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March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
1
Summary of Sensor Quality TestsSummary of Sensor Quality Tests
List of ProblemsList of Problems
F. Hartmann, CMS Tracker Collaboration
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
2
Total Number of Sensor DeliveredTotal Number of Sensor Delivered
Type Received Measured Rejected Accepted*
OB2 1407 1399 535 846
OB1 224 223 99 124
W5A 53 53 17 36
W5B 33 12 3 9
W6A 45 45 27 18
W6B 28 14 4 10
W7A 32 20 2 18
W7B 12 12 1 11
*Passing CMS QTC testsFebruary 14, 2003
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
3
Summary of Quality TestsSummary of Quality Tests
Restrict summary and discussion to sensors delivered after December 1, 2002 (introduction of new QA steps):187 OB2 32 W7A20 W5B 12 W7B21 W6B
261 Sensors in total
Measured Accepted Rej. Optic. Rej. IV Rej. strips
246 219 5 9 17
89% 2% 3.7% 7%
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
4
Sensors to be rejectedSensors to be rejectedSensors measured in Vienna: 32 ST Data:sensor ID optical I_450(µA) Vbreak Vdepl Nr.of I_450(µA) Nr. of
bad strips Ileak Pinholes Cac Rpoly bad strips Pinholes Cac Rpoly
30211322292717 18 3 2 14 2 3 330211422292910 7 5 2 data not available30211322412101 105 8.75
Sensors measured in Perugia: 12730210420383204 chip
30210421850212 20.7 450 2.5630210421850214 16.72 450 2.3430210422066323 17.2 7 1 3 5 1.02 5 3 230210422068004 6 4 2 2 230210422302724 6 1 5 0 030210423860203 9 3 9 data not available30210423860204 8 3 2 6 data not available30210423860213 6 2 6 data not available30210423860215 12 2 12 data not available30210423860224 8 1 8 data not available30210423860508 24.04 data not available30210423860521 9 1 2 8 data not available30210423860522 9 4 2 5 1 data not available30210423863921received broken data not available30210423863922 6 1 1 5 data not available30210423974210 chip data not available
Sensors measured in Karlsruhe: 2730211023185021 C30211023752820 C30211023752823 26.089 185.99 6 5 2 1 2 data not available
Sensors measured in Pisa not included.
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
5
Checklist for Pre-Series QualificationChecklist for Pre-Series Qualification
Pre-series completed
Not yet
Delivery procedure ST resumed with e-mail notification, still some inconsistencies
Bar code o.k.
Data format o.k., several files missing
Mask design Correct for all sensorsW7B test structure wrong
QTC IV problem, scratches, number of bad Cac
PQC o.k., assuming ST applies Flatband Voltage cut at 10 V
Longtime test o.k.
p-irradiation o.k.
n-irradiation o.k.
Bonding test o.k., 2 batches needed cleaning ?
% accepted sensors ~ 90 %Goal of qualification not yet reached.
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
6
Optical Inspection IOptical Inspection IQuality of cut edges has significantly improved. Still some sensors outside specifications (last delivery). Further improvement needed.
1342
m
1464 m
549
m
20383204Back view
Still 4 rejects out of 261
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
7
Optical Inspection IIOptical Inspection IIMany scratches on the surface of almost all sensors:
In many cases no electrical failure.In other cases broken or shorted aluminium lines !
Where and how are these scratches introduced ?Can these scratches be avoided with new scheme skipping IV after cutting? Agreed to try on 1000 OB2 sensors.But then we are even more concerned about cutting defects effecting the IV performance. (On single strip basis & and on overall performance!)
23412513
23412505
bad Cac short23412517
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
8
Bad Cac valuesBad Cac values
Two cases:
• Bad Cac values correlated with scratches. (shorts & opens)
• One batch (4 sensors):All sensors having hundreds of too low Cac values.
AUTOMATIC Cac CAPACITORS MEASUREMENT Is this or will this be introduced ????
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
9
IV problem - breakdown IIV problem - breakdown I
Limit
Correlation observed: Sensors with higher leakage current have strips with high leakage current ANDstrips with high leakage current are often in areas with scratches!
Example of W7A, W7B & W6A, W6B sensors:
0 100 200 300 400 500 60010-8
10-7
10-6
10-5
1
2
34567
89101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111
A
B
CDEFG
HIJKLMNOPQRSTUVWXY
ZAAABACAD
AEAFAGAHAIAJAKALAMANAOAPAQARASATAUAVAWAXAYAZBABBBCBDBEBFBGBHBIBJBKBLBMBNBOBPBQBRBSBTBUBVBWBXBYBZCACBCCCDCECFCGCHCICJCKCLCMCNCOCPCQCRCSCTCUCVCWCXCYCZDADBDCDDDEDFDG
a
b
cdefg
hi jklmnop
qrstu
vwxyzaaabacadaeafagahaiajakalamanaoapaqarasatauavawaxayazbabbbcbdbebfbgbhbibjbkblbmbnbobpbqbrbsbtbubvbwbxbybzcacbcccdcecfcgchcicjckclcmcncocpcqcrcsctcucvcwcxcyczdadbdcdddedfdg 30211023185001
30211023185002 30211023185005 30211023185009 30211023185010 30211023185017 30211023185022 30211023752801 30211023752802 30211023752805 30211023752806 30211023752810 30211023752813 30211023752814 30211023752817 30211023752818
1 30211023752821A 30211023752822a 30211023752823
Leak
age
Cur
rent
[A
]
Voltage [V]
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
10
IV problem - breakdown IIIV problem - breakdown II
longtime
0
0.5
1
1.5
2
2.5
3
3.5
4
4.5
5
0 20 40 60 80 100 120 140 160
time [h]
cu
rre
nt
[uA
]
30211322292506_2
30211322292506_3
30211322292506_1
30211322292720_1
30211322292720_2
30211322292720_3
30211322292518_1
30211322292518_2
30211322292518_3
Time dependence observed for some sensors.Important to agree on test procedure.
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
11
Same IV up to “soft strip breakdown”
0 100 200 300 400 500 6001E-8
1E-7
1E-6
1E-5
ST Karlsruhe
curr
en
t [A
]
bias voltage [V]
First strip Second strip
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
12
Leaky strips -- scratches
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
13
Hints
• Almost each high IV sensor has a few „high leaky“ strips! • Σ leaky strips ~ IV ( few strips drive IV)• EACH leaky strip is scratched ! – not all scratched strips are leaky• Clear correlation between IV and leaky strips and scratches on
sensors observed!• No IV-breaks on Minisensors! different handling ! Scratch test:
– Scratchtest on minisensors to reproduce effect• Needle• Pencil (2B)• screwdriver
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
14
Scratches on minisensor
„Soft“ scratches with probe needle
Carbon residues of pencil
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
15
Deep scratches on minisensor
„Not-so-SOFT“ scratcheswith screwdriver
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
16
0 100 200 300 400 500 6000,00E+000
2,00E-008
4,00E-008
6,00E-008
8,00E-008
1,00E-007
1,20E-007
1,40E-007
1,60E-007
1,80E-007
undamaged small scratch with needle deep scratch with needle scratched with pencil 2B scratched with screwdriver
curr
en
t [A
]
bias voltage [V]
x3
0 100 200 300 400 500 600
1E-10
1E-9
1E-8
strip 5 (not damaged) strip 8 strip 9 strip 10 strip 11 strip 13
stri
p c
urr
en
t [A
]
bias voltage [V]
x70
Total current Single strip current
Global IV and Individual strip IV
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
17
0 5 10 15 20 25 301E-10
1E-9
1E-8
undamaged small scratch with needle deep scratch with needle scratched with pencil 2B scratched with screwdriver
curr
en
t [A
]
strip number
A few single strips show high leakage current!
Undamaged minisensor @ 400V:Ileak ~ 0,2nA x 192 strips ~ 35nAIV ~ 38nA
Damaged minisensor @ 400V: Ileak damaged strips ~ 55nA Ileak all ~ 100nA IV ~ 120nA
Strip scan (Current)
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
18
Idiel on scratched Minisensor
0 5 10 15 20 25 30
1E-13
1E-12
1E-11
1E-10
1E-9
1E-8
1E-7
1E-6
1E-5
Idie
l [A
]
strip number
Effect is located in the Al layer, above the oxide! CMS sensors have metal strip overhang!!!Scratches remove the overhang and introduce pointlike defects
No pinholes created!
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
19
Scratch on bias & guard (minisensor)
0 200 400 600 800 10000,0
5,0x10-9
1,0x10-8
No scratch on minisensor
Tot
al le
akag
e cu
rren
t [A
]
Voltage [V]
0 200 400 600 800 1000-1,0x10-5
0,0
1,0x10-5
2,0x10-5
Scracht on bias and guard Exploded view
Tot
al le
akag
e cu
rren
t [A
]
Voltage [V]
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
20
Preliminary field simulations (with ISE TCAD)
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
21
Solution!?!Scratches -obviously happening very late in the
measuring procedure at ST- are critical!Avoiding scratches will certainly improve
the yield with respect to CaC (strip failure) , leaky strips (strip failure) and to global IV!
BUTThere is no guarantee, that avoiding scratches solves
ALL problems!Is it enough to skip the IV after cutting?????
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
22
Update Contact PersonsUpdate Contact Persons
CMS STGeneral M. Krammer G. Fallica Technical M. Krammer G. Valvo Mask Design E. Focardi G. Valvo Contract and Payment M. Mannelli G. Di Stefano Schedule A. Cattai G. MendolaShipments M. Krammer G. KaueraufData Files
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
23
CMS Tracker collaboration has to produce ~15000 silicon detector modules until end of 2004.
We need to procure 19000 ST sensors in 2 years production time. During full production only samples of sensors can be tested by CMS.We have to relay on Quality Control by ST !
Acceptance limit on sensor failure is max 1% !
Due to delays in pre-series production the time schedule is very tight and we have to compress the module production.
CMS Module ProductionCMS Module Production
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
24
Example of a CMS ModuleExample of a CMS Module
A module consists of 2 sensors, electronic hybrid, 4-6 APV chips, pitch adapter, carbon frame, etc.
For many sensors: The first test of silicon sensor after ST quality control is on an assembled module. Replacement of single sensors is basically impossible!
The present failure rate of 10% is not acceptable
20% of all modules would fail!
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
25
• Strip failure: Add. measurements by CMS– CaC AUTOMATIC Cac CAPACITORS MEASUREMENT!?!
– Leaky Strips (scratches only??)
• IV (scratches only??)
• Optical inspection has to be improved!
• Some improvements in the shipping logistic needed!
• Acceptance rate must be increased to 99% – Otherwise sensor failure will be detected about 1 year later
(2 sensors assembled together with electronics and mechan. parts)
SummarySummary
March 17, 2003March 17, 2003Catania, Meeting ST - CMSCatania, Meeting ST - CMS
CMS Sensor QualityCMS Sensor QualityFrank Hartmann – University of KarlsruheFrank Hartmann – University of Karlsruhe
26
Strip leakage current
0 100 200 300 400 50010-10
10-9
10-8
10-7
10-6
10-5
30211223296114 30211223296121 30211223296122 30211223296123 30211223296124 30211223972807 30211223972812 30211223972816 30211223972822
Leak
age
Cur
rent
[A
]
strip number
0 100 200 300 400 500 600 70010-12
10-11
10-10
10-9
10-8
10-7
10-6
10-5
10-4
234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950
515253545556575859606162636465
6667686970717273747576777879808182838485
8687888990919293949596979899100101102103104105106107108109110
111
112113114115116117118119120121122123
124125126127128129130131132133134135136
137
138139140141142143144145146147148149150
151
152
153
154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206
207208
209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246
247248
249250251
252253
254
255
256257258259260261262263
264265
266
267268269270271272273274275276277
278
279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373
374
375
376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413
414415416417418419420421422423424425426427428429
430
431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502
503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557
558
559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768BC
DEFGHIJKLMNOPQRSTUVW
X
YZ
AA
AB
ACADAEAFAGAHAIAJAKALAMANAOAPAQARASATAUAVAWAXAYAZBABBBCBDBEBFBGBHBIBJBKBLBMBNBOBPBQBRBSBTBUBVBWBXBYBZCACBCCCDCECFCGCHCICJCKCLCMCNCOCPCQCRCSCTCUCVCWCXCYCZDADBDCDDDEDFDGDHDIDJDKDLDMDNDODPDQDRDSDTDUDVDWDXDYDZEAEBECEDEEEFEGEHEIEJEKELEMENEOEPEQERESET
EU
EVEWEXEYEZFA
FB
FCFDFEFFFGFHFIFJFKFLFMFNFOFPFQFRFSFTFUFVFWFXFYFZGAGBGCGDGEGFGGGHGIGJGKGLGMGNGOGPGQGRGSGTGUGVGWGXGY
GZ
HA
HBHCHDHEHFHGHHHIHJHKHLHMHNHOHPHQHRHSHTHUHVHWHXHYHZIAIBICIDIEIFIGIHIIIJIKILIMINIOIPIQIRISITIUIVIWIXIYIZJAJBJC
JD
JEJFJGJHJIJJJKJLJMJNJOJPJQJRJSJTJUJVJWJXJYJZKAKBKCKDKEKFKGKHKI
KJ
KKKLKMKNKOKPKQKRKSKTKUKVKWKXKYKZLALBLCLDLELFLGLHLILJLKLLLMLNLOLPLQLRLSLTLULVLWLXLY
LZMAMBMCMDMEMFMGMHMIMJMKMLMMMNMOMPMQMRMSMTMUMVMWMX
MYMZNANBNC
NDNENF
NG
NHNI
NJ
NKNLNM
NN
NO
NPNQ
NRNSNTNU
NVNW
NXNYNZOAOBOCODOEOFOGOHOIOJOKOL
OMON
OOOPOQOROSOTOUOVOW
OX
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PD
PEPFPGPHPIPJPKPLPM
PN
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QM
QNQOQPQQQRQSQTQUQVQWQXQYQZRARBRCRDRERFRGRHRI
RJ
RK
RLRMRNRORPRQRRRSRTRURVRWRXRYRZSASBSC
SD
SESFSGSHSISJSKSLSMSNSOSPSQSRSSSTSUSVSWSXSYSZTATBTCTDTETFTGTHTITJTKTLTMTNTOTPTQTRTSTTTUTVTWTXTYTZUA
UBUC
UDUEUFUGUH
UI
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UL
UMUNUOUPUQURUSUTUUUVUWUXUYUZVAVBVCVDVEVFVGVHVIVJVKVLVMVNVOVPVQVRVSVTVUVVVWVXVYVZWAWBWCWDWEWFWGWHWIWJWKWLWMWNWOWPWQWRWSWTWUWVWWWXWY
WZ
XAXBXCXDXEXF
XGXHXIXJXKXLXMXNXOXPXQXRXSXTXUXVXWXXXYXZYAYBYCYDYEYFYGYHYIYJYKYLYMYNYOYPYQYRYSYTYUYVYWYXYYYZZAZBZCZDZEZFZGZHZIZJZKZLZMZNZOZPZQZRZSZTZUZVZWZXZYZZAAAAABAACAADAAEAAFAAGAAHAAIAAJAAKAALAAMAANAAOAAPAAQAARAASAATAAUAAVAAWAAXAAYAAZABAABBABCABDABEABFABGABHABIABJABKABLABMABNABOABPABQABRABSABTABUABVABWABXABYABZACAACBACCACDACEACFACGACHACIACJACKACLACMACN
bcd
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f
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h
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l
mnopqrstuvwxyzaaabacadaeafagahaiajakalamanaoapaqarasatauavawaxayazbabbbcbdbebfbgbhbibjbkblbmbnbobpbqbrbsbtbubvbwbx
bybzcacbcccdcecfcgchcicjckclcmcncocpcqcrcsctcucvcwcxcyczdadbdcdddedfdgdhdidjdkdldmdndodp
dqdr
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dydzeaebecedeeefegeheiejekelemeneoepeqeres
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evewexeyezfafbfcfdfefffgfhfifjfkflfmfnfofpfqfrfsftfufvfwfxfyfzgagbgcgdgegfggghgigjgkglgmgngogpgqgrgsgtgugvgwgxgy
gzhahb
hchdhehfhghhhihjhkhlhmhnhohphqhrhshthuhvhwhxhyhziaibicidieifigihiiijik
il
iminioipiqirisitiuiviwixiyizjajbjcjdjejfjgjhjijjjkjljmjnjojpjqjrjsjtjujvjwjxjyjzkakbkckdkekfkgkhkikjkkkl
kmknkokpkqkrksktkukvkwkxkykzlalblcldlelflglhliljlklllmlnlolp
lqlrlsltlulvlwlxlylzmambmcmdmemfmgmhmimjmkmlmmmnmompmqmrmsmtmumvmwmx
mymznanbncndnenfngnh
ninj
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nqnrnsntnunvnwnxnynzoaobocodoeofogohoiojokolomonooopoqorosotouov
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pm
pn
popppqprpsptpupvpwpxpypzqaqbqcqdqeqfqgqhqiqjqkqlqmqnqo
qp
qqqrqsqtquqvqwqxqyqzrarbrcrdrerfrgrhri
rj
rkrlrmrnrorprqrrrsrtrurvrwrxryrzsasb
sc
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sesfsgshsisjskslsmsnsospsqsrssstsusvswsxsysztatbtctdtetftgthtitjtktltmtntotptqtrtstttutvtwtxtytzuaubucudue
uf
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uiuj
uk
ulumunuoupuqurusutuuuvuwuxuyuzvavbvcvdvevfvgvhvivjvkvlvmvnvovpvqvrvsvtvuvvvwvxvyvzwawbwcwdwewfwgwhwiwjwkwlwmwnwowpwqwrws
wt
wuwvwwwxwywzxaxbxcxdxexfxgxhxixjxkxlxmxnxoxpxqxrxsxtxuxvxwxxxyxzyaybycydyeyfygyhyiyjykylymynyoypyqyrysytyuyvywyxyyyzzazbzczdzezfzgzhzizjzkzlzmznzozpzqzrzsztzuzvzwzxzyzzaaaaabaacaadaaeaafaagaahaaiaajaakaalaamaanaaoaapaaqaaraasaataauaavaawaaxaayaazabaabbabcabdabeabfabgabhabiabjabkablabmabnaboabpabqabrabsabtabuabvabwabxabyabzacaacbaccacdaceacfacgachaciacjackaclacmacn
30211023185001 30211023185002 30211023185005 30211023185009 30211023185010 30211023185017 30211023185022 30211023752801 30211023752802 30211023752805 30211023752806 30211023752810 30211023752813 30211023752814 30211023752817 30211023752818
1 30211023752821A 30211023752822a 30211023752823
Leak
age
Cur
rent
[A
]
strip number