4
MOS Transistors Yannis Tsividis CMOS Processes These slides are based on Y. Tsividis and C. McAndrew, “Operation and Modeling of the MOS Transistor”, Copyright © Oxford University Press, 2011. They are meant to be part of a lecture, and may be incomplete or may not even make sense without the accompanying narration.

Lecture Slides 1.3 CMOS Processes

Embed Size (px)

DESCRIPTION

dasdasd

Citation preview

Page 1: Lecture Slides 1.3 CMOS Processes

MOS Transistors Yannis Tsividis

CMOS Processes

These slides are based on Y. Tsividis and C. McAndrew, “Operation and Modeling of the MOS Transistor”, Copyright © Oxford University Press, 2011. They are meant to be part of a lecture, and may be incomplete or may not even make sense without the accompanying narration.

Page 2: Lecture Slides 1.3 CMOS Processes

Based on Tsividis/McAndrew; Copyright © Oxford University Press, 2011 2

STI processes dominant today

CMOS (Complementary MOS) Fabrication processes

Triple-well STI

𝑛+ 𝑛+

poly poly 𝑝+ 𝑝+ STI oxide

𝑛+ 𝑛+

poly poly Oxide

STI (Shallow Trench Isolation) LOCOS (Local Oxidation of Silicon)

𝑛+ 𝑛+

poly poly

Oxide

𝑛+ 𝑛+ 𝑝+ 𝑝+

Oxide poly Oxide poly

𝑝 𝑛

SOI (Silicon on Insulator)

Page 3: Lecture Slides 1.3 CMOS Processes

Based on Tsividis/McAndrew; Copyright © Oxford University Press, 2011 3

Top view:

Cross section:

Realistic relative dimensions

Page 4: Lecture Slides 1.3 CMOS Processes

Based on Tsividis/McAndrew; Copyright © Oxford University Press, 2011 4

SEM images – Intel 45 nm process

nMOS pMOS

Copyright © 2008 by IEEE; courtesy of Intel Corporation (Auth et al., Proc. 2008 Symp. VLSI Technology, pp. 128-129)


1.3 Highly Resistive Substrate CMOS on SOI for Wireless Front-End Switch Applicationscsmantech.org/OldSite/Digests/2011/papers/1.3.pdf ·  · 2012-05-012.2 IBM 0.18um SOI Technology

1.3 Highly Resistive Substrate CMOS on SOI for Wireless Front-End Switch Applicationscsmantech.org/OldSite/Digests/2011/papers/1.3.pdf ·  · 2012-05-012.2 IBM 0.18um SOI Technology

Documents
Lecture 1: Circuits & Layout - Harvey Mudd Collegepages.hmc.edu/harris/cmosvlsi/4e/lect/lect1.pdf · 1: Circuits & Layout CMOS VLSI Design 4th Ed. 2 Outline ... CMOS processes for

Lecture 1: Circuits & Layout - Harvey Mudd Collegepages.hmc.edu/harris/cmosvlsi/4e/lect/lect1.pdf · 1: Circuits & Layout CMOS VLSI Design 4th Ed. 2 Outline ... CMOS processes for

Documents
Advanced Gate Stack Materials and Processes for sub-70 …tking/theses/pranade.pdf · Advanced Gate Materials and Processes for Sub-70 nm CMOS Technology by ... Chapter 2 Metal Gate

Advanced Gate Stack Materials and Processes for sub-70 …tking/theses/pranade.pdf · Advanced Gate Materials and Processes for Sub-70 nm CMOS Technology by ... Chapter 2 Metal Gate

Documents
ASIC Physical Design CMOS Processes

ASIC Physical Design CMOS Processes

Documents
Advanced MOSFET Structures and Processes for … MOSFET Structures and Processes for Sub-7 nm CMOS Technologies Peng Zheng Electrical Engineering and Computer Sciences University of

Advanced MOSFET Structures and Processes for … MOSFET Structures and Processes for Sub-7 nm CMOS Technologies Peng Zheng Electrical Engineering and Computer Sciences University of

Documents
CAMBRIDGE GEOGRAPHY AS - HYDROLOGY AND FLUVIAL GEOMORPHOLOGY: 1.3 RIVER CHANNEL PROCESSES AND LANDFORMS

CAMBRIDGE GEOGRAPHY AS - HYDROLOGY AND FLUVIAL GEOMORPHOLOGY: 1.3 RIVER CHANNEL PROCESSES AND LANDFORMS

Education
1.3 MP CMOS Image Sensor - imaging products · 1.3 MP CMOS Image Sensor ... sition, digitizer and digital signal processing system on a single chip. This 1.3-mega pixel (1280 x 1024)

1.3 MP CMOS Image Sensor - imaging products · 1.3 MP CMOS Image Sensor ... sition, digitizer and digital signal processing system on a single chip. This 1.3-mega pixel (1280 x 1024)

Documents
EE 330 Lecture 30 - Iowa State Universityclass.ece.iastate.edu/ee330/lectures/EE 330 Lect 30 Fall 2017.pdf · Consider a Bulk-CMOS Process A bipolar device in CMOS Processes ... •Maximum

EE 330 Lecture 30 - Iowa State Universityclass.ece.iastate.edu/ee330/lectures/EE 330 Lect 30 Fall 2017.pdf · Consider a Bulk-CMOS Process A bipolar device in CMOS Processes ... •Maximum

Documents
ASIC Physical Design CMOS Processes - Auburn Universityeng.auburn.edu/~nelson/courses/elec5250_6250/slides/ASIC Layout_1... · ASIC Physical Design CMOS Processes Smith Text: Chapters

ASIC Physical Design CMOS Processes - Auburn Universityeng.auburn.edu/~nelson/courses/elec5250_6250/slides/ASIC Layout_1... · ASIC Physical Design CMOS Processes Smith Text: Chapters

Documents
Contents Network Video Recorder Kit · SE-NA108TH 1 megapixel, 1/4" CMOS (Hisilicon 3518C);720P@25fps;IR-CUT SE-NA138TH 1.3 megapixel, 1/3" CMOS (Hisilicon 3518C);1080P@5fps, 960P@25fps,

Contents Network Video Recorder Kit · SE-NA108TH 1 megapixel, 1/4" CMOS (Hisilicon 3518C);720P@25fps;IR-CUT SE-NA138TH 1.3 megapixel, 1/3" CMOS (Hisilicon 3518C);1080P@5fps, 960P@25fps,

Documents
Greyhound Racing New Zealand BOX DRAW REVIEW · 1.2 Processes of the Review 1.3 Basis of this report 1.4 Summary of Findings 1.4.1 Operational Processes 1.4.2 Technical Processes

Greyhound Racing New Zealand BOX DRAW REVIEW · 1.2 Processes of the Review 1.3 Basis of this report 1.4 Summary of Findings 1.4.1 Operational Processes 1.4.2 Technical Processes

Documents
Beam Profiler マニュアル...Beam Profiler CINOGY TECHNOLOGIES 製 CMOS-1201 検出器：CMOS イメージセンサー 波長領域：320-1150 nm Pixel 数：1.3 MPixel Pixel size：5.2×5.2

Beam Profiler マニュアル...Beam Profiler CINOGY TECHNOLOGIES 製 CMOS-1201 検出器：CMOS イメージセンサー 波長領域：320-1150 nm Pixel 数：1.3 MPixel Pixel size：5.2×5.2

Documents
OV9650 Color CMOS SXGA (1.3 MegaPixel) CameraChip ... · 6 Proprietary to OmniVision Technologies Version 1.1, December 7, 2004 OV9650 Color CMOS SXGA (1.3 MegaPixel) CameraChip™

OV9650 Color CMOS SXGA (1.3 MegaPixel) CameraChip ... · 6 Proprietary to OmniVision Technologies Version 1.1, December 7, 2004 OV9650 Color CMOS SXGA (1.3 MegaPixel) CameraChip™

Documents
Chapter 14 CMOS Processes - Miunapachepersonal.miun.se/~gorthu/ch14.pdf · Chapter 14 CMOS Processes Hong Xiao, Ph. D. ... Hong Xiao, Ph. D. 14 Silicon nitride P-type …

Chapter 14 CMOS Processes - Miunapachepersonal.miun.se/~gorthu/ch14.pdf · Chapter 14 CMOS Processes Hong Xiao, Ph. D. ... Hong Xiao, Ph. D. 14 Silicon nitride P-type …

Documents
A 1.3-µW 0.6-µm CMOS Current–Frequency Analog–Digital

A 1.3-µW 0.6-µm CMOS Current–Frequency Analog–Digital

Documents
1.3 Faradaic Processes

1.3 Faradaic Processes

Documents
EV76C664 Datasheet 1.3 Mpixels Monochrome and …EV76C664 Datasheet 1.3 Mpixels Monochrome and Sparse CMOS Image sensor e2v semiconductors SAS December 2016 FEATURES 1.3 million (1280

EV76C664 Datasheet 1.3 Mpixels Monochrome and …EV76C664 Datasheet 1.3 Mpixels Monochrome and Sparse CMOS Image sensor e2v semiconductors SAS December 2016 FEATURES 1.3 million (1280

Documents
Fabrication of CMOS Integrated Circuitseng.staff.alexu.edu.eg/~mmorsy/Courses... · Faculty of Engineering - Alexandria University Overview of CMOS Fabrication Processes The CMOS

Fabrication of CMOS Integrated Circuitseng.staff.alexu.edu.eg/~mmorsy/Courses... · Faculty of Engineering - Alexandria University Overview of CMOS Fabrication Processes The CMOS

Documents
CMOS VLSI DESIGN - RIT - Peoplepeople.rit.edu/lffeee/cmosvlsi.pdf · CMOS VLSI DESIGN Page 22 RIT PROCESSES At RIT we use the SMFL-CMOS or Sub-CMOS processes for most designs. In

CMOS VLSI DESIGN - RIT - Peoplepeople.rit.edu/lffeee/cmosvlsi.pdf · CMOS VLSI DESIGN Page 22 RIT PROCESSES At RIT we use the SMFL-CMOS or Sub-CMOS processes for most designs. In

Documents
David M. Binkley, Ph.D., P.E. - Department of Electrical ... and mixed-signal integrated circuit design in CMOS processes. Methods for optimizing analog CMOS design for bandwidth,

David M. Binkley, Ph.D., P.E. - Department of Electrical ... and mixed-signal integrated circuit design in CMOS processes. Methods for optimizing analog CMOS design for bandwidth,

Documents
OV7620 SINGLE-CHIP CMOS VGA COLOR DIGITAL CAMERA - … · OV7620 Product Specifications -Rev. 1.3 (5/13/00) Preliminary Company Confidential OV7620 SINGLE-CHIP CMOS VGA COLOR DIGITAL

OV7620 SINGLE-CHIP CMOS VGA COLOR DIGITAL CAMERA - … · OV7620 Product Specifications -Rev. 1.3 (5/13/00) Preliminary Company Confidential OV7620 SINGLE-CHIP CMOS VGA COLOR DIGITAL

Documents
Design Rules MOSIS Scalable CMOS (SCMOS) · PDF fileDesign Rules MOSIS Scalable ... MOSIS currently offers only n-well processes or foundry-designated twin-well processes ... Notes

Design Rules MOSIS Scalable CMOS (SCMOS) · PDF fileDesign Rules MOSIS Scalable ... MOSIS currently offers only n-well processes or foundry-designated twin-well processes ... Notes

Documents
1.3-MEGAPIXEL CMOS ACTIVE-PIXEL DIGITAL IMAGE SENSOR1.3-MEGAPIXEL CMOS ACTIVE-PIXEL DIGITAL IMAGE SENSOR 1.3-MEGAPIXEL CMOS ACTIVE-PIXEL DIGITAL IMAGE SENSOR MT9M413 Micron Part Number:

1.3-MEGAPIXEL CMOS ACTIVE-PIXEL DIGITAL IMAGE SENSOR1.3-MEGAPIXEL CMOS ACTIVE-PIXEL DIGITAL IMAGE SENSOR 1.3-MEGAPIXEL CMOS ACTIVE-PIXEL DIGITAL IMAGE SENSOR MT9M413 Micron Part Number:

Documents
Outline Introduction CMOS devices CMOS technology CMOS logic structures CMOS sequential circuits CMOS regular structures

Outline Introduction CMOS devices CMOS technology CMOS logic structures CMOS sequential circuits CMOS regular structures

Documents
V. Re – 2 nd INFIERI International Summer School, Paris, July 16, 2014 Introduction to very deep submicron CMOS processes: the 65 nm CMOS technology for

V. Re – 2 nd INFIERI International Summer School, Paris, July 16, 2014 Introduction to very deep submicron CMOS processes: the 65 nm CMOS technology for

Documents
Assessment processes for older people (pdf, 1.3 - Ministry of Health

Assessment processes for older people (pdf, 1.3 - Ministry of Health

Documents
Trieste, 8-10 November 1999 CMOS technology1 Outline Introduction CMOS devices CMOS technology CMOS logic structures CMOS sequential circuits CMOS regular

Trieste, 8-10 November 1999 CMOS technology1 Outline Introduction CMOS devices CMOS technology CMOS logic structures CMOS sequential circuits CMOS regular

Documents
1/6.5’’ VGA CMOS Image Sensor GC0308 DataSheetaitendo3.sakura.ne.jp/aitendo_data/product_img/camera/...GC0308 -- VGA CMOS Image Sensor GC0308 DataSheet 4 / 32 Package: CSP 1.3

1/6.5’’ VGA CMOS Image Sensor GC0308 DataSheetaitendo3.sakura.ne.jp/aitendo_data/product_img/camera/...GC0308 -- VGA CMOS Image Sensor GC0308 DataSheet 4 / 32 Package: CSP 1.3

Documents
i ELECTROABSORPTION MODULATORS FOR CMOS …Optoelectronic modulators using this technology can be fabricated with conventional CMOS foundry processes, possibly on the same chips as

i ELECTROABSORPTION MODULATORS FOR CMOS …Optoelectronic modulators using this technology can be fabricated with conventional CMOS foundry processes, possibly on the same chips as

Documents
Overview of the Processes and Procedures for the ... · Processes and Procedures for the authorisation of PPP, October 2017, version 1.3 1 Overview of the Processes and Procedures

Overview of the Processes and Procedures for the ... · Processes and Procedures for the authorisation of PPP, October 2017, version 1.3 1 Overview of the Processes and Procedures

Documents