYrBv

    ST,UVWXA> Tecplot SVgPQInoY3)Y';tr75fST,:ZD

    5fA[\5Sentaurus Process ]^TI!_Z8wxBDA`aBZ,8wxB

    Dbcj@m[6deBD;m[6fgBDRWX Crystal-TRIM   ,hz5i

    yMonte Carlo~jOkTBD)jOkTlEBD)kT]mBD1kTnoB

    DRm[68wxpqrsBD77AtT`a8wxBD5AuIno([uXv

    w)XSx;8wx0l,noY(5ylIz`{|n()*+/0,}~A 

    •5!"#$%&w Sentaurus Process   "#$%&'()no*4)

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    Sentaurus Process ,'(UVN91)*)+,()&:no5-b,./Ag5•

    ; Sentaurus Process()no*4ScC,-b0D7!N'5•123,N94

    5Gu6789BZbacd,ijZ"#()no*4 Sentaurus ProcessAFX:

    2*ySynopsys Inc.~;0C?v@GA/B Sentaurus Process  ,*+C

    DA 

    1  Sentaurus Process/01234 

    Sentaurus Process   a?ED,vD(:DdF(no*45j Unix   GH;

    Linux GHLwKIwAuXC?CGwK5Sentaurus Process ,wKJ:;

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    y1~*4%&u567.lC,gx';gx()v)8*

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    fbreak   &nodTUVB9A 

    fexec  wXe8*467.lA 

    init  wX5T0[yC1r,abSxFG1hiA 

    interface  scHvw,t&:CA 

    mgoals  &wMGOALStucCmwEFA 

    tclsel  wXIvHVWC,wx1/A 

    3.2 Sentaurus Process#I>JKEFCD 

    Sentaurus Process,abSxf].lwXf] Sentaurus ProcessSBv,ab

    Sx5e[kg,bc67.l$@ 

    region wX{tyzmwC,yzvwA{A 

    line wXt-ab,yzA{mwA grid e8mwcC,|=67A 

    substrate_profile t-|aab}~•@'|+,-bA 

    polygon cC|aab,!tzSxA 

    point cC|aabSxC,Yk!A 

    doping t-|",34•@'|+A 

    profile 62FG-bZ>*FGAA 

    refinebox cC#$mwEFZ&w MGOALSHe8mw%DA 

    bound U2vwt&Zsc&O+BA 

    contact cCabno}c,$'SxhiA 

    transform cC1(Sx.l,67A 

    3.3  Sentaurus Process#%&LMEFCD 

    ()

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    7.lj@ 

    Arrhenius  Arrheniusw`|atA,{F|+BDAArrhenius67

    gt-I ArrheniusS|a,BG9A 

    beam  2fwXjOIde,BDEFA 

    equation  !#YkBD,341YkN:,~]A 

    gas_flow  a!#Ykpq

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    term  t-N:C&w,XBG9A 

    update_substrate  cC}~C,@*L4)K(FG;!wt/FGA 

    reaction  {t^l4vw,kghiA 

    3.5 RS Sentaurus Process#TU;

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    Sentaurus Process&w,bc-b0D$@ 

    y1~Sentaurus Process  UVW567-by*.cmd~AUVW567-bbV 

    17-1-1  \Cis$|)* Sentaurus Process  UVW567-bY\CS]^,UV

    W567-bAUVW567-bVPQ Sentaurus ProcesswKe Sentaurus Process

    no*4UVW68B9UV,_YPQAUVW567-b,-b0DV

    Sentaurus Process :•P`,:+{5T-bA••;it8\CDCS89,bc

    UVW67:a5UVW567-bbcIwKPQUVWN9Pd"#$%&:n

    o,SjrQ1CDA 

    Sentaurus Process UVW567-b(*.cmd~:s_-H+{ah&Z+{y

    $@Linux|=*4}~, gedity-H+{a~~A 

    y2~Sentaurus Processs2p-by*.log~ Sentaurus Processs   2p-bV Sentaurus Processs   68_:C>-%@,A

    Sentaurus Processs  2p-bCbc!Sj()c,abSxhiA 

    y4~TDR t&-b(*_bnd.tdr~ 

    TDR t&-b>VwK0 Sentaurus Process 567-bCSct,hww9-

    b5ew`riab,SxhiAst5TDR  t&-b:=amwcC([yMesh,

    Noffset3D1  Sentaurus Mesh~,5T-b5ZY;WTH Tecplot SVCd8?@A

    ]jYk DF-ISE   w9,t&-by*_mdr.bnd~5[-b>:=amwcC([

    yMesh1 Noffset2D/3D~,5T-bA 

    y5~mw1•@hi, TDR -by*_fps.tdr~ 

    mw1•@hi, TDR  -b:jkriab,SxhiX1TH Sentaurus Process  C&w5>:•WTH

    Tecplot SV C?@A[ TDR -b:•:•.H;WTH Tecplot SVC62A 

    y6~DF-ISE•@1mw,>t--b(*_msh.cmd)

    [-bwX•@hi1mwhi,>Xt-Ast50noSm•wKd81

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    rA}cf],V5Sentaurus Process 5f,Sxhi;FG-bZQY•abXW

    z4Bv([ySentaurus Device~L8Ww5>his_mwcC([d8VWA

    [-b:et&-bYn;=a Sentaurus ProcessmwcC([,5T-bA 

    y7~DF-ISE-by*.plx~ 

    DF-ISE-bw`1rYr@*S6|+]t-Rb,@*o)|+A{A`k-

    b:•;1T InspectCWXZwX|mA 

    17-1-2 Sentaurus Process/'(]^2_`%, 

    Sentaurus ProcesssJI ISE,UVz95e!UV([S)5p0I[([

    ,UV_Y5Z&R|=na$OLqASentaurus Process VBliYkULotr

    rIy:rWIvYr)sr]trno~,()LnorwpbASentaurus

    ProcessCsT,

    MGOALSH:e

    Sentaurus Structure EditoryabSx+{a~

    dw52tNOGPQtrabSx,x'AtS'a58wxu#()&:_:C

    ,fv/!8wx0l5$@wxyzjySTI~H%@,{@x|0l)wx

    yzjySTI~H%@,l(0l)+3t}~•v/,o!$0l)8wx!n

    u"Sxt}0l;\u^pq0l77A`J!0l#Q.:6,[j•u$4,

    z95g!r6,t4;t/,noeBvVV%|hc,)>V_Y:&,Az

    ?5trnouXBv)H3)|m1J'8wx0lS(`,())*;)X4G

    f/X,()Sx>VQ:!+,A 

    Sentaurus Process 0:PQ@vAB"#$%o9:OE()no,W:;5

    NuMa>c1gx,()&:50DDt&s-1,Dt&s-,z@mwVW

    ;5ABImwFG,PH1r;mwFG,>?Ww_Y5`uX15Bv[61

    Umno.6,V%|j,,ASentaurus ProcesstTIbacd,deBD5::

    •PQ!Rvw,•u.4,Iv4de5jOIFourierdeA[\5wKt-,/BEF)*61D.O)6n9/

    EF1mw%D.EF7o#4FG9:1r0hwFGHC•TDR w9,-b1

    rAFGH;M?L5*4f>-)G/G@#X,5T-bA 1  Sentaurus Process,no0{ 

    &w Sentaurus Process:PQ•tA"#$%N'()&:,no@ 

    y1~Sentaurus Process  wX•R0D,|}ybDm1)m2)v_O7zR

    ab~ab)o)"#yBiCMOS~$%;xvAByULSI-8wx)JKL~

    CMOS 7SjDWSxB9,ab]$%,()&:A>:•>t-RbW:Sx,

    j>ab5noR()&:A 

    y2~Sentaurus Process  no*434OE,DW"#$%N'()&:CSj

    OE(\,()*B5$@tA,Dy5*fg;m*+,D~)D,\6@4)

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    DDX@4)m*;5*-e)Iv4de)tAm*+pq)tAm*+p7-)

    5*jOkT)DP)kfg)-d.4Y,89|m77A 

    y3~Sentaurus Process  :wX?d)J'X,()Sx)&:,:&'4cd

    N:A$@cdePQX,#{,DzjyLOCOS$LOCal Oxidation Separate~

    Sx);CDBDE

    F#1r0 PDB  ,EFL4FGHCAwK&wFGHIJayPDB~:•UV9

    GcC1+{BDEF5-?G0FGHIJayPDB~CFtnoS&w,BD5

    ]:•,LHQ&w,BD;EF1rn`•MH&wAwK]:•&w567.

    ly>Kya Alagator   NH.O~t-X,BD5•9PzQ,no}~Ax

    17.1.1ba Sentaurus ProcessFGHIJayPDB~,(=&'A 

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    x 17.1.1@Sentaurus ProcessUL,FGHIJa 

    $x 17.1.1  S_5R;STSIt,i%UEF2f,bV,DDeD&'V

    .FB'?)BDC,?)O%&yCD~BG95[BG9,z9a@

    [SurfDiffLimit Oxide_Silicon Si Vac 0.0]A!"K[9a TclBG95bB_I.F0

    DC,pqOCD35V&w^FBG9z9`BG,AwK>:•XG}c+{1

    M?[BG95*}X,BGz95•9PBv[6,c~1:&'4yvcd,}

    cA 

    }cuW,V@0FGHIJaCucdC&w,EF1BDd8M?ZQV_

    Y,N95YwKVV0H>cdCM?k`,EF;BD5>ZQVWXY4GM

    ?`aEF1BDAst5gQhM?BDHC,CDcC5>V}0 Sentaurus

    Process5T567-bCs_567EF,M?`PQb:A 

    3 Sentaurus Processxz5fSTWX([ 

    y1~  Yr5fSTWX([ Inspect[4] 

    Sentaurus Process Csxz5fST+{a InspectAInspect Vw`WX)?@

    1|mYrxz5fSTyY3~,UV([AInspect[jpq)NO,xzwK&

    '5OXwKuY3d8X,)MZ4,cC1+{ASentaurus Process ULIs_

    567-be Inspect  xz5fSTUV([,8TN95wK:•05T567-

    b,rW:CV&w SetPlxList1WritePlx67,S}c,•@hi1rHYkp0

    va.plx, DF-ISEw9,-bCAL5wKb:s_ Inspect([&'5Ww[-

    b5f@*S6|+Y3Ax 17.1.2ba Inspect([,(=&'A 

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    x 17.1.2@5fSTWX([ Inspect+{&' 

    •;xS_5wK:•0[&'XG}cuY3,mwcC;5f,z9)5

    fA[;ku:C)&O!\xY3,TU7d8t-1+{5•AB5fST,

    :ZD:610TA`RST,WX1+{UVN9o Tsuprem-%,678UVN

    9c$O)Lq,!AInspect ]qr67NH.Ow95wK:•s_NH67`Z

    ]&'|=5]:•u}c,EFd8dF)U2y$@$D)I3$27~A 

    y2~  srSx;FG5fSTWX([ Tecplot SV[5] 

    Sentaurus Process ()no@#,SxhiST;sr]trFGhiSTVs

    _ Tecplot SV  ([`WX)?@,AwK:•,SxhiST;FGhiSTs_

    struct  67,klI^ytdr)dfise ] ise.mdraw~1rH TDR w9] DF-ISE w9

    ,-bC5?L0 Tecplot SV([}~s_Ww[-b+Hkl,SxhiST1

    FGhiST5Zu5f,ST62)|m1+{Ax 17.1.3 ba Tecplot SV 5f

    STWX([,(=&'A 

    x17.1.3@sr5fSTWX([Tecplot_SV&'_W 

    $x 17.1.3 S_5wK:•s_sr5fSTWX([ Tecplot_SV WX)62

    Sentaurus Process no@#,srSx5fST'x)Q.:CVQ.@*S6,

    |+8a)@*S67:3,'|+1noA{,mwcC_`77A 

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    Sentaurus Process !#jOkT•@,noyL5kT'#,kTAB'no1

    kTv/,!wCa7_`>:s_ Tecplot_SV  ([d8WX)62)|m1+

    {A 

    [\5wK]:•&w Tecplot SV([UL,yvbN_Y`[FGU2srA

    {M:C!,>cFGhiA$@M:C!,vwl(1D3)*63)@*,L

    41z9)@*,S6|+377A 

    17-1-3  Sentaurus ProcessYab/c"NO 

    Sentaurus Process o'c4|}ab)vAB"#$%;@vAB"#$%tA

    N'()&:,()Lno1()L:&'4cd5>:•awKUL[jn8z9

    wx,)JKw6,ab()L:&'4cd]^N:A 

    VP;5Sentaurus Process 0Fd,tA()BD,W:;5u`!BDd8IpUA$@0jOkT]mBD;hz5iyMC~kTBD)m*+•@BDC

    ,@*Fq1@*rs•;•@uC$$e,FG)#$"(Jl(1D,*B•;

    ,D_:Cu,D=rs8a,*B7!N'd8I!fA 

    •5H\,# Sentaurus Process()Lno1()L:&'4cd([C$|

    u>cBDSd8,!f18L=YgaA 

    1 Sentaurus Processd/efgbNO 

    0 Sentaurus ProcessC5!#jOkT•@(\,no:•&w]mkTBD]

    hz5iyMC~kTBD[6]`dFkTjO,|+_`;BvS'#,kTno:

    6AST]mkTBD5V&wFd,mh|+)ij|+•;oa_Z,Bij|

    +*B5`BvjOkT•@,8a;_:AkTLz#,no:6gXG Hobler

    BDd8'FAhz5ikTyMC~BDgV&w4dN/`dFnCkTjO,

    |+5kTnogs_dF!CaS6d8|mAhz5ikTyMC~BD:•V

    W]mkTBDM/34,_`5$@kxy;

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    a9PQZab()&:no,*+}~5Sentaurus Process PQjOkTno

    ^TI!|a8wx0l,BD5$@•@=/g&BDyBeam dose

    control~Rj0x|l&BDyEffective channeling suppression~R@*'?'B

    D

    [7]

    yProfile Reshaping~RMtzAHkTBDyPreAmorphization implants&PAI~;!CaBD77A 

    •@=/g&BDw`[FGg&jOkTd:,Bv5:PQJKLab&:

    C"/@*|+,,-;u.%/O0l,[F|aAj0x|l&BD1@*'

    ?'BD:•j0G|a}x|0l;abz9wxmn_:C,>L0lAMtz

    HkTBDw•MokTnoS'#,x|m$0l5st5,MtzHkTBDe

    !CaBDS)n`|akT_:,nol`1kTv@Ca,8aA 

    Sentaurus Process  jOkTno&w,CDBDgx'[email protected]=

    /BD~Rrange.shykTp:q|!BD~Reff.channeling.supressyj0kTr

    |stl&BD~Rprofile.reshapingykTzuMoBD~RPAIyH2!VWkT

    BD~A 

    jOkTyL5]cs_Q.Bb,vwVW5bnPQ@*,rs;>X|

    +A 

    2 Sentaurus Processd/hijklNO 

    "#$%&'()_:C5,•@=•TH{|nvwC,N9j!R5BI;

    Y\xH,jOkTN/y\5]s2m*+pqN9`PQASentaurus Process n

    om*+pq•@SyG,bcBD@@*FqBDRCau@*rs,FGRB'enDvw,^l4=wBDRB'8*,s-R•@uC$$e,FG77A

    Sentaurus Process  s_ diffuse  67`e8m*+pq•@,no5:Bv@*,+

    pq)+7-)+vw;m*Bbvw,Sx$1Dy$@,D8*,@4)Dv

    w,DD)D,\6Sx@47~;()_:,+B(v/,l(e1+l(1D7

    7A 

    Sentaurus Process  2f,@*Iv4pqBD1@*FqBD5:w``YGB

    v@*,pq8a1rs8aA@*Iv4pqBDWXhz5iF3|m5yXB

    vz9wx8X 100  JK,pq()&:A@*Iv4pqBD,bcz{VtTI

    @*qD0lu@*rs,FG5>%8G34I+pq()&:C%@,+()C

    au@*rs,FGA@*qDBDgbcVVWI•@_:C5Ca),D.:;

    DDX&'?St/,@*Fq0lA@*FqBD:•u"@*Fq0l>tn,

    eW^|+,|}d8~•]M?ANuQZ•@();*+u5=/)mrs,*

    +c~5Sentaurus Process   2fIYRF-vwBDyFlash or laser anneal

    model~5[BDYZupq_:C,29B+tn,|+d8Bv5k>:•n

    B[FGdFab&:B(_:C,l(|+1+356!A[\5Sentaurus

    Process  s_!CaNES6MoBD5:ul(t/,!CaS61DA"|m5

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    >nB[FGdF@*rs_:C!Ca,FG59PIJKabu!CaFq@*

    rs,noc~ASentaurus Process  ]u@*pq"Od8IMo5tdIjGFG"#Dab,Sx!(

    45S•5`V8wx()&:noShiVW,A(l*f5"(Jl10lV8

    wx()*B}cVW,Yk>c"#AP7"kWH5"(Jl10l]FG!(

    $19O,rsO5k>FGab,+$97$PEFA'"]/Q5"(Jl1f

    ?1Y((&%8GFGpq(O,pq.O5%8GFG,D.OA:'5lu8

    wx()&:,no5[EGdFl(V%|>c,A0:&'4cdCEFJ'(

    )&:S%@,l10D;n,3-5l&)NEx.wl10l5,fz{G1

    5)xUmab,4Y]~NOA 

    Sentaurus Process]^l10l*B1no5WX/k

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    zt!u,1(1DQ:[F*BA;q;5Nu+B(v/+l(1D*B,PE

    W->0X]^!"$,h?'#,nCSx1z=`A 

    4 Sentaurus ProcessdySzf4t{/|}:~klNO 

    Sentaurus Process |a@*pq_:C,qD8a5swIWXqO-(PW^

    ,hz5iyKMC~pqN:A 

    0Fd,()&:no([C5pq4,pqN:wX|a@*,35;nC@

    *=/,>?AuXvwx{|nab,:&'4cd|aVjW-,5>uXz9

    wx5X 100nm  ,8wxab()&:C5g`_1rab:&'4cd,EFH

    OA 

    uX8wxab()&:5lVW@*,qD8a5bD•0@*)Cay%,

    =wA abwx,7q|85|@'8A{C19O,8afFGYV!nu,I3z

    45f]v[A,pq4|a,QYZEFG|a#$A{C,jq|+1jq8

    aA 

    WXpqno,hz5iyMC~ULIYkjK3,pqN/AMC  noS}

    c,dFB>!abwx,n8>QR,C55"ab"1abC,@*1CaV

    #q,ATYN'5uXpqnoS}c,B>0AB5"a}can!,?@,

    QNE,Q:*BA#S}c,dFB>>O5`R3-& KMC  pqN/1Q0b

    4%,pqpqN/DEH0cIYv