High & Ultrahigh Vacuum Thin Film Deposition Technologyfrom an art form to a precise science over the past 40 years. It is now commonplace to evaporate metals, alloys, compounds and

VACUUM PRODUCTS CORPORATION

High & Ultrahigh VacuumThin Film Deposition Technology

e-Vap® Summary

Vacuum coating technology has evolvedfrom an art form to a precise science overthe past 40 years. It is now commonplaceto evaporate metals, alloys, compoundsand polymers, and control their desiredthicknesses from mere atomic layers toactual microns.

Thin Film Deposition

MDC produces state-of-the-art thin filmvacuum coating equipment. We currentlysupply users in the optical, metallurgical,medical, semiconductor, research &development, university and OEMmarketplace.Numerous applications include sunglasses,mirrors, laser optics, camera lenses, opticalfilters, infrared detectors, anti-reflectivecoatings, nano-technologies, medicaldevices, superconductors, telecommuni-cations, automotive decorative trim,costume jewelry, corrosion resistantcoatings, stage & entertainment lighting,fiber optic coating, display technologiesand MEMs technology.

The e-Vap® Product Line

MDC offers a wide range of choices andoptions. We understand that every vacuumsystem configuration may be different. Weoffer many standard off-the-shelfcomponents as well as customized designsto suit your particular deposition equipmentneed. The e-Vap® product line supportstwo distinct evaporation methods: the firstbeing thermal or resistive evaporation andthe second being electron beamevaporation.

Resistive Evaporation

The Re-Vap™ resistive sources are by farthe most economical and reliable methodof depositing thin films onto surfaces. Ingeneral terms, electric current passesthrough a resistive element that generatessufficient heat to melt and evaporatevarious coating materials. Materialscommonly evaporated include iron, nickel,aluminum, copper, tin, silver, gold andchrome. Three basic resistive elementdesigns are offered: filament coil, metal foiland oxide crucible types. Filament coildesigns are the most popular. All resistiveelements are relatively inexpensive andcan be discarded after each use or afterseveral uses.

Electron Beam Evaporation

MDC offers an unprecedented selection ofelectron beam evaporation sources andcontrol electronics. Electron beamevaporation is the most versatile means ofvacuum evaporation and deposition. Thistechnique allows the production of thin filmcoatings from pure elements, numerousalloys and compounds. Electron beamevaporation offers several advantages overcompeting processes including precisecontrol of low or high deposition rates,excellent material utilization, sequential &co-deposition and uniform low temperaturedeposition. It also offers relatively highevaporation rates, freedom from sourcecontamination, precise film compositionsand cooler substrate temperatures. Thematerials used for evaporation areavailable in near limitless shapes andforms, the most common being pellets,slugs and disks. Since the 1950s, thedevelopment of higher performance filmsand complex coating processes has beenobstructed by the lack of modern electronbeam evaporation equipment andtechnology. The e-Vap® product line hastaken this challenge head-on and provideselectron beam evaporation sources andcontrol electronics that incorporate leadingedge technologies unmatched in theindustry.

Frame 6 Electron Beam Source

Mighty Source™ mounted on a 6-inch CF flange

XY Programmable Sweep Controller

CVS High Voltage Power Supply

Copyright © 2005 MDC Vacuum Products CorporationReproduction in any manner, in whole or in part, in English or

in other languages, is prohibited. All rights reserved.

1

Miniature Evaporation Systems

Introduction 2

e-Vap® 100 10e-Vap® 3000 12Mighty Source™ 14

Modular Evaporation SourcesIndividual Source 17

Power Supplies 27

XY Programmable Sweep Controller 29

Ordering Information 43Index 44

Horizontal Source Assembly 23Vertical Source Assembly 25

Source Control Module 28Controls & Measurement

Deposition Monitoring and Control 33Crucible Indexer 36

Evaporation Source Accessories 37HF Emitter Assembly 41

Thin FilmDeposition

Thermal EvaporationRe-Vap™ 900 4Re-Vap™ 3000 6

e-Vap®

2 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

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micro-electronic, optical coating andsemiconductor industries. Electron beamevaporation sources are employed in theproduction of a multitude of low and hi-tech products including: sunglasses,camera lenses, optical filters, infrareddetectors, superconductors, automotivedecorative trim, costume jewelry, corrosionresistant surfaces and many others.Electron beam deposition is ideal forresearch and production applications dueto its widespread material availability,efficient material utilization and unmatchedfilm purity and uniformity.

e-Vap® Product Line

The e-Vap® product line is as vast as theapplications requiring electron beamevaporation. Each and every e-Vap®source is designed to meet or surpass thestringent requirements put forth by thevacuum coating world. As a leader andinnovator in this field, MDC holds variouspatents in electron-beam evaporationtechnology. Two notable patents includeU.S. patent numbers 5,418,348 and5,473,627. The first is for MDC’s uniqueelectron source design, which incorporateshigher material capacity with adramatically smaller source footprint. Thesecond, for an ingenious coolant deliverysystem incorporated into MDC’s UHV multi-pocket rotary sources. e-Vap® electronbeam sources are available in six basicsizes, called Frames, which canaccommodate small research as well aslarge production coating requirements withcrucible capacities from 2cc to 400cc. Thesources are offered individually or ascomplete turn-key, flange-mountedsystems with all necessary serviceconnections, including fluid and electricalfeedthroughs. These state-of-the-artevaporation sources are powered andcontrolled with equally advanced solidstate switching power supplies, beamsweepers and control electronics. Thehighest rated power supply is capable of a15,000 Watt output at negative 10,000Volts, fits on a standard 19" rack, is only10-1/4" tall and weighs 100 pounds.Flange-mounted units are factoryassembled and tested including allfeedthroughs. A range of standard optionsinclude a watercooled collimator roof, astepper motor indexer and aprogrammable XY sweep controller.

Introduction


Thin film deposition of metallic, insulating,conductive and dielectric materials playsan important role in a large number ofmanufacturing, production and researchapplications. Resistance heating, sputteringand electron beam are the processes mostwidely used. Techniques employed toperform these processes differ in degree ofsophistication and quality of film produced.A resistance heated evaporation source isrelatively simple and inexpensive, but thematerial capacity is very small. Sputterdeposition can be used to coat large areasand complex surfaces in productioncoating environments utilizing time andpower for rate control.

Electron beam evaporation is the mostversatile means of vacuum evaporationand deposition. This technique allows theproduction of thin film coatings from pureelements, including most metals, as wellas numerous alloys and compounds.Electron beam evaporation offers severaladvantages over competing processesincluding precise control of low or highdeposition rates, excellent materialutilization, co-deposition and sequentialdeposition systems and a uniform lowtemperature deposition. Electron beamoffers higher evaporation rates, freedomfrom contamination, precise rate control atvery low deposition levels, precise filmcomposition and cooler substratetemperatures. The materials used forevaporation are available in near limitlessshapes and forms, the most commonbeing pellets, slugs and disks. Since theintroduction of electron beam evaporationin the 1950s, the development of higherperformance films and complex coatingprocesses has been delayed by the lack ofmodern electron beam equipment andtechnology. MDC’s e-Vap® product linehas taken this challenge head-on andprovides electron beam evaporationsources and control electronics thatincorporate leading edge technologiesunmatched in the industry.

Thin Film Applications

Thin film applications requiring electronbeam evaporation are continuallyincreasing. Applications are found in themedical, metallurgical, telecommunication,

All dimensions in this catalog are given ininches unless specified otherwise.


Miniature evaporation systems include thee-Vap® 100, a precision wire fed electronbeam source designed specifically fordepositing monolayer thin films in ultrahighvacuum environments. It can depositrefractory metals at an atomic level.

e-Vap® 3000 is a 2cc capacity, miniatureelectron beam evaporation system with a3kW power supply. This is a versatiledeposition tool used for thin film coatingprocesses in high and ultrahigh vacuumenvironments. The e-Vap® 3000 systemevaporates virtually all rare earth refractoryand dielectric materials. It providesresearchers a simple, relatively low-costmeans of depositing high purity thin filmcoatings.

Re-Vap™ resistive heater sources are alsopart of the miniature product line. Thesesources are available with filament boatsor coils and oxide crucibles. Re-Vap™

sources are by far the most economicalmethod of depositing thin films.

Evaporation Materials

MDC e-Vap® sources are rugged, reliableand easy to maintain. Electron beamevaporation is an extremely versatilemeans of depositing uniform high-puritythin films. Capable of reaching elevatedtemperatures in excess of 3500°C,evaporation of virtually any material can beaccomplished.

The Silica, Hafnia and Magnesium Fluoridematerials shown at right were producedusing an e-Vap® power supply, e-Vap®Source controller and e-Vap®Programmable Sweep Controller with astandard figure-eight pattern at 200Hzsweep frequency. The continuous andsuperior performance of this arrangementpermits the routine evaporation of theseand other difficult materials.

3MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817


Introductione-Vap®

Material Samples

Silica (SiO2)

FilamentTransformer

SourceControl Module

ProgrammableX-Y Sweep

DepositionRate Monitor

Auto Indexer Drive

SourceControl Module

ProgrammableX-Y Sweep

DepositionRate Monitor

FilamentTransformer

Fixed-Pocket UHV Sourcewith

Manual Controls

Rotary-Pocket UHV Sourcewith

Automatic Controls

Power Supply

Electronic components fit on standard 19" rack. Filament transformer can be mounted remotely as shown or directly on source flange.

Crystal SensorFeedthrough

Water CooledRoof

Shutter

Substrate Fixture

Single-PocketSource

Multi-PocketSource

Typical e-Vap® Installation

Magnesium Fluoride (MgF2)

Hafnia (HfO2)

Silica (SiO2) Carousel Source

004221-2.7x3.6

Re-Vap™


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Thermal Evaporation Systems

Resistive Heater Evaporation

MDC’s Re-Vap™ resistive filament heater evaporation is an econom-ical and reliable method of depositing thin film coatings in vacuum.Current passing through a resistive element generates sufficientheat to melt and evaporate various coating materials. Materials com-monly evaporated using resistive heating include iron, nickel, alu-minum, copper, tin, silver, gold and platinum. Re-Vap™ resistiveevaporation can be used for decorative metallizing as well asdemanding research applications. Three basic resistive elementdesigns are offered: filament coil, metal foil boat and oxide crucibletypes. Filament coil designs are by far the most popular. Re-Vap™

heater elements are economical and disposable. They can be dis-carded after each use to prevent material contamination.

Re-Vap™ coiled filaments are typically three stranded tungsten wireslooped into coils. Multistrand filaments are generally used becausethey offer a greater surface area than single wire filaments. Underthese conditions, the evaporant charge should be small comparedwith the mass of the filament. The filament can hold up to 1 gram ofevaporant material which is formed into staple-like shapes and hungon the central helix of the tungsten filament. Upon melting, the evap-orant wets to the filament and is held in place by surface tension.Spreading of the molten evaporant across the wire is desirable toincrease evaporation surface area. This is accomplished by distrib-uting the initial charge evenly over the entire length of the filament

coil. To minimize dripping of the molten material, the filament coiltemperature must be increased rapidly to 1200-1500°C. Using thistechnique, the molten material will climb or cling to the hot wire andvaporize efficiently. Another type of element coil is the filament bas-ket, used to evaporate pellets or chips of materials which either sub-lime or do not wet the filament wire upon melting. If wetting occurs,the coils of the basket are shorted and the temperature of the sourcedrops.

Metal foil boat type resistive elements are yet another choice forsmall evaporation applications. Metal foil boats are made from thinrefractory metal stampings, usually tungsten, molybdenum or tanta-lum. These boats have dimples which hold the evaporation material.Their miniature size and small capacity make them ideal for smallevaporation jobs. Metal foil boats operate at very high temperaturesand may cause alloying to occur with certain types of evaporationmaterials. Wetting of the metal surface by the molten evaporant isdesirable in the interest of good thermal contact, however, themolten metal will lower the electrical resistance of the foil in the meltarea, thereby causing a drop in temperature. This problem can beeliminated by using a boat which has been coated with a thin layerof aluminum oxide. The oxide coating will not allow wetting of themolten metal evaporant to the metal foil element.

Crucible heaters are an open circular wound filament which allowcrucibles to be inserted inside the windings. The crucibles are com-monly manufactured from alumina, carbon, quartz and boron nitride.Crucibles have insulating properties which form a thermal barrierbetween the filament and melt, allowing a uniform melt temperature.Crucible evaporation is very stable because of its uniform heating. Awide range of low to moderate temperature metals like palladium,tin, selenium, arsenic, indium and organic materials evaporate wellfrom crucibles. Crucibles are less prone to failure compared to metalfoil boats because of the complete isolation between the evaporantand the heater element, thus eliminating shorting or alloying.

Features

■ 900W power supply■ 2-3/4" Del-Seal™ CF flange mount■ Ideal for organic material evaporation■ Contact factory for higher current models

Specifications

Cooling Air cooled

Input power 208 V ±10%, Single-phase, 50/60 Hz, 7 Amperes

Voltage output 0 to 6 VAC

Current output 0 to 150 A

Weight 45lb

Dimensions

Power Supply 16" W x 6" H x 12" L

Output Cable 2 AWG x 10' L

Re-Vap™ 900 Watt Power Supply



Thermal Evaporation SystemsRe-Vap™

Heater Elements

Coated Metal Foil Boat

5.00

7.25

.77

3.75

2.75

2.75 Del-Seal™CF Flange

Acrylic High-Voltage

Shield

Resistive Heater Source Assembly

Oxide Crucible

Filament Coil

REFERENCEPART

NUMBERPRICE

$DESCRIPTION

3450

2450

1100

245

20

17

28

13

25

25

14

17

20

25

20

RH-900

RH-PS-900

RH-F-900

RH-CEK-900

RH-PSPK-900

RH-MFB-900TU

RH-MFB-900TA

RH-MFB-900M

RH-CFB-900TU

RH-CFB-900M

RH-FC-900

RH-FB-900

RH-OC-900A

RH-OC-900BN

RH-OC-900Q

992626

991256

992625

992619

991257-08

992624-01

992624-02

992624-03

992623-01

992623-02

992622

992621

992620-01

992620-02

992620-03

COMPLETE SYSTEM 1

900W POWER SUPPLY

RESISTIVE SOURCE ASSEMBLY 2

CONDUCTOR EXTENSION KIT

POWER SUPPLY SPARE PARTS KIT

METAL FOIL BOAT, TUNGSTEN

METAL FOIL BOAT, TANTALUM

METAL FOIL BOAT, MOLYBDENUM

COATED FOIL BOAT, TUNGSTEN

COATED FOIL BOAT, MOLYBDENUM

FILAMENT COIL

FILAMENT BASKET

OXIDE CRUCIBLE, ALUMINA

OXIDE CRUCIBLE, BORON NITRIDE

OXIDE CRUCIBLE, QUARTZ

1 Includes power supply and resistive source assembly. 2 Includes filament coil heater element.

Conductor Extension Kit

Standard Elements

Re-Vap™ Source Assembly

e-Vap®


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Features

■ 3000 Watt output■ Designed for industrial / production applications■ Compact size - mounts underneath chamber■ High frequency switching power supply■ 5 or 10 Volt tap option■ Connects to Sigma or Inficon rate controllers —

making it stand-alone capable■ CE compliant■ 6000 Watt stack option

Re-Vap™ Power Supply

MDC’s high powered Re-Vap™ resistive evaporation system is a highlyindustrial, robustly designed, economical method of depositing thin filmcoatings. The current passing through a resistive element (filament, boat,etc.) is produced by a unique high current, low voltage switch-mode highfrequency power supply that produces ample amounts of current needed toevaporate materials such as iron, nickel, aluminum, copper, silver, gold andplatinum. Silicon-monoxide, magnesium fluoride, as well as zinc selenideare readily evaporated.

Re-Vap™ Power Supply & Controller

MDC has taken advantage of its extensive knowledge of high frequencysolid-state switching power supplies by incorporating that technology into apatent applied high-powered 3000 watt Re-Vap™ power supply. Tremendoussize and weight reductions are the result. With overall dimensions of 5" x 8"x 13" and a total weight of 20-pounds, the power supply can be mountedunderneath the vacuum coating system just inches away from the high cur-rent feedthroughs. The power supply is only one-eighth the size and one-tenth the weight of a typical 3000 watt resistive power supply. Two uniqueadvantages include higher power efficiency and floor space savings. Powerefficiency is greater because the output cable length is reduced with aresulting lower power loss. The Re-Vap™ controller is a half-rack width dis-play module displaying the current, voltage, safety interlock and status/oper-ation indicators. For automated coating processes, it may be connected to arate/thickness controller for precise control. Power can also be controlledthrough the front panel or with the hand-held remote control.

Re-Vap™ clamp, High Current feedthrough and Z-bar™ extensions

The Re-Vap™ positive clamping method is universally designed for heavy useand quick-change capability. Thumbscrews are provided for fast installationof boats or filaments. Air-side clamping uses silver-plated battery clamp-style hard copper connections designed for maximum surface contact andhigh current carrying capacity.

The Re-Vap™ high current 3/4-inch feedthroughs are rated at 600 amps. Ituses high purity alumina ceramic as the dielectric material, which is hermet-ically sealed to a flexible metal transition using vacuum grade braze alloysin a vacuum brazing furnace. Additionally, a removable snap-on groundshield provides protection from line-of-sight coating on exposed ceramicsurfaces. Re-Vap™ feedthroughs are fitted with Del-Base™ baseplate mountsin standard one-inch, 32mm or 34mm sizes for use in most vacuum coatingsystems, including Balzers and Leybold systems.

Z-bar™ extensions are used in cases where normally an evaporation sourcecannot be positioned because of spacing limitations. The modular Z-bar™

extensions allow you to maneuver your evaporation sources around fixedequipment inside your vacuum coating system. Its versatility allows you touse them singularly or in multiples for those hard to reach locations.

Power Supply Specifications

Cooling Air cooled

Input power 208/220/240 VAC, Single-phase, 50/60 Hz, 25 Amperes

Power output 0 to 5 VDC @ 600 amps

Option: 0 to 10 VDC @ 300 amps

Cable 6-foot cable included

Weight 30 lb shipping

Dimensions 5" W x 8" H x 13" D

Weighs only20 pounds

Weighs only20 pounds

Power Supply

Description



e-Vap®


Features■ Industrial design■ Feedthroughs rated at 600 amps■ Removable snap-on ground shield protects

against coating build-up■ Z-bars allow installation of sources in difficult or

hard to reach locations■ Z-bars may be used singularly or in multiples■ Clamp designed for virtually any type of

commercial heater elements up to 1.25" wide ■ Ultra positive clamping method

Resistive Heater Evaporation

Re-Vap™ typical source installation, shown with two Z-bars and boat clamps

Typical Heater Elements

Metal Foil Boat

Typical Installation Schematic

Baffled Boat

Filament

Re-Vap™ clamp & Z-bar™ extension

Z-bar™

Resistive source

Silver platedairside clamps

1" Bolt hole mountfeedthrough

In-vacuumshield

Standard Elements

All dimensions are given in inchesunless specified otherwise.

• Only one Z-bar shown ~ may be used inmultiples

Re-Vap™ rigid clampRe-Vap™ rigid clamp

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Re-Vap™ Resistive Controller

DescriptionThe Re-Vap™ Resistive Controller is designed for use with theRe-Vap™ 3000 Power Supply. The controller is a half-rack widthdisplay module displaying the current, voltage, safety interlock andstatus/operation indicators. For automated coating processes, itmay be connected to a rate/thickness controller for precise control.Power can also be controlled through the front panel or with thehand-held remote control. Cabling and connectors are provided.

Features

■ Front panel LED displays current and voltage■ On-Off switch■ Safety interlock■ Hand-held remote control■ Contact factory for CE compliance

Resistive Controller SpecificationsConstructionCase Aluminum sheetReadout LED displayMount Half-rack standard electronics cabinet Input power 110 volts, 50/60 HzWeight 11 poundsDimensions 8.5" W x 5.25" H x 14" D

COMPLETE SYSTEM 50

POWER SUPPLY 30

RESISTIVE CONTROLLER 10

REFERENCEPART

NUMBERPRICE

$

6150

3000

975

992970

991301

991303

WTDESCRIPTION LB

RV-3000-SYS

RV-3000-PS

RV-3000-RC

Resistive Controller

Complete SystemA complete Re-Vap™ 3000 system includes:• One 3000 watt power supply• One resistive controller• Two high current electrical feedthroughs, 1-inch bolt style• Two electrical airside clamps• Two Z-bars with bolts• Two rigid boat clamp assemblies• One metal foil boat heater element

Ordering Information

Metal Foil Boat

Resistive heater elements are soldindividually.

REFERENCEPART

NUMBERPRICE

$

16

15

50

METAL FOIL

FILAMENT

BAFFLED

993037

993038

993039

Filament Baffled Boat

Components may be purchased as a complete systemor individually.



e-Vap®


.56 dia (2 places)

2.00

5.19

2.19 .94

1.00

.63

1.75Fits 3/4" conductor

1.25

.25

.375-16 bolt, nut and washer (x2)

1.00

Airside Clamps

Made of OFE copper with silverplate to minimize oxidation andcontact resistance. Two 9/16-inchholes are provided for fasteningeyelet-fitted power cables. Soldindividually.

Rigid clamp1-1/4" width3-1/2" length

.250-20 Thread in Helicoil insert

.50

.25

REFERENCEPART

NUMBERPRICE

$

325RIGID 992968-02

Boat clamps use thumbscrews forfast installation of boats or filaments.Two boat clamps are required.Includes bolts. Sold individually.

REFERENCEPART

NUMBERPRICE

$

185HCC-750 640070

Boat Clamps

REFERENCEPART

NUMBERPRICE

$

450

450

450

95

1-IN. BOLT

32MM BOLT

34MM BOLT

32MM - 1"

992966

993040

993041

991813

High Current Feedthough

1.50 Hex

F

1.00 1.88

3/8-16 UNC-2A 1-14 UNS-2A

.75 dia.

2.253.32 4.68

30 x 1.5mm thread

2.125 dia.2.00

1.61

1.00

3/8-16 UNC-2A

.75 dia.

2.253.32 4.68

Z-bar™

.500

1.625

1.000

1.875�2 places .386�

2 places

2.813 2.813 6.250

.500

Z

.813�2 places

R .188 typ. R .812 typ. MDC Z-bar™ extensions are usedwhere normally an evaporationsource cannot be positionedbecause of spacing limitations. Maybe used singularly or in multiplesfor hard to reach locations. Soldindividually.

REFERENCEPART

NUMBERPRICE

$

295Z-BAR 992969

High current feedthroughs are avail-able for mounting to baseplates inthree standard sizes. A removableshield protects ceramic insulatorfrom contamination during deposi-tion.An adapter is available to mount a1-inch bolt feedthrough to a 32mmbolt hole. Adapter not shown.Two feedthroughs required. Soldindividually.

Standard 1" bolt mount

Metric style for 32mmand 34mm bolt mount

Boat Clamps

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e-Vap® 100 SystemFeatures

■ 100 Watt power supply■ Monolayer E-Beam deposition■ Precision control deposition rates■ 1mm wire feed mechanism, 2mm optional■ Refractory materials evaporation■ UHV compatible to 10-11 Torr■ Bakeable to 250°C■ No water cooling required■ Mounted on 2-3/4" Del-Seal™ CF flange

Li0.4

Lithium

O

Oxygen

Be1.3

Beryllium

C2.8

Carbon

N

Nitrogen

Na0.4

Sodium

S

Sulfur

Mg0.6

Magnesium

B2.2Boron

Al1.2

Aluminum

Si1.5

Silicon

P

Phosphorus

K0.3

Potassium

Se

Selenium

Sc1.2

Scandium

Ca0.6

Calcium

Ti1.6

Titanium

V2.0

Vanadium

Cr2.0

Chromium

Mn1.7

Manganese

Fe2.1Iron

Co2.2Cobalt

Ni2.2Nickel

Cu2.1

Copper

Zn0.9Zinc

Ga1.8

Gallium

Ge2.1

Germanium

As

Arsenic

Rb0.4

Rubidium

Te1.4

Tellurium

Y1.4

Yttrium

Sr0.7

Strontium

Zr2.1

Zirconium

Nb2.7

Niobium

Mo2.8

Molybdenum

Tc3.0

Technetium

Ru3.1

Ruthenium

Rh2.8

Rhodium

Pd2.4

Palladium

Ag1.9Silver

Cd1.1

Cadmium

In1.9

Indium

Sn

Tin

Sb1.4

Antimony

Cs

Cesium

Po1.5

Polonium

La1.7

Lanthanum

Ba0.8

Barium

Hf3.0

Hafnium

Ta4.0

Tantalum

W4.3

Tungsten

Re4.4

Rhenium

Os4.5

Osmium

Ir4.2

Iridium

Pt3.7

Platinum

Au2.9Gold

Hg

Mercury

Tl

Thallium

Pb1.7Lead

Bi1.7

Bismuth

Fr0.4

Francium

Ac2.0

Actinium

Ra

Radium

Lu2.1

Lutetium

Pr1.7

Praseody-mium

Nd1.7

Neodymium

Pm

Promethium

Sm1.4

Samarium

Eu1.0

Europium

Gd1.8

Gadolinium

Tb1.9

Terbium

Dy1.7

Dysprosium

Ho1.8

Holmium

Er1.8

Erbium

Tm1.6

Thulium

Yb1.4

Ytterbium

Lr

Lawrencium

Pa

Protactinium

U3.3

Uranium

Np

Neptunium

Pu

Plutonium

Am2.1

Americium

Cm

Curium

Bk

Berkelium

Cf

Californium

Es

Einsteinium

Fm

Fermium

Md

Mendelevium

No

Nobelium

Ce2.6

Cerium

Th

Thorium

Numbers indicate the time, in minutes, required to deposit one monolayer of the specified elements.

Deposition rates are calculated at element melting point, using a substrate area of 1cm2, a source to

substrate distance of 10cm and a vapor pressure of 10-3 Torr. These values are intended as reference

only, actual rates may vary from those listed.

La1.7

Lanthanum

Ac2.0

Actinium

Monolayer Deposition Rates

e-Vap® 100 is a precision monolayer deposition source employed forevaporative coatings in UHV applications. Its unique design uses anelectron beam power source for thermionic emission and pinpointelectrostatic focusing of an electron beam onto a 1-millimeter diam-eter wire. The wire being evaporated is at ground potential and servesas the source anode, thus attracting electron bombardment. The con-stant stream of electrons heats the wire tip to its melting point form-ing a very small liquid ball, which is subsequently vaporized. The wire

Specifications

Metering Digital Emission Current

Cooling Air cooled


Voltage output 2 kV DC negative polarity

Output Ripple Less than 2% RMS

Voltage Regulation 1%

Current output 0 to 0.05 Amperes

Emission Current Regulation 1%

Efficiency 85%

Weight 20lb

Dimensions 19" W x 3.5" H x 18" L



Miniature Evaporation Systemse-Vap®

REFERENCEPART

NUMBERPRICE

$DESCRIPTION

13500

3775

9500

30

155

60

EV-100

EV-SA-100

EV-PS-100

EV-PS-SPK-100

EV-2MM-100

EV-FIL-100

991029

992458

991192

991257-07

992589

992596

COMPLETE SYSTEM 1

SOURCE ASSEMBLY

100W POWER SUPPLY

POWER SUPPLY SPARE PARTS KIT

2MM WIRE-FEED ADAPTER

FILAMENT SET, 5 ea.1 Includes source and power supply

Source Assembly

SourceAperture

TantalumShield,

1.29" O.D.x 0.02" wall

2.75Del-Seal™ CF

Flange

SHVCoaxial

Feedthroughs

Linear MotionFeedthrough

High Temperature

3.75

7.45

1.63

Wire FeedAdapter

is manually fed by a precision linear drive feedthrough, and must befed periodically as determined by source evaporation rates. The e-Vap® 100 source evaporates high temperature refractory metalsincluding Tantalum, Molybdenum and Tungsten and most other mate-rials manufactured in wire form. High temperature materials are notreadily evaporated using Knudsen or Effusion cells, making thee–Vap® 100, because of its miniature size, an excellent PhysicalVapor Deposition (PVD) evaporation source. The elements table at leftdepicts calculated deposition rates for various pure materials.Thee-Vap® 100 source is constructed with refractory metals for rapidequilibrium with minimal outgassing, to withstand elevated tempera-tures without the need for water cooling and to reduce the possibilityof contamination in sensitive UHV applications. The source has anoutgas mode to allow vacuum conditioning of the evaporation head.This degas feature allows heating of the e-Vap® 100 head to driveoff any adsorbed contaminant. The source is mounted on a 2-3/4"Del-Seal™ CF flange. Power connections are made via four SHV coax-ial connectors clearly labeled for filament positive, filament negative,anode and screen inputs. Maintenance on the evaporation head ismade simple with easy replacement of all key components.

The e-Vap® 100 power supply incorporates all switching technologyfor the high-voltage and filament sections. This translates to a small-er and lighter package, greatly improved arc-suppression and betteremission current control. Arcs are suppressed in the order ofmicroseconds rather than the millisecond response in other 50/60Hzsystems. This, combined with lower levels of stored energy, preventthe molten tip of the evaporant rod from being “blown away” duringan arc, a common occurrence with older systems.

Complete System

e-Vap®


Thin

Film

Dep

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on


e-Vap® 3000 System

Deposition Rate vs Emission Current

0

200

400

600

800

1000

1200

1400

0 100 200 300 400 500 600

SiO

SiO2

HfO2

Fe Pd

Ti

Co

Si

NiGe

Mo

Ta W

Emission Current in mA

Stab

le D

epos

ition

Rat

e in

Å /

min

This graph represents stable rates (not maximum rates) @ 3kW with a source to substrate distance of 10 inches. These values are intended as reference only, actual rates may vary.

Specifications

Metering Digital Emission Current

Cooling Power Supply: Air cooled

Source: Watercooled

Input power 225 V ± 25 V, Single-phase, 50/60 Hz, 18 Amperes

Voltage output 5 kV DC negative polarity

Output Ripple Less than 1% RMS

Voltage Regulation .025%

Current output 0 to 0.6 Amperes

Emission Current Regulation 0.25%

Efficiency 85%

Weight 65lb


MDC’s 3kW Electron Beam Source is a versatile and economicaldeposition tool used for thin film coating processes in high and ultra-

high vacuum environments. The e-Vap® 3000 system evaporatesvirtually all rare earth refractory and dielectric materials. It providesresearchers a simple, relatively low-cost means of depositing highpurity thin film coatings. The source is manufactured using all metalsealed gaskets, is extremely compact and has a high level ofruggedness, reliability and efficiency. The compact source designallows the entire source assembly to fit through a 2.75" Del-Seal™

CF port opening and eliminates internal water and electrical connec-tions. This 3kW source is available free standing or as a completeturnkey system. The filament/emitter assembly has a heat-sink andfeatures a unique single piece high voltage insulator design. Theentire emitter assembly slides out for easy maintenance.

A new 3kW Switching Power Supply is available to drive these minia-ture sources. State-of-the-art switching technology renders a com-pact rack mountable power supply. The built-in source controller alsoemploys switching technology and provides extremely accurate

Features

■ 3kW Switching technology power supply■ UHV compatible■ 2.75" Del-Seal™ CF flange mount

■ Includes water and electrical connections■ Evaporates refractory and dielectric materials■ CE compliant



Miniature Evaporation Systemse-Vap®

REFERENCEPART

NUMBERPRICE

$DESCRIPTION

17400

5985

14500

60

195

155

7

125

30

EV-CE-3000

EV-SA-3000

EV-PS-CE-3000

EV-FIL-3000

EV-A-3000

EV-BF-3000

EV-IBF-3000

EV-IHV-3000

EV-PS-SPK-3000

992600

992601

991221

992610

991929

991922

990529

991921

991257-03

COMPLETE SYSTEM 1

SOURCE ASSEMBLY

3000W POWER SUPPLY

FILAMENT SET, 5 ea.

ANODE

BEAM FORMER

BEAM FORMER INSULATOR

HIGH VOLTAGE INSULATOR

POWER SUPPLY SPARE PARTS KIT1 Includes source and power supply

Power Supply Source Assembly

3.75

.63 Source Face toFlange Center Line

2.75

7.25

7.87

9.00

2.75Del-Seal™ CF

Flange

AcrylicHigh-Voltage

Shield

2 ccCrucible

Source Assembly

Source Detail Filament Detail

Vap® evaporation sources. These liners offer improved thermal sta-bility while reducing the transfer of heat to the crucible. Liners pro-vide the ability to easily and quickly switch evaporant materialswithout removing the crucible for cleaning. They also reduce powerrequirements to achieve specific evaporation rates. See page 39 fora detailed list of crucible liner materials.

2.75Del-Seal™ CFFlange

Sourcefits withina 1.38 insidediameter tube

• Source can be installed in a portwith 2-3/4" Del-Seal™ CF flanges

e-Vap®


Thin

Film

Dep

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on


Features

■ Ideal for evaporating metals, oxides, magneticmaterials and dielectrics

■ Ideal for universities, lab/R&D, pilot productionusers

■ Applications include metallization, MBE, nano-technology, optics, microscopy and thin filmheads

■ Rated for 3000 Watts of deposition power■ Four pocket x 2cc rotating crucible■ Ultra small footprint – total size is 2.4" H x 4.1" L

x 2.8" W■ A contained permanent magnet design produces

a very small, highly dense beam spot■ XY sweep coils are included■ Crucible drive can be driven from any position –

left, right, down, even angled■ Stand-alone, flange-mounted or turn-key assem-

blies are standard offerings■ Flange-mounts are installed on a 2.75-inch Del-

Seal CF flange■ Turnkey assemblies are installed onto a 6-inch

and 10 inch Del-Seal CF flange and include shut-ter and all electrical, water, and mechanicalfeedthroughs –ready to operate

■ See the MDC web site for actual deposition ratedata on up to 27 different materials as well asdownloadable layout, e-drawings for the DesignEngineer

Specifications

Maximum Power 3000 watts

Operating Voltage 5000 volts

Beam Current 600 milli-amperes

Compatible Vacuum 2 x 10E-8 torr

Water Flow 65 psi or .62 gpm

XY Sweep Frequency 0 – 50Hz, 1.0 amps

Beam Spot Size 3-4 mm

Crucible Material OFE copper

Bakeout Temperature 150oC

Crucible Geometry 2.0 cc volume crucibles x 4

Weight 6 lbs

Dimensions 2.4" H x 4.1" L x 2.8” W

Description

Practical, low-cost, and highly reliable electron beam depositionsources are the future as we know it today. MDC introduces the e-

Vap® “Mighty Source™”– a 4 pocket x 2cc rotary electron beamsource. Affordable and extremely compact, it stands just 2.4-inchestall by 4-inches long by 2.8-inches wide. Is there anything smaller

out there? The Mighty Source™ is rated for 3 kilowatts of powerwhich makes it an ideal deposition tool for evaporating metals,oxides, metal-oxides, and magnetic materials. Designed into thesource body are two hermetically-sealed XY-axis sweep coils thatallow you to sweep the electron beam across the crucible pocket,resulting in the maximization of your coating process in terms of

material stability and consistency. The Mighty Source™ design isspecifically tailored for the following uses – pilot production,lab/R&D applications, and the university marketplace. Its compactdesign features allow it to be mounted onto a 2-3/4-inch Del-SealCF flange or onto a 6-inch or 10-inch Del-Seal CF flange in eitherhorizontal or vertical configurations. To complete this product sys-tem, MDC also offers a 3kw power supply and low cost XY sweepcontroller.

e-Vap® Mighty Source™ 4 Pocket Evaporation Source

MODULAR SOURCE SERIES

e-Vap® Mighty Source™ Horizontal Source Assembly (6-inch CF flange)

4 inches



e-Vap®


1000 400200 6000.0

5.0

10.0

15.0

20.0

25.0

300 500

Ta2O5

Ti

Co

Ge

Mo

Al

*Al


Flange Mounted Assemblies

■ Complete turnkey assemblies -plug ‘n play■ Horizontal assembly is supplied on a 6" flange■ Vertical assembly is supplied on a 10" flange■ Water-cooled roofs are available as an option■ Different flange sizes are available upon request■ Physical dimensions are available at

www.mdcvacuum.com/3kw.htmor call 1-800-443-8817 for further details

e-Vap® Mini Sweep Controller e-Vap® 3kW Power Supply

Deposition Rate vs PowerDepositin rate vs Power

MATERIAL SWEEP USEDYES OR NO

No

No

Yes

No

No

Yes

No

No

Yes

Yes

No

Yes

No

Yes

No

No

No

Yes

Yes

No

Yes

No

Yes

No

No

Yes

Yes

Yes

Al

*Al

Al2O3

Ag

Co

Cr

Cu

Ge

Hf

HfO2

In

ITO

Mo

MgF2

Nb

Ni

Pd

Si

Si02

Ta

Ta2O5

Ti

TiO2

W

Y

ZnS

ZnSe

ZrO2

500

100

100

150

200

50

500

300

250

150

200

20

500

10

500

300

100

300

40

500

150

300

150

500

150

30

10

200

4.5

28.0

8.0

13.0

9.0

13.0

2.2

3.0

7.0

9.0

18.0

10.0

8.5

7.0

1.0

3.0

50.0

1.0

25.0

8.0

7.0

20.0

7.5

8.0

40.0

10.0

40.0

10.0*with crucible liner

Deposition Rate Table

* Indicates “with” crucible liner

Deposition Rate vs. Emission CurrentNo Crucible Liners Used

Depo

sitio

n Ra

te (Å

/sec

Emission Current (mA)Accelerating Voltage of 5.25 kV

All rates measured on a Crystal Rate Monitor at 10 inch crucible to sensor distance.

DEPOSITION RATE(Å/SEC)

EMISSION CURRENT (MA)

☛ <None> Power Supplies description

e-Vap®



Thin

Film

Dep

ositi

on


DESCRIPTION REFERENCE

Ref# EV-MS* (Mighty Source™

)

Ref# EV-MS-F275-H

Ref# EV-MS-F1000

Ref# EV-MS-F600H

Ref# Sweep-MS

EV-PS-CE-3000

EV-PS-SPK-3000

EV-FIL-3000

EV-A-3000

EV-BF-3000

EV-IBF-3000

EV-IHF-3000

Ref# ERK-MS

Ref# CSRK-MS

Cajon Fitting Gasket

Fil Clamp Sleeve-MS

Stand Alone Source

3/4" Del Seal CF Flange (horizontal mount)

10" Del Seal CF Flange (vertical mount)

6" Del Seal CF Flange (horizontal mount)

3KW Mini Sweep Controller

Power Supply

Power Supply (spare parts kit)

Filament (pack of 5)

Anode

Beam Former

Beam former Insulator

High Voltage Insulator

Emitter Rebuild Kit1 (Mighty Source)

Crucible Seal Rebuild Kit (Mighty Source)

Gasket (1/8” VCR

Filament Clamp Sleeve

993400

993450

993431

993430

991374

991221

991257-03

992610

991929

991922

990529

991921

993410

993439

042064

993415

5500

6750

11050

10250

1495

14500

30

60

195

155

7

125

250

7.50

3

35

1

2

3

4

5

6

7

8

9

Mighty Source™ Details Table

PRICE FIGPART #

*MS indicates Mighty Source™1 includes 2 filaments, high voltage insulator, beam form, fasteners

Figure 3

Figure 5

Figure 7

Figure 1

Figure 9Figure 8

Figure 6

Figure 4

Figure 2e-Vap® Mighty Source™ Vertical Source Assembly (10-inch CF flange)



e-Vap®

Modular Evaporation Sources

Filament Assembly

■ Filament is shielded from ion bombardment■ No shorting■ Longer filament life■ Reduced coating of ceramic insulators■ Reduced arcing

Emitter Assembly

■ 270° arc emitter module■ Heat sunk emitter■ Consistent electrostatic field■ Longer life anode and beam former■ Reduced filament distortion■ Modular plug-in emitter design■ Simple maintenance■ Simple filament replacement■ Minimal adjustment...

only requires verification of filament tolerance

Open Cathode Design

■ No space charging■ Increased emission■ Cooler operating filament...

requires only 42 amps for 15 kW

Shielded High Voltage Ceramics

■ Reduces coating of ceramic insulators■ Prevents arcing

■ Unique high voltage insulator design...no screws to reduce dielectric breakdown

Beam Sweep Coil Assembly

■ Helmholtz design principle produces a uniformmagnetic field

■ No tunneling■ Beam maintains constant density and shape

when swept across crucible

Magnet Assembly

■ Permanent magnets■ 270° arc beam deflection...

with positive beam containment■ Reliable beam positioning■ No pole pieces■ Efficient magnetic field generation■ Beam travels vertically through crucible

Crucible Module / Replaceable Modules

■ Capacity from 6cc to 400cc■ Complete flush-top design■ No condensate build up■ No contamination from flaking condensate■ Complete utilization of vapor cone during deposi-

tion... no shadowing■ Reduced cross-contamination during changes of

evaporant material

Individual Source

MDC modular e-Vap® sources are state-of-the-art electron-beamevaporation sources designed for the demanding and exacting worldof vacuum coatings. This unprecedented selection of electron-beamevaporation sources provides vacuum coating solutions for mostapplications including medical, metallurgical, telecommunications,micro-electronics and optics.

Modular sources are offered in six standard frame sizes and are standalone components for maximum installation flexibility in existing vac-uum systems. For those desiring standard off-the-shelf solutions,complete horizontal and vertical flange mounted systems are alsoavailable. For a detailed presentation of horizontal and vertical turnkeycoating systems please refer to products beginning on page.

Features

Modular sources are fitted with direct watercooled crucibles. Selectmodels have indirectly cooled crucibles that allow the user to changecrucibles without interrupting the flow of water to the source andwithout having to disassemble the source. Modular sources areoffered with material capacities from 6cc to 400cc in a multitude ofpocket geometries and arrangements. They are available in bothfixed and rotary pocket mechanisms for high and ultrahigh vacuum

environments. e-Vap® modular sources are designed for optimum

performance with e-Vap® power supplies, controls and electronics.Other essential components and hardware required for the installa-

tion of e-Vap® modular sources are detailed starting on page.Contact the MDC technical sales engineers for custom electron-beam evaporation requirements.

e-Vap®


Thin

Film

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Custom source and source assemblies can be designed to fit anexisting chamber or for a special application. Contact MDC fordetails regarding custom source assemblies or custom sources.

Standard Multi Pocket Sources that havebeen identified by our customers as themost popular sources are listed to the right.MDC is has made a commitment with sub-component inventory to offer reduced leadtimes for standard multipocket sources.

Custom Sources and Assemblies

FRAME NUMBER VOLUME MAXIMUMSIZE OF POCKETS PER POCKET POWER

3 4 6cc 6kW

4 4 6cc 6kW

5 4 15cc 10kW

5 4 25cc 10kW

5 6 12cc 10kW

5 1 150cc 10kW

6 4 40cc 15kW

6 4 75cc 15kW

6 1 400cc 15kW

6 6 40cc 15kW

REFERENCEPART

NUMBERPRICE

$

10500

13750

11225

11225

11675

11250

14225

14625

14525

14725

EV-4000-66

EV-4000-66UHV

EV-4000-1015

EV-4000-1025

EV-6000-1012

EV-4000-150CA

EV-4000-1540

EV-4000-1575

EV-4000-400CA

EV-6000-1540

991600

991700

991900

991800

992100

992523

992405

992406

993101

993100

Single-Pocket Centered

Multi-Pocket 4 4@90°

Multi-Pocket 6 6@60°

Carousel 360° Pan

Crucible / Pocket Geometry

1x270°, 1@45°

Custom configurationsStandard configurations

Shown above is one of many possibilities.Contact factory for special geometries.

Custom source and source assemblies■ Six Frame Sizes

Features

■ Single, Multipocket or Carousel Crucibles■ Custom Crucible configurations available■ Crucible sizes from 6cc to 400cc■ Power ratings from 6kW to 15kW■ Direct or indirect water cooling

Options■ Source Options are available-Consult with MDC for existing

designs, availability and list prices.

■ Single Pocket Sources (Frame 1 and Frame 2) UHV com-patible sources, volumes 7cc to 100 cc.

■ UHV Rotary Mechanism (Frame 4 and Frame 5) allows forUHV operation of the multi pocket sources.

■ Direct and Indirect Cooling (Frame 5 and Frame 6) optionfor both of these frame sizes. direct cooling allows for higherpower levels to be applied during deposition, the water sealmust be disturbed to change the crucible. Indirect coolingallows the crucible to be removed without disturbing the waterto vacuum seal, however maximum power levels are lower withindirect cooling.

■ Custom Crucibles Can be machined with various pocketsizes and configurations depending upon your application. MDCwill manufacture any custom crucible that is required includiingsingle, four pocket, six pocket, pan carousel and bananas.

e-Vap® Modular Evaporation Sources



Modular Evaporation Sourcese-Vap®

8.2

Frame 2

Source Size Large

Source Type Fixed Pocket

Maximum Power 15kW

Operating Voltage 6kV to 10kV

Filament 12VAC

Crucible Geometry / Volume

Single-Pocket 75 & 100cc

X-Y Sweep Frequency 200Hz

Large Fixed Pocket

Evaporation Rate of Aluminum

50,000Å/min @15kW with a source to

substrate distance of 250mm

Beam Spot Size 7mm

Crucible Material OFHC Copper

Bakeout Temperature 200°C

Materials UHV Compatible

Compatible Vacuum 2x10-11 Torr

Water Flow

3GPM and / or 65PSIG inlet-outlet differential

Dimensions 6.60L x 5.50W x 2.25H

Weight 10 lbs

Specifications

CRUCIBLE MAXIMUMVOLUME POWER

7cc 6kW

15cc 10kW

25cc 10kW

40cc 15kW

REFERENCE PARTNUMBER

PRICE$

7850

7850

7850

7850

EV-1000-67

EV-1000-1015

EV-1000-1025

EV-1000-1540

990598

990599

990597

990600


75cc 15kW

100cc 15kW


PRICE$

8750

11750EV-1000-1575

EV-1000-15100

992250

992430

Frame 1

Source Size Small

Source Type Fixed Pocket

Maximum Power 15kW


Filament 12VAC


Single-Pocket 7, 15, 25 & 40cc


Small Fixed Pocket




Beam Spot Size 7mm

Crucible Material OFE Copper




Water Flow



Weight 9 lbs

Specifications

e-Vap®


Thin

Film

Dep

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Frame 4

Source Size Small

Source Type UHV Rotary Pocket

Maximum Power 6kW


Filament 12VAC


Multi-Pocket 4x 6cc


Small UHV Rotary Pocket




Beam Spot Size 7mm





Water Flow

1.75GPM or 65PSIG inlet-outlet differential


Weight 17 lbs

Specifications

Frame 3

Source Size Small

Source Type Rotary Pocket

Maximum Power 6kW


Filament 12VAC


Multi-Pocket 4x 6cc, 6x 3cc

Carousel 360°, 15cc


Small Rotary Pocket




Beam Spot Size 7mm



Materials HV Compatible


Water Flow



Weight 10 lbs

Specifications


4 X 6cc 6kW

6 X 3cc 6kW


PRICE$

10500

10750EV-4000-66

EV-6000-66

991600

992166


4 X 6cc 6kW


PRICE$

13750EV-4000-66UHV 991700



Modular Evaporation Sourcese-Vap®

8.2

CRUCIBLE MAXIMUM COOLINGVOLUME POWER

4 X 15cc

4 X 15cc

4 X 25cc

4 X 30cc

6 X 12cc

4 X 15cc

4 X 25cc

4 X 30cc

1 X 150cc

1 X 150cc

10kW

10kW

10kW

10kW

10kW

6kW

6kW

6kW

6kW

10kW

Direct

Direct

Direct

Direct

Direct

Indirect

Indirect

Indirect

Indirect

Direct

REFERENCEPART

NUMBERPRICE

$

10500

16625

11225

11675

11675

11435

11500

12550

11875

11250

EV-4000-1050

EV-6000-1015UHV

EV-4000-1025

EV-4000-1030

EV-6000-1012

EV-4000-615iEV-4000-625iEV-4000-630iEV-4000-150CARiEV-4000-150CAR

991900

992700

991800

992408

992100

992525

992500

992585

992502

992523

Frame 5

Source Size Large

Source Type HV Rotary Pocket

UHV Rotary Pocket

Maximum Power 10kW


Filament 12VAC


Multi-Pocket 4x... 15, 25 & 30cc, 6x 12cc

Carousel 360° 150cc

Combination Custom designs available

Large HV & UHV Rotary Pocket





Beam Spot Size 7mm





Water Flow



Weight 27 lbs

Specifications

e-Vap®


Thin

Film

Dep

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CRUCIBLE MAXIMUM COOLINGVOLUME POWER

4 X 40cc

4 X 60cc

4 X 75cc

6 X 25cc

6 X 40cc

1 X 400cc

1 X 400cc

6 X 40cc

15kWW

15kW

15kW

15kW

15kW

6kW

15kW

6kW

Direct

Direct

Direct

Direct

Direct

Indirect

Direct

Indirect


PRICE$

14225

15550

14625

15550

14725

16625

14525

15625

EV-4000-1540

EV-4000-1560

EV-4000-1575

EV-6000-1525

EV-6000-1450

EV-4000-400CARiEV-4000-400CAR

EV-6000-640i

992405

992400

992406

992599

993100

992720

993101

992674

Frame 6

Source Size Extra-Large

Source Type Rotary Pocket

Maximum Power 15kW


Filament 12VAC


Multi-Pocket 4x... 40, 60 & 75cc, 6x 40cc

Carousel 360° 400cc

Combination Custom designs available





Source-Substrate Distance 250mm

Beam Spot Size 7mm





Water Flow



Weight 40 lbs

Specifications

Extra-Large Rotary Pocket



e-Vap®


Horizontal Source Assembly

CoolingRoof

Source/CrucibleWater Lines

Cooling RoofWater Lines

Manual ShutterLinear Feedthrough

Pocket IndexerRotary Feedthrough

Filament TransformerHigh Voltage Feedthrough

X-Y SweepInstrumentation Feedthrough

Guide RodSupport Bushings

10.00 with 10" Flange8.00 with 8" Flange

Shown withUHV Rotary-Pocket Source

Frame Size 4

Shown with10" Del-Seal™ CF

Flange

10.75 Shutter Open8.75 Shutter Closed

14.0 with 10" Flange12.0 with 8" Flange

Crucible Face to Flange Center Line0.30" Fixed on 8" Flange0.14" Fixed on 10" Flange1.38" Rotary on 10" Flange

Features

■ UHV compatible system■ 8" or 10" Del-Seal™ CF flange mount■ Assembly includes rotary, linear and electrical

feedthroughs, clamps, linkages, water flow switchand water connections

■ Manual, push-pull shutter■ High temperature, 300°C manual rotary drive on

4 pocket models; blanked off on single pocket■ Flange seal surface to crucible centerline is 8" on

8" Del-Seal™ CF■ Flange seal surface to crucible centerline is 10"

on 10" Del-Seal™ CF■ Systems available with or without watercooled

roofsHorizontal Flange Mounted System

UHV Single-Pocket Source

UHV Rotary-Pocket Source

e-Vap®


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Optional Accessories

REFERENCEPART

NUMBERPRICE

$MOUNTING FRAME SOURCE COOLING SOURCE WEIGHT

FLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDS

13350

14100

13850

14600

19000

19750

EV-FMP-8H

EV-FMP-8RH

EV-FMP-10H

EV-FMP-10RH

EV-FMP-10HUHV

EV-FMP-10RHUHV

992515

992516

992499

992541

992498

992540

8" DEL-SEAL 1 ONE POCKET 7cc NO 990598 50

8" DEL-SEAL 1 ONE POCKET 7cc YES 990598 50



10" DEL-SEAL 4 FOUR POCKET 6cc NO 991700 95

10" DEL-SEAL 4 FOUR POCKET 6cc YES 991700 95

OPTIONNUMBER

PRICE$DESCRIPTION

450

3650

825

500

1250

Call

Call

Call

-01

-02

-03

-04

-05

-06

-07

-08

PNEUMATIC SHUTTER,TWO POSITION

AUTO INDEXER AND DRIVE

GUIDE RODS

CUSTOM SOURCE POSITION

CUSTOM COOLING ROOF PORTS

15cc CRUCIBLE

25cc CRUCIBLE

40cc CRUCIBLE

OPTION -03

Pneumatic Shutter

Pneumatic shutters are an excellent tool forprecise control of film thickness on to a sub-strate. The air actuated shutter masks off thevapor stream between source and substrate atthe beginning and finishing stages of the evap-oration/deposition cycle. The shutter alsoallows pre-melt or “soak” prior to deposition byblanketing the evaporation material. This is atwo position shutter with a 120VAC solenoid.

OPTION -04 TO -08

OPTION -05

OPTION -02

OPTION -01

Guide Rods

Two linear bearing guide rods allow the flange

mounted e-Vap® systems to be routinelymaintained by simply sliding in and out, indrawer-like fashion. A weldable support brack-et kit is provided to secure the guide rods ontothe user’s port flange. Installation is simple andself explanatory.

Crucible Indexer & Drive

The Auto-Indexer is a stepper motor drive unitwith optical encoding for rotating and position-

ing multi-pocket e-Vap® sources. The unit candrive sources with up to eight pockets in eithera unidirectional or bidirectional manner. It canalso drive continuous carousel-type sources ateight speed settings. Includes mounting brack-et for external drive.

Custom Source Position & Volume

The standard distance from the source centerto the mounting-flange seal face is 10" or 8"for horizontal systems. For custom positionsbetween 8" to 12" add option 4. Standard sin-gle-pocket crucible volume is 7cc. For pocketvolumes of 15, 25 or 40cc add option -06, -07or -08 respectively.

Custom Roof Ports

Watercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor deposi-tion rate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port loca-tions can be specified by the customer.

Horizontal Flange Mounted Source

MDC has eliminated the difficulties of flange mounting electronbeam sources. Problems associated with designing and fittingsources into coating systems have been solved with the introductionof standard horizontal flange mounted evaporation sources. Thecompact footprint of these flanged evaporation systems allows theinstallation of up to three individual sources onto one ten-inch cham-ber. The flanged assemblies include an electron beam source with allwater and electrical connections. A guide rod option provides adrawer like sliding action, ideal for installation and system mainte-

nance. Horizontal flange mounted assemblies come ready to acceptthis guide rod kit. Another option includes a water-cooled roof, which

mounts directly above the e-Vap® source. The water-cooled roofacts as a heat barrier between the source and substrate and alsoprevents vapor condensation on chamber walls. The water-cooledroof is fitted with a deposition port angled towards the substrate,which aids in deposition uniformity, even when source and substratecenterlines are offset. Horizontal systems purchased with a sourcecontrol module will be fitted with flange-mounted filament trans-formers.

When ordering e-Vap® assembly options, please add the option number(s) to the end of thedesired assembly Part Number listed above. For example 992515-01-02-03-04-05-08



e-Vap®


UHVSingle-Pocket

Source

6.00

10" Del-Seal™ CFFlange

CoolingRoof

Manual ShutterRotary Feedthrough

Filament TransformerHigh Voltage Feedthrough

Source/CrucibleWater Lines

X-Y SweepInstrumentation Feedthrough

Cooling RoofWater Lines

11.90

7.00

Vertical Source Assembly

Features

■ UHV compatible system■ 10.0" Del-Seal™ CF flange mount■ Assembly includes rotary and electrical

feedthroughs, clamps, linkages, water flow switchand water connections

■ Shutter is fitted with a high temperature, 300°Cmanual rotary drive

■ Flange seal surface to crucible centerline is 6"standard

■ Systems available with or without watercooledroofs

Vertical Flange Mounted System

UHV Single-Pocket Source

Vertical Flange Mount / Less Cooling Roof

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REFERENCEPART

NUMBERPRICE

$MOUNTING FRAME SOURCE COOLING SOURCE WEIGHT

FLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDS

14750

15500

EV-FMP-10V

EV-FMP-10RV

992511

992513



Vertical Flange Mounted Source

MDC has eliminated the difficulties of flange mounting electronbeam sources. The effort that goes into designing and fitting asource to a vacuum coating chamber has been done for you with theintroduction of standard vertical flange mounted evaporationsources. The flanged assembly includes one 7cc electron beamsource with all water and electrical connections. This type of flangemounted system is typically installed vertically through the bottomside of a chamber. The compact footprint of these flanged evapora-tion systems requires only one port flange for installation. A popularoption commonly ordered with these systems is a water-cooled roof,

which mounts directly above the e-Vap® source. The water-cooledroof acts as a heat barrier between the source and substrate and

Optional Accessories

OPTIONNUMBER

PRICE$DESCRIPTION

1500

500

1250

Call

Call

Call

-01

-04

-05

-06

-07

-08

PNEUMATIC SHUTTER, TWO POSITION

CUSTOM SOURCE POSITION

CUSTOM COOLING ROOF PORTS

15cc CRUCIBLE

25cc CRUCIBLE

40cc CRUCIBLE

When ordering e-Vap® assembly options, please add the option number(s) to the end of thedesired assembly Part Number listed above. For example 992511-01-04-05-08

OPTION -05

Pneumatic Shutter

Shutters mask off the vapor stream betweensource and substrate. Shutters are ideal forpre-melt or “soak” prior to deposition by blan-keting the evaporation material. Pneumaticshutters for vertical flanged assemblies cannotbe mounted on source flange, but can beinstalled through a secondary 1.33" Del-Seal™

CF port. This shutter is a two position shutterwhich includes a 120VAC solenoid.

OPTION -04

OPTION -01

Custom Roof Ports

Watercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor deposi-tion rate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port loca-tions can be specified by the customer.

Custom Source Position

Source position is the distance from the sourceface to mounting flange seal face. This dimen-sion is standard at 6" for all vertical systems.Customer chamber layout or specificationsmay dictate a custom distance. Source posi-tions between 6" and 10" are optional andavailable at the price listed bellow. Dimensionsoutside these limits must be quoted separately.

also prevents vapor condensation on chamber walls.The watercooled roof is fitted with a deposition port, angled towardsthe substrate, which yields excellent deposition uniformity, evenwhen source to substrate centerlines are offset. The single-pocketsource comes standard with a 7cc capacity crucible. The sameassembly can be fitted with larger capacity sources including 15, 25and 40cc versions. To order the larger volume crucible option addone of the three option numbers to the end of the assembly partnumber. Vertical systems purchased with a source control modulewill be fitted with flange-mounted filament transformers.

OPTION -06 TO -08 Custom Crucible Volume

The standard volume for a single-pocket cru-cible is 7cc. For single pocket volumes of 15,25 or 40cc add option -06, -07 or -08 respec-tively.



e-Vap®


Features

■ 6kW, 10kW and 15kW models■ High frequency switching technology■ Excellent regulation■ Low stored energy■ Power efficiency greater than 85%■ Low ripple■ Rugged IGBT switches■ CE compliant■ Sequential or simultaneous operation of up to

three electron beam evaporation sources

e-Vap® CVS Series Power Supplies are constructed using state-of-the-art solid state high frequency switching technology. They areoffered in three standard models rated for 6kW, 10kW and 15kW.CVS series power supplies are for use with the horizontal and verti-cal flange mounted systems detailed on the previous four pages, as

well as the e-Vap® modular sources as detailed beginning on pageof this catalog. These power supplies are also compatible with mostcommercially available electron beam sources and are recommend-ed as upgrade power supplies in existing electron beam evaporationsystems.

Power supply enclosures are fully interlocked for operator safety.

e-Vap® CVS Series Power Supplies can power and control up tothree electron beam sources. Source controls and X-Y Sweeps arenot included with power supplies and must be purchased separate-ly. For ordering information please see the next three pages. The

e-Vap® source control module also employs solid state high fre-quency switching technology and is designed to precisely control

emission current when used with e-Vap® power supplies. MDC rec-ommends the use of a high voltage grounding hook when servicingor working with all high voltage power supplies. Grounding hooks aredetailed on page of this catalog.

CVS-6 Power Supply

REFERENCEPART

NUMBERPRICE

$POWER WEIGHTSUPPLY VOLTAGE POUNDS

15300

22575

24750

15300

22575

24750

CVS-6-2CE

CVS-10-2CE

CVS-15-2CE

CVS-6-4CE

CVS-10-4CE

CVS-15-4CE

991240

991275

991242

991193

991245

991246

6kW 208 75

10kW 208 90

15kW 208 100

6kW 400 75

10kW 400 90

15kW 400 100

Specifications

Metering Digital Voltage and Emission Current

Cooling Air cooled

Input power 208 V ±10%, Three-phase, 50/60 Hz, 30, 40, 60 Amperes

400 V ± 5%, Three-phase, 50/60 Hz, 15, 20, 30 Amperes

Voltage output 1 to 10 kV DC, negative polarity

Voltage Ripple Less than 1% RMS

Voltage regulation ± 0.25% of full scale output

Efficiency 85%Cables From – To LengthInput power cord Facilities outlet – Power Supply 12'8 gauge ground wire Power Supply – Ground 12'

Current output

6 kW 0 to 0.6 Amperes



Weight See Table


Power Supplies

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Controls and Measurement

REFERENCEPART

NUMBERPRICE

$WEIGHT

DESCRIPTION POUNDS

5600

5750

6005

125

850

SCM2-DFM-CE

SCM2-RCM-CE

SCM2-RCM-1"B

EV-HRS

SCM-25FC-CE

991364-01

991364

991364-02

991062

991287

DIRECT PACKAGE 10

REMOTE PACKAGE 10

REMOTE FOR 2-1" BOLT FT10

HALF RACK SPACER 1

25-FOOT CABLE KIT 3

Source Control Module

Indirect

Source Control Module

Features

■ High frequency switching technology■ Improved emission stability over 60 Hz SCR

circuits■ Compact filament transformer■ Electrically isolated from high voltage unit■ Grounded and shielded filament transformer

offers improved safety over conventional designs■ Self contained emission current monitoring for

independent operation■ CE compliant■ Full remote control capability■ Touch screen programming■ PS/2 handheld mouse/trackball■ Rack mount brackets included

e-Vap® CVS Source Control Modules are designed for use withe-Vap® CVS Series Power Supplies. The source control module unitincludes filament transformer assembly, hand held mouse controland all necessary cables for hook-up with an e-Vap® CVS PowerSupply. A maximum output current of 70 amperes assures sufficientpower to drive virtually any commercially available electron beamsource. e-Vap® CVS Source Control Modules are available in threeinstallation packages, direct flange mount and two remote cablemounts. Direct flange mount packages are used on all MDC flangemounted evaporation systems. This package allows mounting of thefilament transformer to a high voltage feedthrough fitted with a2.75" Del-Seal™ CF flange. Filament transformer attachment isaccomplished by bolting the transformer housing via two of theflanges .250-28 bolts positioned 180° apart. The remote cablemount packages provide 36" of high voltage cable with OFE copperconnector lugs and an acrylic high voltage shield. This package istypically used with modular source installations where high voltageelectrical feedthroughs are fitted with 2-3/4 Del-Seal™ CF flanges,but limited space does not allow direct installation. The secondremote package is used on installations where high voltage are two1" feedthroughs.The source control module’s compact size occupies only half thewidth in a standard 19" electronics rack. To facilitate the installationinto a standard 19" rack, MDC offers half-rack spacers. However, ifthe source control module is purchased in conjunction with an e-Vap® programmable X-Y sweep controller the two units can be fas-tened together to form the standard 19" rack width and would notrequire the half-rack spacer.

SpecificationsMetering Digital Emission Current

Cooling Air cooled


Voltage output 12 VAC

Current output 0 to 70 Amperes

Efficiency 85%Cables From – To Length

Input power cord1 Wall outlet – Source Control Module 7.5'

Interface cable1 Power Supply – Source Control Module 6'

Secondary cable1 Transformer – e-Vap® Source 3'

Control cable2 Source Control Module – Transformer 12'

Transformer input cable2 Source Control Module – Transformer 12'

High voltage cable2 Power Supply – Transformer 12'

Weight 20 lb

Dimensions 8.5" W x 5.25" H x 14" L1Fixed length cables; not available in other lengths

2A 25-foot cable kit may be purchased separately; three cables are included in one kit

Direct



e-Vap®


Features

■ Use with virtually any electron beam source■ Large color LCD display■ Store up to 99 sweep patterns (up to 95

user programmable)■ Four pre-defined and highly expandable

patterns include CIRCLE, SPIRAL, FIGURE 8,and, LINE patterns

■ PS/2 handheld mouse/trackball control included■ An audible alarm warns of possible fault conditions■ Ability to custom name each sweep pattern■ Ability to choose a crucible pocket number to

correspond to specific sweep patterns and/orparameters such as beam centering or evaporation material specification

■ Ability to custom name the sweep controller itself for coating machine identification

■ Expanded beam power-profile capabilities allow the user to control erosion of difficult to evaporate materials

■ Customizable display color (foreground and background) to match your company colors or coating machine colors

■ Password option – requires a four digit password to access functions

■ RS-232 interface■ Safety-interlocked■ All cabling included■ CE compliant■ Rack mounting brackets included

e-Vap® XY Programmable Sweep Controller with mouse

The next generation e-Vap® Programmable Sweep Controller has taken electron beam sweep capabilities to a higher level in versatility and practicality.It combines years of customer feedback with the latest advances in electronicstechnology. It possesses profound advancements from its predecessor interms of functionality and ruggedness. It is designed with both the coatingengineer and coatingoperator in mind. Electronbeam control is dynami-cally precise allowing theuser optimum ability todeposit dielectrics andmetals in the mostdemanding of applications.The strength of the sweepcontroller lies in its abilityto easily adapt to differentevaporation processrequirements, using its many expandable sweep patterns. Four predefinedsweep patterns and up to 95 additional user-defined patterns can bestored. The predefined patterns include CIRCLE, SPIRAL, FIGURE 8, andLINE patterns. Each of the 95 user defined patterns may consist of up to 208 XY points with a different beam dwell time for each beam point.The user interface includes a large, vibrant color LCD display with six function keys and a smooth rolling adjustment knob. A handheld PS/2device/trackball is provided which allows beam maneuverability for crucible material preparation and evaporation. For computer-automatedvacuum systems, a detailed rear panel digital I/O port along with a standard RS-232 interface allows access to the most important sweeperfunctions and status signals. An optional interactive Windows program isavailable allowing desktop sweep pattern design and virtually unlimited sweep pattern storage.

Specifications

Graphic Display Color LCD

Input Power 100-120/200-240V, 50/60Hz, 3A

Max Coil Output (sweep + dc bias) 5 Amps

Max Sweep Frequency 200 Hz

Programming Interface Pushbutton, Digital I/O, or RS-232

Mouse Remote Input PS/2

Max Cable Length (18AWG) 25 feet (7.6 meters)

Weight 11 lbs

Dimensions 8.5" W x 5.25" H x 14” L, Rack-mountable

XY Programmable Sweep Controller

Description

Welcome Screen DisplayWelcome Screen Display

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Sweep Pattern Types

All of these patterns may have their sweep characteristics and parameters highly modified. These parameters include SPEED, PHASE,and POWER PROFILE.SPEED is defined as the speed of which the beam travels to completeone cycle of a given pattern. The fundamental frequency of beam sweepis speed. SPEED settings are Fast, Medium, and Slow. Fast is consideredthe base time, Medium takes twice as long, and Slow takes five times as long.PHASE is defined as angular pattern rotation per cycle. The pattern isrotated a few degrees after each sweep pattern cycle. PHASE settings areFast (50 degree steps), Medium (20 degree steps), Slow (10 degreesteps), and None.

POWER PROFILE is defined as speed of the beam based on its distancefrom the center of the crucible. It allows the beam to sweep faster throughthe center of the crucible than at the outer edges. The parameter of a pattern crossing a crucible too many times, thus resulting in “tunneling”of the material, may be adjusted to obtain “even” beam temperature distribution across the crucible surface. POWER PROFILE settings rangefrom 1 to 1/R2. A setting of 1 is considered as the beam dwell time, beingthe same for all points. A setting of 1/R2 is considered the beam dwelltimes being four times greater on the outer edges of the crucible. Adjustingthe profile between 1 and 1/R2 (twenty possible adjustments) is a new feature for the sweep controller and adds coating process optimization tothis already valuable parameter.

Circle Pattern

Figure 8 PatternSpiral Pattern

A CIRCLE pattern makes the beam sweep in concentric circles beginning atthe outer edge of the crucible and steps closer to the center of the cruciblewith each revolution. Upon reaching the center, a reverse cycle begins andthe beam sweep pattern continues.

A SPIRAL pattern makes the beam sweep in a continuous spiral, beginningat the outer edge of the crucible and advancing toward the center and thenback out again.

The FIGURE 8 pattern makes the beam sweep in a well-defined figure 8path across the crucible.

Select Pattern

The Select pattern allows the user to view patterns 1 through 99. All patterns may be started and/or edited from here as well.



e-Vap®


Display Modes

System ParametersLine Pattern

A LINE pattern makes the beam sweep in a straight line across the crucible.As in all the predefined patterns (circle, spiral, figure 8 and line), the sweepamplitude, speed, phase, power profile, and XY offset can be readily adjusted.There is also easy access to selecting patterns and scrolling through different screen menus.

The System Parameter screen allows the XY offset to be adjusted andstored. Linearity and contrast adjustments can be implemented from here aswell. Foreground and background color selections can also be made fromthis screen and will affect all subsequent patterns. The maximum allowablesweep amplitude current can be set here for the pattern. You can also designate the coating machine’s name as well as adjust the sensitivity of themouse from this screen.

User Pattern: Ninety-six (96) user-defined patterns, completely customizableby the user, can be designed and stored into the sweep controller for instantaccess. Each of the user-defined patterns can contain up to 208 beam location points. Each point can possess its own dwell time ranging from 1 to 100mS. Patterns can be designed via front panel or through RS-232. Ifdesigned via the front panel, a color interactive matrix panel is displayed for

user feedback. It displays a crucible-shaped area showing all selected points(see the Interactive Matrix Panel screen shown on the left.) Custom namingof the generated pattern, adding and deleting points/patterns, and modifyingdwell times is all done on this same screen. A new feature of the sweep controller allows the user to access the SPEED function as well. Choices areFast, Medium, and Slow.

User Pattern User Pattern

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The XY Programmable Sweep Controller comes equipped with a handheld PS/2 mouse/trackball which allows activation, and XYoffsets and sweep amplitude adjustments from up to 6 feet away.

• Sweep On/Off – click the left mouse button• DC On/Off – click the right mouse button• Edit XY Offset – roll the trackball in the desired direction• Edit Amplitude – highlight amplitude, roll the trackball up or down.

Handheld PS/2 Mouse/Trackball


REFERENCEPART

NUMBERPRICE

$DESCRIPTION

4400

125

XYS2-CE

EV-HRS

991344

991062

XY PROGRAMMABLE SWEEP CONTROLLER

HALF RACK SPACER

The sweep controller has the ability to custom name each individual sweeppattern, whether pre-defined or user-defined. For example, when youchoose a specific pattern for a specific evaporation material, it may be desirable to name the pattern after the evaporation material, such as“QuartzPattern” or “TitaniumPattern.”The sweep controller also has the ability to store a name for itself. If yourcoating machine is called “Coating Machine One,” you could customize thename of the sweep controller as, “CoatingMachine1.”The sweep controller also has the ability to assign a specific pattern number (1 to 99) to a specific crucible number or crucible pocket. This is advantageous for users who always have a certain evaporation material ina certain crucible pocket. This allows the user to have saved custom sweepand beam parameters for a given crucible pocket. This is beneficial sincemost deposition controllers have the ability to invoke crucible pockets during a coating cycle.

Customize the Pattern/Controller Name

60

30

0

30

60

90 90

0.0 0.2 0.4 0.6 0.8 1.00.20.40.60.81.0

Rotary Pocket Evaporation Source with HF Emitter Assembly

Hidden Filament Emitter Assembly

Maximize coating distribution with optimal sweep patterns

Optical Coating Uniformity Solutions



e-Vap®


Deposition Monitoring and Control

The SQC-122 controls deposition rate and thickness in multi-layerthing film deposition processes. The controller was designed forease of use with six content sensitive Softkeys providing rapidaccess to frequently used data. The 122C memory will hold up to 25processes consisting of 250 layers and 25 materials. Cut / Copy/Paste Capabilities make it easy to modify or duplicate processesand layers. The controller has inputs for two crystal sensors, two 0-10 volt outputs are available to control the evaporation rate. Eightrelays and digital inputs can be independently assigned to over 40possible events, including pocket rotation and external process con-trols. A windows program for set up and data acquisition is alsoincluded with the controller.

The SQC-222C model of the controller includes software for co-dep-osition control. The two crystal sensors and two outputs to controldeposition rate, along with special software features allow for co-deposition capability.

MDC offers a choice of four units with a range of capabilities frommonitoring the deposition process to controlling multiple depositionprocess or controlling co-deposition processes. The choices are tai-lored from introductory / economical thin film deposition to fullprocess control for a production process. Co-deposition of materialsfrom multiple sources allows easier fabrication and investigation ofcomplex material compositions and layers. All of the monitors andcontrollers utilize proven 6 MHz quartz crystal sensor technology tomeasure the thin film deposition process.

The SQM-160 measures thickness and deposition rate of the thinfilm deposition process. The base unit can monitor from 2 independ-ent measurement channels. Four relays are available to controlsource and crystal shutters during the deposition process. Up tonine films can be stored in memory in the SQM-160, active film canbe easily changed from the front panel. All parameters can also beset from the front panel of the monitor. The SQM-160 is a monitoronly it is not capable of controlling the rate during deposition.

SQM-122C Two Channel Deposition Controller

Description

SQM-160 Rate/Thickness Monitor

SQM-122C Screen Example

SQM-222C Co Deposition Controller

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Crystal Sensor Packages

REFERENCEPART

NUMBERPRICE

$WEIGHT

DESCRIPTION MOUNT POUNDS

1375

1425

1970

120

LPSP-1

LPSP-275

LPSP-HT-275

CRP-500-117

991310

991311

991637

991131

LOW PROFILE SENSOR PACKAGE 1" BASEPLATE 5

LOW PROFILE SENSOR PACKAGE 2.75" DEL-SEAL 5

BAKEABLE SENSOR PACKAGE 2.75" DEL-SEAL 5

SENSOR CRYSTALS, GOLD RATED BOX OF 10 5

1" Base-Plate Low Profile 2.75" Del-Seal™ CF Low Profile 2.75" Del-Seal™ CF Bakeable to 400°C

This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5

crystals per box, two Swagelok® compression fittingsand a 1" base-plate sensor feedthrough. Bakeable to180°C.

This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5

crystals per box, two Swagelok® compression fittingsand a 2.75" Del-Seal™ CF sensor feedthrough. Bakeableto 180°C.

This bakeable sensor package includes a 400°C bake-able sensor head, oscillator, 30" in-vacuum cable, 6"BNC cable, 10' BNC cable, and a box of gold coated sen-sor crystals with 5 crystals per box. Sensor head is preinstalled on a 2.75" Del-Seal™ CF flange, which includesthe sensor feedthrough.


The SQM-242 is a thin film deposition controller and a standardPCI expansion card. Each SQM monitors from one to four crys-tal sensor inputs, and provides two control voltage outputs. Atypical single sensor deposition system is shown, the SQM-242card is installed in a computer, a quartz crystal sensor is con-nected to the input and the output is connected to a power sup-ply. The card will control the deposition rate and adjust the out-put of the power supply for constant deposition rate. The basicSQM-242 card includes software that is easily modified to

REFERENCEPART

NUMBERPRICE

$DESCRIPTION

1295

2700

3150

1295

1075

SQM-160

SQC-122C

SQC-222C

SCM-242

SQS-242

991366

991309

991367

991327

991328

SQM-160 TWO CHANNEL DEPOSITION MONITOR

SQM-122C TWO CHANNEL DEPOSITION MONITOR

SQM-22C TWO CHANNEL DEPOSITION MONITOR

SQM-242 TWO CHANNEL DEPOSITION MONITOR

SQS-242 CO DEPOSITION SOFTWARE

SQM-242 Co Deposition Controller Software

SQM-242 Co Deposition Controller PCI Card

communicate with digital I/O cards. The SQS-242 software packagesupports multiple cards, co-deposition, digital I/O , graphing, anddata logging.



e-Vap®


Features

■ Reliable■ Small Footprint■ Minimal Shadowing■ Minimal Crystal Handling■ Ease of Installation■ Works w/ Present Thin Film Controllers■ 1/3 The Price of Leading Competitors Units

XL12 Multi Crystal Sensor Head Package Includes:■ Multi Crystal Sensor Head■ Controller■ 1” Bolt Feedthrough or 2 3/4 Conflat■ 30” In-Vacuum Cable■ 12 Complementary Quartz Crystals■ 15 Crystal Carriages■ 2 Sensor Shields

Description

The XL12 Multi Crystal Sensor Head can hold up to 12, 6 MHzCrystal at one time. With the XL12, the customer can take financialadvantage of long term deposition runs! This instrument is anexclusive patent pending design ready to meet industry needs.

This revolutionary design is a small 1.5”w x 5.75”l x 1.4”h (seedrawings) sensor head that uses slide technology to transfer thecrystals. The crystals are seated in carriage assemblies in order toprovide guaranteed exchange during process. When the crystal inuse expires, an operator can manually signal the next crystal tomove into position or you can send a signal via your thin film moni-tor / controller. After a signal is given, the XL12 transfers the nextcrystal into position which moves the expired crystal into a holdingcompartment. To reload the XL12 you simply remove the self align-ing crystal cartridge from the main body. You remove 2 screws andthe top plate, you then re-load 12 new crystals, replace the topplate and reinstall the cartridge to the main body. This processtakes less than 5 minutes!

XL12 Multi Crystal Sensor Head


XL12 Multi Crystal Sensor Head Specifications

Crystal loaded in cartridge

REFERENCEPART

NUMBERPRICE

$DESCRIPTION POUNDS

XL12 MULTI CRYSTAL SENSOR HEAD 2 EV-XL12CS 991375 Call

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The e-Vap® Crucible Indexer is a micro stepper controlled motor driveunit used to position and rotate a multi-hearth electron beam source.The crucible indexer will rotate and position up to eight pocket positions,additional eight preprogrammed configurations can be selected via dipswitch settings at the back of the controller. These include: 4 pocket, 6pocket, 2 pocket, 180° Banana, 3 pocket 90° Banana, 3 pocket 120°Banana, 3 pocket 135° Banana, 3 pocket 145° Banana, or Continuous360° rotation. An additional dip switch lets the user select the follow-ing modes: Bi-Direction (shortest path between pockets), CounterClockwise Rotation, UHV Source Type, High Speed Range, BCD I/O, andEnable Ethernet communications. In addition the indexer can be userconfigured for any pocket / banana crucible layout. The Indexer alsoeliminates mechanical adjustment of the home or 1st pocket location,the "home" position can be defined electronically.

The e-Vap® Crucible Indexer can be controlled either manually orremotely, it can be configured to interface with most deposition con-troller equipped to select pockets on a multi layer deposition. AWindows-based configuration screen can be used to customize thepocket layout. The drive motor comes with a bracket to attach to a 2.75inch Del Seal rotary feedthrough or to a 1 inch bolt type rotaryfeedthrough. The indexer is supplied with a coupling to connect the 1/4inch drive shaft to the 1/4 inch feedthrough shaft. The e-Vap® CrucibleIndexer is designed to be one of the most flexible methods to customizeor fine tune crucible rotation and control for multi hearth electron beamsources.

Specifications

MOTOR DRIVE

Motor type micro-stepper

Torque 1.4 N-m (200 oz-in)

Speed (RPM) low: 0.05, 0.06, 0.08, 0.10, 0.12, 0.15, 0.19, 0.24, 0.30, 0.37

high: 0.5, 0.6, 0.8, 1.0, 1.2, 1.5, 1.9, 2.4, 3.0, 3.7

Resolution 1.8ºl

Repeatability 0.25ºl

Size (height x width x depth) 89 x 89 x 122 mm (3.5" x 3.5" x 4.8")

Weight 1.5 Kg (3.2 lbs)

Power 12 W (supplied by controller)

Specifications

CONTROLLER

Pockets up to 8

digital inputs binary or BCD encoded

low = 0 to 2 Vdc, high = 4 to 24 Vdc, non-isolated

Communications RS-232 or Ethernet

Size (height x width x depth) 88 x 213 x 197 mm (3.5" x 8.4" x 7.75")

Weight 2.7 Kg (6 lbs)

Power 100-120 / 200-240 VAC, 50/60 Hz, 20W

Compliance CE (LVF & ECD)

Interconnecting cable 10ft (3m), standard DB25

REFERENCEPART

NUMBERPRICE

$DESCRIPTION

2255EV-CI-INDEXER 991400CRUCIBLE INDEXER

Features

■ Direct drive-No pulleys or belts to set or adjust■ Electronic calibration of position■ 8 predefined pocket configurations included■ User configurable feature allows for custom or spe-

cial pocket configurations■ Can be operated manually or by external controller■ Two speed ranges for a total of 20 speed settings■ 1.8º resolution■ CE compliant

e-Vap® Crucible Indexer

Crucible Indexer



e-Vap®

Evaporation Source Accessories

Pneumatic Shutter Two Position

Pneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of theevaporation/deposition cycle. The shutter also allows pre-melt or “soak” prior todeposition by blanketing the evaporation material. Shutters with a 2" diameterand 2" stroke are used on sources with crucible volumes of less than 40cc.Shutters with a 3" diameter and 4" stroke are used on sources with crucible vol-umes of 40cc and greater. These shutters come standard with a 120VAC sole-noid valve.

REFERENCEPART

NUMBERPRICE

$NOM. SHUTTER STROKEFLANGE DIAMETER LENGTH

930

1500

950

1250

PS-2P2-133

PS-2P3-133

PS-2P2-275

PS-2P3-275

991796-02

991796-01

991794-02

991794-01

1-1/3 2.00 2.00

1-1/3 3.00 4.00

2-3/4 2.00 2.00

2-3/4 3.00 4.00

Pneumatic Shutter Three Position

Pneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of theevaporation/deposition cycle. The shutter also allows pre-melt or “soak” prior todeposition by blanketing the evaporation material. A three position shutter offersgreater process flexibility than other shutters. In position one the shutter willclose the deposition and rate monitoring ports on a horizontal e-Vap® systemfitted with a water-cooled roof. In position two the shutter continues to block thedeposition port, but opens the rate monitoring port. In position three all ports areopen and the system is ready to begin a coating cycle. This shutter includes a120VAC solenoid air control valve.

REFERENCEPART

NUMBERPRICE

$DESCRIPTION

1650PS-3PU-133 996343SHUTTER 3-POSITION

High Voltage Safety Accessories

REFERENCEPART

NUMBERPRICE

$DESCRIPTION

215

195

225

EV-SGH

HVE-2

BHVE-2

991106

640051

640057

HIGH VOLTAGE SAFETY GROUND HOOK

ACRYLIC SHIELD 2-3/4" DEL-SEAL

ACRYLIC SHIELD 1" BASE-PLATE

Grounding Hook... MDC recommends the use of a grounding hook prior to serv-ice or maintenance of any high voltage equipment. Connections which werepreviously energized should be discharged with a grounding hook solidly con-nected to a low impedance earth ground. Hook installation is made easy withthe supplied 64" insulated cable.

High Voltage Shield... To prevent accidental contact with exposed high voltageleads MDC recommends the use of high voltage acrylic shields. Shields areavailable for 2-3/4" Del-Seal™ CF flange and 1" Baseplate mounted feed-throughs. Strain relief will accept cable sizes from .23" to .47" diameters.

e-Vap®


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Manual Shutter Push-Pull

Manual shutters are an excellent tool for control of film thickness onto a sub-strate. The manually operated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of theevaporation/deposition cycle. The shutter also allows pre-melt or “soak” prior todeposition by blanketing the evaporation material. Shutters with a 2" diameterby 2" stroke are used on sources with crucible volumes of less than 40cc.Shutters with a 3" diameter by 4" stroke are used on sources with crucible vol-umes of 40cc and greater.

Linear Guide Rods

Linear bearing guide rods allow horizontal flange mounted e-Vap® systems tobe routinely maintained by simply sliding in and out, in drawer-like fashion. Twolinear ball bushings provide the smooth gliding action required for ease ofmovement. Weldable support brackets secure the guide rods onto the user’sport flange. The bracket installation procedure is simple and self explanatory.

REFERENCEPART

NUMBERPRICE

$DESCRIPTION

825EV-LGRA 991791GUIDE RODS

Water Flow Switch

e-Vap® electron beam sources rely on water-cooling to dissipate the largeamounts of heat generated by an electron beam. Proper water flow is essentialfor normal system operation as well as for safety. The water flow switch will turnoff all power to the e-Vap® source when and if a preset water flow rate dropsbelow its set point.

REFERENCEPART

NUMBERPRICE

$DESCRIPTION

300

300

EV-WF110

EV-WF240

991031

991031-01

WATER FLOW SWITCH 110V

WATER FLOW SWITCH 24VDC

REFERENCEPART

NUMBERPRICE

$NOM. SHUTTER STROKEFLANGE DIAMETER LENGTH

825

975

925

985

MS-2-133

MS-3-133

MS-2-275

MS-3-275

991793-01

991793-02

991792-01

991792-02

1-1/3 2.00 2.00

1-1/3 3.00 4.00

2-3/4 2.00 2.00

2-3/4 3.00 4.00



e-Vap®


MDC recommends using crucible liners with all e-Vap® sources. Crucibleliners provide thermal isolation between a target material and a source’swatercooled crucible. These liners offer improved thermal stability whilereducing the transfer of heat to the crucible. Liners provide the ability to eas-ily and quickly switch evaporant materials without removing the source forcleaning. They also reduce power requirements to achieve specific evapora-tion rates. Graphite and vitreous carbon are the most popular liner materialsdue to their low cost and favorable thermal properties. Vitreous carbon isproduced using a patented glazing process baked above 1400°C eliminat-ing any porosity in the carbon. Please contact MDC sales for price and avail-ability on the various non-priced liner materials.

Crucible Liners

GRAPHITE 2cc

GRAPHITE 6cc

GRAPHITE 7cc

GRAPHITE 15cc

GRAPHITE 25cc

GRAPHITE 30cc

GRAPHITE 40cc

GRAPHITE 60cc

GRAPHITE 75cc

GRAPHITE 100cc

VITREOUS CARBON 2cc

VITREOUS CARBON 6cc

VITREOUS CARBON 7cc

VITREOUS CARBON 15cc







MOLYBDENUM 2cc

MOLYBDENUM 6cc

MOLYBDENUM 7cc

MOLYBDENUM 15cc

MOLYBDENUM 25cc

MOLYBDENUM 30cc

MOLYBDENUM 40cc

MOLYBDENUM 60cc

MOLYBDENUM 75cc

MOLYBDENUM 100cc

TUNGSTEN 2cc

TUNGSTEN 6cc

TUNGSTEN 7cc

TUNGSTEN 15cc

TUNGSTEN 25cc

REFERENCEPART

NUMBERPRICE

$LINER CRUCIBLEMATERIAL SIZE

80

55

75

70

80

135

Call

Call

Call

Call

135

135

135

150

225

225

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

EV-CL2G

EV-CL6G

EV-CL7G

EV-CL15G

EV-CL25G

EV-CL30G

EV-CL40G

EV-CL60G

EV-CL75G

EV-CL100G

EV-CL2VC

EV-CL6VC

EV-CL7VC

EV-CL15VC

EV-CL25VC

EV-CL30VC

EV-CL40VC

EV-CL60VC

EV-CL75VC

EV-CL100VC

EV-CL2M

EV-CL6M

EV-CL7M

EV-CL15M

EV-CL25M

EV-CL30M

EV-CL40M

EV-CL60M

EV-CL75M

EV-CL100M

EV-CL2TU

EV-CL6TU

EV-CL7TU

EV-CL15TU

EV-CL25TU

992584-01

990586-01

990587-01

990588-01

990589-01

992484-01

990590-01

992571-01

992572-01

992573-01

992584-02

990586-02

990587-02

990588-02

990589-02

992484-02

990590-02

992571-02

992572-02

992573-02

992584-03

990586-03

990587-03

990588-03

990589-03

992484-03

990590-03

992571-03

992572-03

992573-03

992584-04

990586-04

990587-04

990588-04

990589-04

TUNGSTEN 30cc

TUNGSTEN 40cc

TUNGSTEN 60cc

TUNGSTEN 75cc

TUNGSTEN 100cc

BORON NITRIDE 2cc

BORON NITRIDE 6cc

BORON NITRIDE 7cc

BORON NITRIDE 15cc

BORON NITRIDE 25cc

BORON NITRIDE 30cc

BORON NITRIDE 40cc

BORON NITRIDE 60cc

BORON NITRIDE 75cc

BORON NITRIDE 100cc

ALUMINA 2cc

ALUMINA 6cc

ALUMINA 7cc

ALUMINA 15cc

ALUMINA 25cc

ALUMINA 30cc

ALUMINA 40cc

ALUMINA 60cc

ALUMINA 75cc

ALUMINA 100cc

COPPER 2cc

COPPER 6cc

COPPER 7cc

COPPER 15cc

COPPER 25cc

COPPER 30cc

COPPER 40cc

COPPER 60cc

COPPER 75cc

COPPER 100cc

REFERENCEPART

NUMBERPRICE

$LINER CRUCIBLEMATERIAL SIZE

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

Call

EV-CL30TU

EV-CL40TU

EV-CL60TU

EV-CL75TU

EV-CL100TU

EV-CL2BN

EV-CL6BN

EV-CL7BN

EV-CL15BN

EV-CL25BN

EV-CL30BN

EV-CL40BN

EV-CL60BN

EV-CL75BN

EV-CL100BN

EV-CL2A

EV-CL6A

EV-CL7A

EV-CL15A

EV-CL25A

EV-CL30A

EV-CL40A

EV-CL60A

EV-CL75A

EV-CL100A

EV-CL2CU

EV-CL6CU

EV-CL7CU

EV-CL15CU

EV-CL25CU

EV-CL30CU

EV-CL40CU

EV-CL60CU

EV-CL75CU

EV-CL100CU

992484-04

990590-04

992571-04

992572-04

992573-04

992584-05

990586-05

990587-05

990588-05

990589-05

992484-05

990590-05

992571-05

992572-05

992573-05

992584-06

990586-06

990587-06

990588-06

990589-06

992484-06

990590-06

992571-06

992572-06

992573-06

992584-08

990586-08

990587-08

990588-08

990589-08

992484-08

990590-08

992571-08

992572-08

992573-08FABMATE 2cc

FABMATE 6cc

EV-CL2FM

EV-CL2FM

992584-10

990586-10

90

100

e-Vap®


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The spare parts detailed below are a list of e-Vap® consumable components which mayrequire periodic replacement. These components have been specifically designed for usewith MDC e-Vap® electron beam evaporation sources and systems.

ANODE 1-6 1

BEAM DEFLECTOR SHIELD 1, 2, 5, 6 2

BEAM DEFLECTOR SHIELD 3, 4 2

BEAM FORMER 1 - 6 3

CATHODE BLOCK, LH 1, 2 4

CATHODE BLOCK, RH 1, 2 4

CATHODE BLOCK, LH 3 - 6 4

CATHODE BLOCK, RH 3 - 6 4

EMITTER ASSEMBLY 1, 2 6

EMITTER ASSEMBLY, OLD 5 1 6

EMITTER ASSEMBLY 6 6



EMITTER ASSEMBLY, NEW 5 1 6

FASTENERS, NON-GALLING 1 - 6 5

FILAMENT CLAMP, LH 1 - 6 7

FILAMENT CLAMP, RH 1 - 6 7

FILAMENT SET, 5 ea. 1, 2, 6 8

FILAMENT SET, 5 ea. 3, 4, 5 8

INSULATOR, HIGH VOLTAGE 1 - 6 A

INSULATOR, FILAMENT BLOCK 1 - 6 B

INSULATOR, BEAM DEFLECTOR 1 - 6 C

INSULATOR, BEAM FORMER 1 - 6 D

REFERENCEPART

NUMBERPRICE

$USED WITH

DESCRIPTION FRAME SIZE FIGURE

325

115

65

40

200

200

200

200

1450

1450

1450

1450

1450

1450

50

40

40

60

60

15

20

15

7

EV-EA

EV-BDS

EV-BDS

EV-BF

EV-LCB

EV-RCB

EV-LCB

EV-RCB

EV-EA-1000

EV-EA-4010

EV-EA-4015

EV-EA-4066

EV-EA-4UHV

EV-EA-4010

EV-FK

EV-LFC

EV-RFC

EV-FIL

EV-FIL

EV-IHV

EV-IFB

EV-IBDS

EV-IBDS

990537

992201

990534

990533

990525-01

990526-01

990525-02

990526-02

990630-01

990630-02

990630-03

990630-04

990630-06

990630-05

990585

990531

990532

992330

990527

990530

990528

990535

990529

270º Emitter Consumable Accessories

Figure 1

Figure 3

Figure 5

Figure 6

Figure 8 Figure 9

Figure 7

Figure 4

Figure 2

1 Older frame-five emitter assemblies are fitted with short design anodes as pictured in figure seven and bottom of figureone. New frame-five emitter assemblies are fitted with new extended design anodes as shown at top of figure one.

A

B

C

D

C

D



e-Vap®


EMITTER RETROFIT KIT

EMITTER RETROFIT KIT 1, 2, 5 1

EMITTER RETROFIT KIT 6 2

EMITTER ASSEMBLY

EMITTER ASSEMBLY 1, 2, 5 1


REPLACEMENT PARTS

ANODE 1-6 3

BEAM DEFLECTOR SHIELD 1-6 4

FILAMENT INSTALLATION TOOL 1-6 5

CATHODE BLOCK, LH 1-6 6

CATHODE BLOCK, RH 1-6 6

FASTENERS, NON-GALLING (Set of 8) 1-6 7

FILAMENT CLAMP, LH 1-6 8

FILAMENT CLAMP, RH 1-6 8

CONSUMABLES

FILAMENT SET, 5 ea. 1-6 9

INSULATOR, HIGH VOLTAGE 1-6 10

REFERENCEPART

NUMBERPRICE

$USED WITH

DESCRIPTION FRAME SIZE FIGURE

3500

4100

2500

2500

250

125

15

650

650

50

95

95

60

235

EV-EAHF1-KIT

EV-EAHF6-KIT

EV-EAHF1

EV-EAHF6

EV-AHF

EV-BDSHF

EV-FIT

EV-LCBHF

EV-RCBHF

EV-FKHF

EV-LFCHF

EV-RFCHF

EV-FILHF

EV-IHVHF

992908

992909

992850-02

992850-01

992845

992846

992534-01

992853

992852

993042

992847-01

992847-02

990527

992414

Figure 3

Figure 5

Figure 7

Figure 1

Figure 9 Figure 10

Figure 8

Figure 6

Figure 4

HF Emitter Assembly

Retrofit KitA complete HF Emitter Assembly retrofit kit includes:• One HF Emitter Assembly• One filament installation tool• One face plate for emitter• Permanent magnets (Frame size 5 and 6 only)• Two installation screws• Detailed instructions

Components may be purchased individually or as acomplete retrofit kit.

The spare parts detailed below are a list of e-Vap® consumable com-ponents which may require periodic replacement. These compo-nents have been specifically designed for use with MDC e-Vap®

electron beam evaporation sources and systems equipped with theHF Emitter Assembly.

Figure 2

e-Vap®


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Installation Hardware

Listed below are the essential components required for a typical installation of stand-alonemodular e-Vap® electron beam sources. Included are feedthroughs for source water cool-ing and all electrical interfaces. Manual and auto-indexer type rotary feedthroughs areavailable for the installation of multi-pocket sources. All components are fitted with indus-try standard vacuum mounts to facilitate source installation onto existing coating systems.Standard mounts include... Del-Seal™ CF metal seal flanges and 1" baseplate O-ring sealmounts. Customers with Balzers systems with 1-1/4" base plate ports can use MDC 1-1/4"to 1" baseplate port adapters.

FEEDTHROUGHS, WATER & ELECTRICAL

WATER, DUAL .312" TUBES, 2.75" DEL-SEAL 1

WATER, DUAL .312" TUBES, 1" BASE-PLATE 1

SWEEP COIL, 4 PIN .056, 1.33" DEL-SEAL 2

SWEEP COIL, 4 PIN .056, 2.75" DEL-SEAL 2

SWEEP COIL, 4 PIN .056, 1" BASE-PLATE 2

TC-CRIMP CONTACTS FOR .056 PIN, Pkg of 5 2

HIGH VOLTAGE, 2 PIN .250, 12kV 2.75" DEL-SEAL 3

HIGH VOLTAGE, 1 PIN .312, 12kV 1" BASE-PLATE 10

CONNECTOR, RIGHT ANGLE POWER, .25" PIN 3

CONNECTOR, INLINE POWER, 25" PIN 3

CONNECTOR, RIGHT ANGLE, .312" PIN

FEEDTHROUGHS, ROTARY BELLOWS SEAL

ROTARY MANUAL, .250 SHAFT, 1.33" DEL-SEAL 4

ROTARY MANUAL, .250 SHAFT, 2.75" DEL-SEAL 4

ROTARY, .250 SHAFT BOTH ENDS, 1.33" DEL-SEAL 5

ROTARY, .250 SHAFT BOTH ENDS, 2.75" DEL-SEAL 5

FEEDTHROUGHS, ROTARY O-RING SEAL

ROTARY, .250 SHAFT BOTH ENDS, 1" BASE-PLATE 6

ASSEMBLY EQUIPMENT

BASE-PLATE ADAPTER BALZERS 1-1/4" TO MDC 1" 7

VCR® GLAND, .250" MODIFIED .218" BORE 8

VCR® GLAND, .250" TO .312" TUBE ADAPTER 8

WATER FLOW SWITCH, 110V 9

WATER FLOW SWITCH, 240V 9

HIGH VOLTAGE SAFETY GROUND HOOK 11

HIGH VOLTAGE ACRYLIC SHIELD, 2-3/4" DEL-SEAL 12

HIGH VOLTAGE ACRYLIC SHIELD, 1" BASE-PLATE 12

REFERENCEPART

NUMBERPRICE

$DESCRIPTION FIGURE

150

285

275

275

300

60

425

395

25

25

75

450

465

525

535

345

95

22

10

300

300

215

195

225

991534

991726

991531

991532

991727

991538

640005

992940

991537

991536

992818-03

670004

670005

991731

991730

652000

991813

990610

991809

991031

991031-01

991106

640051

640057

Figure 2

Figure 4

Figure 6

Figure 8

Figure 11

Figure 9

Figure 7

Figure 5

Figure 3

EV-LF275

EV-LF1

EV-IF133

EV-IF275

EV-IF1

TC-CRIMP

EV-HC275

EV-HC1

RAPC

ILPC

REVHVC

HTBRM-133

HTBRM-275

EV-BRMI-133

EV-BRMI-275

FRM-1

EV-BAI

EV-MVCR

EV-TAVCR

EV-WF110

EV-WF24D

EV-SGH

HVE-2

BHVE-2

Figure 1

Figure 10

Figure 12



e-Vap®


Shipping Method

All standard shipments are made by thefollowing method unless otherwise specified:• FOB Hayward, California and Sarasota,

Florida.• prepay and added to invoice (PPA);• shipped via UPS ground service or best

way as determined by MDC.

Nonstandard shipments must be specified bythe customer. General notes include thefollowing:• orders may be specified to ship collect;• charges for nonstandard methods of

shipping are determined by the specifiedcarrier;

• in some cases, oversized items may becharged at a “dimensional weight” (dim-weight) rate which is substantially higherthan surface rates.

MDC recommends in all cases that analternative carrier be named at the time oforder.

Weights stated in this catalog are forreference only. Exact shipping weights aredetermined at the time of shipment.

Payment Terms

Net 30 days with prior credit approval.VISA®, MasterCard® and AmericanExpress® credit cards, prepaid, are alsoaccepted.

Prices and Specifications

Prices and specifications are subject tochange without notice.

Delivery

Every effort will be made to ship within three(3) days of receipt of an order. In the event ofback-order, a firm delivery date will beestablished and quoted.

Warranty

All products manufactured by MDC VacuumProducts Corporation are warranted to befree from defects in materials andworkmanship for a period of twelve (12)months from the date of shipment by MDCVacuum Products Corporation to the buyer.Liability under this warranty is expresslylimited to repair or replacement of defectiveproducts at the option of MDC VacuumProducts Corporation. Products returned toMDC Vacuum Products Corporation for repairor replacement shall be received prepaid.Expendable items such as gaskets, bellows,bearings, lubricants, etc., may have a servicelife of less than one year in normal usage. Ifsuch items fail to give reasonable service fora period of time, as determined by MDCVacuum Products Corporation, they will berepaired or replaced by MDC VacuumProducts Corporation at its election.

Return Policy

In the event that a product is to be returnedto MDC, a Return Authorization (RA) numbermust be obtained from the MDC SalesDepartment prior to shipment of the product.Call the toll free number listed at the bottomof this page and request an RA number. Tofacilitate processing, please provide theoriginal date of purchase and either theoriginal purchase order number or theoriginal MDC sales order number.

Products returned to MDC Vacuum Products

Corporation for repair or replacement shallbe received prepaid. Items arriving without aReturn Authorization number will be refused.

A product failing to give reasonable servicefor a period of time, as determined by MDCVacuum Products Corporation, will be repair-ed or replaced by MDC Vacuum ProductsCorporation at its election.

Trademark Ownership

American Express® American Express Co.MasterCard® Mastercard International Inc.VISA® VISA International Service AssociationApiezon® Avo Biddle InstrumentsAutoCad® AutoDesk CorporationConflat®, Fel-Pro® Varian Associates Inc.Corning®, Pyrex® Corning Inc.Dicronite® Rotary Components, Inc.Kovar® Carpenter TechnologyMazak® Yamazaki Mazak Corp.Slo-Syn® Superior Electric Co.Suprasil™ Heraeus Amersil Inc.Swagelok®, VCR® Swagelok Co.Teflon® E.I. DuPont de Nemours & Co., Inc.VacOptix® Insulator SealViton®, Buna®, Kapton®, Kalrez®,Krytox®, Vespel®, Delrin® DuPont Dow

ElastomersCab-Fast® Caburn-MDC LimitedDel-Seal™, Del-Base™, Del-Weld™, Kwik-Flange™, Large-Flange™, Mini-Scaffold™,Auto-Dock™, C-Loc™, Uni-Loc™, V-Plane™,Re-Vap™, e-Vap®

MDC Vacuum Products Corporation

MDC customer service and technical department MDC inventory and stock room MDC shipping and receiving department

All dimensions in this catalog are given ininches unless specified otherwise.

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Subject Page Subject Page Subject Page

AAccessories, e-Vap®

Consumable. . . . . . . . . . . . . . . . . . . 40-44General . . . . . . . . . . . . . . . . . . . . . . . . . 37Installation . . . . . . . . . . . . . . . . . . . . . . 42

Acrylic, high voltage shieldFits 1" baseplate mounts . . . . . . . . . 37,42Fits 2-3/4" Del-Seal™ CF . . . . . . . . . 37,42

Adapter, e-Vap®

1/4" to 5/16" tube . . . . . . . . . . . . . . . . 421-1/4" to 1" baseplate . . . . . . . . . . . . . 422mm wire feed . . . . . . . . . . . . . . . . . . . 11

Alumina crucible liners . . . . . . . . . . . . . . . 39Anode, 3kW miniature source. . . . . . . . 13,16Anode, modular source. . . . . . . . . . . . . 40,41Applications, e-Vap® . . . . . . . . . . . . . . . . . 2

BBaseplate

Adapter, 1-1/4" to 1" . . . . . . . . . . . . . . 42Beam former

3kW source. . . . . . . . . . . . . . . . . . . . . . 13270º source. . . . . . . . . . . . . . . . . . . . . . 40

Block insulator, filament 270º . . . . . . . . . 482Block, cathode 270º . . . . . . . . . . . . . . . . . 40Boron Nitride crucible liners . . . . . . . . . . . 40

CCable, 25' source control. . . . . . . . . . . . . . 28Carbon crucible liners . . . . . . . . . . . . . . . . 39Carousel source, modular . . . . . . . . . . 21-22Cathode block 270º . . . . . . . . . . . . . . . . . . 40Coil feedthroughs . . . . . . . . . . . . . . . . . . . 42

Electrical 4 pin .056", 2-3/4" . . . . . . . . 42Electrical 4 pin .056", 1-1/3" . . . . . . . . 42Electrical 4 pin .056", 1" baseplate. . . . 42

Consumable accessories . . . . . . . . . . . 40-41Controller, deposition rate . . . . . . . . . . 33-34Copper crucible liners . . . . . . . . . . . . . . . . 39Crucible liners . . . . . . . . . . . . . . . . . . . . . . 39Crucible, resistive source oxide . . . . . . . . . . 5Crucible Indexer . . . . . . . . . . . . . . . . . . . . 36Crystal sensor packages

Low profile on 1" baseplate . . . . . . . . . 34Low profile on 2-3/4" . . . . . . . . . . . . . . 34High temperature on 2-3/4" . . . . . . . . . 34Low profile on 2-3/4" . . . . . . . . . . . . . . 34

XL-12 . . . . . . . . . . . . . . . . . . . . . . . . . . 35

DDeposition rate controller . . . . . . . . . . . 33-34Deposition rates

Monolayer . . . . . . . . . . . . . . . . . . . . . . . 10Stable . . . . . . . . . . . . . . . . . . . . . . . . . . 10

EElectrical feedthrough, e-Vap® Sweep,

4 pin, .056" on 2-3/4" . . . . . . . . . . . . . 424 pin, .056" on 1-1/3" . . . . . . . . . . . . . 424 pin, .056" on 1" baseplate . . . . . . . . . 424 pin, .056" on 2-3/4 . . . . . . . . . . . . . . 42High voltage, 2 pin .250 on 2-3/4" . . . . 42High voltage, 2 pin .250 on 1" baseplate 42High current, Re-Vap™ . . . . . . . . . . . . . . 9

Element, resistive source heater basketBaffled boat. . . . . . . . . . . . . . . . . . . . . . . 8Coil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5Filament . . . . . . . . . . . . . . . . . . . . . . . . . 8Foil boat, metal . . . . . . . . . . . . . . . . . . . . 5Foil boat, coated metal . . . . . . . . . . . . . . 5

Emitter assembly, 270º . . . . . . . . . . . . . . . 40Emitter assembly, HF. . . . . . . . . . . . . . . . . 41Extension kit, Re-Vap™ conductor . . . . . . . . 5

FFasteners, non-galling . . . . . . . . . . . . . 40,41Feedthroughs

Electrical . . . . . . . . . . . . . . . . . . . . . . . . 42Rotary . . . . . . . . . . . . . . . . . . . . . . . . . 42Water, dual 5/16 tube . . . . . . . . . . . . . . 42High current, Re-Vap™

Filament clamp . . . . . . . . . . . . . . . . . . . . . 42Filament sets,

EV-100 . . . . . . . . . . . . . . . . . . . . . . . . . 113kw single . . . . . . . . . . . . . . . . . . . . . . 13Mighty SourceTM. . . . . . . . . . . . . . . . . . . 16270º emitter . . . . . . . . . . . . . . . . . . . . . 40HF emitter . . . . . . . . . . . . . . . . . . . . . . . 41

Filament transformer, source control . . . . . 28Filament, resistive source

Re-Vap™900 . . . . . . . . . . . . . . . . . . . . . . 5Re-Vap™3000 . . . . . . . . . . . . . . . . . . . . . 8

Flange mounted sourcesHorizontal . . . . . . . . . . . . . . . . . . . . . . . 24

Miniature. . . . . . . . . . . . . . . . . . . . . . . . 13Mighty SourceTM. . . . . . . . . . . . . . . . . . . 16Vertical . . . . . . . . . . . . . . . . . . . . . . . . . 25

Flow switch, water . . . . . . . . . . . . . . . . . . 38Frame size, modular source

Frame 1, 2, . . . . . . . . . . . . . . . . . . . . . . 19Frame 3,4 . . . . . . . . . . . . . . . . . . . . . . . 20Frame 5 . . . . . . . . . . . . . . . . . . . . . . . . 21Frame 6 . . . . . . . . . . . . . . . . . . . . . . . . 22

GGland 1/4 VCR® with .218" bore . . . . . . . 42Gland 1/4 VCR® to 5/16"

tube adapter . . . . . . . . . . . . . . . . . . . . . 42Graphite crucible liners . . . . . . . . . . . . . . . 39Grounding hook, high voltage . . . . . . . . . . 37Guide rods, horizontal flanged

source. . . . . . . . . . . . . . . . . . . . . . . . . . 38

HHalf-rack spacer

3-1/2" high . . . . . . . . . . . . . . . . . . . . . . 365-1/4" high . . . . . . . . . . . . . . . . . . . 28,32

HF emitter . . . . . . . . . . . . . . . . . . . . . . . . . 41High voltage power supplies, 208 volt

100W-EV-100 . . . . . . . . . . . . . . . . . . . . 113kW . . . . . . . . . . . . . . . . . . . . . . . . 13,156kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27

High voltage power supplies, 400 volt6kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27

High voltage shield, acrylicFits 2-3/4" Del-Seal™ CF . . . . . . . . . 37,42Fits 1" baseplate mount . . . . . . . . . . 37,42

IIndexer, crucible . . . . . . . . . . . . . . . . . . . . 36Indirect watercooled sources . . . . . . . . 21,22Insulator

Beam deflector, 270º. . . . . . . . . . . . . . . 40Beam former, 270º . . . . . . . . . . . . . . . . 40Ceramic, 270º . . . . . . . . . . . . . . . . . . . . 40Filament block, 270º . . . . . . . . . . . . . . . 40High voltage, HF, 270º . . . . . . . . . . . 40,41



e-Vap®

Subject Page Subject Page Subject Page

J

K

L

MManual shutter, push-pull . . . . . . . . . . . . . 38Miniature evaporation systems . . . . . . . 10-14 Miniature sources

e-Vap® 100W . . . . . . . . . . . . . . . . . 10-11e-Vap® 3000W . . . . . . . . . . . . . . . . 12-13Mighty Source™ . . . . . . . . . . . . . . . . 14-15

Modular sources, by frame sizeFrame 1, 2 . . . . . . . . . . . . . . . . . . . . . . 19Frame 3,4 . . . . . . . . . . . . . . . . . . . . . . . 20Frame 5 . . . . . . . . . . . . . . . . . . . . . . . . 21Frame 6 . . . . . . . . . . . . . . . . . . . . . . . . 22

Modular sources, flangedHorizontal . . . . . . . . . . . . . . . . . . . . . . . 24Vertical . . . . . . . . . . . . . . . . . . . . . . . . . 25

Molybdenum crucible liners. . . . . . . . . . . . 39Mouse, XY sweep . . . . . . . . . . . . . . . . . . . 32

N

OOrdering information . . . . . . . . . . . . . . . . . 43

PPatterns, XY sweep . . . . . . . . . . . . . . . 30-31Pneumatic shutter

2 position, 2 on 1-1/3" . . . . . . . . . . . . . 372 position, 2 on 2-3/4" . . . . . . . . . . . . . 372 position, 3 on 1-1/3" . . . . . . . . . . . . . 372 position, 3 on 2-3/4" . . . . . . . . . . . . . 37

Power supplies, 208V input voltage100W, EV-100 . . . . . . . . . . . . . . . . . . . . 11

900W, Re-Vap™ . . . . . . . . . . . . . . . . . . . . 43000W, Re-Vap™ . . . . . . . . . . . . . . . . . . . 63kW . . . . . . . . . . . . . . . . . . . . . . . . . 13,156kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27

Power supplies 400V input voltage6kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27

Q

RRate controller, deposition . . . . . . . . . . 33,34Re-Vap™ . . . . . . . . . . . . . . . . . . . . . . . . . . 4,9Remote mount filament transformer . . . . . 28Resistive source, Re-Vap™ . . . . . . . . . . . . 4,9Rods, guide, horizontal flanged source . . . 38Roof, watercooled . . . . . . . . . . . . . . . . 23-26

SSafety accessories

Acrylic shield, fits 1" baseplate . . . . . . . 37Acrylic shield, fits 2-3/4". . . . . . . . . . . . 37Grounding hook, high voltage . . . . . . . . 37

Sensor packages, crystal. . . . . . . . . . . . . . 34XL-12 . . . . . . . . . . . . . . . . . . . . . . . . . . 35

Shipping method . . . . . . . . . . . . . . . . . . . . 43Shutter, e-Vap®

Manual . . . . . . . . . . . . . . . . . . . . . . . . . 38Pneumatic. . . . . . . . . . . . . . . . . . . . . . . 37

Single-pocket sources, modular . . . . . . . . 19Source control filament transformer . . . . . 28Source control module . . . . . . . . . . . . . . . 28Sources,

Resistive, Re-Vap™ 900 . . . . . . . . . . . . . . 4Resistive, Re-Vap™ 3000 . . . . . . . . . . . 7-9

Sweep coil feedthroughs . . . . . . . . . . . . . . 29Sweep patterns . . . . . . . . . . . . . . . . . . 31-31Sweep programmable controller, XY. . . 29-32Switch, water flow

110 volt. . . . . . . . . . . . . . . . . . . . . . . . . 3824VDC volt . . . . . . . . . . . . . . . . . . . . . . 38

Systems, e-Vap®

Horizontal, flanged electron beam . . . . . 23Miniature, flanged electron

beam . . . . . . . . . . . . . . . . . . . . . . . . . 13Miniature, flanged resistive . . . . . . . . . . . 4Vertical, flanged electron beam . . . . . . . 25Re-Vap™ 3000. . . . . . . . . . . . . . . . . . . . . 6

Mighty sourceTM

. . . . . . . . . . . . . . . . . . . 14

TTantalum crucible liners . . . . . . . . . . . . . . 39Tungsten crucible liners. . . . . . . . . . . . . . . 39

U

VVCR® Gland 1/4 with .218" bore . . . . . . . 42VCR® Gland 1/4 to 5/16"

tube adapter . . . . . . . . . . . . . . . . . . . . . 42Vitreous carbon crucible liners . . . . . . . . . 39

WWarranty . . . . . . . . . . . . . . . . . . . . . . . . . . 43Water cooling, direct and indirect,

e-Vap®. . . . . . . . . . . . . . . . . . . . . . . . . 18Water feedthroughs, e-Vap®

Dual 5/16" tube on 1" baseplate. . . . . . 42Dual 5/16" tube on 2-3/4" . . . . . . . . . . 42

Water flow switch . . . . . . . . . . . . . . . . . . . 38Watercooled roof, horizontal and

vertical . . . . . . . . . . . . . . . . . . . . . . . 24,26Wire fed source-EV-1100

1mm wire . . . . . . . . . . . . . . . . . . . . . . . 112mm wire . . . . . . . . . . . . . . . . . . . . . . . 11

XXY sweep controller, programmable . . . 29-32

Y

Z

Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap®

46

Thin

Film

Dep

ositi

on

Notes



e-Vap®

Notes

Visit www.mdcvacuum.comto order online and for all of the latest pricing, newproduct and sales representative contact information.

Access over 3300 parts online–thousands ofcomponents in-stock!

Mighty Source ™

e-Vap® Source

Fla

nge-mounted UHV Source

e-Vap® 3000Re-V

ap™ 900 System

Accessories

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ount

ed

Multi pocket

Single pocket

MDC Vacuum Products Corporation23842 Cabot Boulevard, Hayward, CA 94545-1651• Toll Free 800-443-8817• Phone 510-265-3500 • Fax 510-887-0626• e-mail [email protected] • www.mdcvacuum.com

VACUUM PRODUCTS CORPORATION

Thin Film Technology

Documents

High & Ultrahigh Vacuum Thin Film Deposition Technologyfrom an art form to a precise science over the past 40 years. It is now commonplace to evaporate metals, alloys, compounds and