Iwaki pneumatic drive bellows pumps - SeekPartfile.seekpart.com/keywordpdf/2011/5/23/201152310417886.pdf · Iwaki pneumatic drive bellows pumps were intro- ... The pump is driven

Iwaki pneumatic drive bellows pumps

CAT-W 0051-01

1

The F series comprises pneumaticdrive bellows pumps designed foruse in semiconductor manufactur-ing processes. Iwaki pneumaticdrive bellows pumps were intro-duced to the market over 10 yearsago; since then we have activelydeveloped and improved productsin step with rapidly changing mar-ket needs. Over 20 models ofpumps are available. Their qualityand performance are recognizedand highly rated by device manu-facturers all over the world.

Not only pumps, but peripheraldevices such as controllers, damp-eners and liquid chemical supplysystems have been developed toaugment a well rounded portfolioof quality equipment for wetprocess and surface preparation.

For Ultrapure Chemical Delivery in Semiconductor Processing

Guideline for Pump Selection

Series

Series

Series

Series

-20T

Series

High Pressure Durability and Long Life Attained by Using Thick Bellows

Safely Transfer Liquid Chemicalsof Temperatures Between 10˚C and 180˚C

Energy Saving Design to Consumea Lesser Amount of Air

Safely Transfer Liquid Chemicalsof Temperatures Between 20˚C and 180˚C

Pneumatic Drive Bellows Pump with Non-metallic Body

Two Types for CirculatingMedium Temperature Liquid

Pneumatic drive bellows pumps series

2

Rich Assortment of PumpsThe F series includes more than 20 modelsranging from FW-H, the most powerful ofthe series, capable of transferring high-tem-perature and high-pressure liquid to FZ withits non-metallic structure. Customers canchoose the most suitable ones for their uses.

Contamination-free Design All the wetted parts are made of fluororesinwhich is highly resistant to chemical attackand heat. Fiercely corrosive liquids are safe-ty transfer with less particle matter beingproduced.

Sensor-drive SystemThe pump is driven by a built in stroke sen-sor located away from the liquid path. Theoperation is reliable and the pumps functionwith stability even at low stroke rates.

Built-in Leak SensorAs standard equipment, all the models haveleak sensors which are ensured to reactpromptly if the bellows are damaged.

Note: Leak sensor is option for FZ

Enhanced AccessoriesDampeners, controllers and other accessorieshave been improved and refined. Their useminimizes particle production and extendsthe life of the bellows.

Note: In order to extend the life of the bellows, the useof the SC controller or the FD driver is recommended.For further information, see the description on page 10.

Max. discharge capacityL/minMax. air consumptionNL/min

Max. air supply pressureMPaTemperature range˚C

80

0.5

82010 to 100

40

0.5

480

10 to 180

5 to 100

20 to 180

5 to 100

5 to 100

22

0.3

200

200

0.2

40

22

0.3

250

40

0.4

200

3

Chemical supply equipment■�

FWPneumatic drive bellows pump

PD-W/PDA-WDampener

Filter To use point

SC-2/FD-2Controller/Driver

Supply tank

IWAKI uses its extensive experience and advanced pump technology to meet the needsof chip manufactures for Wafer wet-bench, chemical supply equipment and CMP. IWAKI provides a complete line of pumps and systems.

NH4OH, H2O2, HCL, HF, H2SO4

F seriesPneumatic drive bellows pump

Filter

APD-3-BController

PD-H/PD-WDampener

■200/300mm wafer wet-bench

SC-1/SC-2Controller

CFD-8T-BChemical fluid dispensing pump


4

CMP slurry supply equipment■�

Silicon wafer

CMPmachine

SC-2 Controller

EH/W-PHpH controlElectromagnetic metering pump

Chemical liquids

CMP chemical

Mixing tank Supply tank

CMP-05CMP pump

CMD-05Dampener

AC-1/FD-1,FD-2Controller/Driver

AC-1/FD-1,FD-2Controller/Driver

PD-W/PDA-WDampener

DIW NH4 H2O2

CMP-50CMP pump

CMD-50Dampener

FWPneumaticdrive bellows pump

Pneumatic drive bellows pumpsFW series

Mixed-liquidcirculation/Transfer CleaningCleaning

(Batch process)Cleaning

(Single wafer)

Chemicalsupply

equipment

Chemicalreplenishingequipment

ModelWafer wet-bench CMP process

Pneumatic drive bellows pumpsFW-H series

Pneumatic drive bellows pumpsFF series

Pneumatic drive bellows pumpsFF-H series

Pneumatic drive bellows pumpsFZ-20T

Pneumatic drive bellows pumpsFA series

Chemical fluid dispensing systemCFD series

Application

5

Model

Liquid temperature range

Max. stroke speed

Pump connection size

Max. discharge capacity

Max. air supply pressure

Max. air consumption

Supply air connection size

FW-20

10 to 100

120

ø19 X ø16PFA tube

ø19 X ø16PFA tube

20

0.2 to 0.5

330

Rc1/4

FW-20H

10 to 100

120

20

0.2 to 0.5

101 to 150

0.15 to 0.3

151 to 180

0.15 to 0.2

330

Rc1/4

FW-40

10 to 100

80

40

0.2 to 0.5

480

Rc3/8

FW-40H

120

40

200 140

10 to 100

0.2 to 0.5

101 to 150

0.15 to 0.3

151 to 180

0.15 to 0.2

480 300 220

Rc3/8

FW-80

10 to 80

80

ø25 X ø22PFA tube

ø25 X ø22PFA tube

80

0.2 to 0.5

820

Rc1/2

˚C

spm

L/min

MPa

NL/min

Note: Max. discharge capacity shows when pumping clear water at 20˚C.

Specifications

Robust Bellows Design Advances High Pressure Performance and Service Life

•The adoption of thick bellows enables the pump to discharge liquid under pressure ashigh as 0.45 MPa maximum. Moreover, the bellows have three or four times as long alife as a diaphragm. Thus, the downtime can be substantially reduced.

•In addition to its use in feeding chemical liquid, the FW series specified for highpressure and medium temperature (10 to 100˚C) is usable in a cleaning system and forthe circulation of CMP slurry liquid and the FW-H series for high pressure and hightemperature (10 to 180˚C) is usable as a circulation pump in a cleaning system.

•The fitting portions for suction anddischarge are of PFA tubular struc-ture formed integrally. This pre-vents particles from accumulatingand allows joints available on themarket to be used.

•When connected to a special con-troller, the discharge can be con-trolled and monitored easily.

Pump headValveValve caseBellows

PTFE(Tube : PFA)PTFEPTFEPTFE

1234

1

24

3

Construction and Materials

FW-40/40HFW-20/20H FW-80

NL/m

in

MPa

L/min

NL/m

in

MPa

L/min

NL/m

in

MPa

L/min

Performance curvesDischarge capacityDischarge pressure

Air consumption

0.3

0.4

0.2

0.1

20 40 8060

600

200

400

500

100

700

300

10 2015 255

80

200

40

240

120

280

160

0.1

0.4

0.3

0.2

0.3

0.4

0.2

0.1

400

240

80

160

560

480

320

20 4030 5010

0.5MPa

0.4MPa

0.3MPa

0.2MPa

0.5MPa

0.4MPa

0.3MPa

0.2MPa

0.5MPa

0.4MPa

0.3MPa

0.2MPa

0.5MPa

0.4MPa

0.3MPa

0.2MPa

0.5MPa

0.4MPa

0.3MPa

0.2MPa

0.5MPa

0.4MPa

0.3MPa

0.2MPa

FW-20

FW-20H


6

Model


Max. stroke speed.






FF-10BT/CT

B type : 5 to 100 C type : 5 to 50*

120

1/2 PFA tube

10

0.3

90

Rc1/4

FF-20BT/CT

3/4 PFA tube

22

180

FF-10HT

1/2 PFA tube

10

80

20 to 180

120 80

0.2

FF-20HT

3/4 PFA tube

20

150

Rc1/4 Rc3/8

FF-40HT

ø25 X ø22PFA tube

40

200

˚C

spm

L/min

MPa

NL/min

* The cylinder of the "B" type is made of aluminum and tetrafluororesin and that of the "C" type is of PVC.Note: Max. discharge capacity shows when pumping clear water at 20˚C.

Specifications

Energy Saving Design to Consume Less Air

•The FF series are specified for use with medium temperature liquids (The PVCcylinder type: 5 to 50˚C; Al cylinder type: 5 to 100˚C) and the FF-H series aredesigned to handle a wide range of chemical liquids ranging from ordinary tempera-tures to high temperatures (20 to 180˚C).

•The liquid end parts are made entirely from fluororesin and free from contaminationas they are designed so as to use neither rubber nor metal. As the bellows are com-pletely welded with the body of the FF-H series, there is no leakage due to heatcycles. The dead volume of air is minimized for saving the consumption of air.

•The packing of the pump shaft canbe replaced with a new one easily,without disassembling the pump.

•The suction port and dischargeport are of PFA tubular structure inthe FF-H series. For the FF series, atubular structure type and pumpattached with special fitting areavailable.


Pump headValveValve case

Bellows

PTFE(Tube : PFA)PFAFF:PTFEFF-H:PFAPTFE

123

4

1

24

3


0.30

0.20

0.10

0.25

0.35

0.15

0.05

0.20

0.10

0.25

0.15

0.05

10

50

100

150

10 205 152 4 6 8 12

100

20

60

80

40

0.3MPa

0.3MPa

0.2MPa

0.2MPa

0.2MPa

0.15MPa

0.2MPa

0.15MPa0.15MPa

0.15MPa

0.3MPa

0.3MPa

0.2MPa

0.2MPa

0.2MPa0.2MPa

0.2MPa

0.2MPa

0.15MPa

0.15MPa

0.15MPa0.15MPa

FF-20/20HFF-10/10H

10 20 30 40

50

200

100

150

0.10

0.04

0.08

0.06

0.02

0.12

0.16

0.14

FF-40H

NL/m

in

MPa

L/min

NL/m

in

MPa

L/min

NL/m

in

MPa

L/min

0.18


Air consumption

0.15MPa0.15MPa

FF-20

FF-20H

7

Model

Specifications


Max. stroke speed






FZ-20T

5 to 100

130

3/4PFA tube

22

0.3

250

Rc 3/8

˚C

spm

L/min

MPa

NL/min


Pneumatic Drive Bellows Pump with Non-metallic Body

•The chemical fluid path, the air chamber and pump housing are constructed of inertfluororesins. The pumped liquid does not contact metal anywhere; air borne andprocess contamination are eliminated. Welded bellows design will not leak even withheat cycle operation. Integral tube connections prevents accumulation of particles andis compatible with a variety of ports. This prevents particles from accumulating andallows connection with joints available on the market.


Pump headValveValve caseBellows

PTFE(Tube : PFA)PFAPTFEPTFE

1234

1

2

4 3Construction and Materials

FZ-20T

NL/m

in

MPa

L/min


Air consumption

10 15 20 255

0.20

0.10

0.25

0.05

0.15

100

200

150

250

50

0.3MPa

0.3MPa

0.2MPa0.2MPa

0.15MPa0.15MPa

FZ-20T


8

Model


Max. stroke speed






FA-2E

5 to 100

150

Rc1/8

2

0.4

50

Rc1/4

FA-40VEW

80

Rc1

40

200

Rc3/8

˚C

spm

L/min

MPa

NL/min

Specifications


Two Models for Circulating Medium Temperature Liquid

•There are two standardized models; the FA-2E, a lateral type for a low flow rate, andthe FA-40VEW, a vertical type for a high flow rate. The FA-2E employs a spray sys-tem for single wafer processing while the FA-40VEW is suitable for cleaning 200/300mm wafers.

•H-shaped thick bel-lows are used(Only FA-40VEW). They have excellentresistance to high pres-sure and a long life towithstand continuouslong-time operation.

•When connected to aspecial controller, thedischarge can be con-trolled and monitoredeasily.

Pump headValveValve case

Bellows

PTFEPFAFA-2E : PFAFA40VEW : PTFEPTFE

123

4

1

1 2

2

4

4

3

3


FA-40VEWFA-2E

FA-2E

NL/m

in

MPa

L/min

Performance curves

FA-40VEW

NL/m

in

MPa

L/min

Discharge capacityDischarge pressure

Air consumption

0.30

0.20

0.10

1.0 2.00.5 1.5

10

20

30

40

0.30

0.40

0.20

0.10

4020 5010 30

100

200

300

0.4MPa0.4MPa

0.4MPa

0.3MPa

0.2MPa

0.15MPa

0.1MPa

0.4MPa

0.3MPa

0.2MPa

0.3MPa0.3MPa

0.2MPa

0.2MPa0.15MPa

0.1MPa

FA-40VEW

FA-2E

•These are controllers specially made forthe F series pumps. Each controller cancontrol three pumps simultaneously. TheModel SC-1 is for the FF, FF-H, FZ andFA pumps and the SC-2 is for the FW andFW-H pumps.

•Owing to their function of fixed flow ratecontrol, the discharge of the pump is keptat a fixed level even when the dischargepressure of the pump changes due to filterclogging so as to maintain stable circula-tion/filtration.

•The range of pump pulsation is heldalways to a minimum level by automaticcontrol of the pressure of the air fed to thedampener. Thus, on-the-spot adjustment ofpressure is no longer necessary.

•Since the difference in pressures in andout of the bellows is kept to a minimumvalue despite a change in the pump load onthe discharge side, the life of the bellows isextended.

9

•Pump pressure can be automaticallyadjusted to minimum pulse pressureregardless of a change in the discharge ofthe pump likely to be caused by the clog-ging of a filter. Particles are hindered frompassing through filters and pipes are pro-tected from vibrations.

•Downtime can be reduced because thereis no need of on-the-spot adjustment ofpressure.

•Installation in existing facilities or equip-ment is possible.

•Having no automatic pressure adjustmentmechanism.

Model


Pulsation pressure range


Applicable pumps

Max.enclosed air pressure

Connection size

Wet end material

PDA-10HPD-10H

FF-10FF-10H

1/2"PFA Tube

PDA-20HPD-20H

20 to 180

0.04 or less

Rc1/4

FF-20FF-20H

0.3

3/4"PFA Tube

PTFE/PFA

PDA-40HPD-40H

FA-40VEWFF-40H

0.4

1"PFA Tube

˚C

MPa

MPa

PDA-20W

FW-20FW-20H

ø19X ø16PFA Tube

PDA-40W

10 to 180

0.06 or less

Rc1/4

FW-40FW-40H

0.5

ø25X ø22PFA Tube

PTFE/PFA

PDA-80W

FW-80

PD-20W

FW-20

ø19X ø16PFA Tube

PD-40W

10 to 100 10 to 80

0.06 or less

Rc1/4

FW-40

0.5

ø25X ø22PFA Tube

PTFE/PFA

PD-80W

FW-80

Note 1: The damper cannot be used at a pressure above the level specified for the pump. Note 2: The range of pulse pressures depends on conditions of usage. For further information, please call us.

Specifications

Automatic DampenersPDA-H/PDA-W

DampenersPD-H/PD-W

Bellows

Pin

Valve ball(suction side)

Valve ball(exhaust side)

Air INAir OUT

Slider

Cylinder

Spring pin

IN Out

Construction

Note : Above illustration shows PDA-H

Pump ControllerSC-1/SC-2

Model

Specifications

Power consumption

Ambient temperature for operation

Power voltage

Ambient humidity for operation

Dimensions in mm

Model

24VA or less

0 to 55˚C

DC24V ±10%

Corrosive gas is not permited

W210 x D180 x H110

Ext

erna

l inp

utE

xter

nal o

utpu

t

Command for flow rate switching, start, alarm reset, output ignoring low pressure alarm

Input signal : Potential free or transistor open collector, ON voltage : 3 V or less,OFF voltage : 18 V or more

Leak alarm/defective pump operation alarm, liquid pres-sure upper/middle/lower limit alarms, total account alarm, ready output

Output mode : NPN transistor open collector, Switching capacity : DC 24V 0.4A

PDA-20W

PD-10H

SC-1


10

Pump DriverFD-1/FD-2

Pump ControllerAC-1

Quick Exhaust ValveQEV

•Pump drivers FD-1/2 are low-cost dri-vers. The FD-1 is for the FF, FF-H, FZ andFA pumps and the FD-2 for the FW andFW-H pumps.

•As its fixed stroke rate control functionenables the pump to operate with a fixednumber of strokes regardless of a change inthe pump load on the discharge side, a sta-ble discharge is maintained. Since it isalso possible to keep the differential pres-sure always at a minimum value, the life ofthe bellows is extended.

•The length of time (reference time)required for one shot of the pump can beset. A time-up alarm is output when thepump operates more quickly than the refer-ence time so as to make one aware of thedefective operation of the pump.

•In the event damage is caused to the bel-lows, a leak alarm is output to bring thepump to an emergency stop.

•This is an inexpensive type controller forthe F series pumps.

•Upon receiving a signal from the pump'sbuilt-in stroke sensor, the controller reli-ably activates the solenoid.

•It functions to output an alarm in case thepump stops or the bellows are damaged.

•When the quick exhaust valve is mountedbetween a pump and a solenoid, the sole-noid is protected from corrosion caused byreturned air. In the event the bellows aredamaged, the valve is useful to preventchemical liquid fromsprouting out of thetank into the air andfrom splashing onto theair side.

Model

Specifications

Power consumption


Power voltage


Dimensions in mm

Model

24VA or less

0 to 60˚C

AC100V ±10% 50/60 Hz


W144 x D146 x H72

Model

Specifications

QEV-8V

QEV-10V

QEV-15V

Connection size

Rc1/4

Rc3/8

Rc1/2

Applicable models

FW-20/20H, FF-10/10HFF-20/20H, FA-2

FW-40/40H, FF-40H, FA-40

FW-80

Model

Specifications

Power consumption


Power voltage


External starting signal

Leak alarm/time-up alarm

External stroke rate variable/ switching signal

External stroke rate variable/switching signal

Maximum pump stroke ratesetting/switching

Dimensions in mm

Model

24VA or less

0 to 55˚C

DC24V ±10%


AUTO : Relay contact

Input resistance: Variable0 to 100% at 0 to 5 kΩ�

AUTO: Relay contact, Contact ON/Variable by external signal, Contact OFF/ Variable by volume

4-stage changes by dipswitch (80, 120, 150 and200 spm)

Relay contact output

W120 x D120 x H40

Ext

erna

l inp

ut

Externaloutput

Note: DC24V type is also available on request.

CFD/APD

Chemical FluidDispensing System

•The Iwaki chemical fluid dispensingsystem, made up of a pump (CFD) and acontroller (APD), is capable of meter-ing and supplying, in addition tohydrochloric acid solutions and hydro-fluoric acid solutions, ammonia waterwhich has a high vapor pressure, and ahydrogen peroxide solution whichtends to produce bubbles, with highprecision.

•Two types are available; the pneu-matic valve type CFD-8T/APD-3 andthe ball valve type CFD-8T-B/APD-3B.Note: The pneumatic valve is excluded from thespecifications.

Model


Max. stroke rate

Pump connection port diameter


Max. discharge pressure

Supplied air pressure

CFD-8T/8T-B

20 to 60

30

PFA1/4 tube

8

0.05

0.15 to 0.3

˚C

spm

L/min

MPa

MPa

Wet-end part materialNote1 : Max. discharge capacity shows when pumping clear water at 20˚C.Note 2 : The leak sensor, which is an optional item, can be attached.

Note: Power consumption does not include the load on the alarm connection side.PTFE/PFA

Specifications for pump

Model

Power consumption

Ready output / Time-up alarm

Dimensions in mm

Power supply voltage

Starting input

Setting of shot number

APD-3

20VA or less

Photocoupler opencollector

W230 x D180 x H90

DC24V±10%

Potential free or transistor open collector

by means of ten key

NPN transistor open collector

by means ofdigital switch

APD-3-BSpecifications for controller

FD-2

AC-1 QEV-8V

APD-3-B

•One APD controller can drivethree CFD pumps. The amountof liquid to be supplied by each

pump can be set as desired(The number of shots canbe set between 0 to 99.)

CFD-8T-B


IWAKI CO.,LTD.

TEL : (1)508 429 1440 FAX : 508 429 1386TEL : (61)2 9899 2411 FAX : 2 9899 2421TEL : (65)763 2744 FAX : 763 2372TEL : (62)21 392 8288 FAX : 21 392 8088TEL : (60)3 703 8807 FAX : 3 703 4800TEL : (886)2 2776 5900 FAX : 2 2740 2812TEL : (66)2 322 2471 FAX : 2 322 2477 TEL : (852)2 607 1168 FAX : 2 607 1000TEL : (86)20 8130 0605 FAX : 20 8130 0601TEL : (86)10 6262 6678 FAX : 10 6262 6551

TEL : (49)2154 9254 0 FAX : 2154 1028TEL : (39)02 9903931 FAX : 02 99042888TEL : (45)48 24 2345 FAX : 48 24 2346TEL : (33)1 69 63 33 70 FAX : 1 64 49 92 73TEL : (41)32 3235024 FAX : 32 3226084TEL : (44)1743 231363 FAX : 1743 366507TEL : (46)8 511 72900 FAX : 8 511 72922TEL : (358)9 2742714 FAX : 9 2742715TEL : (43)2236 33469 FAX : 2236 33469TEL : (47)66 80 66 86 FAX : 66 80 66 87TEL : (31)297 241121 FAX : 297 273902TEL : (34)943 630030 FAX : 943 628799

6-6 Kanda-Sudacho 2-chome Chiyoda-ku Tokyo 101-8558 JapanTEL : (81)3 3254 2935 FAX : 3 3252 8892 (http://www.iwaki-pumps.co.jp/)

: IWAKI EUROPE GmbH: IWAKI Italia S.R.L.: IWAKI Pumper A/S : IWAKI France S.A.: IWAKI (Schweiz) AG: IWAKI PUMPS (UK) LTD: IWAKI Sverige AB: IWAKI Suomi Oy: IWAKI (Austria) GmbH: IWAKI Norge AS: IWAKI Holland B.V.: IWAKI Iberica Pumps,S.A.

GermanyItalyDenmarkFranceSwitzerlandU.K.SwedenFinlandAustriaNorwayHollandSpain

: IWAKI WALCHEM Corporation: IWAKI Pumps Australia Pty. Ltd.: IWAKI Singapore Pte. Ltd.: IWAKI Singapore (Indonesia Branch)

: IWAKIm Sdn. Bhd.: IWAKI Pumps Taiwan Co., Ltd.: IWAKI (Thailand) Co.,Ltd. : IWAKI Pumps Co., Ltd.: IWAKI Engineering & Trading Co.,Ltd.: IWAKI Pumps Co., Ltd. (B.J.office)

U.S.A.AustraliaSingaporeIndonesiaMalaysiaTaiwan ThailandHong KongChinaChina

( )Country codes• Actual pumps may differ from the photos. • Specifications and dimensions are subject to change without prior notice. • For futher details please contact;

Printed in Japan 3000.5.99

Model A B C D E F G H J

346 458 218 221 105 140 22 90 182

434 542 240 250 140 180 25.5 102 220

266 361 188 191 84 114 14.5 82 154

288 400 218 221 105 140 20 91 182

431 533 240 250 140 180 23.5 97

I

112

130

97

112

130 220

FW-20/20H

FW-40/40H

463 600 302 317 185 240 27 119.5 317158.5FW-80FF-10/10H

FF-20/20H

FF-40H

(B)A 10

F

G

(100)

EI

J

(100

)

6

D

H

C

5

91

308344

288 105145188(100)

206

182

(100

)

20

10

(150)φ233

240184 220

545

274

(460

)88

4-φ18

5110

2

(192)149

610250

(96) 50

4-M6

Dimensions in mm

FW/FF series

FZ-20T FA-2E

FA-40VEW

Model A B C114 115 40144 133 50160 205 60204 273 80

10204080

Model A B C148 215 33188 255 36208 323 38

204080

PDA-W

PDAPD-HPD-W

A

Air�IN

INOUTC

B

9

100

Air�OUT

A100 100

INOUT

B

C

11Air�OUT

AIr�IN

Australia

GermanyItalyDenmarkFrance

SwitzerlandU.K.SwedenFinland

AustriaNorwayHollandSpain

U.S.A.

SingaporeIndonesiaMalaysiaTaiwan

ThailandHong KongChinaKorea

IWAKI World-Wide Network

Thorough quality-control mea-sures and constant pursuit ofefficiency have helped Iwakiestablish a suprerior produc-tion system.

ISO9001�JQA-1173

IWAKI SAITAMA PLANT IWAKI MIHARU PLANT

Documents

Iwaki pneumatic drive bellows pumps - SeekPartfile.seekpart.com/keywordpdf/2011/5/23/201152310417886.pdf · Iwaki pneumatic drive bellows pumps were intro- ... The pump is driven