LEAN Implementation @Global company

May 11, 2015

Carmit Berdugo Cohen – Quality Manager, KT Israel

KLA-Tencor – Who Are We?

KLA-Tencor supports the semiconductor industry with advanced inspection & metrology process control solutions.

Our cutting-edge hardware and software technology identifies defects in semiconductor chip manufacturing.

We help assure that everything from MP3 players and plasma HDTV's to PCs, Macs and iPhones work with precision. 

You almost certainly own a product with a chip that our technology made FASTER, SMALLER & SMARTER.

We’re Not Just in Silicon Valley…

North America United States25%

Europe U.K.FranceGermanyIreland15%

ScotlandNetherlandsItalySpain Middle East

Israel

South Asia India

Asia Pacific Japan – 20%KoreaTaiwanSingapore 40%MalaysiaChina

Global Leader in Yield Acceleration Since 1976

Installed base ~25,000 tools

>5,110 employees

>3,264 technical personnel in 17 countries

>$1.5B R&D investments over last 4 years

FY 2010 revenue: >$1.8B+

Customers: Intel

IBM

Samsung

Motorola

AMDR&D expenditures

3x that of our combined top 3 competitors

Competitors

|

KLA-Tencor’s Technology Impacts YOU

MP3 Players Plasma HDTV Satellite TV

DVR

DigitalSLR

Portable DVD

Cell Phone

PCs & Macs

Car DVD

DigitalCamera

NR Headphones

Navigation

System

19901980 2000 today

0.065m

1.5m

1m

0.5m

0.35m

0.25m

0.18m

0.13m

0.09m

Se

mic

on

du

cto

r D

esi

gn

R

ule

s

• Faster

• Cheaper

• Smaller

More materials lead to more defect types: More process control needed

Consumer Era–Short Product Lifetimes (Cell Phone Evolution)

Define “Small”

Our Tools Will Find a Defect the Size of a Small Coin on the Great Wall of China…in Seconds

One Chip

WaferThe Great Wall of China

| confidential8

Honey, I Shrunk the Substrate

Source: KLA-Tencor

0.01 micron (10nm)DNA Strand Diameter: ~6nm

0.1 micron (100nm)Semiconductor Bridging Defect: ~30nm

1 nanometer (nm)

1 mm (1,000,000nm)Human Hair: ~100,000nm

1 cm (10,000,000nm)Head of a Pin: ~2,000,000nm

0.1 mm (100,000nm)Red Blood Cell: ~5,000nm

1 micron (1,000nm)Bacteria: ~800nm

| confidential9

Obstacles To Improving Yield

0.01 micron (10nm)DNA Strand Diameter: ~6nm

0.1 micron (100nm)Semiconductor Bridging Defect: ~30nm

1 nanometer (nm)

1 mm (1,000,000nm)Human Hair: ~100,000nm

1 cm (10,000,000nm)Head of a Pin: ~2,000,000nm

0.1 mm (100,000nm)Red Blood Cell: ~5,000nm

1 micron (1,000nm)Bacteria: ~800nm

Source: KLA-Tencor

KLA-Tencor Provides Systems that Enable Finding Defects and Measuring Critical Dimensions

And…You can’t control what you can’t measure!

You can’t fix what you can’t find!

Smaller Overlay Window

(yield & reliability challenges)

Source Drain

Transistor

GateDielectric

35 nm GateLength

METROLOGY

DefectiveVia

BARCUnder-Etch

Void

Buried void

Residual Polymer

Poisoned Resist

Chamber Flake

High Aspect

Ratio Defect

DEFECTS

Why LEAN

הצורך בניהול רזה

שינוי בקצב השינוי

Current population 6,9 billion

12 KLA-Tencor Confidential - Internal Use Only

שינוי בקצב השינוי - מאקרו

משמעומשמעותת

שינוייםשינויים

עלויות ייצור גבוהות

שינוי במס' המכונות המוזמנות

Build Planשינויים גדולים בתחזית

תהליכים לא עקביים

חוסרים בחומרים

Up/Down turnריבוי ב-

שינוי בקצב השינוי - מיקרו

14 KLA-Tencor Confidential - Internal Use Only

של כל יתרון תחרותי ארגונית ליצירת אסטרטגיה

ארגון

התחרות ע"י: כושרשיפור

קיצור זמני תגובה

שיפור באיכות המוצר/השרות

הורדת עלויות

גישות לחיסול הבזבוז עם כלים טכניים שילוב של

רכות

תפישת "הניהול הרזה"

מירבי ללקוחערךהפעלת הארגון להענקת

בתהליך: גורמים חסרי ערך ללקוחבזבזניםצמצום

בחינת התהליך דרך משקפי הלקוח

16 KLA-Tencor Confidential - Internal Use Only

Global Infrastructure

Building LEAN Teams

GOPS Steering Committee

LEAN Owners

LEAN Owners

LEAN Owners

LEAN Owners

LEAN Owners

Israel USA Singapore Germany Hong Kong

EXPERTEAM

Zone Leaders

EXPERTEAM

Zone Leaders

EXPERTEAM

Zone Leaders

EXPERTEAM

Zone Leaders

EXPERTEAM

Zone Leaders

Adding LEAN to GOPS BSC

Productivity ($) Adoption (Score) Inventory Turns

Building the Infrastructure

LEAN Maturity Model (LMM)

Cost Saving Model

What is LMM?

Diagnostic tool to assess Lean progress

Feedback system to measure effects (and respond accordingly)

Cross-Site Lean Summit (Gemba Visit)

Common Language

Common Framework: Standards, BKMs

Promote Cross-Site interaction

Lean Maturity Model Assessment

To achieve the World Class Manufacturing, focus is on 22 key characteristics, which are grouped into the 7 categories

In general the scoring (1 to 5) is aligned similar to guidelines shown below

1 2 3 4 5

Basic understanding or implementation beginning to occur.

Active programs/projects to develop understanding of the category, perhaps some implementation by the management team is expected.

Active programs/projects to develop understanding of the category, with implementation being actively driven by the management team and deeper into several parts of the organization.

Thorough understanding and implementation throughout the organization.

Thorough understanding and implementation throughout the extended value stream, from supplier through the organization to the customer.

Assessment Category Total5S 2Continuous Improvement 4Culture 2Measurement & Matrix 4Mgmt Support 3Quality 2LEAN tools 5Grand Total 22

Complete LMM score sheet

Assessment Tool – Lean Maturity – Example

Assessment Tool – Lean Maturity – Example

Assessment Tool – Lean Maturity – Example

Building the Infrastructure

LEAN Maturity Model (LMM)

Cost Saving Model

Productivity Lean Savings – Guidelines

“Lean” Savings – savings captured from:

Projects specifically identified / driven by Lean Initiative activity

Includes Projects, routine cell 5S, Kaizen & Red Tag Event activity

*

*

Example for Savings - KTI

Reporting Performance Qtrly

Productivity ($) Adoption (Score) Inventory Turns

Thank You