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Greetings from
Multi-scale and Multi-physics Modeling
Their Role in 3D Integration
Multi-scale and Multi-physics Modeling
Their Role in 3D Integration
IEEE EMC Society & Georgia TechIEEE EMC Society & Georgia Tech
Madhavan Swaminathan
Distinguished Lecturer, IEEE EMC Society
Joseph M. Pettit Professor in Electronics
School of Electrical and Computer Engg.
Director, Interconnect and Packaging Center
Georgia Institute of Technology Feb 2012
� 3D Integration – What, Why and When ?
� Case for Multi-scale and Multi-physics Modeling
� Through Silicon Via Basics
� Electromagnetic Modeling (Multi-scale)� EFIE – Managing Spatial Resolution for Cylindrical Structures
� FDTD – Managing time resolution
� Electrical - Thermal Modeling (Multi-physics)� Joule Heating & IR Drop� Temperature Dependent High Frequency Effects
� Some thoughts on Electrical - Mechanical Modeling (Multi-physics)
� Concluding thoughts …..
OutlineOutline
Georgia Institute of Technology Feb 2012
Moore’s LawMoore’s Law
1965
Components/IC will double every year
1975
Components/IC will
double every two years
When asked, “What would you like your legacy to the world to be ?”Dr. Moore replied: “Anything” but Moore’s Law”
� Has been the
driver for the
semiconductor
industry for more than
4 decades
� More well known
than Murphy’s lawSource: Spectrum and Anderson
School UCLA
Georgia Institute of Technology Feb 2012
System Convergence and Miniaturization TrendSystem Convergence and Miniaturization Trend
1970 1980 1990 2000
100
1000
10000
100000
Vo
lum
e(cm
3)
W/S
SMART
“Watch” &
Bio-sensor
SINGLE FUNCTION
MULTIFUNCTION
MEGAFUNCTION
Notebook
PC
Laptop
Cellular
Fu
nct
ion
al
Den
sity
or
Co
mp
on
ent
Den
sity
/ c
m3)
Courtesy: Packaging Research Center, Georgia Tech
Georgia Institute of Technology Feb 2012
70 72 74 76 78 80 82 84 86 88 90 92 94 96 98 00 02 04 06 08 10 12 14 16 18 20 22 24 1
101
102
103
104
105
106
109
108
107
106
105
104
103
102
Mor
e th
an M
oore
SIP
/SO
PO
rgan
ic
Even M
o(o)re
Eve
n M
o(o)
re
Silic
on
World’s smallest
Organic RF Module
PRC/JMD
Moore’
s Law
Computing
Con
sum
er
Com
putin
g
, Con
sum
er,
Bio
, Ene
rgy
Performance
Degrades
With scaling
Quad
core
Dual
Core
3D
INTEGRATION
Ceramic/PWBVol=XYZ
Vol=10-3XYZ
Vol=10-6XYZ
Tra
nsis
tor
Density/c
m2
Syste
m C
om
p. D
ensity/c
m2
107
Source: IPC, PRC and Spectrum
Year
Is Moore’s Law Sufficient for System Miniaturization ?
Is Moore’s Law Sufficient for System Miniaturization ?
Georgia Institute of Technology Feb 2012
Stacking using Wirebond (past)
Stacking using TSV (future)
POP Stacking (present)
Ref: R. Tummala and M. Swaminathan, “Introduction to System on Package”, McGraw Hill, 2008
3D Z-directioninterconnections
3D Integration Technologies3D Integration Technologies
Georgia Institute of Technology Feb 2012
CPU and Memory Integration TrendCPU and Memory Integration Trend
Inte
gra
tion
Den
sity
Time
Multichip Package
DDR3
Stacked POPLPDDR
Stacked PIPLPDDR+Analog
Stacked TSV
Wide I/O
4.8nJ/word
512pJ/word
512pJ/word
2-7pJ/word
� Power Budgeting 10X increase in 10 Years� 30-50% increase in I/O Power (Mobile)� 3D w/ TSV reduces power by 4-10X� Interconnect/Packaging Based Solution
Courtesy: Part Greg Taylor, Intel and Paul Franzon, NC State
Georgia Institute of Technology Feb 2012
� First Killer Product in 2013
� Wide I/O Memory� Mobile product application
� 512 I/Os transmitting at 12.8Gbps (3.2Gbps
in LPDDR2 memory)
� 8X improvement in Bandwidth� 35% decrease in package size
� 50% decrease in power consumption
Courtesy: Samsung [1]
[1] Dr. Oh Hyun Kwon [ISSCC, 2010] – Samsung Electronics Courtesy: Xilinx
3D w/ Chip Stacking
2.5D
3D enabled w/ Interposer
Integration ApproachesIntegration Approaches
Georgia Institute of Technology Feb 2012
Empire State Building Micro-system
Going VerticalGoing Vertical
www.ipc.gatech.edu
Strong Foundationto protect against earthquake & entry/exitto outside world
MechanicalIntegrity toProtect againstHurricane
CommunicationBetween FloorsWith minimum interference
Good cooling System to remove heat
Georgia Institute of Technology Feb 2012
Power Delivery/DC/ACEMI
Signal Integrity
Place & Route
Electrical (EMC)
Joule HeatingThermal ManagementT
he
rma
l
Mechanical Stresses
Me
ch
an
ical
Tier 1Thickness ~ 50 µmAc tive Face Down
Tier 1Thickness ~ 5 0 µm
Active Face D own
BackSide MetalPitc h ~ 5-25 µm
BackSide MetalPitch ~ 5-2 5 µ m
Package SubstrateThickness ~ 180 µm
Package SubstrateThickness ~ 1 80 µ m
UnderfillG ap ~ 80 µ m
UnderfillGap ~ 80 µm
Flip Chip BumpSize ~ <100 umPitch ~ 100-200 um
Flip Chip BumpSize ~ <100 umPitch ~ 100-200 um
TSVSize ~ 5-10 µmPitc h ~ 10-50 µm
TSVSize ~ 5-10 µm
Pitch ~ 10-50 µm
BGA BumpPitch ~ 0.65 mm
H eight ~ 300 um
BGA BumpPitch ~ 0.6 5 mmHeight ~ 300 um
µ-BumpPitc h ~ 25-50 µm
µ-BumpPitch ~ 25-50 µm
UnderfillGap ~ 20 µ m
UnderfillGap ~ 20 µm
Tier 2Thickness ~ 260 µm
Ac tive F ace D own
Tier 2Thickness ~ 2 60 µ mActive Face Down
Mu
lti-
sca
le G
eom
etr
y
Multi-physicsenvironment
Modeling for 3D IntegrationModeling for 3D Integration
Multi-scale
&
Georgia Institute of Technology Feb 2012
Cu Oxide
Si
D=100µm, R=15µm, L=100µm, dox=0.1µm, εSiO2=3.9 and εSi = 11.9
Sharp increase in IL
Gradual increase in IL
Structure and Electrical Response of Through Silicon Via Pair
Structure and Electrical Response of Through Silicon Via Pair
Georgia Institute of Technology Feb 2012
Signal ViaPort 1
Signal ViaPort 2
Ground Via
Ground Via
R1
C1
R2
C2
R1
C1
R
L/2
R
L/2
Conductance
1.E-04
1.E-03
1.E-02
1.E-01
1.E+00
1.E+01
1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10 1.E+11
Frequency (Hz)
Conducta
nce (m
S)
Conductance
Capacitance
1.E-02
1.E-01
1.E+00
1.E+01
1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10 1.E+11
Frequency (Hz)C
apacitance (pF)
Capacitance
Loss Tangent
0.E+00
5.E+00
1.E+01
2.E+01
2.E+01
3.E+01
3.E+01
4.E+01
1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10 1.E+11
Frequency (Hz)
tan
d
Loss Tangent
Slow Wave Quasi-TEMTransition
� Strong interfacial polarization and dielectric
relaxation exists that provide unique characteristics
to TSVs through the Maxwell-Wagner Effect (Defines Slow Wave and Quasi-TEM mode)
Maxwell-Wagner EffectMaxwell-Wagner Effect
Georgia Institute of Technology Feb 2012
Conductor (10um dia) Thin oxide layer (<1um)
Lossy silicon substrate
100um
10-30um
Due to the length scale (1:1000), it is difficult to apply EM Modeling directly to
TSV Arrays
Electromagnetic Modeling of TSVsThe Multi-scale Problem
Electromagnetic Modeling of TSVsThe Multi-scale Problem
Georgia Institute of Technology Feb 2012
� Uses Cylindrical
Basis Functions – CMBF, AMBF,PMBF
� Solves Electric Field Integral Equation
� Uses Acceleration Methods
� Computes frequency dependent RLGC parameters
� Computes accurate coupling and loss occurring due toproximity effect
� TSV position can be arbitrary (Eliminates Meshing)
Mutual Inductance
Integral Equation Based Solver using Specialized Basis FunctionsIntegral Equation Based Solver using Specialized Basis Functions
Georgia Institute of Technology Feb 2012
×1
×5.0
×5.0
SE mode
PE-d mode
PE-q mode
Resultant current
density distribution
×1
×5.0
×5.0
SE mode
PE-d mode
PE-q mode
Resultant current
density distribution
-1.5 -1 -0.5 0 0.5 1 1.5
-1.5
-1
-0.5
0
0.5
1
1.5
-1.5 -1 -0.5 0 0.5 1 1.5
-1.5
-1
-0.5
0
0.5
1
1.5
-1.5 -1 -0.5 0 0.5 1 1.5
-1.5
-1
-0.5
0
0.5
1
1.5
-1.5 -1 -0.5 0 0.5 1 1.5
-1.5
-1
-0.5
0
0.5
1
1.5
-1.5 -1 -0.5 0 0.5 1 1.5
-1.5
-1
-0.5
0
0.5
1
1.5
Skin and Proximity Effect Modes
Polarization Effect Modes
Fundamental
1st Mode 2nd Mode
Ref: K. J. Han and M. Swaminathan, “Inductance and Resistance
Calculations in Three-Dimensional Packaging using
Cylindrical Conduction Mode Basis Functions”, IEEE Trans. on
Computer Aided Design of Integrated Circuits & Systems, ‘09
Modal Basis FunctionsModal Basis Functions
Georgia Institute of Technology Feb 2012
-6 -4 -2 0 2 4 6-6
-4
-2
0
2
4
6x 10
-5
�378 basis functions (Fast Henry)
�3 – 5 Specialized Basis Functions (This Method)
Modeling of Current in ConductorModeling of Current in Conductor
Fast Henry
Georgia Institute of Technology Feb 2012
conductor series
resistance Conductor self
and mutual
inductances
Problem due to
increased conductance
(leakage)
Conductance
CapacitanceTSV StructureL=100umD=30umP=60umGrounded Substrate
K. J. Han, M. Swaminathan and T. Bandhyopadyay, “Electromagnetic Modeling of Through-Silicon Via (TSV) Interconnections using Cylindrical Modal Basis Functions”, IEEE Trans. on Advanced Packaging, 2010
RLGC Parameter ExtractionRLGC Parameter Extraction
Georgia Institute of Technology Feb 2012
Frequency 1GHz
-70
-60
-50
-40
-30
-20
-10
0
0 50 100 150 200 250
Pitch (um)
Co
up
lin
g (
dB
)
TSV
TOV
Frequency 10GHz
-70
-60
-50
-40
-30
-20
-10
0
0 50 100 150 200 250
Pitch (um)
Co
up
lin
g (
dB
)
TSV
TOV
R=10µm, L=100µm and dox=100nm
er(SiO2)=3.9, er(Si)=11.9
R=10µm and L=100µmEr = 3.9
D: Pitch
D: Pitch
25dB
7dB
Crosstalk – A Major Concern for Silicon InterposerCrosstalk – A Major Concern for Silicon Interposer
Georgia Institute of Technology Feb 2012
Q
G G G
G
G G
S
G
G
S S S S
S S S S S
S
S
S
S
S
S
D=100µm, R=10µm, L=200µm, dox=0.1µm, εSiO2=3.9 and εSi = 11.9
50 Ohm2V
50 Ohm
0 0.2 0.4 0.6 0.8 1
x 10-8
-0.02
0
0.02
0.04
0.06
0.08
0.1
0.12
TS
V-1
3 (
V)
TIME
Coupled Noise into Q TSV
All Signals Excited
Noise Measured on TSV Q Near End
Shielding
doesn’t work
well
Importance of ShieldingImportance of Shielding
Georgia Institute of Technology Feb 2012
Top viewCross-sectional view
SiO2
Si300 um
10 um
1000 um
1000 um
500 um500 um
20 um 150 um
100 um
1 mm 20 mm 1 mm
1 um
PEC boundary
20 mm
45 um
500 um
500 um100 mm
PEC boundary40 mm
• TSV oxide thickness: 1um
• TSV copper diameter: 100um
• Silicon conductivity: 10 S/m
• Scale difference=1um(oxide thickness):20mm(length of TL)=1:20000
• Discretized into 94 × 263 × 31 = 766,382 (Laguerre-FDTD Method)
� 4.6M unknowns
V. Sridharan, M. Swaminathan, and T. Bandyopadhyay, “Enhancing Signal and Power Integrity Using Double Sided Silicon Interposer,” IEEE
Microwave and Wireless Components Letters, To be Published in Dec. 2011
Microstrip Transition with Power and Ground Planes
Microstrip Transition with Power and Ground Planes
Georgia Institute of Technology Feb 2012
Start with FDTD
222
111
1
zyxc
t
∆+
∆+
∆
<∆
� Yee Grid Limited by the CFL stability condition Can lead to long simulation time for multi-scale dimensions� However, FDTD is memory efficient
Expand the fields
Ez Hy
Marching on Time
� Unconditional Stability
� Reduces simulation time for multi-scale dimensions – time step not limited by CFL condition� Domain decomposition techniques can be applied to reduce memory and increase capacity
Marching on Degree
qEEE ,....,, 10
0 5 10 15 20 25 30-0.5
0
0.5
1
p=0
p=1
p=2
p=3
p=4
Laguerre basis functions
Laguerre Finite Difference Time Domain (FDTD) MethodLaguerre Finite Difference Time Domain (FDTD) Method
Georgia Institute of Technology Feb 2012
22
Laguerre-FDTD
SLeEC
Improvement
Laguerre-domainTime-domain
Maxwell’s equations
in time-domain
Maxwell’s equations
in Laguerre-domain
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 50
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
Time (ns)
J (A
/m2)
0 20 40 60 80 100 120 140 160 180 200-2.5
-2
-1.5
-1
-0.5
0
0.5
1
1.5
2
2.5
Coefficient #
Am
plit
ude
0 20 40 60 80 100 120 140 160 180 200-3000
-2000
-1000
0
1000
2000
3000
4000
Coefficient #
Am
plit
ude
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5-800
-600
-400
-200
0
200
400
600
800
1000
1200
Time (ns)
J (A
/m2)
SourceSource
Solution
[5] Y.-S. Chung, T. K. Sarkar, B. H. Jung and M. Salazar-Palma, "An unconditionally stable scheme for the finite-difference time-domain method," IEEE Trans. Microw. Theory Tech., vol. 51, no. 3, pp. 697-704, Mar 2003. [6] K. Srinivasan, Multiscale EM and Circuit Simulation Using the Laguerre-FDTD Scheme for Package-Aware Integrated-Circuit Design. PhD Thesis, Georgia Institute of Technology, 2008
[1] K. S. Yee, "Numerical solution of initial boundary value problems involving Maxwell’s equations in isotropic media," IEEE Trans. Antennas Propag., vol. 14, no. 3, pp. 302-307, Mar 1966. [2] Shumin Wang, “Numerical Examinations of the Stability of FDTD Subgridding Schemes,” ACES Journal, Vol. 22, No. 2, July 2007[3] T. Namiki and K. Ito, "A new FDTD algorithm free from the CFL condition restraint for a 2D-TE wave," in IEEE AP-S Symp. Dig., Orlando, FL, 1999. [4] F. Zheng and Z. Chen, "Numerical Dispersion Analysis of the Unconditionally Stable 3-D ADI–FDTD Method," IEEE Trans. Microwave Theory and Tech., vol. 49, no. 5, pp. 1006-1009, May 2001.
Prior Time Domain Methods
Laguerre-FDTD Methods
SLeEC (Simulation using Laguerre-Equivalent Circuit) [6]
� Equivalent circuit model� Infinite time simulation capability� Optimal # basis functions
� Node numbering scheme for memory efficiency� Dispersion� Skin effect
Laguerre - FDTD MethodLaguerre - FDTD Method
Georgia Institute of Technology Feb 2012
Laguerre-FDTD
CPU time 319 mins
Memory
consumption44 GB
SiO2
Si300 um
10 um
1000 um
1000 um
500 um500 um
20 um 150 um
100 um
1 mm 20 mm 1 mm
1 um
PEC boundary
20 mm
45 um
500 um
500 um100 mm
PEC boundary40 mm
L-FDTD
CST
CPU Time << FDTD
Memory > FDTD
(Can be reduced using
Domain Decomposition)
Simulation ResultsSimulation Results
Georgia Institute of Technology Feb 2012
� Steady-state Electrical Problem
� Steady-state thermal problem
),,,( Tzyxρ : Electrical Resistivity
),,( zyxφ : Electrical Potential
Current
Ohmic Loss ���� Joule Heat:
Conductor
IRV =∆
),,(),,( zyxEJzyxPJoule
vvv⋅=
0),,(),,,(
1=
∇⋅∇ zyx
Tzyxφ
ρ
),,,( Tzyxk : Thermal conductivity
),,( zyxT : Temperature
Heat sources
Power from Transistors
),,( zyxP
(((( )))) ),,(),,(),,( zyxPzyxTzyxk −−−−====∇∇∇∇⋅⋅⋅⋅∇∇∇∇
),,,( Tzyxρ Joule heating
Current
Multi-core CPU
Stacked Cache Memory
Multi-physics – Interaction between Electrical and ThermalMulti-physics – Interaction between Electrical and Thermal
Georgia Institute of Technology Feb 2012
• Conductor electrical resistivity
20 40 60 80 100 120 140 160 180 2001.5x10
-8
2.0x10-8
2.5x10-8
3.0x10-8
3.5x10-8
4.0x10-8
4.5x10-8
5.0x10-8
Resis
tivit
y (
Oh
m*m
)
Temperature (Degree)
Silver
Copper
Aluminum
30% increase
• Silicon thermal conductivity[*]
[*] http://www.efunda.com/
Electrical and Thermal Properties of Metal and Silicon Vs Temperature
Electrical and Thermal Properties of Metal and Silicon Vs Temperature
Creates HotspotsIncreases Ohmic Loss
Georgia Institute of Technology Feb 2012
Combined IR Drop & Thermal AnalysisCombined IR Drop & Thermal Analysis
Convergent?No
Yes
Input
Static Electrical Solver*(formulation, mesh, solve)
Heat Sources Calculation
Static Thermal Solver*(formulation, mesh, solve)
Update Material Properties
Output
DC
IR DropThermal
Gradient
Joule Heating
T-Dependent
Resistance
J. Xie, D. Chung, M. Swaminathan, et al, “Electrical-thermal co-analysis for power delivery networks in 3D system integration,” IEEE International Conference on 3D System Integration (3DIC), pp. 1-4, Sept. 2009.
J.Xie, D. Chung, M. Swaminathan, M. Mcallister, et al, “Effect of system components on electrical and thermal characteristics for power delivery networks in 3D system integration,” 18th conference on Electrical Performance of Electronic Packaging and Systems (EPEPS), pp. 113-116, Oct. 2009.
Georgia Institute of Technology Feb 2012
Max temperature v.s. flow velocity
J. Xie, M. Swaminathan, “Electrical-thermal co-simulation with micro-channel water cooling in 3D integration,” accepted
with revision by IEEE Trans. Advanced Packaging, 2010.
Correlation with measurement
3D System with micro-channels
40 50 60 70 80 90 100 11020
25
30
35
Ou
tlet
Tem
pera
ture
(D
eg
ree)
Flow Rate (m l/m in)
Simulation
Measurement
Heat Conduction, Air Convection and Micro-fluidic CoolingHeat Conduction, Air Convection and Micro-fluidic Cooling
20 40 60 80 100 120
30
40
50
60
70
80
90
100
Tem
pera
ture
(D
eg
ree)
Flow Rate (ml/min)
Max chip temp: Chip1Max chip temp: Chip2
Channel output temp: Chip1Channel output temp: Chip2
Georgia Institute of Technology Feb 2012
Temperature (Flow rate: 104 ml/min)
Temperature and IR drop with Micro-fluidic CoolingTemperature and IR drop with Micro-fluidic Cooling
Temperature
Decrease
Using Micro-channels
IR Drop
DecreasesUsing
Micro-channels
Steady State Steady State
Georgia Institute of Technology Feb 2012
29
Die Temperatures
X (mm)y (mm)
Die: 1.2 cm x 1.2 cm
Interposer: 3 cm x 3 cm
PCB: 10 cm x 10 cm
Convection coefficient: 20 W/(m2K)
Interposer thickness: 110 micron
Die thickness: 200 micron
TIM conductivity: 2 W/(m-k)
Ideal heat sink: 25 Celsius
Air convection for interposer and PCB
Interposer Temperature
PCB Temperature
Power Map
17 W
17 W
8 W
8 W
17 W
17 W8 W
8 W
Die1
(50 W)
Die2
(50 W)
Stacked Dies
X (mm)y (mm)
TSV Location
Top Die
Jianyong Xie, M. Swaminathan, "Electrical-thermal co-simulation of 3D integrated systems with micro-fluidic cooling and
Joule heating effects," IEEE Trans. on CPMT, vol. 1, no. 2, pp. 234-246, Jan. 2011.
Bottom Die
Temperature Gradients in a SystemTemperature Gradients in a System
Georgia Institute of Technology Feb 2012
Temperature Dependent TSV model
Temperature-dependent Copper conductivity[*]
Temperature-dependent Silicon Conductivity[*]
*W.-S. Zhao, X.-P. Wang, and W.-Y. Yin, "Electro-thermal effects in high density through silicon via (TSV) arrays," Progress In
Electromagnetics Research, Vol. 115, 2011.
Temperature Variation of Conductivity for Copper and Silicon
Temperature Variation of Conductivity for Copper and Silicon
Georgia Institute of Technology Feb 2012
0 0.5 1 1.5 2
x 10-9
-0.05
0
0.05
Co
up
led
No
ise
TIME
T= 25 C
T= 60 C
T= 95 C
T=110 C44.16 mv
34 mv
Coupling increases as
temperature increase
Coupling decreases as
temperature increase
Silicon substrate
Signal TSV-1 Signal TSV-2
Ground TSV-1 Ground TSV-2
umI RDLref 95_ =
umP TSVTSV 250=−
umhsub 100=
umd TSVTSV 130=−
Microprobe
Port 1
Microprobe
Port 2
30υm
Capacitive
Portion
Resistive
Portion
Xtalk decreases
with temperature
Temperature Dependent High Frequency EffectsTemperature Dependent High Frequency Effects
Georgia Institute of Technology Feb 2012
TSV and surrounding stressed region. Arrows indicate direction of differential thermal expansion
Courtesy: G. Subbarayan, Purdue Univ.
Thermal field
Keep outregion Distance
Mechanical StressMechanical StressThermal Induced Stress
Thermal Induced Stress
S. M. Sri-Jayantha, et al, "Thermomechanical modeling of 3D electronic packages," IBM J. RES. & DEV., Vol. 52, No. 6, Nov. 2008.
� TSV induced stress is very large at the TSV-silicon interface � Relatively small as the distance from the TSV increases� Keep Out Zones (KOZ) around the TSV to maximize
reliability and performance� KOZ ensures that there is no wiring, TSVs or other transistordevices in this region
CTE (Cu) ~ 17ppm/CCTE (Tung) ~ 4.5ppm/C
CTE (Si) ~ 3ppm/C
Linear coefficient @ 20C
Keep Out Zones (KOZ) – Need for Mechanical ModelingKeep Out Zones (KOZ) – Need for Mechanical Modeling
Georgia Institute of Technology Feb 2012
Insertion Loss
NEXT between 1 and others FEXT between 1 and others
1
50µm
100µm
1V Excitation
Keep Out Zones (KOZ) and TSV Electrical ResponseKeep Out Zones (KOZ) and TSV Electrical Response
Spread in IL
Spread in Coupling
Change in
Current Dist.
Georgia Institute of Technology Feb 2012
Concluding Thoughts …..Concluding Thoughts …..
Mechanical Stresses
Joule Heating/Electro-migration
Thermal Management
Signal Integrity
Place & Route
Multi-physics andMulti-scaleEnvironment neededFor the DesignOf 3D Heterogeneous SystemsTier 1
Thickness ~ 50 µmAc tive Face Down
Tier 1Thickness ~ 5 0 µm
Active Face Down
BackSide MetalPitc h ~ 5-25 µm
BackSide MetalPitch ~ 5-2 5 µ m
Package SubstrateThickness ~ 180 µm
Package SubstrateThickness ~ 1 80 µ m
UnderfillGap ~ 80 µ m
UnderfillGap ~ 80 µm
Flip Chip BumpSize ~ <100 umPitch ~ 100-200 um
Flip Chip BumpSize ~ <100 umPitch ~ 100-200 um
TSVSize ~ 5-10 µmPitc h ~ 10-50 µm
TSVSize ~ 5-10 µm
Pitch ~ 10-50 µm
BGA BumpPitch ~ 0.65 mm
Height ~ 300 um
BGA BumpPitch ~ 0.6 5 mmHeight ~ 300 um
µ-BumpPitc h ~ 25-50 µm
µ-BumpPitch ~ 25-50 µm
UnderfillGap ~ 20 µ m
UnderfillGap ~ 20 µm
Tier 2Thickness ~ 260 µm
Ac tive Face Down
Tier 2Thickness ~ 2 60 µ mActive Face Down
Multi-scale
Need for the modelingof the interaction betweenmultiple domains will only
increase for 3D!Time for the IEEE Community to Innovate!
Georgia Institute of Technology Feb 2012
epsilonlab.ece.gatech.edu; www.ipc.gatech.edu
Thank youThank you