CS Intel Confidential — Do Not Forward

Corporate Services Point of Use of Compressor for

LPO2 Generation

Shahina P Supriti

Mechanical Engineer

Shahina P Supriti

July 30, 2014

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Acknowledgement

I want to particularly thank my manager Umar Mushtaq for all the help he has provided. He was always very helpful and supportive.

I also want to thanks for their help during this internship and helping me with this project.

Finally I want to thank Intel to give me opportunity to work as summer intern.

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About Me

Shahina P Supriti

Mechanical Engineer

Arizona State University

Enrolled In MS. Program

Graduating In December,

2014

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Personal Goals & Objectives My short term goal is to graduate and long term

goal is to work in the industry as a mechanical

engineer.

I gained real world industrial working experience

through my intel internship.

My ideal position would be a mechanical

engineering position focusing on industrial design

and maintenance.

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Problem and Mission Statement

Oil Free Air(OFA) is very expensive as it is high quality

and high pressure compressed

air

Demand of OFA has increased due to implementation of

complex process in the plant.

Excess air demand can exceed the compressor plant capacity

Problem Statement

Investigate an appropriate alternative compressed air system for the Low Purity Oxygen(LPO2) system which

can maintain low quality feed air requirement.

Compressor selection and sizing

Find out whether new compressed air system is feasible, cost effective and calculate ROI

Mission Statement

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Where energy is wasted

OFA

LPO2

115 PSIG

90 PSIG

Other

Demand

Side

115 PSIG

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LPO2 SYSTEM

OFA SYSTEM

Critical Parameter: pressure & Dewpoint

Other OFA Demand

Side

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LPO2 SYSTEM OVERVIEW

Air

oxygen Receiver

tank

nitrogen Purged to

atmosphere

• The Oxygen Purity Specification is

93%(±3%)

• Technique: Pressure Swing

Adsorption(PSA)

• Two molecular sieve beds to provide a

constant supply of purified oxygen

alternatively.

• Provide subfab abatement tools to abate

Hazardous Production Materials(HPMs)

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LPO2 SYSTEM

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LPO2 SYSTEM

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LPO2 POU Compressor

Feasibility Study criteria

Total Skid 7(6 plus 1

future)

Each skid 425 Scfm

Total Scfm

(7x425)~3000

• Feed air requirement 3000scfm at

90 PSIG supply pressure

• Dirt particle <1 Micron

• Inlet air dew point +37 F or lower

• Oil concentration(including vapor)

=<3PPM

• System need to be N+1

• Ability to control compressor

capacity based on LPO2 load

demand.

• ROI should be less than 5 years

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Compressor

135 PSIG

Receiver Tank

Coalescing filter

Dryer

DEW POINT -40F

After Filter

.09micron

After cooler

Final Filter

.02micron

Compressor

100 PSIG

Receiver Tank

Filter

1 micron

Dryer

DEW POINT +37 F

OFA SYSTEM PROPOSED SYSTEM for LPO2

Saving

Saving

Not needed

Not needed

Saving

Not needed

Comparison

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PROPOSED COMPRESSED AIR

SYSTEM

LPO2

Filter

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Steps to Compressor selection and

Sizing •Supply air to LPO2 System

•Type Of Compressor Application

•Pressure(100 PSIG)

•Capacity(3000SCFM) Critical Parameters

•Atlas Copco

•Kobelco Scope of Supplier

•1000SCFM capacity at 100PSIG

•1500SCFM capacity at 100PSIG

•Available Voltage service: 480V

Select and Size the Proper compressor

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Types Of Compressor

Smaller Machine Capacities

Lower Equipment cost

More options in 480V range

More Options In VSD

Rotary Screw

Compressor

Centrifugal

Compressor

Large Capacities

More Expensive

Limited options in 480V range

Primarily constant speed design

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Compressor selection Model

(Rotary Screw

Compressor)

Capacity

(scfm)

Motor

BHP VOLT EFFICIENY

Atlas Copco

ZR200-7-60 FF

Oil-free

1107 254 480 95.6%

ZR275-7-60FF

Oil-free

1443 354 480 95.6%

Kobelco

KNW 2-B/H

Oil-free

1102 222 480 95.8%

KNW2-D/H

Oil Free

1559 327 480 95.8%

Model

( VSD

compressor)

Capacity

(scfm)

Motor

BHP VOLT EFFICIENY

Atlas Copco

ZR315 VSD FF

Oil-free

472-1583 120-

416

480 95.6%

Kobelco

KNW 2-B/X

Oil-free

1102 222 480 95.8%

KNW2-D/X

Oil Free

1559 327 480 95.8%

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Dryer Selection

Refrigerated Dryer

Less Expensive

Higher Dew Point(35°F to

50°F)

Desiccant Dryer

Expensive

Very low Dew Point(-40°F to

-150°F)

Lower Energy Cost

Higher Energy cost

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Dryer Selection Kobelco Atlas Copco

Model HES1500

MD600Series

Type Refrigerated

Dryer Desiccant

Dryer

Pressure Dew Point(F) 37or lower -40

SCFM 1500 Comes with

package

Voltage 460 (compressor+Dryer)

Power(KW) 9.8

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Filter Selection Kobelco

Atlas Copco

Alumimum Casting

PD970F, 4" flange with filter media, 0.01

micron removal level

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Control Solutions

Atlas Copco

ES16

• Monitor and control Compressor, Dryer and Filter

• prioritized to reduce downtime and match workload

Max 4 Compressor control

• Controls most efficient combination of air compressor required to meet plant demand

• HMI display trend charts, data logging and remote

monitoring via internet

Kobelco

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Approaches to cost estimation

Equipment Cost

Installation cost

Operational Cost

Total Cost* =

+

+

* Not assuming depreciation, taxes, maintenance costs, etc.

Assume half of the equipment

based on historical data

Cost of compressor, Dryer, filter

receiver tank, control system

Power consumption of Compressor

and dryer Plus cooling load energy

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Equipment Cost(load No-Load) Kobelco (1102 SCFM)

compressor Quantity Cost/unit SCFM(N+1)

Total cost(N+)

KNW 2-B/H(1102 SCFM) 4 $130,000 4408 $520,000

Dryer(1500SCFM) 3 $28,000 4500 $84,000

Filter 4 $2,500 $10,000 Sequencer 1 $19,242

Wet Air receiver Tank 1 $9,000

Total Equipment cost $642,242

Kobelco 1559 SCFM

compressor Quantity Cost/unit SCFM(N+1) Total cost(N+1)

KNW 2-D/H 3 $140,000 4677 $420,000

Dryer(1500SCFM) 3 $28,000 4500 $84,000

Filter 3 $2,500 $7,500

Sequencer 3 $17,000

Wet Air receiver Tank 1 $9,000

Total Equipment cost

$537,500

Atlas Copco 1107 SCFM

compressor Quantity Cost/unit SCFM(N+1) Total cost(N+1)

ZR200-7-60 4 $225,000 4428 $900,000

Filter 4 $3,500 $14,000

Sequencer 1 $15,000 $15,000

Wet Air receiver Tank(3000 Gallon) 1 $39,000 $39,000

Total Equipment cost

$968,000

Atlas Copco 1443 SCFM

compressor Quantity Cost/unit SCFM(N+1) Total cost(N+1)

ZR200-7-60 3 $258,800 $776,400

Filter 4 $3,500 $14,000

Sequencer 1 $15,000 $15,000

Wet Air receiver Tank(3000 gallon) 1 $39,000 $39,000

Total Equipment cost

$805,400

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Kobelco

(Load no-

Load, 1102

scfm)

Kobelco

(L0ad no-

Load, 1559

scfm)

Atlas

Copco(Load

No-Load,

1107scfm)

Atlas

Copco(Load

No-Load,

1443 scfm)

Kobel

VSD(1102

scfm)

Kobelco

VSD(1559

scfm)

Atlas Copco

VSD(1583

Sscfm)

$642,242

$537,500

$968,000

$805,400 $762,000

$627,500

$997,000

EQUIPMENT COST

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$0$50,000

$100,000$150,000$200,000$250,000$300,000$350,000$400,000$450,000

$344,000 $342,000 $345,000 $348,000 $397,000

$358,000

$414,000

Operational Cost

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Projected ROI

Option

Kobelco Kobelco Kobelco Kobelco Atlas

Copco Atlas

Copco Atlas

Copco

1102

SCFM 1559

SCFM 1102

SCFM 1559

SCFM 1107

SCFM 1443

SCFM

(472-

1583)SCF

M

VSD VSD VSD

Quantity 4 3 4 3 4 3 3

Cost/Compress

or unit 130k 140k $160k $170k $225k $258k $311k

Total Equipment

cost $642k $538k $760k $628k $929k $805k $997k

Operational

cost/year $330k $342k $345k $348k $397k $358k $412k

Installation Cost $320k $269k $380k $314k $484k $403k $500k

ROI 9.92 8.12 11.96 10.16 33.24 14.58 55.24

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Combination Of VSD and

Load-No load(OPTION 1)

Kobelco Compressor quantity cost/unit

Scfm (N+1)

Total

Cost (N+1)

Power(kw)/ Unit

KNW 2-B/H(1102

SCFM, LOAD-NO LOAD) 3 $130k 4408 $550k 173

KNW2-B/X(1102 SCFM)VSD 1 $160k 163

Total Equipment Cost $672k

Installation Cost $333k

Operational cost/year $312k

Energy Saving/year $128k

ROI 7.86

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Combination Of VSD and

Load-No load(OPTION 2) Option 2

Kobelco Compressor quantity cost/unit

Scfm (N+1)

Total

Cost (N+1)

Power(kw)/ Unit

KNW 2-B/H(1559

SCFM, LOAD-NO LOAD) 2 $140k 4677 $450k 255

KNW2-D/X(1559 SCFM)VSD 1 $170k 233

Total Equipment Cost $568k

Installation Cost $284k

Operational cost/year $331k

Energy Saving/year $109k

ROI 7.77

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$0

$100,000

$200,000

$300,000

$400,000

$500,000

$600,000

$700,000

Total

Equipment

Cost

Installation

Cost

operational

cost/year

Energy

saving/year

Combination Of VSD and Load-NoLoad

Option 1(1102 SCFM) Option 2(1559 Scfm)

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Conclusion

Lowest payback period is found for Kobelco Combination Of VSD and load-No load (OPTION 2) Rotary screw Compressor .

Payback period is longer and this project is not feasible.

Future Research

Off-loading OFA demand can secure reliable power supply to OFA which may reduce cost of upgrading electrical infrastructure when future OFA demand is increased.

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Question???

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Back up

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Types OF Compressors

Two types Of Compressors:

Rotary Screw Compressor

Centrifugal Compressor

6 centrifugal compressor

1 screw compressor

Supply Air FAB22 &FAB32

N+1 Capacity 30,784 SCFM

N 25,963 SCFM

OC9

6 Screw Compressor

Supply Air to FAB12

N+1 Capacity 18,600 SCFM

N capacity 15,300 SCFM

FAB12

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Rotary Screw

Positive displacement compressor

Confines a volume of air and reduces the volume of confined air to raise pressure

Run continuously loading-unloading air

OFA System

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Centrifugal Compressor

Dynamic Machines

Rotating component accelerate the air to a high velocity and then diffuse high velocity air

to high pressure

High Efficiency

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Dryer • Remove water vapor from the

compressed air system • Drying Technology-Adsorption • Two types Dyer Heated Dryer Heat Of Compression Dryer

Heated Dryer Heat Of Compression Dryer

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Filters 3 stages of filtration

Coalescing Dry1

After FinalDry2

Dryer Train Qty-6

After Cooler

First Stage(coalescing) –

Capture large Particles

Second Stage(After Filter)-

Media Polysulfone

capture Particle > 0.9m

Third Stage(Final Filter)

capture Particle > 0.02m

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