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Laser Zentrum Hannover, Germany
Nanomanufacturing
Boris N. ChichkovLeibniz University Hannover 18.04.23
Boris Chichkov, Nanomanufacturing
Laser nanomanufacturing technologies
near IR fs-pulses
resin
Two-photon polymerization Laser printing Laser ablation
Boris Chichkov, Nanomanufacturing
SEM image of high quality microchip fabricated in 400 µm thick AlN substrate
Fs laser microstructuring
Boris Chichkov, Nanomanufacturing
targettarget
laser
Nano-Nano-particleparticle
Liquid
• High purity and stability• Monoatomic materials• Alloy nanoparticles• Particle surface-functionalization• Polymer-embedded nanoparticle • Coatings with nanosized particles• Controlled drug-release• Stoichiometric nanoparticles• Novel methods better control
J. Phys. Chem. C, 2010
Appl. Phys. A, 2010
Laser generation of nanoparticles
Boris Chichkov, Nanomanufacturing
Receiver substrate
(glass)
Tightly focused fs laser pulse
Thin Au
film
Donor substrate
(glass)
Fabrication of spherical nanoparticles by laser printing
5
„Laser-induced transfer of metallic nanodroplets for plasmonics and metamaterial application“JOSA B, Vol. 26, No. 12, B130, 2009
Boris Chichkov, Nanomanufacturing6
Controlled fabrication and precise deposition of silicon nanoparticles
Receiver substrate
(glass)
Bulk silicon
Tightly focused fs laser pulse
Silicon nanoparticle
Silicon dioxide Silicon donor layer
„Laser printing of silicon nanoparticles with resonant optical electric and magnetic responses“, Nature Communications, 5, No. 3402, (2014).
200 nm
50 µm
Boris Chichkov, Nanomanufacturing
near IR fs-pulses
resin
Opt. Lett. 28, 301, (2003)Adv. Eng. Mat. 5, 551, (2003)
3D nanostructuring by two-photon polymerization
Nanotechnology with lasers
Ormocer
Deutsches Patent 101 52 878.7-43
Boris Chichkov, Nanomanufacturing
Nature Photonics, v. 3, 450 (2009)
PhCs fabricated in Zr-hybrid polymers
Boris Chichkov, Nanomanufacturing
Commercially available 2PP system from LZH: [email protected]
Two-photon polymerization (5cm/s)
Boris Chichkov, Nanomanufacturing
10 µm 2 µm
Microoptics: Tapered waveguides
Boris Chichkov, Nanomanufacturing
Fabrication of SRRs by laser direct-writing
Ring diameter: 5 µmWire diameter: 800 nmGap width: 800 nm
Resonance: 11 µm wavelength(RLC model)
-Mechanical properties of the polymer allow fabrication of free standing SRRs
-Excitation of magnetic resonance for radiation incident perpendicular to substrate surface (kz)
FDTD simulation ofsingle SRR response
Boris Chichkov, Nanomanufacturing
3D conductive polymer microstructures
PEG-DA : poly(ethylene glycol) diacrylateEDOT : 3,4-ethylenedioxythiophenePEDOT : poly(3,4-ethylenedioxythiophene)
PEG-DA and EDOT blends are used for 2PP and sequential in-situ oxidative polymerization;
Real-3D, physically stable and biocompatible microstructures are produced; Interpenetrating polymer network of PEG-DA and PEDOT leads to conductivities
of up to 0.04 S/cm.
EDOT
PEDOT
Boris Chichkov, Nanomanufacturing
3D ultralight and ultra strong materials
Boris Chichkov, Nanomanufacturing
Surface plasmon-polaritons for data transport
14
R. Zia et al., Materials Today 9, 20 (2006)
1 kHz
1 MHz
1 GHz
1 THz
10 nm 100 nm 1 µm 10 µm 100 µm 1 mmCritical dimension
Op
erat
ing
sp
eed
Plasmonics
Photonics
The Past
Electronics
Boris Chichkov, Nanomanufacturing
Surface plasmon-polaritons
15
Bandwidth of
electronics:
~ 10 GHz
Bandwidth of light:
400 THz – 750 THz
Core size:
~ 8 µm
pitch:
~ 65 nm