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www.MirrorcleTech.com© 2019 Mirrorcle Technologies, Inc. All rights reserved.
Gimbal-Less Two-Axis Scanning MEMS Micromirrors
Device Datasheet S41369
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Device Parameters Summary
Device ID : S41369
Actuator Name: A5M24.2
Actuator Mode : Gimbal-less Dual-Axis Quasistatic
Mirror Type: Integrated
Mirror Size : 2.4mm diameter
Mirror Coating : Aluminum
Maximum Mech. Angle - X Axis [degrees] : 5.4198
Maximum Mech. Angle - Y Axis [degrees] : 5.3689
Maximum Vdifference - X Axis [V] : 158.4800
Maximum Vdifference - Y Axis [V] : 157.4400
Driver Bias Voltage (Vbias) [V] : 80
Maximum Mech. Angle - Coupled Axes [degrees] : 7.7471
Resonant Frequency - X Axis [Hz] : 901
Resonant Frequency - Y Axis [Hz] : 905
Quality Factor - X Axis : 82.6000
Quality Factor - Y Axis : 77.2000
Recommended LPF Cutoff Frequency (6th Order Bessel) [Hz] : 300
Date and Time Report was Created: 30-May-2018 at 19:27:51
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Static ResponseVoltage vs. Mech. Angle - Individual Axes
Voltage vs. Mech. Angle - Coupled Axes
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Frequency ResponseSmall Signal Frequency Response - Magnitude
Small Signal Frequency Response - Phase
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Step ResponseX-Axis Step Response
Y-Axis Step Response
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2D Lookup Tables
Voltage vs. X Mech. Angle - Lookup Table
Voltage vs. Y Mech. Angle - Lookup Table
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2D Lookup Tables
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Y vs. X Tilt - Addressable Mech. Angles
