MEMS

Towards smart community…

AKHIL GARG

• Micro - Small size, micro fabricated structures

• Electro - Electrical signal /control ( In / Out )

• Mechanical - Mechanical functionality ( In / Out )

• Systems - Structures, Devices, Systems Control

Accelerometer & Gyro Sensors

iMEMS ADXRS Angular Rate-Sensing Gyro

Hard Drive Magnetic Read/Write Heads

By incorporating MEMS actuation, the head can be positioned more quickly and to finer tolerances, this results in higher density data capability.

MEMS Fabrication

Surface Micro Machined Motor

HARMEMS

LIGA Fabrication Process

microstructures up to 1000 μm high.

Mass Storage - IBM

IBM’s “Millipede”100 Tera Bit per square inch!

CONCLUSIONMEMS would completely transform our lives and improve our comfort level tremendously

Thank You

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