The World Leader in High-Performance Signal Processing Solutions

Inertial Sensors in

GPS & Navigation Systems

Amsterdam, Dec. 15, 2006Amsterdam, Dec. 15, 2006Amsterdam, Dec. 15, 2006Amsterdam, Dec. 15, 2006

Christoph Wagner

Field Applications Specialist Sensors

christoph.wagner@analog.com

+49 (89) 76903-349

2

Inertial Sensors in GPS & Navigation Systems Outline

� Introduction

� Basics

� Gyroscopes

� How it works

� Where we are

� Where we go to

� Low-g Accelerometers

� What they are used for in GPS and Nav Systems

� ADIS...

� ...

3

ADI Leadership Team

Brian McAloonBrian McAloonGroup VP, DSP and

System Products Group

Robbie McAdamRobbie McAdamVP and GM, Analog

Semiconductor Components

Bill GiudiceBill GiudiceVP

Micromachined Products

Jerry FishmanJerry FishmanPresident and CEO

Ray StataRay StataChairman of the Board

New Products GyroscopesAccelerometers

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ADI Micromachined Products DivisionCredentials

� World Class MEMS operation

� 18 Years of Experience in Design and Manufacturing

� Dedicated Facilities in Cambridge, Massachusetts, USA

� 300+ Employees

� QS-9000 and TS16949 Certified

� Most Comprehensive Product Portfolio of any MEMS Manufacturer

� Reliable Supplier to Hundreds of Customers Worldwide

� Top Quality, Reliability and Repeatability Track Record

� >>1 Million Inertial Sensors Shipped Each Week

� >>250M Total Sensors Shipped

Price Yield VolumePPM OTD

Lowest Total Cost of Ownership

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1995

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2006

ADI Fiscal Year

0

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Annual Forecast Cumulative

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What are we talking about?Newton´s Law

� Force F = Mass m · acceleration a

� Force F = spring constant k · displacement x

���� a = k/m · x

a

mx

m

k

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Top View

Tether

Inertial Mass (Beam)

CS1

Anchor

Sensor at rest

Unit CellCS1 = CS2

Fixed outer plates

CS2

Capacitive Sensor PrincipleDifferential Capacitor

Applied Acceleration

Unit Cell CS1 > CS2

CS2

Responding to an applied acceleration

CS1

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Applications

ZY

X

ADXRS150

Mass

Low-g Accelerometers and Gyroscopes

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iMEMS Gyro Principle of OperationWhat Does a Gyro Do?

� Measures How “slow” an object is

turning: output ~ °/s

� Measures Change of Inclination

or Direction

� The iMEMS Gyro measures

angular rate by measuring the

Coriolis Force.OSCILLATION

MASS

ROTATION

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ADI’s Gyros ADXRSxxxPrincipal of Operation

F= 15kHz

x

F= 15kHz

y

Syncronous Demodulation and

Rectification of Y Axis Signal

Low pass filter

& Amplifier

ZY

X

ADXRS150

Mass

Rateout

Drive and Feedback Loop

Coriolis Acceleration

Resonato

r Motio

n

Rotation Axis

Linear - Linear Oscillator

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iMEMS Gyro Principle of Operation

VibratoryMass

VibratoryMass

Accelerometer

Accelerometer

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Gyro Selection Table

-40 to+85

64.75V

to5.25V

YesYes0.1% of FS0.05DC to2kHz

15.0±15%

±75ADXRS401

-40 to+85

64.75V

to5.25

YesYes0.1% of FS0.10DC to2kHz

5.0± 8%±300ADXRS300

-40 to

+856

4.75Vto

5.25VYesYes0.1% of FS0.05

DC to

2kHz

12.5±

10%±150ADXRS150

TempRange

(°C)

SupplyCurrent

(mA)

VoltageSupply

(V)

VoltageReference

(V)

TempSensor

NonlinearityNoise

Density(°/s/rtHz)

BandwidthSensitivity

(mV/°/s)Range

(°/s)Part#

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Analog Devices’ iMEMS Angular Rate SensorsBackground

� Industry’s first and only volume,single-chip angular rate sensor

� iMEMS process integrates electronics and

mechanical elements for optimal balance of

price and performance

� Volume production since 2002

� Shipping into automotive safety systems

� Rollover Detection and Stability Control

� Shipping into other applications

� Navigation, Consumer, Industrial and Military

� Same iMEMS process used in over 250 million

sensors shipped to date

� World-class quality, reliability and on-time delivery

� Broad product roadmap covering wide range of applications

� Silicon-based iMEMS enables higher levels of integration

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Key BenefitsSummary

� Size/weight

� Low power

� Ability to work through shock

� Vibration immunity

� Configurable bandwidth/noise

� Low over all noise

� Self test function

� Integrated T-Sensor for T-calibration

� High reliability

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� Enhanced iMEMS Process

� Increases Temperature Range

� Minimizes Noise

� Excellent Quality & Reliability

� Improved Beam Design

� Excellent Quality & Reliability

� Optimizes Performance

� Shock & Vibration Immunity

� Enhanced CBGA Package

� Backward Compatible

� ~3-4x Improvement Reliability

� Compliant to EU RoHS

� Updated Electronics

� Die Shrink

� New Features (e.g., Ratiometric)

“Athens” Gyro ArchitectureOverview

New Interconnect

Improved Beam

RoHS / Robust

Solder Balls

Die Shrink

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“ATHENS” (ADXRS61x) FamilyTarget Markets, Part Numbers, and Selected Specifications

� Rollover Detection

� ADXRS610� ADXRS611� ADXRS612

� Electronic Stability Control

� AD22305� Requires electronic data transfer of calibration information for uniquely serialized components to

achieve highest level of performance� Derivatives suitable for Navigation and other applications

� ADXRS613� ADXRS614

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iMEMS Gyro Product RoadmapHigh-Level View of ADI’s iMEMS Gyros

2003

RS150/300

RS401

RS8xx6 dof

RS6xx-XL

RS4xx-Dual

2004 2005 2006 2007 2008 2009 2010

RS41x

Highest PerformanceStability Control

Balance of Price & PerformanceRollover / Navigation

Driven by PriceConsumer

• 0.02°/s/√Hz, < ±3°/s Offset

• Low-stress plastic packaging

• 12-bit Digital (SPI) Output

• -40°C to > +125°C Operation

“Athens”RS610-RS613

• Improved Shock &

Vibration Immunity

• 3.3V Compatible

• Ratiometric Output

• -40°C to +105°CRS6xx-Roll

• Pitch & Roll In-Plane

Sensing

Released

Dev.

Future

“Athens”RS614

• Cost Reduced Versions

of “Athens”

• -40°C to +105°C

“Athens”AD22305

• Cal. Data Provided for < ±3°/s

• -40°C to +105°C Operation

• Ceramic BGA Package

RS8xx-XL

RS8xx“Rome”

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What can a Low-g Accelerometer be Used For?Enabled Applications

Low-gAccelerometer

Inclination Shock/Vibration Motion

∫ a dt = v∫ v dt = x

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ProductionCP-16-25 to70°

0.18 @ 1.8V

1.8 to 5.252801.6Analog±10300 mV/g±3g2ADXL323

ProductionCP-16-25 to70°

0.18 @ 1.8V

1.8 to 3.6280(X,Y)350(Z)

1.6(XY)0.55(Z)

Analog±10300 mV/g±3g3ADXL330

ProductionCP-16-20 to

70°0.52.4 to 62202.5Analog±10420 mV/g±2g2ADXL322

ProductionCP-16-20 to70°C

0.52.4 to 63202.5Analog±1057 mV/g±182ADXL321

ProductionCP-16-20 to70°C

0.52.4 to 62502.5Analog±10174 mV/g±5g2ADXL320

ProductionE-8-40 to85°C

0.75

(3 to 6)1602.5PWM±1030 %/g±1.2g2ADXL213

ProductionE-8-40 to

125°C0.5

3.3

(3 to 6)1702.5Analog±5620 mV/g±1.7g2ADXL204

ProductionE-8-40 to125°C

0.75

(3 to 6)1102.5Analog±61000 mV/g±1.7g2ADXL203

ProductionE-8-40 to125°C

0.75

(3 to 6)1102.5Analog±61000 mV/g±1.7g1ADXL103

StatusPackageTemp

Range(°C)

Supply

Current(mA)

Voltage

Supply(V)

Noise

Density(µg/rtHz)

**MaxBandWidth(kHz)

OutputType

Sensitivity

Accuracy(%)

SensitivityRange# of

AxesPart#

Accelerometer Selection Tablewww.analog.com -> MEMS and Sensors -> iMEMS® Accelerometers

Further Variants on Request

Automotive / Military / Industrial

Consumer

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iSensorsAdditional Product Options for Industrial MEMs Customers

� iSensor Product Positioning

� Separate Product Line from ADI’s iMEMs (MPD) Component Group

� Additional Integration and Performance; Calibration; Embedded Compensation; Programmability; Application Focused Features

� Optimized for Industrial and Instrumentation Customers

� Enable Low Cost of Entry, and Fast Time to Market

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iSensor Family: Current Products and Developments

Product

Category

Fully Integrated,

Digital Multi-Sensor

Programmable,

Calibrated

High Performance,

New Function Wireless

Level of

Integration

Inertial and Temp

Sensors, Conversion

Sensor, Conversion,

Embedded Control

Multiple Sensors,

Embedded Control,

Advanced

Architectures

Sensor, Conversion,

Wireless Link

Functionality

Offered

Simple Interface; Full

Signal Chain

Performance

Programmable Sensor;

Application-Targeted

Low Noise; Multi-Axis;

Application Targeted Remote Sensing

Part

Numbers

ADIS16003,

ADIS16006,

ADIS16100,

ADIS16080

ADIS16201, ADIS16202,

ADIS16203, ADIS16204,

ADIS16209, ADIS16250,

ADIS16255

ADIS16120,

ADIS16130,

ADIS1622X,

ADIS16350 ADIS16270

ReleasedSamplingIn DevelopmentIn Definition

16003/6: SPI Accel

16100/80: SPI Gyro

16201: Prog. Inclinometer

16203: 360o Inclinometer

16209: Hi-Accuracy Inclinometer

16120/130: Low Noise Gyro

16250/5: Prog. Gyro

16202: Wide-BW Prog. Accel

16204: Hi-G Prog. Accel / Impact Sensor

1622X: Vibration Sensor

16350: 3-axis gyro

16270: Wireless Monitor

Product Descriptions

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01011..01

Applying MEMs in NavigationRequired Compensations:

� Offset

� Sensitivity

� Voltage

� Temperature Mapping to a Common Reference

Frame

Additional Sensors for Improved

Accuracy / Stability

� Alignment/Orientation

� Cross-Axis

� Cross-Sensor

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ADIS16350 TriTriTriTri----Axis GyroAxis GyroAxis GyroAxis Gyro (Preliminary)

KEY FEATURESKEY FEATURESKEY FEATURESKEY FEATURESKEY FEATURESKEY FEATURESKEY FEATURESKEY FEATURES� Tri-Axis Gyroscope

� +/- 320o/sec range� 14-bit resolution

� Tri-axis Accelerometer� +/-10g range� 14-bit resolution

� 350Hz Bandwidth� Factory Calibrated Sensitivity and Bias� Digitally controlled Sensitivity and Bias� Digitally controlled Sample Rate� Digitally controlled filtering� Programmable condition monitoring,

alarms� Auxiliary digital I/O� Digitally activated self-test� Programmable Power Management� Embedded Temperature Sensor� SPI Compatible serial interface� Auxiliary 12-bit ADCinput and DAC

output� Single supply operation: +4.75V to

+5.25V� 2000g powered shock survivability

� Guidance & Control

� Platform Control & Stabilization

� Inertial Measurement Units

� Motion Control & Analysis

� Robotics

Applications

Schedule

Samples 4Q06

In Run Bias Stability.016

o/sec

Turn-on to Turn-on Bias Stability .035 o/sec

Angular Random Walk 3.6 o/√hr

Calibrated Rate Sensor Cluster

Axial Alignment 1o

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In Run Bias StabilityRoot Allen Variance

σ τ( )1

2 m 1( ).

1

m 1

i

y i 1( ) y i( )( )2

=

. for m successive y(i) averaged over τ

Depending on averaging time resolution decreases to below 100°/s

AD22305: Typical Root Allan Variance at 25°C vs. Averaging Time

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Interesting Facts

� Sensor “mass” is 8 micrograms

� Resolution: 100°/h or 0.03°/s

� Equivalent Res.: 37.5 Fermi (1 Fermi = 10-15 m)

� Equivalent Res.: 12 zF (1 zepto F = 10-21 F)

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