25
Give your Microscope a Hand Recent Advances in Handling & Characterizing Materials and Electronics from Micro to Nano Scale EFUG Workshop, Cagliari Oct 1st, 2012 Andrew J. Smith

Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

  • Upload
    others

  • View
    0

  • Download
    0

Embed Size (px)

Citation preview

Page 1: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Give your Microscope a Hand

Recent Advances in Handling & Characterizing Materials and Electronics from Micro to Nano Scale

EFUG Workshop, Cagliari

Oct 1st, 2012 Andrew J. Smith

Page 2: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Give your microscope a hand!

Page 3: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Finger Tips for the Nano World

Page 4: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Up to 12 probes in SEM/FIB in a few seconds

Page 5: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Nano Workshop

Page 6: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Soldering Laser Welding

Page 7: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Lathe

Page 8: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Grip Nano Objects

Page 9: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Lift Out Shuttle

3 Lift Outs in 12 min

Page 10: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

RoTip Rotate and watch from all Angles

Page 11: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

SemGlue Pull Nano Objects

Page 12: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Force Sensor Tensile and Forging Experiments

Page 13: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Spring Table with Analysis SW Nanomechnical Characterization

Page 14: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

E5AT Eucentric 5 Axis Stage EBSD, ECCI

Page 15: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

EBSD, ECCI

Page 16: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Gas Injection System EBID and Charge Compensation

Page 17: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Prober Shuttle

Page 18: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Heating Stub Heating Tip

Cryo Tip Holder

Page 19: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Active Potential Contrast Courtesy of Frank Zachariasse, Philips Nijmegen

Page 20: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

EBAC Electron Beam Absorbed Current

Page 21: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Electron Beam Induced Current EBIC Live Imaging

Page 22: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Micro Four Point Probe M4PP

Sheet Resistance

Page 23: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Ease of Use Automatic Parking, Cable Drumm

Page 24: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

iPad Control

Page 25: Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all Angles. SemGlue Pull Nano Objects. Force Sensor Tensile and Forging Experiments

Thank you