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KHUSHI RAM BHARDWAJEE 4THYEAR359/07

DAVIET(JALANDHAR)

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(J )

Introduction

Electromechanical Systems

MEMS

Current Applications

NEMS and Nanotechnology

Impact of Miniaturization

Challenges and Possibilities

References

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MEMS IS SIMPLY KNOWN AS MICRO

ELECTRO MECHANICAL SYSTEM.ITIS THE ART OFMINIATURIZING.MINITUARIZINGART WAS VERY OLDLY USED BY

WATCH MAKER IN 13TH CENTURY.

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Figure 5.1: Jonathan Swift.

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5.

Introduction, Continued

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MST - Microsystems Technology .

MEMS - Microelectromechanical System.

Manmade devices created using compatiblemicrofabrication techniques that are capable of

Converting physical stimuli, events and parametersto electrical, mechanical & optical signals

Performing actuation, sensing and other functions

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Definition and Terms

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.

Electromechanical SystemsFunctional Block Diagram

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Materials

Crystallography Forms of Silicon Amorphous

Polycrystalline

Crystalline

Miller Planes

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MEMSMicrostructure Fabrication

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Pattern definition

Photolithography

Deposition

Oxidation, chemical-vapor

deposition, ion implantation Removal

Etching, evaporation

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-Structural layer

-Sacrificial layer

deposit

pattern

etch

Microstructure Fabrication, Continued

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MEMS Advantages

The advantages of MEMS devices include

Size

High sensitivity Low noise

Reduced cost

The applications for MEMS are so far reaching that a multi-billion

dollar market is forecast. Key industry applications include

transportation, telecommunications and healthcare.

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Accelerometers

Micro Optical Electro Mechanical Systems(MOEMS)

Digital Mirror Devices (DMD) used in ProjectionDevices

Deformable mirrors

Optical Switches

Inkjet Print heads (Microfluidics)

Pressure Sensors

Seismic Activities - Thermal transfer

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Current Applications

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Micro-arrayed biosensors

Virus detection

Neuron probes (nerve damage/repair) Retina/Cochlear Implants

Micro Needles

ChemLab Micro Fluidic Pumps

- Insulin Pump (drug delivery)

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Biomedical

Current Applications, Continued

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Hand held detectors biological & chemicalmicrosensors

Chems Lab on a Chip (security applications)

DataStorage Systems

IBM Millipede storage system AFM tip writes data

bit by melting a depression into polymer mediaum andreads data by sensing depressions.

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Detection systems

Current Applications, Continued

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Nanotechnology

manipulation ofmatter at thenanometer scale.

Nanomaterials

Started with carbon.

Behavior depends onmorphology.

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carbon and carbon nanotube

NEMS and Nanotechnology

http://upload.wikimedia.org/wikipedia/commons/f/f8/Eight_Allotropes_of_Carbon.png

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Quantum dots

Nanowires Quantum films

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Quantum Dots.

NEMS and Nanotechnology,

Continued

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Electrostatic manipulation

Moving one electron or molecule at a time

Patterning

Dip Pen Lithography

Electron Beam Lithography

Nano Fabrication

NEMS and Nanotechnology,

Continued

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Cantilever Sensors

Mass Storage (IBM) Millipede chip Nanochip

Molecular Electronics Transistors Memory cells Nanowires Nanoswitches

Merging of technologies

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Cantilever sensors are essentially

MEMS cantilevers with chemical

arrays attached. The cantilevers,acting much like tuning forks,

have a natural frequency of

vibration which changes as more

mass is attached (nano function).

The change in frequency issensed by the MEMS device

indicating a measurable presence

in the system of particular reacting

compound.

Selective chemical

layer

Reacting compound

cantilever

Cantilever sensor

Merging of technologies

NEMS and Nanotechnology,

Continued

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Potential Positive Impacts Reduction of disease. Job opportunities in new fields.

Low-cost energy.

Cost reductions with improved efficiencies. Improved product and building materials. Transportation improvements

Potential Negative Impacts

Material toxicity Non-biodegradable materials. Unanticipated consequences.

Job losses due to increased manufacturing efficiencies.

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Impact of Miniaturization

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Fundamental and applied research

Engineering and technological developments

Low Cost Fabrication

Molecular manufacturing

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Challenges and Possibilities

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Gad-el-Hak, M. MEMS, Design and Fabrication,Second Edition. (2005)

Lyshevski, S., MEMS and NEMS, CRC Press LLC.(2002)

Maluf, N. and Williams, K., An Introduction toMicromechanical Systems Engineering, SecondEdition, Artechouse, Inc. (2004)

Microsytems, Same-Tec 2005 PreconferenceWorkshop, July 25 &26, 2005.

Taylor and Francis,MEMS Introductory Course,

Sandia National Laboratories, June 13-15, 2006. What is MEMS technology? MEMS and

Nanotechnology Clearinghouse.http://www.memsnet.org/mems/what-is.html.

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