IMT Catalog Standard Graticules

S t a n d a r d G r a t i c u l e s

2O u r C o m p a n y

IMT has been providing top quality microlithographic products since 1954.

From our headquarters near Zurich, Switzerland, and supported by a globalcustomer service organisation, we provide our customers with high-quality custom-made microlithographic products, large area photomasks as well as standardgraticules and testing targets.

In our state-of-art production facility using the most modern equipment, our staff of 60manufactures our products with the keen attention to detail and quality that isassociated with Swiss products.

O u r p r o d u c t s

This brochure contains an overview of our standard graticules and reticules.

IMT is primarily a supplier of complex customized microlithographic solutions as wellas large area photo-masks.

The deep technical know-how of our team and the fact that we operate one of thebest equipped facilities for microlithography, allows us to offer our customer uniquesolutions for optical components on flat substrates.

3T e c h n i c a l s p e c i f i c a t i o n

This brochure covers our standard precision graticules.The standard precision graticules are available from stock in small quantities.

The patterns of the graticules are made with a bright chrome coating. The chromecoating is vacuum deposited onto the substrate.

Glass substrate: Optical glassDimension: 0.5 mm, protective chamferLayer thickness: 0.1 m

Reflection of graduationair side and glass side: 50 60%

View: Always seen on layer

Residual light transmission: < 0.1% at 550 nm

Index letters a and b have been added to some of the illustration item numbers toindicate the following designs:

a p o s i t i v e : opaque pattern on transparent backgroundb n e g a t i v e : transparent pattern on opaque background

If the number has no index, the item is only supplied as illustrated.

Other glass substrates or transmissions and reflections are available as to customerspecifications.

Measure protocols and calibration charts are available at extra charge.

41 a , 1 b L a r g e r e s o l u t i o nt a r g e t w i t h U S A F p a t t e r n

10 line groups each comprising 6three-bar pairs1 to 6from 4 mm to 4.4 mpitch*).G l a s s s u b s t r . :101.6 x 82.6 x 2mm7 7 7 4 3 7 (1a positive)7 7 7 3 6 0 (1b negative)

*) refer to resolution table on page 14

2 a , 2 b S m a l l r e s o l u t i o nt a r g e t w i t h U S A F p a t t e r n

Identical to target No.1, butwithout the 12 peripheral three-bar pairs.8 line groups comprising 6 three-bar pairs.1 to 6 from 1mm to 4.4mpitch*).G l a s s s u b s t r . : 38 x 38 x 2mm7 7 8 0 0 0 (2a positive)7 7 7 4 9 4 (2b negative)


3 , 4 , 5 S e c t o r s t a r t a r g e t

Comprising 36 transparent andopaque sectors of equal width.Smallest resolved grating pitch atthe centre approx. 8.7 m,corresponding to an unresolveddark core of 0.1 mm dia.

G l a s s s u b s t r . : 10 x 1.5 mm7 7 7 6 8 7 (3)

G l a s s s u b s t r . : 25 x 1.5 mm7 7 7 4 4 8 (4 )

G l a s s s u b s t r . : 60 x 1.5 mm7 7 8 0 0 1 (5)

6 S e c t o r s t a r t a r g e t

Comprising 72 transparent andopaque sectors of equal width.Smallest resolved grating pitch atthe centre approx. 8.7 m,corresponding to an unresolvedtransparent core of 0.1 mm dia.

G l a s s s u b s t r . : 60 x 1.5mm7 7 7 5 4 0 (6)

7 s m a l l s e c t o r s t a r a r r a y

33 sector star targets each 2 mmdia. comprising 36 transparentand opaque sectors of equal widthon a common transparent field ofapprox. 29.2 x 21 mm. Smallestresolved grating pitch at thecentre of the sector stars approx.8.7 m, corresponding to anunresolved dark core of 0.1 mmdia.

G l a s s s u b s t r . : 50 x 50 x 1.5 mm7 7 8 0 0 2 (7)

58 M e d i u m s e c t o r s t a r a r r a y

37 sector star targets each 4 mmdia. comprising 36 transparentand opaque sectors of equal widthon a common transparentbackground.The array covers a transparentfield of 50 x 50 m. Smallestresolved grating pitch at thecentre of the sector stars approx.17.5 m, corresponding to anunresolved dark core of 0.2 mmdia.


9 L a r g e s e c t o r s t a r a r r a y

59 sector star targets each 4.5mm dia. comprising 36transparent and opaque sectors ofequal width on a commontransparent background.The array covers a transparentfield of 90 x 90 m. Smallestresolved grating pitch at thecentre of the sector stars approx.13 m, corresponding to anunresolved dark core of 0.15 mmdia.

G l a s s s u b s t r . : 101x101x2 mm7 7 8 0 0 4 (9)

1 0 S e c t o r s t a r w i t h g r a t i n g s

Sector star with 24 mm dia.comprising 36 transparent andopaque sectors of equal width ona common opaque background.Also combining 4 linear gratingswith transparent and opaque lineson an opaque background

G l a s s s u b s t r . 40x40x 1.5 mm7 7 8 0 0 5 (10)

Grating pitch of the fourgratings:Grating 1) 0.64 mm;Grating 2) 0.32mm;Grating 3) and 4) 0.16 mm.Smallest resolved grating pitch atthe centre of the sector starapprox. 22m, corresponding toan unresolved dark core of 0.25mm.

1 1 M i c r o m e t e r s c a l eg r a t i c u l e

2 mm in 200 divisions; Line width2 m 0.5m. Graduationaccuracy: 0.5 m.L i n e l e n g t h s :10 mm lines: 0.1 mm

5 mm lines: 0.075 mm1 mm lines:0.05 mm


61 2 O c u l a r m i c r o m e t e r s c a l eg r a t i c u l e

10 mm in 100 divisions:Line width 15 m 2 m.Graduation accuracy 5 m.L i n e l e n g t h s :10 mm lines: 1 mm

5 mm lines: 0.7 mm1 mm lines: 0.3 mm

G l a s s s u b s t r . : 15 x 1.5 mm7 7 8 0 0 6 (12)

1 3 a , 1 3 b C r o s s l i n e g r a t i c u l e

Continuous crossline.Line width 5 m 1 mAngular accuracy 1 arc minute

G l a s s s u b s t r . : 15 x 1.5 mm7 7 7 6 7 6 (13a positive)7 7 8 0 0 7 (13b negative )

1 4 1 m m G r i d c h a r t

100 mm square grid subdividedinto 1 mm squares.Graduation accuracy:Interval 2 m; Total length 15m.Grid viewed through glass.

G l a s s s u b s t r . 110x110x3 mm7 7 7 3 9 6 (14)

1 5 a , 1 5 b 0 . 5 m m G r i d c h a r t

75 mm square grid subdividedinto 0.5 mm squares.Graduation accuracy:Interval 3 m; Total length 10m.Grid viewed through glass.

G l a s s s u b s t r . : 85 x 85 x 3 mm7 7 7 7 5 9 (15a positive)7 7 7 5 0 7 (15b negative)

71 6 a , 1 6 b 0 . 1 m m G r i d c h a r t

50 mm square grid subdividedinto 0.1 mm squares.Graduation accuracy:Interval 5 m; Total length 10 m.Grid viewed through glass


1 7 a D o t a r r a y

Calibration of Image SystemsDot-: 0.25 mm 1.0 mDot to Dot: 0.5 mm 1.0mImage field: 25 x 25 mm

G l a s s s u b s t r . : 50x50x 1.5mm7 7 8 7 9 6 (17a positive)

1 9 a , 1 9 b D o t a n d l i n ec o m p a r i s o n

3m to 100m. 2 adjacent rowsof 17 dots and lines of equalwidth: Line length 2 mm withdesignation numbers.Line width:3, 4, 5, 6, 7, 8, 9, 10, 12, 15, 20,25, 30, 40, 50, 75 and 100 m.2 mm spacing.


2 0 a , 2 0 b D o t a n d l i n ec o m p a r i s o n

10 m to 1000 m. As version19, but with 19 dots and lineswith following widths:10, 20, 30, 40, 50, 60, 70, 80,90, 100, 125, 150, 200, 250,300, 400, 500, 750 und 1000m.


82 1 a , 2 1 b F u l l f o r m a tr e s o l u t i o n t a r g e t a r r a y

0.5 mm grid chart as per version15 interrupted by 13 singleresolution targets each with 6groups comprising 6 three-barpairs with grating pitchesbetween 250 to 4.4 m (as perversion2 group 2 to 7 of thesmall resolution target*)



2 2 a , 2 2 b C r o s s l i n eg r a t i c u l e

Continuous crossline.L i n e w i d t h s :I 20 2 mI I 50 3 mI I I 100 5 mI V 200 10 m

Angular accuracy within 1 arcminute.G l a s s s u b s t r . : 25 x 1.5 mm

P o s i t i v e7 7 8 0 0 9 (22a I)7 7 7 9 3 9 (22a II)7 7 8 0 1 0 (22a III)7 7 8 0 1 1 (22a IV)

N e g a t i v e7 7 7 6 9 7 (22b I)7 7 7 7 8 7 (22b II)7 7 8 0 1 2 (22b III)7 7 8 0 1 3 (22b IV)

2 3 R a d i u s g r a t i c u l e

Continuous crossline andconcentric circles with followingdiameters:1, 2, 3, 4, 5, 7.5, 10, 12.5 and15 mm.L i n e w i d t h :I 15 2 mI I 70 5 mAngular accuracy within 1 arcminute.Concentric circles with radiusaccuracy within 0.01 mm.

G l a s s s u b s t r . : 25 x 1.5 mm7 7 7 4 7 3 (23 I)7 7 7 3 3 8 (23 II)

2 4 G r a t i c u l e w i t h a n g l eg r a d u a t i o n s

Radial l ines to max. 20 mm dia.Angle divisions 15, 22.5, 30,45, 60, 75 and 90 withconcentric circles dia 5, 10 and15 mm.Line width : 15 2 mAngular accuracy within 30

G l a s s s u b s t r . : 25 x 1.5 mm7 7 8 0 1 4 (24)

92 5 O c u l a r m i c r o m e t e rs c a l e g r a t i c u l e

10 mm in 200 divisionsLine width: 10 2 mL i n e l e n g t h s : 0.05mm-line.=0.2mm, 0.1mm-line.= 0.4mm, 0.5und 1mm-line= 0.6mm. Every0.5mm(Height 0.2mm) numberedGraduation accuracy: Interval 1m, total length within 5mG l a s s s u b s t r . : 15 x 1.5 mm7 7 7 4 3 6 (25 I) h o r i z o n t a l7 7 8 0 1 5 (25 II) v e r t i c a l

2 6 O b j e c t m i c r o m e t e rs c a l e g r a t i c u l e

10 mm in 500 divisionsLine width: 3 1 mL i n e l e n g t h s : 0.02mm-line=0.1mm, 0.1mm-line= 0.2mm,0.2mm-line= 0.3mm. Every 0.2mm (Height 0.075 mm)numbered.Graduation accuracy: Interval 1m, total length within 3mG l a s s s u b s t r . : 15 x 1.5 mm7 7 7 3 4 4 (26 I) h o r i z o n t a l7 7 8 0 1 6 (26 II) v e r t i c a l

2 7 D o t a n d l i n ec o m p a r i s o n c h a r t

For detection of surface flawsto optics standard DIN 10110.3 rows of 5 dots and lines ofequal width with designationnumbers from 0.0025 to 1.6mm

G l a s s s u b s t r . : 60 x 30 x 2 mm7 7 7 4 0 6 (27)

2 8 a , 2 8 b R e s o l u t i o n t a r g e ta r r a y

41 resolution targets as pertarget No 1 with groups 4, 5, 6and 7.Largest grating pitch= 0.06 mm(16 lines per mm)Finest grating pitch= 4.4m*)(228 lines per mm) in crossformation.


G l a s s s u b s t r . : 50 x 50 x 3mm7 7 8 0 1 7 (28a positive)7 7 8 0 1 8 (28b negative)

10

2 9 a , 2 9 b R e s o l u t i o n t a r g e tw i t h N B S p a t t e r n

49 groups comprising five-barlines at right angles to eachother. Resolution from 1 lineper mm to 250 lines per mm.Finest grating pitch 4 mEach group designated by thenumber of lines per mm. Linelengths correspond to 12 x thegrating pitch.

G l a s s s u b s t r . : 70 x 70 x 3mm7 7 7 4 1 3 (29a positive)7 7 8 0 1 9 (29b negative)

3 1 a , 3 1 b S u r f a c eC o m p a r i s o n p l a t e

For detection of surface flawsto optics standard DIN 10110.Chrome structures (Lines anddots) from 10 m up to 1.0 mm


3 2 L i n e g r a t i n g t e s t p l a t e

16 groups of line gratings from1.25 to 100 lines per mm.Grating pitches from 0.8 mm to0.01 mm, line-to-spaceratio=1:1.Length of lines 22 mmGroup lengths form approx. 2.4mm to approx. 5 mmG l a s s s u b s t r . : 85 x 35 x 3 mm7 7 8 0 2 2 (32)

11

3 3 T e s t p l a t e

Concentric circles and squareson diameters 5, 10, 15, 20 and25 mm including centre anddiagonal lines.L i n e w i d t h s :I 15 2 mI I 70 5 mAngular accuracy: 1 arcminute.Radius accuracy: 0.01mm

G l a s s s u b s t r . : 50x50x1.5 mm7 7 8 0 2 3 (33 I)7 7 8 0 2 4 (33 II)

3 4 0 . 2 5 m m G r i d c h a r t

50 mm square grid subdividedinto 0.25 mm squares.Line widths: 15 m, every forthline 30 m.Graduation accuracy:Interval 2mtotal length 5mGrid viewed through glass.

G l a s s s u b s t r . : 70x70x1.5mm7 7 7 8 7 0 (34)

3 5 0 . 0 6 6 m m G r i d c h a r t

30 mm square grid subdividedinto 0.066 mm squares.Line widths: 5 m, every thirdline 10 m.Graduation accuracy:Interval 2m;total length 5mGrid viewed through glass


3 6 0 . 0 5 m m G r i d c h a r t

30 mm square grid subdividedinto 0.05 mm squares.Line widths: 5 m, every fifthline 10 m.Graduation accuracy:Interval 2m;total length 5mGrid viewed through glass


12

3 7 0 . 0 3 3 m m G r i d c h a r t

20 mm square grid subdividedinto 0.033 mm squares.Line widths: 3 m, every sixthline 5 m.Graduation accuracy:Interval 2m;total length 5mGrid viewed through glass


3 8 0 . 0 2 5 m m G r i d c h a r t

20 mm square grid subdividedinto 0.025 mm squares.Line widths: 3 m, every fourthline 5 m.Graduation accuracy:Interval 2m;total length 3mGrid viewed through glass


3 9 0 . 0 2 m m G r i d c h a r t

20 mm square grid subdividedinto 0.02 mm squares.Line widths: 3 m, every fifthline 5 m.Graduation accuracy:Interval 2m;total length 3mGrid viewed through glass


4 0 G r a t i n g t e s t a r r a y

10 groups 10 x 10 with gratingsof 5 to 125 lines per mm.Line-to-space ratio = 1:1.Each group designated by thenumber of lines per mm.

G l a s s s u b s t r . : 165 x 30x3 mm7 7 8 0 2 8 (40)

13

4 1 G r i d t e s t a r r a y

10 groups 10 x 10 with grids of5 to 125 lines per mm.Line-to-space ratio = 1:1.Each group designated by thenumber of lines per mm.

G l a s s s u b s t r . : 165 x 30x3 mm7 7 8 0 2 9 (41)

4 2 a , 4 2 b F o u c a u l t t e s tp l a t e

As per VG 95442 for testingbinoculars and telescopes.2x17 groups (doublearrangement) comprisingline groups w ith linesarranged at 45 to eachother.Resolution 6.3Lp/mm to 25Lp/mm i.e. grating pitchesfrom 160 m to 4mProgression ratio 32:1. Eachgroup designated by thenumber of line pairs per mm.

G l a s s s u b s t r . :I 50 x 50 x 2 mmI I 12 x 2 mm

P o s i t i v e 42aI 7 7 8 0 3 0I I 7 7 8 0 3 1

N e g a t i v e 42bI 7 7 8 0 3 2I I 7 7 8 0 3 3

4 3 O b j e c t m i c r o m e t e r

20 mm in 200 divisions, withcrosshair;Line width 15 2 mL i n e l e n g t h s :0.1 mm-Line = 0.4 mm0.5 mm-Line = 0.5 mm1.0 mm-Line = 0.7 mmEvery tenth line (each mm) 0-20numbered;Height of numbers: 0.4 mm

G l a s s s u b s t r . : 26 x 1.5 mm7 7 8 0 3 4 (43)

4 4 O b j e c t m i c r o m e t e r

20 mm in 200 divisions, withcrosshair;Line width 15 2 mL i n e l e n g t h s :0.1 mm-lines = 0.4 mm0.5 mm-lines = 0.5 mm1.0 mm-lines = 0.7 mmEvery tenth line (each mm)10-0-10 numbered;Height of numbers: 0.4 mm

G l a s s s u b s t r . : 26 x 1.5 mm7 7 7 4 9 3 (44)

14

R e s o l u t i o n t a b l e s f o r t a r g e t sFor standard graticules

L= Number of line pairs per mmS= Line/space width in m

N o . 1 , N o . 2 , N o . 2 1 u n d N o . 2 8 P r o g r e s s i o n r a t i o 6 2 : 1ElementNo

Group - 2 Group - 1 Group 0 Group 1 Group 2

L S L S L S L S L S1 0.25 2000 0.5 1000 1.00 500 2.00 250 4.00 1252 0.28 1780 0.56 890 1.12 445 2.24 223 4.49 1123 0.31 1590 0.63 790 1.26 395 2.52 198 5.04 994 0.35 1410 0.71 710 1.41 355 2.83 178 5.66 895 0.40 1260 0.79 630 1.59 315 3.17 158 6.35 796 0.44 1120 0.89 560 1.78 280 3.56 140 7.13 70

ElementNo

Group 3 Group 4 Group 5 Group 6 Group 7

L S L S L S L S L S1 8.00 63 16.0 32 32.0 16 64.0 8 128 42 8.98 56 18.0 28 35.9 14 71.8 7 144 3.53 10.1 50 20.2 25 40.3 12 80.6 6.2 161 3.14 11.3 44 22.6 22 45.3 11 90.5 5.5 181 2.85 12.7 40 25.4 20 50.8 10 102 5 203 2.56 14.3 35 28.5 18 57.0 9 114 4.4 228 2.2

18

Version0 2/2008

Other Products

Large area photomasks in sizes up to 24 x 32, used for the following applications; Optical Calibration tools Photomasks for LCD production Bumpmasks for the semiconductor industry ( Wafer Level Packaging) others

Tailormade graticules, such as: Incremental- and coded discs for rotary encoders Eye test charts for Ophthalmology Graticules for various applications, such as:

- Medical surgery equipment - Research applications - Optics - etc.

IMT Masken und Teilungen AGIm Langacher, Greifensee Postfach, CH-8606 Nnikon Switzerland Telephone + 41 44 943 19 00 Fax + 41 44 943 19 01E-mail [email protected] [email protected] www.imtag.ch

IMT North America, Inc. 11 Bridge Street West Wyoming, PA 18644 USA Telephone + 1 570 954 0933Fax + 1 570 693 3631E-mail [email protected] [email protected] www.imtag.ch

USASwitzerland

Contact

16

0

Documents

IMT Catalog Standard Graticules