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Silicon Light Machines Proprietary
Introduction to PLV Technology
Silicon Light Machines Proprietary 2
Grating Light Valve (GLV)Ø Demonstrated in 1993Ø HDTV display applications in 2000Ø Computer to plate (CTP) printing in 2001Ø Long-haul telecomm, dynamic gain equalizers (DGE)
and re-configurable blocking filters (RBF) in 2002
Planar Light Valve (PLV)Ø Conceived, modeled, and patented in 2003Ø DARPA contract for DUV maskless lithography 2004
Spatial Light Modulation at Silicon Light Machines
Silicon Light Machines Proprietary 3
Planar Light Valve Technology
Silicon Light Machines conceived a 2D analog of the 1D GLV
New device is based same CMOS process and materials used in the proven GLV technology, but arranges pixels in a 2-dimensional, close-packed array.
New device inherits desirable properties of GLV and extends applications where GLV could not be used.
Different embodiments of device can provide different modulation functionality: Amplitude, Phase, or Both
Silicon Light Machines Proprietary 4
AluminizedPiston
Planar Light Valve (PLV)
• 2D geometry
• Smaller pixel size
• Larger étendue
• 100% fill factor
• Very high speed
Face Plate
Piston Array
Silicon-nitrideFlexures
Standard Posts
5-12µm
New properties of PLV
Inherited properties of GLV
• High contrast
• Analog gray-scale
• Non-contact
• Borderless pixels
• High power handling
• High reliability
Silicon Light Machines Proprietary 5
PLV Cross-Section
λ/4
Diffracting
+V Electrodes
Reflecting
λ/2
Device changes from reflective state to scattering state by deflection of the MEMS pistons through quarter wavelength.Pistons
Silicon Light Machines Proprietary 6
Amplitude or Phase Modulation
The piston structure of the PLV can support different embodiments depend on application requirement.
By altering the piston-faceplate design, the PLV can be straightforwardly modified into a phase modulator.
A pixel, formed by 2×2 mirrors
Firstmirror group
Secondmirror group
1
12
2
A pixel, contrast only.
(a) Amplitude Modulator (b) Amplitude+ Phase Modulator
Silicon Light Machines Proprietary 7
Diffracting state Reflecting state, 0 phase-shift
Reflecting state, π phase-shift
1 pixel with2 × 2 pistons
eiπ = −1 ei0 = +10
λ/4
Amplitude and Phase Modulation
Using this PLV structure, a single pixel can assign arbitrary amplitude and phase.
Silicon Light Machines Proprietary 8
PLV Development Summary
Static PLV
Non-electrical
PLV
Electrically Active PLV
• Static (non-MEMS) PLV surface • Single etch depth• Demonstrate 500:1 contrast• 532nm images generated
• Non-electrical device• First double-layer device• Piston + face plate• No piston conductor
• First electrically active PLV• Integrated membrane conductor• Successfully demonstrated 9/05• Design learning rolls into PLV1
Pistons Only
• Piston MEMS layer only• Used existing GLV process• Piston mechanics validated• Light modulation results
Nit3 920Å
Silicon wafer
INOX (1µm)
Poly LM1
Post2
Cut1
Post1
SAC1
SAC2 STOX 1-2kÅ
Poly-Si 500Å
ThickAl
Nit2 500Å
SAC3Thick
Al
Thin Al
Nit1 500Å
STOX
Nit3 920Å
Silicon wafer
INOX (1µm)
Poly LM1
Post2
Cut1
Post1
SAC1
SAC2 STOX 1-2kÅ
Poly-Si 500Å
ThickAl
Nit2 500Å
SAC3Thick
Al
Thin Al
Nit1 500Å
STOX
0V +25V0V +25V
Silicon Light Machines Proprietary 9
-3 -2 -1 1 2 3
0.2
0.4
0.6
0.8
1
-3 -2 -1 1 2 3
0.2
0.4
0.6
0.8
1
-3 -2 -1 0 1 2 3-3
-2
-1
0
1
2
3
-3 -2 -1 0 1 2 3-3
-2
-1
0
1
2
3
-2
0
2-2
0
2
00.20.40.60.81
-2
0
2
-2
0
2-2
0
2
00.20.40.60.81
-2
0
2
Optical Response & Imaging
Diffracting (φ=π)Reflecting (φ=0)PLV Array
Filter
FTL
PLV
Wafer
Transform Plane
Fourier Filter
Final Image
FTL-1
PBS
QWP
Silicon Light Machines Proprietary 10