Jon Chang May. 2005 P. 1製造執行系統 Manufacturing Execution System : MES 製造執行系統

Jon Chang

May. 2005 P. 1

製造執行系統製造執行系統Manufacturing Execution System : MES Manufacturing Execution System : MES

製造執行系統製造執行系統Manufacturing Execution System : MES Manufacturing Execution System : MES

Jon Chang

May. 2005 P. 2

Outline

產業 Operation

產業 e 化架構 Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合

Jon Chang

May. 2005 P. 3

產業活動

策略規劃

品

質

工

程

行銷

工程與研發生產規劃

廠區控制

（生產）工廠自動化

維修與服務

行政支援與管理

配送

Jon Chang

May. 2005 P. 4

Outline

產業 Operation





Jon Chang

May. 2005 P. 5

產業電子化活動

供應商之供應商供應商顧客之

顧客顧客主企業

採購生產配銷採購生產配銷採購生產配銷

工程研發工程研發工程研發

行政支援行政支援行政支援

營業營業營業

Jon Chang

May. 2005 P. 6

電子化應用系統 (I)

供應商之供應商供應商顧客之

顧客顧客主企業

MESPES/CSM SCM PES/CSM MES SCM MESPES/CSM SCM

CE/PDMCE/PDM CE/PDM

ERPERP ERP

EC/QREC/QR EC/QR

Jon Chang

May. 2005 P. 7

電子化應用系統 (II)

S u p p ly C h a in M a n a g e m e n t (S C M )

ProcurementExecutionSystem(PES)

Enterprise Information Management (PIM)C o m p o n e n t &

S u p p lie rM a n a g e m e n t

(C S M )

P r o d u c t D a taM a n a g e m e n t

(P D M )

E n te r p r iseD o c u m e n t

M a n a g e m e n t(E D M )

Engineering

CAD CAE CAPP

Manufacturing

CAM MES MCS

Q u ic kR e sp o n se

(Q R )

e -C o m m e r c e(E C )

C u sto m e rR e la tio n

M a n a g e m e n t(C R M )

E n te r p r ise R e so u r c e P la n n in g(E R P )

Q u ic kR e sp o n se

(Q R )

e -C o m m e r c e(E C )

C u sto m e rR e la tio n

M a n a g e m e n t(C R M )

K n o w led g e M a n a g em en t

。

Jon Chang

May. 2005 P. 8

供應鏈管理供應鏈管理SCMSCM

顧客關係管理顧客關係管理CRMCRM

企業智財 BIC /

企業資源規劃企業資源規劃ERPERP

EC Platform / WEB Application Server/ Application ServerEC Platform / WEB Application Server/ Application Server電子商務平台電子商務平台 // 網站應用程式伺服軟體網站應用程式伺服軟體 // 應用程式伺服軟體應用程式伺服軟體

基礎發展環境基礎發展環境

供應面需求面知識管理 KM

工程資料管理工程資料管理PDMPDM

工程資料管理工程資料管理PDMPDM

製造執行系統製造執行系統MESMES

製造執行系統製造執行系統MESMES

電子化應用系統 (III)

Jon Chang

May. 2005 P. 9

Outline

產業 Operation





Jon Chang

May. 2005 P. 10

What is IC industry

Jon Chang

May. 2005 P. 11

IC Manufacturing Process (I)

Poly

P Substrate

Pwell

NAPT

Nwell

PAPT

VTP

Poly

PSD NSD NSD NSDPSD PSD

W W WWILD

Trench oxide

IMD-1

W W W W

Metal-1

Metal-2

Poly

P Substrate

Pwell

NAPT

Nwell

PAPT

VTP

Poly

PSD NSD NSD NSDPSD PSD

W W WWILD

Trench oxide

IMD-1

W W W W

Metal-1

Metal-2

Jon Chang

May. 2005 P. 12

IC Manufacturing Process (II)

黃光

薄膜

蝕刻植入

光阻去除

流程說明圖釋薄膜 (Thin_film)1. 化學氣相沉積 (CVD)2. 金屬濺鍍 (PVD)3. 擴散 (Diffusion)

黃光 (PHOTO)1. 光罩 (MASK)2. 光阻 (Coater)3. 曝光 (Exposure)4. 顯影 (Development)

蝕刻 (ETCH)1. 濕蝕刻 (Wet-ETCH)2. 乾蝕刻 (DRY-ETCH)

光阻去除 (PR remove)將光阻去除後就是我們所需的圖形 (PATTERN)

FILMWafer

Wafer

FILMWafer

光阻FILMWafer

光阻FILMWafer

光罩

Jon Chang

May. 2005 P. 13

IC Manufacturing Process (III)

HDP PSG

SiN 300A

W-Plug

FSG 1.7KA (2.9KA)

SiN 500A

SiN 300A

M1 (Cu) M1 (2.6K)

M2 (Cu) M2 (3.5K)

FSG 4.9KA

FSG 2.3KA (4.2KA)

Via1

STI

SiN 500A

SiN 300A

M3 (Cu) M3 (3.5K)

FSG 4.9KA

FSG 2.3KA (4.2KA)

Via2

SiN 500A

SiN 300A

M8 (Cu) M8 (9K)

USG 7.2KA

USG 7.5KA (9.9KA)

Via7

SiN 300AFSG 2.3KA (4.2KA)

SiN 500A

SiN 750A

M7 (3.5K)

5.5KA600A

900A

1200A

900A

AlCu 12KA

PESiN 6KAPEOX 4KA

4KA

SiN 400A

(IMD7=6.5KA)for V7=0.36*0.36

(IMD1~6=4.5KA)

Jon Chang

May. 2005 P. 14

IC Manufacturing Process (IV)

Jon Chang

May. 2005 P. 15

Outline

產業 Operation





Jon Chang

May. 2005 P. 16

IC Manufacturing Process Management (1)

整合4M (Man, Machine, Material and Method) 以最短的時間及最少的成本產出最好品質的產品. Cost Cycle Time Yield Productivity

Jon Chang

May. 2005 P. 17


There are 30-50 basic routes for production FAB

There are 500-1000 product routes in one FAB

There are 3000 tools monitoring routes in one FAB

There are 500-1000 production tools in one FAB

There are 1K wafers start in one FAB

There are daily 80K track-in-out in one FAB

There are daily 15M transactions in one FAB

There are average daily 600 people operation in one FAB

There are daily 1-2K tool monitoring operation in one FAB

There are average 10K control/dummy wafers in one FAB

There are average 14K SPC charts used in one FAB

There are 20K real-time tool monitoring charts in one FAB

There are average 4000 tool alarms in one FAB

There are average 2K final wafer test data files generated

Jon Chang

May. 2005 P. 18

Human Tool Material

TechnologyQualityKnowledge


Why we need MES ? More technologies More tighten process control More cost for any production lost More demand for cycle time management More automation operation is required

Jon Chang

May. 2005 P. 19


Sec. Min. Day MonthHour

Die

Site

Wafer

Resolution

CP

WAT

DefectScan

SPC

IM

FDC

Insp.

Lot

Real-timeReal-timeReal-timeReal-time

300mm

Sec. Min. Day MonthHour

Die

Site

Wafer

Resolution

CP

WAT

DefectScan

SPC

IM

FDC

Insp.

Lot

Real-timeReal-timeReal-timeReal-time

300mm

Human Dispatching

Human DecisionRTD dispatching

Auto DecisionRTD dispatching

Lot BaseDSA

DSA

CLIP KSR

DSA

SPC

300mm

Human Dispatching



Lot BaseDSA

DSA

CLIP KSR

DSA

SPC

Human Dispatching



Lot BaseDSA

DSA

CLIP KSR

DSA

SPC

300mm

Jon Chang

May. 2005 P. 20

Outline

產業 Operation





Jon Chang

May. 2005 P. 21


Quick Response to Business Change

Cycle

Jon Chang

May. 2005 P. 22

Complexity ManagementRapid changes to business needs and demands.

Increasing process and product complexity.

Larger wafers and carriers.

Increased reliance on factory information and control systems.

Factory and Process OptimizationIncreased customer expectation to meet on time deliver.

Increased urgency for improved factory effectiveness.

High factory yield at start-up.

Reduce wafer and product costs.

Extendibility, Flexibility and ScalabilityReuse of factory information and control systems.

Factory systems that support rapid process and technology changes.

Semiconductor challenge in ITRSSemiconductor challenge in ITRS

[Source : ITRS 2003]

Jon Chang

May. 2005 P. 23

Cost per unit area of silicon—Manufacturing cost per unit area of silicon is a easure of productivity. The capital cost of a factory has grown significantly each year, from $50M US in the 1980s to over $3B US in 2003.2

Time to ramp a factory to high-volume production with high yields—Decreasing time to ramp a factory to high volume production and high yield has more economic impact than reducing operating costs. New factories must be built and ramped to mature production at a much faster rate as reflected in Tables 86 and 89. Existing factories must be upgraded faster without impacting ongoing production.

Increasing flexibility to accommodate technology and business changes—Technology advances and the globalization of manufacturing enterprises have led to a decrease in cost for electronic components. This enables new markets to open and creates the need to increase the pace of new product introduction. The flexibility to accommodate these changes in business expectations must improve without significant cost impacts.

Improvement for Semiconductor challenge in ITRSImprovement for Semiconductor challenge in ITRS

Jon Chang

May. 2005 P. 24

KPI in ITRS – Factory OperationKPI in ITRS – Factory Operation


Jon Chang

May. 2005 P. 25

KPI in ITRS – Production EquipmentKPI in ITRS – Production Equipment


Jon Chang

May. 2005 P. 26

KPI in ITRS – FICSKPI in ITRS – FICS


Jon Chang

May. 2005 P. 27

KPI in ITRS – FacilityKPI in ITRS – Facility


Jon Chang

May. 2005 P. 28

KPI in ITRS – MetrologyKPI in ITRS – Metrology


Jon Chang

May. 2005 P. 29

KPI in ITRS – Process IntegrationKPI in ITRS – Process Integration

Jon Chang

May. 2005 P. 30

KPI in ITRS – Yield LearningKPI in ITRS – Yield Learning


Jon Chang

May. 2005 P. 31

KPI in ITRS – Yield EnhancementKPI in ITRS – Yield Enhancement


Jon Chang

May. 2005 P. 32

Outline

產業 Operation





Jon Chang

May. 2005 P. 33

MES

Jon Chang

May. 2005 P. 34

manufacturing execution system: Software systems designed to integrate with enterprise systems to enhance the shop floor control functionality that is usually inadequate in ERP systems. MES provides for shop floor scheduling, production and labor reporting, integration with computerized manufacturing systems such as automatic data collection and computerized machinery.

MES is a term used to describe systems that track and manage all aspects of a job in real time while it is in the execution phase or in process It may include resource management, capacity scheduling, maintenance management, statistical quality control, laboratory information management, process management, data collection, plant wide document management and process optimisation. MES is focused on the short term and may link to ERP/MRPII software for higher level planning and control tasks.

Enables network managers to gather control data from the shop floor into coherent and relevant information. Key functions include data acquisition, dispatching, document control, scheduling, resource allocation, product history, operational analysis, and management of labor, maintenance, processes, and quality.

製造執行系統是一從接到訂單從事生產開始到產品完成，傳送產品在生產線上生產的即時資訊給使用者監看。它將工廠生產的即時和準確資料回應於報表或其他方式上，呈現的結果會隨著現在情況的不同迅速改變，其目的在於降低沒有附加價值的活動，如機台當機等，並提高有效的生產。 MES 可以將讓產品準時交貨，提高庫存週轉率，增加總生產盈餘，和加速資金的流動，當生產活動發生緊急事件時，他還提供現場緊急狀態的資訊，並可經由兩條以上的管道通知使用者

MES definition

Jon Chang

May. 2005 P. 35

MES History

1960 年代的晚期到 1970 年代初期　　

從會計系統衍生出物料需求規劃（ MRP ），此系統用來協助工廠對物料需求做好規劃。

1970 年的晚期到 1980 年代初期

電腦對資料的處理能力越來越強， MRP 則衍生為 MRPII ，此 MRPII 則包含了現場報表系統（ Shop Floor Reporting System ）、採購系統（ Purchasing System ）與其他相關功能。在這段期間，許多公司開始認為他們需要其他系統去管理更多事物，因 MRPII 不強調預測及需求分配上的管理，對現場的管理功能也較缺乏；為了改善這些缺失，預測、配銷資源規劃（ Distributed Resource Planning ； DRP ）、 MES （強調 WIP 追蹤）與單一功能的系統（如品管功能）等相關系統就應運而生，但這些系統卻未完全整合，所以系統間資料的交換非常困難。

1980 年的晚期至 1990 年初期

這些系統開始嘗試藉著擴大功能來解決「資訊孤島的問題」。於是 MRPII 變成企業資源規劃（ Enterprise Resource Planning, ERP ）、 DRP 衍生為供應鏈管理，而現場管理功能則變為整合性的 MES 。到了 1990年代後期，傳統製造系統之間的界線就變得很模糊，如 ERP 逐漸含有現場管理功能。

以上資料整理自【 MESA International White Paper No. 5, 1997 】。

Jon Chang

May. 2005 P. 36

MES History

Jon Chang

May. 2005 P. 37

Jon Chang

May. 2005 P. 38

Jon Chang

May. 2005 P. 39

MES Response

PlanningLevel

ExecutionLevel

ControlLevel

SupervisoryLevel

ms seconds hours days weeks month years

ERP(Enterprise Resource

Planning)

DCS

MES(Manufacturing

Execution System)

PLC(Programmable Logic Controller)

(Distributed Control System)

(Supervisory Control and Data Acquisition)

SCADA

Jon Chang

May. 2005 P. 40

Outline

產業 Operation





Jon Chang

May. 2005 P. 41

MES core functions

Jon Chang

May. 2005 P. 42

MES assist functions

Jon Chang

May. 2005 P. 43

MES functions

MES系統

規劃及排程生產指令及操作程序

產品規格管理

資源使用及追縱

原物料 ( 特氣化 ) 需求

生產產品追蹤

追蹤及控制

作業員管理

SPC

工程資料收集

資料管理自動化

自動化介面及pc 連線

MES資料連結

產能效率管理現場生產排單

維修保養管理

品質管理

Jon Chang

May. 2005 P. 44

How MES help

ME

S

Production Objects

生產 / 效率 / 品管

Fab In-line

Operations

• UPF 標準化 , 合理化• 減少 MO - 機台連線自動化• 減少人力 - 傳輸搬運自動化• 製造效率控制 ( 派工 )• 製程條件控制 ( 光罩 ,Recipe)• 即時品檢 – IPQC/OQC• 提高設備 /資產使用率• 現場產品狀況

Fab Off-line

Analysis

• 人機效能分析• 產能分析• 生產效率分析• 成本分析• QA 管理• 良率提昇

Fab Off-line

Management

• WIP 在製品管理• 良率統計• 機台管理• Cycle Time 管理• 工單管理• 材料管理

Manufacturing Flow + Process Criteria

Material Flow Resource ( 人 , 設備 , Cassette..)

Jon Chang

May. 2005 P. 45

How MES help

Challenge if Without MES

• Run Cards 記錄所有事件• 人工控制所有生產活動

生產流程控制靠 Run Card 人工機台操作人工製程條件控制生產資料收集困難 , 無即時 SPC 管制品質管制不即時 ,需人工重新輸入派工困難材料管理

• 無即時現場管理資訊 (在製品 ,機台 ,人 )• 生產效率分析困難• 工程資料分析困難• 管理報表產生困難

With MES’s Help

• 所有資料存入電腦 , 方便資料擷取及管理• 電腦控制 ( 或建議 ) 所有生產活動

簡化操作流程並防止錯誤發生自動化並防止 Miss Operation Recipe/Mask, Data Feedback/Forward 資料自動收集 , 分類 , 送給 SPC 管制電腦即時管制 , 並採取 Actions 有效率的派工邏輯材料比對及管理

• Real-time Fab-wide 管理• Real-time 資料隨時可作分析• 節省資料整理時間• Information at your fingertip

Jon Chang

May. 2005 P. 46

Manufacturing Function Group in semiconductor(1)

PART management BOM, Process management (tool, equipment) SPEC management (quality spec in each process, queue time) Technology Management Tool management Layout management

Scheduling and Dispatching management Priority management (Link with SCM) Capacity Planning Dispatching agent

Track-In-Out management Recipe management Tool ALM management Equipment management Process control management

Jon Chang

May. 2005 P. 47

Manufacturing Function Group in semiconductor(2)

Automatic Tool Control Integrated Material, MES and Tool Automatic data collection (MFG data and ENG data) Tool control (track-in, process, track-out) Real-time tool monitoring Real-time process monitoring

WIP tracking and decision support system Detail WIP tracking (WIP-Tool-Human-Time-Event) Tool Utilization (OEE) Super Hot Lot Management Hold Lot management Alarm management

Data quality control Queue time management Rework Management SPC control OCAP Yield analysis

Jon Chang

May. 2005 P. 48

Manufacturing Function Group in semiconductor (3)

Tool Management Tool ID, Capability Tool constraint Tool Layout (link with AMHS) AMHS management

Human Management Security Certification Time management

Material Management FOUP AMHS (MCS management) GAS/ Chemistry

Integration SCM integration (scheduling) PDM integration (PART) Engineering Data Integration

Jon Chang

May. 2005 P. 49

MES benefit

Benefit Type Description

Improve yield

Reduce cycle time

Production floor management

General Benefits

Improve customer satisfaction

Improve overall effectiveness

Improve competitiveness

Qualitative Benefits

Improve throughput

Improve equipment utilization

Eliminate/Reduce manual errors

Project-Specific Benefits

Source: TIBCO Software

Jon Chang

May. 2005 P. 50

MES benefitThe potential gain by implementing MES addresses the need for immediate current, on-line information that allows users of the MES system to make the best informed decisions regarding the application of inventory, plant resources and people:

•Reduces manufacturing cycle times •Reduces WIP Inventory •Reduces paperwork between shifts •Eliminates lost paperwork/blueprints •Improves customer services •Reduces or eliminates data entry •Reduces lead time •Improves product quality •Empowers plant operations people •Responds to unanticipated events

Jon Chang

May. 2005 P. 51

Outline

產業 Operation





Jon Chang

May. 2005 P. 52

MES 架構MES 的架構

關連式資料庫 (Relational Database) ： MES 的最大特色就是資料庫，因它記錄著整廠的生產資訊，包括：統計品管分析、設備和人力追蹤（ Labor Tracking ）、物料追蹤（ Material Tracking ）、實驗室資料（ Laboratory Data ）、製程資料（ Process Data ）、工廠文件（ PlantDocument ）等。這些資訊可提供給各部門做成報表，進行分析，然而製作報表或進行分析的工具往往與 MES 數不同一系統。欲能提供簡單快速且能跨平台存取功能的資料庫類別，非關連式資料庫莫屬。

圖形使用者介面（ Graphical User Interface ； GUI ）：圖形使用者介面的應用，提供使用者一個容易使用的環境。

開放式系統架構（ Open System Architecture ）：在開放式系統下才能不受電腦廠商的技術牽絆，而且能使企業內『新』『舊』的電腦技術相容。開放式系統提供了標準的介面、跨平台的應用程式，且資料可跨平台的交換。

主從架構（ Client/Server Architecture ）：這種架構比大型主機架構更節省成本。

系統訂做工具（ System Customization Tools ）：每一企業對 MES 功能要求情況各有不同， MES 廠商除了提供標準的功能模組外，還需提供一套良好訂做工具，根據客戶個別需要，快速符合顧客需求。

整合性工具（ Integration Tools ）：企業內可能存在許多系統；如分散式控制系統 (Distributed Control System) 、工廠支援系統 (Plant Support System) 、 MRP II 與 ERP ， MES 必需提供介面來連接這些系統，使資料能夠互通。

Reference From: Joe deSpautz, "Quantifying the benefits of automation", ISA Transaction, No.33, 1994, pp.107-102.

Jon Chang

May. 2005 P. 53

MES 架構

Factory ModelingFactory Modeling

WIP ManagementWIP Management

EQP ManagementEQP Management Security ControlSecurity Control

EDC/SPCEDC/SPC

SEMI DevSEMI DevNT ClientsNT Clients

Bus Bus rulesrules

Area Applications

FACTORYworks

Process PlanProcess Plan

Message Bus

• Semi-auto EDC

• Dispatch/What is next

• Lot Schedule/Based on C/T

• Reticle Usage forecast

• Reticle Management

• Recipe Management

• Event/Alarm Management

• Preventive Maintenance

• Carrier Management

• EEN/ECN

ToolTool

Intelligent User

InterfaceSECS I/F

ReportReport

EDAEDA

MonitoringMonitoring

IUI + Web UI

Jon Chang

May. 2005 P. 54

MES 架構

MES Server

TCS(Cell Level)

TAP300 + Process Equipment

InterBayXfer Eqp

IntraBayXfer Eqp

Stocker

AMHS Integrator

E5/E30/E37E42/E58E40/E90E87/E90

E5/E37E82

E5/E37E88

E84

E82 : IBSEM E84 : Parallel I/O InterfaceE88 : Stocker SEM

E5 : SECS-II, E30 :GEM E37 : HSMS Generic ServicesE40 : Standard for Processing Management(PJM)E42 : Recipe Management StandardE58 : ARMASE87 : Carrier ManagementE90 : Substrate trackingE94 : Control Job Management

OHV

FOUPFOUP

Jon Chang

May. 2005 P. 55

MES 架構

Group control

Unit control

Field

Sensors& actors A V

Supervisory

Primary technology

Workflow, order tracking, resources

SCADA =Supervisory ControlAnd Data Acquisition

T

Production planning, orders, purchase

1

2

3

4

0

Planning, Statistics, Finances5

(manufacturing) execution

enterprise

administration

Jon Chang

May. 2005 P. 56

MES 架構

DBSserversDBS

servers

AIX / HACMP

SharedStorage

NT or Win2000/PC

OMI SCH ClientSM Client

ALMGUI

RTMGUI

ECSGUI

AIX / HACMPAIX / HACMP

AMHS MCSStandby

SunSun AIX

i-EDAServer

APC300GUI

SharedStorage

RMSGUI

AIX

ReportingDB Server

DispatchingServer

(ISS report)

DispatchingServer(RTD)

PMSGUI

AMHS MCSServer

Orbix

CIM Framework

NT or Win2000/PC

ALMserver ADODB

serverOSS server

CFM server(f14cfm01)

CFM loader(f14sch01)

MDB server

TCS serversTCS serversTCS serversTCS servers(01-125)

DBSservers

PMSserver

RMSserver

ECSserver

RTMserver

OrbixSDEV F/W

CFM300Report Viewer

SPC Pro OSSGUI

OrbixSiView MainStarter

iEDAOrbix COMet SDEV F/W

OrbixOrbix

MMSserver

MMSGUI

COMet

GMPLoader

HACMP Cluster #2HACMP Cluster #1

MM Server

AIX / HACMP

Orbix

CIM Framework

Database Server

(MMDB/SPCDB)

AIX / HACMP

Orbix

CIM Framework

SM/SCH Server

AIX / HACMP

Ext I/F

RPTDB &Replication

HP 8400

RTMDB

CIMDB

Cluster

HP 8400

FIRSTDB

CIMDB(Hot-Standby)

HP 8400

EMRLES/eSPCEES ODS

EESMES

Jon Chang

May. 2005 P. 57

Outline

產業 Operation




MES 定義 MES 功能 MES 架構 MES operation

MES 技術 MES 與其它 e 化系統的整合

Jon Chang

May. 2005 P. 58

MES framework

Coat

Tra

ckIn

Set

Up

Eq

p

Tra

ckO

ut

Exposure

Dis

pat

ch

Tra

ckIn

Set

Up

Eq

p

Co

llec

tdat

a

Mo

nit

orA

larm

s

Tra

ckO

ut

…………………………………..

Develop

Tra

ckIn

Co

llect

Dat

a

Tra

ckO

ut

Equipment CommunicationsEquipment Communications

Eqp ManagerEqp Manager

(MBX)

PRPsrvPRPsrvMDLsrvMDLsrv WIPsrvWIPsrvEQPsrvEQPsrvOPRsrvOPRsrv EDCsrvEDCsrvCATsrvCATsrv

Dis

pla

y W

I

Lot 1234Lot 4567Lot 5678Lot 34324Lot 84567Lot 54877

Intelligent ClientIntelligent Client SpcClient/RuleSrvSpcClient/RuleSrv

Jon Chang

May. 2005 P. 59

How does MES function with operation

Lot03Lot03Lot02Lot02

Lot01Lot01

Setup EQSetup EQSetup EQSetup EQ

Lot01Lot01

Lot Load into EQLot Load into EQ& Setup Parameter& Setup Parameter



Track InTrack InLot List:Lot List:

Lot01 Lot02 Lot03Lot01 Lot02 Lot03Input Lot Id, EQ IdInput Lot Id, EQ Id



Display OperationsDisplay OperationsTemp: 75 CTemp: 75 CTime: 120 minTime: 120 min

** Data CollectionData Collection



Process StartProcess StartProcess StartProcess Start

Process EndProcess EndProcess EndProcess End

Data CollectionData CollectionInput DataInput Data


Track OutTrack OutInput Lot Id, QtyInput Lot Id, Qty


Track Out Info.Track Out Info.Next StepNext Step

Next LocationNext Location



Lot UnloadLot Unloadfrom EQfrom EQ


Lot01Lot01 Transfer Lot to Next LocationTransfer Lot to Next LocationTransfer Lot to Next LocationTransfer Lot to Next Location

Jon Chang

May. 2005 P. 60



Lot01Lot01

Setup EQSetup EQSetup EQSetup EQ

Lot01Lot01












Process StartProcess StartProcess StartProcess Start

Process EndProcess EndProcess EndProcess End











Lot01Lot01 Transfer Lot to Next LocationTransfer Lot to Next LocationTransfer Lot to Next LocationTransfer Lot to Next Location

Jon Chang

May. 2005 P. 61


PPRROOCCEESSSS--SSTTEEPP

##11

In-Line In-Line Staging Staging Area Area

EQP2EQP2

EQP4EQP4

EQP5EQP5

EQP1EQP1

EquipmentEquipment

Staged Staged LotsLots

WAITWAIT StateState

Arrival TimeArrival Time

Track-InTrack-InRUNRUNStateState

Process Process Start TimeStart Time

Track-OutTrack-OutEQP3EQP3

Next Process Step Next Process Step Staging Staging AreaArea

#2#2

ScrapScrapScrapScrap

Process Process End TimeEnd TimeWAIT WAIT

State.State.

SSTTEEPP

CCYYCCLLEE

TTII

MMEEYield%Yield%Yield%Yield%

Jon Chang

May. 2005 P. 62

SiView DEMO - BR

Jon Chang

May. 2005 P. 63

SiView DEMO – Tool status

Jon Chang

May. 2005 P. 64

SiView DEMO – WIP tracking

Jon Chang

May. 2005 P. 65

SiView DEMO – WIP tracking

Jon Chang

May. 2005 P. 66

SiView DEMO – SPC

Jon Chang

May. 2005 P. 67

SiView DEMO – Decision Support

Jon Chang

May. 2005 P. 68

Outline

產業 Operation





MES 技術 MES 與其它 e 化系統的整合

Jon Chang

May. 2005 P. 69

MES 技術

Message Bus (TIBCO, XML, SOAP, Rosetanet)

Database (Oracle, SQL, DB2, Informix)

Client/Server architecture (Client -> MM server)

GUI development library

Tool control development

SEMI SECS/GEM/XML standards

Decision support system (smart dispatching system)

Jon Chang

May. 2005 P. 70

Outline

產業 Operation





MES 技術 MES 與其它 e 化系統的整合 MES 未來發展方向

Jon Chang

May. 2005 P. 71

MES and E-commerce

Production Information

TSMC Online

Assembly & Test

Business Transactions

Design Portal

Services & Technologies

Quality & Reliability

Technical Documents

Customer Satisfaction

an overview of services and technologies

an integrated environment forIC design assistance

book product names, submitservice requests, and access CyberShuttleTM services

information on sort, assemblyand final test services.

status tracking for customer corrective action request

policy and reviews on theprocess quality and reliabilityinformation

a virtual document center forproviding one click download

an array of up-to-date logistic status reports

Jon Chang

May. 2005 P. 72

MES and ERP

DemandForecast

PurchaseOrder

Customers ESCM Customer Interfacing (real-time)

ESCM Planning (batch run)

AllocationPlanning

DemandPlanning

CapacityModeling

Delivery Confirmation

PO entryand change

ATP Request/Consumption

ATP

(NSD)

CASD

Support Commitment

Support plan

AllocationManage-ment

ForecastJudged

Demand

CapacityPlan

OrderManagement

Output Planning

ATP

AdjustedCASD

ATP Plan

CapacityPlan

Demand-to-Support

Order-to-Confirm

Manufacturing

Planning

MPS

ConsumedATP

Actual Delivery

Order-to-Ship

Jon Chang

May. 2005 P. 73

MES and PDM

Customer ENG1 / RDCustomer Engineer Product Engineer

MT Form(Mask Tooling)

MaintainTechnology Infor.

Book TM number

Issue MT/TIP

EBO

EBO system

FSR Form(Foundry Service

Request)

Issue Engineering Notice

MES system

Issue lot handling request

Customer lot handling request

PE Infor. maintenance

Maintain holadable stage

: PDM system

: other system

Jon Chang

May. 2005 P. 74

Outline

產業 Operation





MES 技術 MES 與其它 e 化系統的整合 MES 未來發展方向

Jon Chang

May. 2005 P. 75

Future Direction of MES

Scalability (support considerable transaction for bigger FABs and detail information)

System centric operation instead of human-centric operation (knowledge operation)

Simulation Capability is embedded for knowledge creation

Industry information sharing instead local information sharing (Virtual FAB support)

Friendly decision support system

Exception handling become only thing for human operation

Jon Chang

May. 2005 P. 76


man-machine communication

instructor

logging

process data

actualization

operator

processdata base

plant

simulation

maintenanceengineer

history

knowledge base

Jon Chang

May. 2005 P. 77


Jon Chang

May. 2005 P. 78

Q & A