Transaction Information

ToolId DC08ToolStatus Running WafersLocation East Fishkill, NYWaferSize 300 mmFabSection Clean

General Product Information

VendorSupplier SCREEN/DNSModel SU-3100Vintage 2011SerialNo 530L00394AAssetDescription SINGLE WAFER WET STATIONSoftwareVersion NACIM NAProcess SP-SC1-SC2-HF

Hardware Configuration (Fab)

SystemType Description Quantity StatusMain System 8 CHAMBER AQUASPIN OK Factory Interface FOUP 4 OK Handler System Yasakawa 1 OK Options System naOthers na

Hardware Configuration (Subfab / Auxilliary Units)

Description Quantity StatusCooling Unit 1 OK

Missing/Faulty Parts / Accesorries List

Description Quantitynone 1

Tool Pictures

general Main Body

manufactureserial S/N MFG Plate

Additional Configuration Files