KLA Tencor Alpha Step IQ OPERATING MANUAL - UTA Tencor Alpha... · KLA Tencor Alpha Step IQ OPERATING MANUAL ... of your meansurement area will be ... 4.3.5 You must now level the

DOCUMENT: KLA Tencor Alpha Step IQ STANDARD OPERATING PROCEDURE Version: 1.0

KLA Tencor Alpha Step IQ OPERATING MANUAL

Version: 1.0 Sept. 2011

UNIVERSITY OF TEXAS AT ARLINGTON

Nanofabrication Research and Teaching

Facility


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TABLE OF CONTENTS 1. Introduction……………………………………………………… 3

1.1 Scope of Work………………………………………… 3

1.2 Description…………………………………………….. 3

1.3 Safety………………………………………………….. 3

2. Hardware ..............................…………………………………. 3

3. Requirements…………………………………………………… 3

3.1 Training……………………………………………….. 4

3.2 Restrictions…………………………………………… 4

3.3 System Checks………………………………………. 4

4 Operating Procedure …………………………………………. 4

4.1 System Login…………………………………………. 5

4.2 Equipment Alignment……...……………………....... 5

4.3 Measurement…………………………………………. 8

4.4 Saving Data …………..……………………………... 10

4.5 Shutdown……………………………………………… 11

5 Appendix …………………………………………………….. 12

5.1 Stylus Measurement Information ………………………. 12

5.2 Specifications ………………………………………………… 12 5.3 Scan Parameters ……………………………………….. 13


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1 INTRODUCTION

1.1 Scope These procedures apply to the KLA Tencor Alpha Step IQ. All maintenance should follow the procedures set forth in the manufacturer‟s maintenance and operations manuals. This document is for reference only. Personnel should be trained by authorized staff before operating this equipment.

1.2 Description

The KLA Tencor Alpha Step IQ stylus-based surface profiler combines high measurement precision and versatility. With 8Ã (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ surface profiler provides excellent repeatability and performance to analyze and monitor processes. Provides advanced and customizable 2D surface analysis and saved site image with recipe. It precisely determines and analyzes thin step heights, surface micro roughness, and overall form error on thin film surface coatings while providing sufficient vertical range for large topography variations.

1.3 Safety 1.3.1 This machine is connected to 110 VAC. Be very careful and aware of

electrical hazards. If you encounter any electrical malfunctions, contact Nanofab staff immediately

1.3.2 This machine has no EMO (Emergency Off), If electrical must be removed from system it must be unplugged.

1.3.3 The stage is capable of movement, take care not to pinch your fingers. 1.3.4 Read any posted Nanofab Engineering Change Notices (ECN) for any

hardware, process or safety changes before running the tool.

2 HARDWARE

2.1 Alpha Step IQ main frame component

2.2 Computer and Computer Monitor

3 REQUIREMENTS

3.1 Training You must be a qualified user on the KLA Tencor Alpha Step IQ. It has three scanning modes, the standard single scan. A multiple scan up to 10 times and calculates the


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mean, standard deviation, minimum, and maximum of the parameters selected. Then a manual sequence mode guides the operator through scanning multiple sites and automatically creates a report of the data with a statistical summary. The system can take reading with a standard scan left to right and from right to left with limitations.

3.2 Restrictions

3.2.1 None.

3.3 System checks

3.3.1 Turn on system Computer.

Fig. 3.3.1

4 OPERATING PROCEDURE

4.1 System Login

4.1.1. Login to the system‟s computer by clicking on the “Alpha Step” icon.

Fig. 4.1.1

ON Button

Alpha Step Icon


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4.1.2. When it asks for a password enter the word “student” in lower case

letters. See the RED Circle in Fig. 4.1.2 .

Fig. 4.1.2

4.1.3 This is the screen as it appears that you will use.

Fig 4.1.3

4.2 Equipment Alignment

4.2.1 Place your sample on the stage. Forward (to you) of center about 1 inch.

Fig. 4.2.1


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4.2.2 Then rotate the table 180 degree, this should be close to where you will need to be under the stylus, as indicated by the yellow arrow in Fig. 4.2.1.

4.2.3 From the front of the machine, on the left side, slightly under the

“Machine” table top are two stage alignment knobs. Note magnification right side of tool behind the stage, this will magnify your view in camera mode.

Fig.4.2.3

4.2.4 The front knob adjusts the forward and back position. The back knob adjusts the left to right position.

Fig. 4.2.4

4.2.5 You are trying to get your sample positioned under the stylus so that is

easier to locate your measurement point with the camera.

Fig. 4.2.5a Fig. 4.2.5b

Left Side Table

Adjustment Knobs

Left to Right

Position

Stylus

Stylus

Stylus View from left side

with cover removed.

Front to Back

Position

Stylus Arm

Magnification Knob


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4.2.6 Once you have a rough alignment of your sample you are ready to move the stage up.

4.2.7 You move the stage up by going to the computer, using the mouse move

the arrow over the down arrow as seen in Fig. 4.2.7 then double click.

Fig. 4.2.7

4.2.8 The stage will move up slowly and the stylus will come down. The stage

will stop when it touches the stylus. Fig. 4.2.9 will show you what it looks like on the monitor.

Fig. 4.2.8 4.2.9 Once you see above and stage has stopped, move the arrow over the Up

arrow and click once and the stylus will move up. You can then locate your measurement point using the same adjustments you used above to find your rough alignment and monitor the camera screen on the monitor.

Fig. 4.2.9

Stylus

Stylus Reflection

Up Arrow

Camera Monitor Screen


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4.3 Measurement

4.3.1 At this point you should have the measurement screen showing and you should have located the area you want to measure via previous steps.

Fig. 4.3.1

4.3.2 You should load one of 15 basic recipes by pushing the “LOAD” button. Presently there are 5 different scan lengths. If you need a custom recipe contact the tool owner.

Fig. 4.3.2a Fig. 4.3.2b

4.3.3 Next you are ready to push the green “START” button. Once you start the

scan the stylus will come down at the red cross intersections and start a left to right scan, unless you have chosen a right to left scan.

Fig 4.3.3

Load File Display

Load File Button

GREEN Start Button

15 Standard Recipes


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4.3.4 When the Alpha Step completes its scan the stylus will retract and a trace

of your meansurement area will be displayed.

Fig. 4.3.4

4.3.5 You must now level the scan by going to “Leveling 2 Zones” and click on

the button. Select “Leveling using 2 zones” and move the zones on the trace area you want to level. Zones widths can be changed by clicking on their sides. Once done, click „OK‟ and that will level the trace.

Fig. 4.3.5

4.3.6 Select “2 bars” or “2 zones”. Now you can position the bars or zones on the trace and read Height, Width, and TIR values on the left. More or less parameters can be selected by clicking on “Parameters”.

Fig. 4.3.6

Leveling 2 Zones

2 Bar or 2 Zones Buttons

Width, Height and TIR

Data Display

Trace Results


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4.4 Saving Data 4.4.1 To save the data for future reference go to the “DATA REVIEW” button

and click once.

Fig. 4.4.1

4.4.2 This will take you to a second screen where you can review and or modify

your results and then click on the “File” icon and “Save” them to the “Nanodata Drive”.

Fig. 4.4.2a Fig. 4.4.2b

4.4.3 Once data is saved you can go back to the scan and measurement screen

by clicking on “SCAN”.

Fig. 4.4.3

Data Review Button

File Icon

Scan Button


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4.4.4 You are now ready to either measure another site or sample. If you will be measuring another sample you must first lower the stage by double clicking on the “UP” arrow. Then follow all the previous steps to take another measurement. If there are no other measurements to be made proceed to the shutdown procedure.

Fig. 4.4.3

4.5 Shutdown 4.5.1 Once the stage is lowered, remove your sample. 4.5.2 Go to the “EXIT” button and click on it once.

Fig. 4.5.2

4.5.3 It will ask “Do you really want to shutdown system” answer “YES”.

Fig. 4.5.2a Fig. 4.5.2b 4.5.4 Enter your information into the log book.

UP Arrow

Exit Button


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5.0 Appendix 5.1 Stylus Measurement Information

5.2 Specifications: Scanning stylus (standard): 5-

Stylus force: 15 mg (nominal setting)

Profile length (max): 10 mm in the right direction 2 mm in the left direction

Maximum step height: 2 mm (for stepping down conditions only)

Scan Length: 10 mm

Scan Speed: 2 μm/s to 200 μm/s

Sampling Rate: 50, 100, 200, 500 or 1000 Hz

Vertical Range: ± 10 μm (20 μm) at 0.012 Å vertical resolution

± 200 μm (400 μm) at 0.24 Å vertical resolution

± 1000 μm (2000 μm) at 1.2 Å vertical resolution

Horizontal Resolution: 0.01 μm (100 Å) at 2 μm/s scan speed

Scan Method: Moving stylus, stationary stage

Stylus Control: Manually adjustable force


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Range: 1.0 – 99.9 mg

Resolution: 0.1 mg (~ 0.5mg standard deviation)

Optical Magnification: 1) Standard: 70 – 210 x

2) High Mag. option: 160 – 480 x

Step Height Repeatability: 1) At 20 μm range: 0.0008 μm (8 Å) typical standard deviation1 or 0.1% of measured vertical range.

2) At 400 μm range 0.005 μm (4000 Å) typical standard deviation or 0.2% of the measured vertical range.

3) At 2000 μm range 0.030 μm (2 μm) typical standard deviation or 0.5% of the measured vertical range.

Step Height

Z control : interactive control via software

Maximum sample size: 158 mm diameter

Maximum sample thickness: 21 mm

Maximum sample weight: 1 kg

Throat depth: 81 mm

X/Y maximum travel: 151mm x 80 mm

Stage rotation: 360°, unlimited manual rotation

Leveling: manual and various software leveling of profiles

5.3 Scan Parameters:

The main screen displays the scan parameters, the live video image of the sample and stylus, and the scan trace. The different parameters are described here.

5.3.1 Scan Length - Can be entered in units of μm (10 mm max in right direction, 2 mm

max in left direction)

5.3.2 Number of Scans - A multi-scan mode of up to 10 repeated scans at the position can be selected. The mean and standard deviation of the measurements will be calculated.

5.3.3 Scan Speed - Speeds between 2 to 200 μm/s can be selected by the user.

5.3.4 Advanced - This menu gives other options for scan speed, including scan delay. More information on this will be added at a later time.

5.3.5 Sampling Rate - Rates between 50 to 1000 Hz can be selected by the user.

5.3.6 Scan Time - This is automatically determined by the Scan Length, Scan Speed, and Number of Scans parameters that are selected by the user.


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5.3.7 Scan Direction - Either the right or left direction arrow can be selected by the user. Note that the maximum scan length differs by direction: 10 mm max in right direction, 2 mm max in the left direction.

5.3.8 Resolution - This is automatically determined by the Scan Speed, and Sampling Rate parameters that are selected by the user. For example, a slower scan speed and higher sampling rate will yield better resolution.

5.3.9 Sensor Range - The ASIQ has 3 types of sensors with ranges of 20 μm, 400 μm, and 2 mm, respectively. The user can select which sensor best suits their scan purposes.

Note: If the user is not sure of the dimensions of the features to be scanned, a sensor with

the largest range should be used first for measurements. Choosing a sensor with a

smaller range than the actual feature size can result in damage to the sensor and to the

sample. Also, when stepping up from bottom to the top of a feature (peak bias), it is

preferred that the maximum distance not exceeds the dimension of 875 microns. This

will prevent potential damage to the stylus.

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