Long Travel Industrial Linear Stages - Newport...For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at IDL 225 Spec

Long TravelIndustrial Linear Stages

The long-travel IDL-LM industrial-grade linear stages boast the highest load capacity and speed of all linear motor stages with a wide variety of sizes and travels to choose from, making it well-suited for demanding production environments. They are also known for their outstanding accuracy and improved pitch and yaw specifications.

Platform Sizes, Travel Ranges & Load Capacities for Popular Industrial ApplicationsThe various sizes of width, travel range and load capacities of the IDL-LM family are available to fit numerous applications. Given the variety, these stages are directly stackable with each other, minimizing design and assembly time.

Easy Direct Mounting of XY Stack ConfigurationsIDL-LM stages feature both imperial and metric mounting hole patterns allowing for flexible mounting.

Reliable Stage DeliveryJust like any other Newport product, the IDL-LM series can be ordered both from stock or under a blanket schedule. This ensures that OEMs meet their commitments.

• Built for industrial environments with debris protection, high throughput & reliability

• High-efficiency, non-contact, ironless linear motor for fast motion & speed stability

• Extended travel and high load capacities to fit different applications

• Improved Pitch and Yaw Specifications

• Quick and reliable delivery based on customers’ production needs

Product Features

IDL-LM Series

GUA

RANTEED

SPECIFICATIO

NS

Base Material Recirculating caged ball bearings

Drive Mechanism Ironless Linear motor

Feedback Linear steel scale with 20 µm pitch

Limit Switches Positive and Negative End-Of-Run -5 V

Origin Optical at center of travel

Cable 5 m, optional cable management

Long Travel Industrial Linear StagesIDL-LM Series

Specifications for IDL

IDL 165 Spec Table IDL165-100LM IDL165-200LM IDL165-300LM

Travel Range 100 mm 200 mm 300 mm

Maximum Speed 2000 mm/s 2000 mm/s 2000 mm/s

Minimum Incremental Motion 0.050 µm 0.050 µm 0.050 µm

Maximum Continuous Force 68 N 68 N 68 N

Maximum Peak Force 289 N 289 N 289 N

Centered Load Capacity 450 N 450 N 450 N

Accuracy* ±2.0 µm ±2.0 µm ±2.0 µm

Bi-directional Repeatability ±0.25 µm ±0.25 µm ±0.25 µm

Pitch ±0.15 µrad ±0.20 µrad ±0.30 µrad

Compliance in Pitch 0.4 µrad/Nm 0.4 µrad/Nm 0.4 µrad/Nm

Yaw* ±15 µrad ±20 µrad ±30 µrad

Compliance in Yaw 0.4 µrad/Nm 0.4 µrad/Nm 0.4 µrad/Nm

Compliance in Roll 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm

Origin Repeatability ±0.1 µm ±0.1 µm ±0.1 µm

Cable Length 4.5 m 4.5 m 4.5 m

Thread Type M6 M6 M6

Width 165 mm 165 mm 165 mm

Weight 8.7 kg 10 kg 12 kg

MTBF 20,000 h (24% load, 30% duty cycle) 20,000 h (24% load, 30% duty cycle) 20,000 h (24% load, 30% duty cycle)

RoHS Compliant Compliant Compliant

* *Provided are guaranteed specificatons. Typical specifications are 2 x better in general. For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at www.newport.com

IDL 225 Spec Table IDL225-200LM IDL225-300LM IDL225-400LM IDL225-500LM IDL225-600LM IDL225-1000LM IDL225-1200LM

Travel Range 200 mm 300 mm 400 mm 500 mm 600 mm 1000 mm 1200 mm

Maximum Speed 2000 mm/s 2000 mm/s 2000 mm/s 2000 mm/s 2000 mm/s 2000 mm/s 2000 mm/s

Minimum Incremental Motion 0.050 µm 0.050 µm 0.050 µm 0.050 µm 0.050 µm 0.050 µm 0.050 µm

Maximum Continuous Force 136 N 136 N 136 N 136 N 136 N 136 N 136 N

Maximum Peak Force 578 N 578 N 578 N 578 N 578 N 578 N 578 N

Centered Load Capacity 1000 N 1000 N 1000 N 1000 N 1000 N 1000 N 1000 N

Accuracy* ±2.0 µm ±2.0 µm ±2.3 µm ±2.7 µm ±3.0 µm ±4.3 µm ±5.0 µm

Bi-directional Repeatability ±0.25 µm ±0.25 µm ±0.25 µm ±0.25 µm ±0.25 µm ±0.5 µm ±0.5 µm

Pitch ±20 µrad ±25 µrad ±30 µrad ±35 µrad ±40 µrad ±55 µrad ±65 µrad

Compliance in Pitch 0.55 µrad/Nm 0.55 µrad/Nm 0.55 µrad/Nm 0.55 µrad/Nm 0.55 µrad/Nm 0.55 µrad/Nm 0.55 µrad/Nm

Yaw* ±20 µrad ±25 µrad ±30 µrad ±30 µrad ±30 µrad ±40 µrad ±40 µrad

Compliance in Yaw 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm

Compliance in Roll 0.7 µrad/Nm 0.7 µrad/Nm 0.7 µrad/Nm 0.7 µrad/Nm 0.7 µrad/Nm 0.7 µrad/Nm 0.7 µrad/Nm

Origin Repeatability ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm

Cable Length 5 m 5 m 5 m 5 m 5 m 5 m 5 m

Thread Type M6 M6 M6 M6 M6 M6 M6

Width 225 mm 225 mm 225 mm 225 mm 225 mm 225 mm 225 mm

Weight 25 kg 26.5 kg 31.9 kg 33.8 kg 35.8 kg 45 kg 56 kg

MTBF 20,000 h (24% load, 30% duty cycle)

20,000 h (24% load, 30% duty cycle)






RoHS Compliant Compliant Compliant Compliant Compliant Compliant Compliant



Specifications for IDL

IDL 560 Spec Table IDL560-450LM IDL560-600LM IDL560-750LM IDL560-1000LM

Travel Range 450 mm 600 mm 750 mm 1000 mm

Maximum Speed 2000 mm/s 2000 mm/s 2000 mm/s 2000 mm/s

Minimum Incremental Motion 0.050 µm 0.050 µm 0.050 µm 0.050 µm

Maximum Continuous Force 472 N 472 N 472 N 472 N

Maximum Peak Force 2830 N 2830 N 2830 N 2830 N

Centered Load Capacity 2000 N 2000 N 2000 N 2000 N

Accuracy* ±2.5 µm ±3.0 µm ±3.5 µm ±4.3 µm

Bi-directional Repeatability ±0.25 µm ±0.25 µm ±0.5 µm ±0.5 µm

Pitch ±0.33 µrad ±0.40 µrad ±0.30 µrad ±0.40 µrad

Compliance in Pitch 0.37 µrad/Nm 0.37 µrad/Nm 0.37 µrad/Nm 0.37 µrad/Nm

Yaw* ±30 µrad ±30 µrad ±30 µrad ±40 µrad

Compliance in Yaw 0.1 µrad/Nm 0.1 µrad/Nm 0.1 µrad/Nm 0.1 µrad/Nm

Compliance in Roll 0.12 µrad/Nm 0.12 µrad/Nm 0.12 µrad/Nm 0.12 µrad/Nm

Origin Repeatability ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm

Cable Length 5 m 5 m 5 m 5 m

Thread Type M6 M6 M6 M6

Width 560 mm 560 mm 560 mm 560 mm

Weight 114 kg 124 kg 142 kg 159 kg





RoHS Compliant Compliant Compliant Compliant

* *Provided are guaranteed specificatons. Typical specificatohns are 2 x better in general. For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at www.newport.com

IDL 280 Spec Table IDL280-300LM IDL280-400LM IDL280-500LM IDL280-600LM IDL280-700LM IDL280-1000LM IDL280-1200LM

Travel Range 300 mm 400 mm 500 mm 600 mm 700 mm 1000 mm 1200 mm

Maximum Speed 2000 mm/s 2000 mm/s 2000 mm/s 2000 mm/s 2000 mm/s 2000 mm/s 2000 mm/s

Minimum Incremental Motion 0.050 µm 0.050 µm 0.050 µm 0.050 µm 0.050 µm 0.050 µm 0.050 µm

Maximum Continuous Force 265 N 265 N 265 N 265 N 265 N 265 N 265 N

Maximum Peak Force 1248 N 1248 N 1248 N 1248 N 1248 N 1248 N 1248 N

Centered Load Capacity 1500 N 1500 N 1500 N 1500 N 1500 N 1500 N 1500 N

Accuracy* ±2.0 µm ±2.3 µm ±2.7 µm ±3.0 µm ±3.3 µm ±4.3 µm ±5.0 µm

Bi-directional Repeatability ±0.25 µm ±0.25 µm ±0.25 µm ±0.25 µm ±0.5 µm ±0.5 µm ±0.5 µm

Pitch* ±25 µrad ±30 µrad ±35 µrad ±40 µrad ±45 µrad ±55 µrad ±60 µrad

Compliance in Pitch 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm

Yaw* ±25 µrad ±30 µrad ±30 µrad ±30 µrad ±30 µrad ±40 µrad ±40 µrad

Compliance in Yaw 0.2 µrad/Nm 0.2 µrad/Nm 0.2 µrad/Nm 0.2 µrad/Nm 0.2 µrad/Nm 0.2 µrad/Nm 0.2 µrad/Nm

Compliance in Roll 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm 0.3 µrad/Nm

Origin Repeatability ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm ±0.1 µm

Cable Length 5 m 5 m 5 m 5 m 5 m 5 m 5 m

Thread Type M6 M6 M6 M6 M6 M6 M6

Width 280 mm 280 mm 280 mm 280 mm 280 mm 280 mm 280 mm

Weight 48 kg 55.1 kg 59.7 65 69.5 82.5 94








RoHS Compliant Compliant Compliant Compliant Compliant Compliant Compliant



Load Characteristics and Stiffness

XPS-DX 1–8 axes universal high-performance motion controller/driver

XPS-RLX 1–4 axes universal high-performance motion controller/driver

XPS-EDBL High-power, 3-phase, sinusoidal DC brushless motor driver

Recommended Controller/Drivers

Ordering Information

DimensionsIDL165-LM Stages

IDL165-LM IDL225-LM IDL280-LM DL560-LM

Cz, Centered load capacity (N) 450 1,000 1,500 2,000

kax, Angular stiffness [Roll] (Nm/µrad) 3.3 1.4 3.3 8.3

kay, Angular stiffness [Pitch] (Nm/µrad) 2.5 1.8 3.3 2.7

kaz, Angular stiffness [Yaw] (Nm/µrad) 2.5 3.3 5 10

Note: The max. values for the normal center load (Cz) and the off-center load (Q) are given in the graph located close to the dimension drawings.

Z

Y

QD

CzX ±Cx

kαy

kαz

kαx

Cz, Normal centered load capacity 1000 N

-Cx, +Cx, Axial load capacity, continuous 113 N

Kαx, Compliance in roll 0.7 µrad/Nm

Kαy, Compliance in pitch 0.55 µrad/Nm

Kαz, Compliance in yaw 0.3 µrad/Nm

Note : Performance is driver and motor dependent.

2.76(70)

.39 (10)

6.50(165)

6.85 (174)

BOTH SIDES:3 HOLES M4 THD, DEPTH: .31 (8)

2.54(64.5).39

(10)

1.75(44.5)

A (1)

AT MAX. TRAVELA (1)

AT MAX. TRAVEL

5.91 (150)

L

3.94(100)

B B

3.94(100)

MODEL TRAVEL L A (1) n1 B n2

IDL165-200LM 7.87 16.93 7.67 8 5.71 6 (200) (430) (194.8) (145)

IDL165-300LM 11.81 20.87 9.64 8 5.71 6 (300) (530) (244.8) (145)1) INCLUDING OVER-TRAVEL ALLOWED BY THE HARD STOP.

MODEL SHOWN: IDL165-200LMDIMENSIONS IN INCHES (AND MILLIMETERS)

.67 (17) .31 (8)

5.94(151)

5.91(150)

1.57(40)

SQR 2.95(75)

SQR 3.94(100)

SQR 5.91(150)

.55(14)

n2 x 2 HOLESM4 THDDEPTH: .31 (8) MOTOR CABLE

ENCODER CABLEHALL CABLEAIR TUBE

APPROX. LENGTHS: 177 (4500)

22 HOLES M6 THD,DEPTH: .24 (6)

n1 CLEARANCE HOLESFOR M6 SCREWS

SQR 1.97(50) SQR .98 (25)

Z

Y

QD

CzXkαy kαz

kαx

±Cx






Off-Center Load (N)

0

Off-Center Load Along X or Z Axis Off-Center Load Along Y Axis

50 100 150 200 250 300 350 400 450

Cant

ileve

r Dis

tanc

e “D

” (m

m)

0

140

120

100

80

60

40

20

160

Max. values for the normal center load (Cz) and the off-center load (Q) are given in the graphs below.

Example:The IDL225-600LM is an IDL stage with 600 mm travel and a linear motor drive.

100 200 300 400 450 (1)

500 (2)

600 700 (2)(3)

750 (1)

1000 1200

165

225

280

560

IDL

SeriesWidth(mm)

Travel(mm)

Drive

LM

1) Only IDL560 stages.2) Except IDL560 stages.3) Except IDL225 stages. LM: Linear motor


IDL225-LM Stages3.94(100)

.49 (12.5)

10.28 (261)


1.97(50)

3.35(85)

.69(17.5)

.71(18)

8.07(205)

1.57(40)

.79(20)

3.35(85)

7.87 (200)

L

7.87 (200)

B B

7.87 (200)

SQR 1.97(50)

SQR 3.94(100)

SQR 5.91(150)

SQR 7.87(200)

7.87(200)

8.86(225)

.59(15)

1.14 (29)

A (1)

AT MAX. TRAVELA (1)

AT MAX. TRAVEL


6 HOLES M5 THD/ø5.39 (137),DEPTH: .39 (10)



MOTOR CABLEENCODER CABLEHALL CABLEAIR TUBE



n2 x 2 HOLES M4 THDDEPTH: .31 (8)


IDL225-200LM 11.81 23.07 9.63 8 8.07 6 (200) (586) (244.5) (205)

IDL225-300LM 11.81 27.00 11.59 8 8.07 6 (300) (686) (294.5) (205)

IDL225-400LM 15.75 30.94 13.56 8 8.07 6 (400) (786) (344.5) (205)

IDL225-500LM 19.69 34.88 15.53 8 8.07 6 (500) (886) (394.5) (205)

IDL225-600LM 23.62 39.45 17.50 8 17.13 6 (600) (1002) (444.5) (435)

IDL225-1000LM 39.37 54.57 25.37 12 17.13 6 (1000) (1386) (644.5) (435)


Z

Y

QD

CzXkαy kαz

kαx

±Cx






Off-Center Load (N)

0


50 100 150 200 250 300 350 400 450

Cant

ileve

r Dis

tanc

e “D

” (m

m)

0

140

120

100

80

60

40

20

160



IDL280-LM Stages3.94(100)

.49 (12.5)

10.28 (261)


1.97(50)

3.35(85)

.69(17.5)

.71(18)

8.07(205)

1.57(40)

.79(20)

3.35(85)

7.87 (200)

L

7.87 (200)

B B

7.87 (200)

SQR 1.97(50)

SQR 3.94(100)

SQR 5.91(150)

SQR 7.87(200)

7.87(200)

8.86(225)

.59(15)

1.14 (29)

A (1)

AT MAX. TRAVELA (1)

AT MAX. TRAVEL










IDL225-200LM 11.81 23.07 9.63 8 8.07 6 (200) (586) (244.5) (205)

IDL225-300LM 11.81 27.00 11.59 8 8.07 6 (300) (686) (294.5) (205)

IDL225-400LM 15.75 30.94 13.56 8 8.07 6 (400) (786) (344.5) (205)

IDL225-500LM 19.69 34.88 15.53 8 8.07 6 (500) (886) (394.5) (205)

IDL225-600LM 23.62 39.45 17.50 8 17.13 6 (600) (1002) (444.5) (435)

IDL225-1000LM 39.37 54.57 25.37 12 17.13 6 (1000) (1386) (644.5) (435)


Z

Y

QD

CzXkαy kαz

kαx

±Cx






Off-Center Load (N)

0


50 100 150 200 250 300 350 400 450

Cant

ileve

r Dis

tanc

e “D

” (m

m)

0

140

120

100

80

60

40

20

160



22.05(560)

4.72(120)

.59 (15)

9.84 (250)

L

9.84 (250)

B B

19.69 (500)

9.84 (250)


IDL560-450LM 17.72 39.41 15.43 8 8.07 6 (450) (1001) (392) (205)

IDL560-600LM 23.62 43.35 18.39 8 17.13 6 (600) (1101) (467) (435)

IDL560-750LM 29.53 51.22 21.34 8 17.13 6 (750) (1301) (542) (435)

IDL560-1000LM 39.37 59.09 26.26 8 17.13 6 (1000) (1501) (667) (435)1) INCLUDING OVER-TRAVEL ALLOWED BY THE HARD STOP.

12.05 (306)


2.56(65)

3.94(100)

.79(20)

3.94(100)

A (1)

AT MAX. TRAVELA (1)

AT MAX. TRAVEL

3.94(100)5.91(150)

SQR 1.97(50)

SQR 5.91(150)

SQR 9.84(250)

13.78(350)

20.67(525)

21.26(540)

SQR 3.94(100)

SQR 7.87(200)

11.81(300)

15.75(400)

20.67(525)

20.67(525)

1.57(40)

.79(20)

.71(18)






1.14 (29)




7.87(200)9.84(250)

1.06 (27)

4 CLEARANCE HOLES ø.39 (9.9)C’BORED ø.87 (22.2)

n1 CLEARANCEHOLES ø.39 (9.9)

C’BORED ø.87 (22.2)


Z

Y

QD

CzXkαy

kαz

kαx

±Cx






Off-Center Load (N)

0 400 800


1200 1600 1800200 600 1000 1400 2000

Cant

ileve

r Dis

tanc

e “D

” (m

m)

0

50

100

150

200

250

300

350

400


22.05(560)

4.72(120)

.59 (15)

9.84 (250)

L

9.84 (250)

B B

19.69 (500)

9.84 (250)


IDL560-450LM 17.72 39.41 15.43 8 8.07 6 (450) (1001) (392) (205)

IDL560-600LM 23.62 43.35 18.39 8 17.13 6 (600) (1101) (467) (435)

IDL560-750LM 29.53 51.22 21.34 8 17.13 6 (750) (1301) (542) (435)


12.05 (306)


2.56(65)

3.94(100)

.79(20)

3.94(100)

A (1)

AT MAX. TRAVELA (1)

AT MAX. TRAVEL

3.94(100)5.91(150)

SQR 1.97(50)

SQR 5.91(150)

SQR 9.84(250)

13.78(350)

20.67(525)

21.26(540)

SQR 3.94(100)

SQR 7.87(200)

11.81(300)

15.75(400)

20.67(525)

20.67(525)

1.57(40)

.79(20)

.71(18)






1.14 (29)




7.87(200)9.84(250)

1.06 (27)



C’BORED ø.87 (22.2)


IDL560-LM Stages

www.MKSINST.com I [email protected]+1-978-645-5500 I +1-800-227-8766

DS-091901 (11/19) ©2019 MKS Instruments, Inc.Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Beaune-la-Rolande, France

and Wuxi, China have all been certified compliant with ISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified.


22.05(560)

4.72(120)

.59 (15)

9.84 (250)

L

9.84 (250)

B B

19.69 (500)

9.84 (250)


IDL560-450LM 17.72 39.41 15.43 8 8.07 6 (450) (1001) (392) (205)

IDL560-600LM 23.62 43.35 18.39 8 17.13 6 (600) (1101) (467) (435)

IDL560-750LM 29.53 51.22 21.34 8 17.13 6 (750) (1301) (542) (435)


12.05 (306)


2.56(65)

3.94(100)

.79(20)

3.94(100)

A (1)

AT MAX. TRAVELA (1)

AT MAX. TRAVEL

3.94(100)5.91(150)

SQR 1.97(50)

SQR 5.91(150)

SQR 9.84(250)

13.78(350)

20.67(525)

21.26(540)

SQR 3.94(100)

SQR 7.87(200)

11.81(300)

15.75(400)

20.67(525)

20.67(525)

1.57(40)

.79(20)

.71(18)






1.14 (29)




7.87(200)9.84(250)

1.06 (27)



C’BORED ø.87 (22.2)


Z

Y

QD

CzXkαy

kαz

kαx

±Cx






Off-Center Load (N)

0 400 800


1200 1600 1800200 600 1000 1400 2000

Cant

ileve

r Dis

tanc

e “D

” (m

m)

0

50

100

150

200

250

300

350

400


22.05(560)

4.72(120)

.59 (15)

9.84 (250)

L

9.84 (250)

B B

19.69 (500)

9.84 (250)


IDL560-450LM 17.72 39.41 15.43 8 8.07 6 (450) (1001) (392) (205)

IDL560-600LM 23.62 43.35 18.39 8 17.13 6 (600) (1101) (467) (435)

IDL560-750LM 29.53 51.22 21.34 8 17.13 6 (750) (1301) (542) (435)


12.05 (306)


2.56(65)

3.94(100)

.79(20)

3.94(100)

A (1)

AT MAX. TRAVELA (1)

AT MAX. TRAVEL

3.94(100)5.91(150)

SQR 1.97(50)

SQR 5.91(150)

SQR 9.84(250)

13.78(350)

20.67(525)

21.26(540)

SQR 3.94(100)

SQR 7.87(200)

11.81(300)

15.75(400)

20.67(525)

20.67(525)

1.57(40)

.79(20)

.71(18)






1.14 (29)




7.87(200)9.84(250)

1.06 (27)



C’BORED ø.87 (22.2)


IDL560-LM Stages

Documents

Long Travel Industrial Linear Stages - Newport...For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at IDL 225 Spec