GaN Technology for High Frequency ApplicationsGaN Technology for High Frequency Applications Timothy Boles Technology Fellow MACOM Technology Solutions
1
• Agenda
– Future Directions
Provider of High-Performance Analog RF, μW, mmW and Photonic Solutions
Headquartered in Lowell Massachusetts 27 offices worldwide, 1061 employees $418 million of FY 2014 revenue Strong Patent and IP Position
6,000+ customers worldwide Global, multi-channel sales strategy 3,000+ products across 40 product lines 60 years of RF & Microwave History
2000
Cobham acquires M/A-COM
AMP acquires M/A-COM
GaAs HMIC
Vacuum tubes
First high-power PIN diodes, transistors, phase shifters First GaAs switch
IC for handsets
Low noise, high frequency
linearity
linearity High linearity
High frequency, power, efficiency
High frequency, power, efficiency
InP High speed, high voltage, low power
SiPh High integration, high power, high
performance
performance
integration
integration
High integration
High integration
Technology Portfolio
• High speed analog RF, μW, mmW and photonic engineering competencies • Long product lifecycles
Diverse Array of Products and Form Factors
Integrated Circuits
1 MHz
Radio Frequency
6 GHz
Communications
Broadcast
Light
Light
• The lowest cost solution always wins in the marketplace
• So …. If Silicon can do …. Silicon will win ….
• So …. If Silicon can’t & GaAs can …. GaAs will win ….
• GaN needs to provide unique solutions & provide compelling value to win
Market Typical Device Price Point
Aerospace and Defense Broadband, High Efficiency, MMIC HPA • 10 – 100 W • 28/48 V operation
$2.00 – $5.00/Watt
$0.5 – $1.00
Semiconductor Material Properties
• High Breakdown Field – 10x Si or GaAs – Smaller Devices – Higher Impedances – Lower Intrinsic Capacitances
• Low Dielectric Constant – 50% of Si or GaAs – Reduced Intrinsic Junction
Capacitances
• High Power Density – 2-10x GaAs or Si – Smaller Devices – Higher Impedances – Good Thermal Conductivity
• Best Power Device Figure of Merit • Increased Frequency Response
– Smaller Devices – Lower Capacitances – Reduced Matching Loss – High Saturation Velocity – High fmax
• Highest Johnson Figure of Merit
Why Gallium Nitride
– High Resistivity Substrate – Sapphire, SiC, Silicon
– Nucleation Layers – AlGaN Buffer – GaN Channel – AlGaN Barrier – GaN Cap Layer – Oxidation of AlGaN
• GaN HEMT Operation – Gate Control – Schottky Diode MESFET – Active Layers Undoped – Channel Conduction
• 2 Dimensional Electron Gas • AlGaN/GaN Band Gap Difference • AlGaN/GaN Lattice Mismatch/Strain • Piezoelectric Induced Charge
– 2DEG Layer in GaN Channel at AlGaN/GaN Interface
– Drain Current – Function of Al Fraction in AlGaN & Thickness of Barrier Layer
GaN Cap
Nucleation Layers
Aver of Medians
0 2 4 6
Al Content % ( 25%-to-28 % )
-3.15 -3.1
-3.05 -3
-2.95 -2.9
-2.85 -2.8
-2.75 -2.7
V
GaN High Power/Frequency Advantages • High Breakdown Field Strength
– Enables High Drain Operating Voltages (>50 volts) – 10x Reduction GD Spacing while Supporting High Peak Fields
• Smaller SD Spacings => Higher Frequency Operation – 1st Order Analysis – Trapping/Dispersion Effects Not Considered – Phase Shifts/Delays Not Included – Time Delay for an Electron to Transit from Source to Drain – Frequency Capability/RF Gain Direct Function of Transit Delay
11
RFgain ≈ fT/f
τSG τG
τCgs τCgd
Gate SG
Isolation Implant Isolation
GaN High Power/Frequency Advantages • Higher Device Impedances
– Outside World is 50 – Transformation Elements ARE NOT Lossless – Have a Finite Q – Higher Real Impedance => Reduced Impedance Transformation/Fewer Elements
• Low Dielectric Constant – Low Intrinsic Terminal Capacitances – Cgs/Cgd in Parallel with Rin(real)/Rout(real) – Parasitic Transformation Lowers Impedances – Cds is Feedback Element – Improved Device Stability
12
Ohms Law
GaN/SiC vs GaN/Si
• Thermal Conductivity – GaN approximately the same as Silicon – GaN approximately one third of SiC and
Copper – Improved Thermal Conductivity of SiC
Substrate – Everything Else Being Equal – GaN/SiC
WILL Outperform GaN/Si
13
• High Frequency Power Devices – GaN is GaN!! – GaN has Excellent Saturated Electron Velocity - 2.7x107 cm/s – Highest Among Standard Semiconductor Materials
• Everything Isn’t Equal – Difference in Thermal Response Not as Great as it Would Seem – Thermal Conductivity for SiC & Silicon Asymptote at Elevated Temperature – GaN Operating Temperature - 200°C to 220°C – 3:1 Factor Reduces to <2:1 at Temperatures >150°C – Thermal Difference Can be Overcome by Improved Thermal Design
Comparison: GaN/Si to GaN/SiC • GaN on Silicon
– Condition: Freq = 3GHz, Vds = 48V, Idq = 300mA
– P1dB = 60W (CW) min – G1dB = 15dB – Eff1dB = 60%
• GaN on SiC – Condition: Freq = 3GHz, Vds = 48V, Idq
= 300mA – P3dB = 60W (CW) – G3dB = 12dB – Eff3dB = ~55%
14
Falcon 14mm 3GHz CW 48V Idq=300mA fixture MTS MAGX-002731-100L (exteranlly tuned)
0
2
4
6
8
10
12
14
16
Pout (W)
G ai
n (d
Fal #3 %Eff
Fal #4 %Eff48 V GaN/Si Showing Comparable Performance (or Superior) as Compared to GaN/SiC
Chart2
2.97
2.83
2.97
2.83
8.9
8.9
8.9
8.9
26.7
25.7
26.7
25.7
38.8
37.8
38.8
37.8
44.8
45.3
44.8
45.3
53
52
53
52
56.8
57.4
56.8
57.4
57.7
60
57.7
60
59.2
59.2
DE
Falcon 14mm 3GHz CW 48V Idq=300mA fixture MTS MAGX-002731-100L (exteranlly tuned)
14.6
14.5178643552
0.1145833333
0.11061601
14.5
14.4
0.2166082555
0.2186517296
14.2
14.1
0.3870911621
0.3851918465
13.9
13.8
0.4590194965
0.4632352941
13.6
13.5
0.5080747596
0.4967105263
13.1
13.1
0.5183881064
0.5233494364
12.8
12.5
0.5282738095
0.5362481315
12.6
12.1
0.5318952802
0.5411255411
12.1
0.5316091954
Sheet1
Nitronex Falcon 14mm GaN HEMT RF 3GHz CW Idq = 300mA , 48V Bench E136, Nitronex fixture APB11-187
Device
Vgs
-1.59
0.1
2.1
20.0
33.2
13.2
0.46
9.5%
-10
1
18.4
30.0
42.6
12.3
1.18
32.5%
-9
1.5
23
31.8
43.6
11.9
1.38
34.7%
-10
2
29.5
33.0
44.7
11.6
1.59
38.7%
-11
2.5
35
34.0
45.4
11.3
1.77
41.2%
-10
4.9
52.7
36.9
47.2
10.3
2.39
45.9%
-10
Nitronex Falcon 14mm GaN HEMT RF 3GHz CW Idq = 300mA , 48V Bench E136, MAGX-002731-100L
Device
Vgs
DE
Falcon 14mm 3GHz CW 48V Idq=300mA fixture Nitronex APB11-187 (2007) extenally tuned
Sheet2
DE
Falcon 14mm 3GHz CW 48V Idq=300mA fixture MTS MAGX-002731-100L (exteranlly tuned)
Sheet3
parasitic interfacial charge – High Resistivity Silicon
Substrate (>100 ohm-cm; preferably >10,000 ohm- cm)
– Peak interfacial charge <1017cm-3
GaN/Si GaN/SiC
Power Density (W/mm) 7 7 Gain (dB) 17.5 15 Efficiency (%) >70 >65
GaN/Si Has Achieved The Performance Required To Enable
Wide Adoption
Device Technology
Substrate Technology
Substrate Maturity
$/in2
GaN on SiC SI-SiC Low 3” - 6” 1 X 1 X
GaN on Si Silicon High 4” – 12” 106 X 10-3 – 10-4 X
Silicon World
GaN/SiC vs GaN/Si Substrate Materials Technology Drives Cost
• Cost Structure – SiC Substrate Material Generation – 150 µm/hr at >2200°C – SiC Substrate Production Dominated by One Supplier – Silicon Substrate Material – 3 in/hr (76,200 µm/hr) at ≈1400°C – Silicon Substrates – Many Suppliers/Very Competitive Market – Substrate Cost/Area is Factor of >1000x - Si:SiC – GaN Epitaxial Growth Differences Immaterial – Substrate Cost Dominates GaN Epitaxial Material
• Effect on Thermal Design – Improve Device Thermal Resistance on Silicon Substrate – Thermal Resistance Sets the Reliable Device Operating Junction
Temperature – Spread Heat Generating Areas => Larger Die – Die Size Increase ≈20% – Enabled by Lower Cost of Silicon Substrate
GaN High Frequency Power Performance Alternate Technologies Comparison
GaN HEMT Issues/Challenges
– Epitaxial Buffer Thickness
– Peak Field Management/ Field Plate Design
– Thermal Layout
• Process – GaN Coherency
• Nitrogen Sublimation from Surface • GaN Ohmic Metal – Ti/Al/Ni/Au • Thermal Cycle >800C
– Gate Leakage/Stability • Gate Metal Stack-Up • Ni/Au; Ni/Pd/Au; Ni/Pt/Au; NiO/Ni//Au • GaN Surface States/Passivation
– Bulk/Surface Traps - Dispersion
Ga Nodules after Ohmic Metal RTA Cycle
Gate Schottky Diode Degradation
20mm Gate Periphery Gold Free GaN/Si – 200mm Si CMOS Fab
GaN HEMT Issues/Limitations
Side of Gate • Coalesce Into Continuous Line/Crack
– RF Power Degradation
Unstressed
Pulsed IV Characteristics Current Collapse
• 200µ FET • 20 volt Load Line • 1.15 A/mm • 300ns, 1µs, 10µs, 80µs,
1ms Pulse Widths
DC & Pulsed (1us) Data Vgs -3.2 to +0.8 in steps of 0.4 V
0.000
0.100
0.200
0.300
0.400
0.500
0.600
0 2 4 6 8 10 12 14 16 18 20 Vds (V)
Id s
GaN HEMT Issues/Limitations Reliability
\Vgs from -3.200e0 to 800.0e-3 by 400.0e-3
\Vds from 0.0 to 19.90e0 by 100.0e-3
\t_q= 1.000e-3, t_p= 1000.0e-9
\Averages/pt = 32 (some at 64; 32 requested)
\2200 lines
200 4
-3.16E+00
\Vgs from -3.200e0 to 800.0e-3 by 400.0e-3
\Vds from 0.0 to 19.90e0 by 100.0e-3
\t_q= 1.000e-3, t_p= 1000.0e-9
\Averages/pt = 32 (some at 64; 32 requested)
\2200 lines
200 4
-3.16E+00
DC-IV 0307
PIV 0405
PIV 0409
Vds (V)
Ids (A)
DC & Pulsed (1us) Data Vgs -3.2 to +0.8 in steps of 0.4 V
0.0000018087
0.0010046247
-0.0038357498
0.0000025173
0.0014264997
-0.0037888748
0.0000028209
0.0021061872
-0.0036013749
0.0000030818
0.0021218122
-0.0034138749
0.0000033184
0.0025202496
-0.0028279374
0.0000035505
0.0028874371
-0.0023279374
0.0000037747
0.0030671246
-0.0016169999
0.0000039823
0.0032077496
-0.0024138749
0.0000041911
0.0027624371
-0.0018591874
0.000004402
0.0038639996
-0.0010623125
0.0000046109
0.0040827496
-0.00064825
0.0000050075
0.0041764996
0.0001720625
0.0000053837
0.0043093121
-0.000382625
0.0000057839
0.0040593121
-0.0000623125
0.0000061589
0.0040514996
0.0010783124
0.0000065775
0.0045983745
0.0009298749
0.0000075641
0.0050671245
0.0016642499
0.000008544
0.004856187
0.0009533124
0.000009553
0.005293687
0.0017892499
0.000010623
0.005871812
0.0025861248
0.000011664
0.0063796244
0.0025392499
0.000012709
0.0052546245
0.0031408123
0.000013731
0.006043687
0.0034298748
0.000014739
0.0068093119
0.0036251873
0.000015709
0.0066608744
0.0040704998
0.000016612
0.0064655619
0.0037658123
0.000017501
0.006340562
0.0040704998
0.000018366
0.0067624369
0.0050704997
0.000019198
0.0070280619
0.0048126872
0.00001999
0.0072468119
0.0047579997
0.000020742
0.0074889994
0.0050939372
0.000021568
0.0071530619
0.0056251872
0.000022396
0.0076452494
0.0060314372
0.000023119
0.0074499369
0.0062970622
0.000023845
0.0077936869
0.0067423746
0.000024538
0.0081452494
0.0061876872
0.000025259
0.0079499369
0.0065939372
0.000025961
0.0082702494
0.0064767497
0.000026691
0.0080671244
0.0069298746
0.000027381
0.0083249369
0.0070704996
0.000028053
0.0084811868
0.0070392496
0.000028801
0.0085983743
0.0070236246
0.000029421
0.0088796243
0.0064064372
0.000030231
0.0088639993
0.0062345622
0.000030962
0.0088952493
0.0065548747
0.000031778
0.0092936868
0.0070861246
0.000032503
0.0089733743
0.0062892497
0.000033198
0.0090671243
0.0059298747
0.000033935
0.0092389993
0.0058048747
0.000034637
0.0094733743
0.0061642497
0.000035377
0.0091999368
0.0056954997
0.00003601
0.010004624
0.0054767497
0.010153062
0.0060236247
-0.0000000005
0.010301499
0.0060783122
0.00086364
0.010168687
0.0060783122
0.0011703
0.010012437
0.0057892497
0.0012704
0.0098483743
0.0055939372
0.0013065
0.010082749
0.0054142497
0.0013188
0.0099968118
0.0049611247
0.0013209
0.0099421243
0.0046486247
0.0013175
0.010426499
0.0054220622
0.00131
0.010028062
0.0047267497
0.0013003
0.010231187
0.0054689372
0.0012888
0.010574937
0.0052736247
0.0012919
0.010379624
0.0049533122
0.0012912
0.010582749
0.0046642497
0.0012852
0.010543687
0.0046876872
0.0012817
0.010387437
0.0048361247
0.0012766
0.011035874
0.0048829997
0.0013001
0.011012437
0.0046876872
0.0013199
0.010418687
0.0049533122
0.0013385
0.011551499
0.0048439372
0.0013553
0.011387437
0.0048751872
0.0013733
0.011051499
0.0041408123
0.0013905
0.010942124
0.0037892498
0.0014065
0.011246812
0.0046876872
0.001423
0.011512437
0.0042736248
0.0014378
0.011340562
0.0043048748
0.0014528
0.011363999
0.0039923748
0.0014686
0.011629624
0.0043048748
0.0014837
0.011840562
0.0037345623
0.0014995
0.011285874
0.0042814373
0.0015173
0.012457749
0.0038595623
0.0015372
0.011528062
0.0029611248
0.0015563
0.011395249
0.0037267498
0.0015769
0.011996812
0.0039454998
0.0015988
0.011942124
0.0039298748
0.0016205
0.012004624
0.0042658123
0.001644
0.012449937
0.0039142498
0.0016677
0.012278062
0.0039220623
0.0016925
0.012442124
0.0038439373
0.0017171
0.012465562
0.0033673748
0.0017434
0.012379624
0.0029689373
0.0017714
0.012160874
0.0034220623
0.0018018
0.012051499
0.0028829998
0.0018291
0.012207749
0.0030314373
0.0018597
0.012887437
0.0031408123
0.0018891
0.012426499
0.0032658123
0.0019189
0.012449937
0.0028048748
0.0019491
0.012863999
0.0027736248
0.0019792
0.012613999
0.0023204999
0.0020081
0.013121812
0.0028829998
0.002037
0.012926499
0.0030626873
0.0020654
0.013387437
0.0025001874
0.0020962
0.013340562
0.0028595623
0.012653062
0.0025470624
-0.00009
0.012910874
0.0021329999
0.0087724
0.012457749
0.0023439374
0.015342
0.012942124
0.0022736249
0.019596
0.012981187
0.0017814374
0.021981
0.013465562
0.0019220624
0.023215
0.013293687
0.0025001874
0.023864
0.013262437
0.0016720624
0.024237
0.013996812
0.0018517499
0.024476
0.013949937
0.0013126874
0.024637
0.013598374
0.0022736249
0.024748
0.013684312
0.0013986249
0.025009
0.013863999
0.0016720624
0.025186
0.013942124
0.0015392499
0.025291
0.013942124
0.0012501874
0.025388
0.014543687
0.0019611249
0.025448
0.014778062
0.0012892499
0.025765
0.014418687
0.0008986249
0.026006
0.014215562
0.0011798749
0.026197
0.014231187
0.0009689374
0.026355
0.013926499
0.0011095624
0.026491
0.014496812
0.0010001874
0.026635
0.014582749
0.0013517499
0.026807
0.014528062
0.0003908125
0.027037
0.014746812
0.0006876874
0.027311
0.014473374
0.0009376874
0.02762
0.014926499
0.0012111249
0.027951
0.015262437
0.0000626875
0.02829
0.014465562
0.0009845624
0.028626
0.014918687
0.0002189375
0.028952
0.015199937
0.0008283124
0.02927
0.015449937
0.0011017499
0.029569
0.015184312
0.0006173749
0.02986
0.015090562
0.000133
0.030129
0.015481187
0.0007111249
0.030381
0.015121812
0.0009454999
0.03063
0.015231187
-0.000226375
0.030863
0.015176499
0.000117375
0.031085
0.015699936
-0.00039825
0.031297
0.015145249
-0.0002498125
0.031491
0.014942124
-0.0000466875
0.03167
0.015590562
0.00010175
0.031847
0.015918686
-0.000257625
0.032006
0.015637437
-0.0005310625
0.032163
0.015590562
-0.000570125
0.0323
0.015504624
-0.0002185625
0.032429
0.016512436
-0.000351375
0.032546
0.015949936
0.0001564375
0.032658
0.016598374
-0.000538875
0.032761
0.016035874
-0.000867
0.032858
0.016629624
-0.0007810625
0.032945
0.016754624
-0.0004373125
0.033032
0.016293686
-0.0013904375
0.015973374
-0.00108575
-0.00009
0.016121811
-0.0015857499
0.016728
0.016590561
-0.000726375
0.032328
0.016668686
-0.00102325
0.046207
0.016348374
-0.0009998125
0.05781
0.016746811
-0.001070125
0.06682
0.016504624
-0.0013279375
0.073217
0.016528061
-0.0008279375
0.077367
0.017332749
-0.0003591875
0.079914
0.016356186
-0.0014060625
0.081464
0.016590561
-0.0015154375
0.082447
0.016660874
-0.0005310625
0.083656
0.016356186
-0.0014295
0.084389
0.016426499
-0.0017654374
0.084839
0.016598374
-0.0010466875
0.085181
0.016949936
-0.0014060625
0.085399
0.016973374
-0.0018904374
0.085974
0.017121811
-0.0021326249
0.086273
0.016856186
-0.0019294999
0.086387
0.016621811
-0.00139825
0.086358
0.016856186
-0.00146075
0.086285
0.017192124
-0.0023279374
0.086367
0.016770249
-0.0016091874
0.086801
0.017160874
-0.0019685624
0.087567
0.017238999
-0.0017029374
0.088493
0.017309311
-0.0020857499
0.089401
0.017317124
-0.0025857499
0.090178
0.017348374
-0.0020544999
0.09086
0.017699936
-0.0023044999
0.09138
0.017145249
-0.0022107499
0.09177
0.017824936
-0.0024138749
0.09206
0.017270249
-0.0024998124
0.09225
0.017160874
-0.0019138749
0.09239
0.017067124
-0.0028357499
0.09248
0.017410874
-0.0024294999
0.09252
0.017270249
-0.0023357499
0.09254
0.017449936
-0.0024919999
0.09252
0.018028061
-0.0023982499
0.0925
0.017363999
-0.0026169999
0.09246
0.017582749
-0.0022576249
0.09239
0.017598374
-0.0018982499
0.0923
0.017731186
-0.0029294999
0.0922
0.092029
0.012160874
-0.0034998124
0.091888
0.017551499
-0.0038904373
0.091733
0.020754624
-0.0040466873
0.091585
0.024793686
-0.0034998124
0.091419
0.026887436
-0.0038279373
0.091253
0.029684311
-0.0038044998
0.031676498
-0.0034529374
-0.0001
0.033793686
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P O U
50V, Mode-S; 1.03GHz 50V, Mode-S; 1.06GHz 50V,Mode-S; 1.09GHz
MACOM MAGX-001090- 1K1L00, 1.1kW GaN/SiC
Power Transistor
Power module
Combiner Splitter
Pout vs Pin Characteristic
• LNA • Gain Blocks
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CREE - 20 MHz - 6.0 GHz, GaN MMIC, Power Amplifier
• Ultra Broad Band Multi-Stage Amplifier • Gain - 18 dB • Psat - 30 W • Power Gain – 13.5 dB • PAE – 33% • Operation up to 50 V • 50 Input & Output Match • Die Size 0.157 x 0.094 x 0.004 inches
GaN Future Directions
• GaN MISHEMTs – Turn to Mainstream Silicon – MISHEMT Formation – High-k Dielectrics Gate Dielectrics
Have Successfully Reduced Gate Leakage
– Traditional Silicon Gate Dielectrics Decrease the Gate Capacitance, Reducing Gate Modulation, and Transconductance
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