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ME104 2 a Chua Kim Lian 25062012
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SPECIALIST DIPLOMA IN
M&E CO-ORDINATION
CLEAN ROOM SYSTEM
LABORATORY SYSTEM
The Copyright of this document belongs to BCA. No part of this document may be used, disclosed, transferred, reproduced,
stored in a retrieval system or transmitted in any form or by any means electronic, mechanical, photocopying recording or
otherwise to any person not authorized to use it without the express written permission of BCA
CLEANROOM
Er. CHUA Kim Lian
email: [email protected]
tel: 6742 8938
hp: 9631 5762
Basic of Cleanroom
Cleanroom Standard
Industries
Methodology: Design ~ Project
Design Features
Cleanroom Protocol
Testing and Balancing
CLEANROOM STANDARD
ISO 14644-1
FED STD 209E
definition
ISO 14644-1
cleanroom
A room in which the contamination of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of particles inside the room and in which other relevant parameters. e.g. temperature, humidity, and pressure, are controlled as necessary
definition
FED STD 209E
cleanroom A room in which the concentration of airborne
particles is controlled and which contains one
or more clean zones
clean zone A defined space in which the concentration of
airborne particles is controlled to meet a
specified airborne particulate cleanliness class
ISO 14644-1
FEDERAL STANDARD 209E
ISO Class 4 cleanroom
352 airborne particles at 0.5 um size within a
volume unit of 1 m3
Federal Standard Class 10 cleanroom
10 airborne particles at 0.5 um size within a
volume unit of 1 ft3
Facility Definitions
AS-BUILT CLEANROOM (FACILITY)
AT-REST CLEANROOM (FACILITY)
OPERATIONAL CLEANROOM (FACILITY)
AS-BUILT
A cleanroom (facility) that is complete and
ready for operation with all services
connected and functional but without
equipment or personnel in the facility
AT-REST
A cleanroom (facility) that is complete with all
services functioning and with equipment
installed and operable or operating as
specified, but without operating personnel in
the facility
OPERATIONAL
A cleanroom (facility) in normal operation with
all services functioning and with equipment
and personnel, if applicable present and
performing their normal work functions in the
facility
INDUSTRIES
Microelectronics
Wafer
Flat screen
Pharmaceutical
Sterile products
Tablet
INDUSTRIES
Biotechnology
Antibiotic
Genetic engineering
Optics
Lenses
Laser equipment
INDUSTRIES
Medical Devices
Instruments
Machines
Food & Beverages
Sterile environments
Packaging
HOW TO KEEP IT CLEAN?
Influencing factors
factors that can harm the product / process /
operator
Particulate and Gaseous Contaminants
Environmental Factors
Particulate and Gaseous Contaminants
Cleanliness of air
Cleanliness of surface of the working place
Dead and living particles
Inert and toxic particles
Environmental Factors
Temperature of air
Humidity of air
Light intensity
Vibration
Noise
Environmental Factors
Radiation
Ionization
Electrostatics
Electromagnetic
CLEANROOM FUNDAMENTAL
Layout
Component
Function
GOWNING ROOM
AIR SHOWER
PASS THRU
AIR FLOW
Air circulation
Air return
Filtration
Pressurization
Pressure differential to lesser area
AIR PRESSURE CONTROL
CEILING SYSTEM
CLEANROOM
FILTERS
CEILING
ELECTRICAL
PARTITION
PARTITION
WINDOW
CLEANROOM
RELIEF AIR GRILLES
LIGHT FITTING
REFLECTED CEILING