EP-DT-TFG Laura

1T. Schneider DT seminar 11/03/2020

EP-DT-TFG Manual Mode

2T. Schneider DT seminar 11/03/2020

Manual Mode

• Getting to know the machine• The controls• The software• How to start up• How to close down• E-gun

• What is the power of the e-beam?

• Getting to know the materials

EP-DT-TFG Manual Mode

3T. Schneider DT seminar 11/03/2020

Manual Mode

• Preparation of material• Aluminium• Chrome• Copper• Gold• Quartz• Titanium

• Premelting• Filling up crucibles

little by little• Uniform, melted

material w/o gas enclosures

EP-DT-TFG Premelt

4T. Schneider DT seminar 11/03/2020

Gold1 – After first meltdown 2 – Refill material

3 – Second meltdown, not successful

4 – Third meltdown, successful

• Boiling point: 2800 ᵒC• Density: 19.32 g/cm3

• Thermal conductivity: 319 W/m*K• %-power: 25%• Graphite crucible• Small e-beam pattern

EP-DT-TFG Premelt

5T. Schneider DT seminar 11/03/2020

Copper1 – Before meltdown 2 – After first meltdown

3 – After second meltdown 4 – After third meltdown

• Boiling point: 2575 ᵒC• Density: 8.92 g/cm3

• Thermal conductivity: 413 W/m*K

• %-power: 22%• Molybdenum crucible• Small e-beam pattern

EP-DT-TFG Premelt

6T. Schneider DT seminar 11/03/2020

Aluminium 1 – Before meltdown

2 - After meltdown

• Boiling point: 2470 ᵒC• Density: 2.7 g/cm3

• Thermal conductivity: 237 W/m*K• %-power: 45%• Wettens easily• Fabmate crucible• Small e-beam pattern

EP-DT-TFG Premelt

7T. Schneider DT seminar 11/03/2020

Titanium1 – After initial meltdown 2 – Refill material

3 – After first meltdown after refill

4 – After second meltdown after refill

• Boiling point: 3290 ᵒC• Density: 4.51 g/cm3

• Thermal conductivity: 24,5 W/m*K• %-power: 60%• Molybdenum crucible• Small e-beam pattern

EP-DT-TFG Premelt

8T. Schneider DT seminar 11/03/2020

Chrome1 – First fill up of crucible 2 – After first coating

3 – Material grounded and refilled

• Boiling point: 2670 ᵒC• Density: 7.15 g/cm3

• Thermal conductivity: 111 W/m*K• %-power: 8%• Sublimation – no liquid phase• Copper crucible• Big e-beam pattern

EP-DT-TFG Initial tests

9T. Schneider DT seminar 11/03/2020

First Coatings and Initial tests• Inficon thickness monitor• Thickness tests

• Weight tests (EP-DT-EF-TFG)• FIB/SEM tests (EN-MME)• Interferometer (EN-MME-MM)• Veeco Dektak Mechanical

profiler (TE-VSC-SCC)• Bruker Dektak Mechanical

profiler (EPFL - CMI facility)FIB/SEM (EN/MME)

Bruker Dektak (EPFL – CMI) Interferometer (TE-VSC-SCC)

EP-DT-TFG Initial tests

10T. Schneider DT seminar 11/03/2020

First Coatings and Initial tests• Adhesion tests

• Cross hatch scratch test• Tape test• Pull-off test (TE-VSC)

EP-DT-TFG Automatic Mode

11T. Schneider DT seminar 11/03/2020

Automatic Mode

• Combine data from manual coatings• Analyze data to find parameters• Test parameters

• Create test recipes• Conduct test coatings• Transmission tests of samples• Analyze results and tune recipe• Repeat until we reach best recipe

View of e-gun during coating

EP-DT-TFG Automatic Mode

12T. Schneider DT seminar 11/03/2020

Automatic Mode• Safer• More user-friendly• High precision, even for very

thin coatings <2nm• High repeatability• New process

• Stable• Much thinner• Improved uniformity

EP-DT-TFG Study of Cr

13T. Schneider DT seminar 11/03/2020

Study of Cr coating for RD51-PICOSEC

• Study for RD51-PICOSEC

• Aim:

• As transparent as possible

• A level of resistance in the MOhms

• More transmission = more data

• Previous results – 50% transparency

• New results – improve on old results

EP-DT-TFG Study of Cr

14T. Schneider DT seminar 11/03/2020

EP-DT-TFG Study of Cr

15T. Schneider DT seminar 11/03/2020

EP-DT-TFG Study of Cr

16T. Schneider DT seminar 11/03/2020

EP-DT-TFG Conclusion

17T. Schneider DT seminar 11/03/2020

Conclusion

• Tests in manual mode• Automatic mode

• Study of Cr

• New process• Controlled environment• Highly stable and

repeatable processes• Better precision• Thinner layers

• Future projects

EP-DT-TFG Laura – x subject

18T. Schneider DT seminar 11/03/2020

Questions?