Facility meeting Nov. 2013GopalLithography Bay

Equipments:Laser writerEVG Mask alignerMJB4 mask alignerEVG Bonder

E-Line systemPioneer E-beam system

Raith e-Line off hrs

Raith e-Line non off hrs

Raith Pioneer off hrs

Raith Pioneer non off hrs

Used

105

131

NaN

136

196Not Used

Downtime

Unavailable

Total

50

150

250

Litho Equipments Utilization Chart.Nov.2013

Tota

l hrs

Laser writer (OH)

Laser writer (NOH)

EVG620 (OH)

EVG620 (NOH)

EVG501 (OH)

EVG501 (NOH)

MJB4 (TH)

Used 180 394 124 40 30 10 40

Not Used

0 146 56 320 150 350 140

Downtime

0 0 0 0 0 0 0

Un-available

0 0 0 180 0 180 540

Total 180 540 180 540 180 540 720

0100200300400500600700

Litho Equipments Utilization Chart. Nov. - 2013To

tal h

rs

Other Issues:• E-line- Laser resonator is replaced.•E-line was down(14,15thNov.)- Load lock switch was broken. Replaced with the spare switch got from local agent

•Bonder quartz bond glass plate got fabricated in CENTUM Local fabrication cost, about Rs.15000, EVG quoted about 1.25 lakhs. It is working….

Trend chart Nov. 2013 : E-line

Oct Nov Dec Jan Feb Mar Apr May Jun Jul Aug sept Oct Nov Dec0

5

10

15

20

25

30

9 10 10 1012 13 14 14 13 13 14 14

25 25

HSQ 120nm E-line

Month

CD in

nm

Trend chart. Nov.2013 : Pioneer

Jun Jul Aug Sept Oct Nov0

5

10

15

20

25

30

13 1315 15

25 25HSQ 120nm Pioneer

Month

CD in

nm

July Aug Sep Oct Nov0

0.5

1

1.5

2

2.5

3

3.5

MJB4

1 Micron2 Micron3 Micron

Feat

ure

size

in M

icron

s

Resist: AZnLoFSpin coated at 3000rpm for 40 sec.Thickness: 2umSoft bake 1 min at 110CExposure for 8 seconds in MJB4Post exposure bake for 1 min at 110CDevelopment for 25 secs (AZ726MIF)

Trend chart: Nov.2013:

Trend chart : Nov.2013

Resist: AZ5214ESpin coated at 6000rpm for 40 secsThickness: 1 umSoft bake 1 min at 110CExposure 50 mJ/cm2 in EVG620Development for 18-20 secs (AZ351B 1:4)

May

JuneJuly

August

Septem

ber

October Nov

0

0.5

1

1.5

2

2.5

3

3.5

EVG 620

Series3Series5Series7

Months

Feat

ure

size

in M

icron

s

Laser writer trend from Nov-12 to Nov- 13

Nov Dec Jan Feb Mar Apr May June Aug Sep Oct Nov0

0.5

1

1.5

2

2.5

3

3.5

Laser Writer (Direct writing)

Series1Series3Series5

Months

Feat

ure

size

in M

icron

s

Resist: S1813Spin coated at 4000rpm for 40 secsThickness: 1.3 umSoft bake 1 min at 110CDose: Lens-5, Filter-3%, Gain-12, D-step-2, Pos speed -1Development for 38 secs (AZ351B 1:4)

Laser writer trend from Oct -13 to Nov- 13

Oct Nov0

1

2

3

4

5

6

2.2 2.1

3.2 3.2

5.2 5.3

Laser writer (Mask writing)

Series3Series5

Months

Feat

ure

size

in M

icron

s

SEM image of Mask

Thanks