Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL

8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL

1/19

MEMS Sensors for Smart Living:

ITRI Solutions

Chris Chen, ITRI


2/19

Outline

• MEMS Sensors for Smart Living – Sensors are Everywhere

– What MEMS Sensors are Most Required

– Smart Living Megatrend Herald Next Wave of MEMS

• MEMS Technologies in ITRI

– Total Solutions on MEMS

– ITRI’s Smart Sensors

– Roadmap toward Smart Living• Summary


3/19

MEMS Sensors for Smart Living


4/19

Sensors are Everywhere!

Power Management

Smart AppliancesHome Security

(IR Sensors)

Healthcare Anywhere

Consumer Electronics

Wearable DevicesAir Quality Monitoring

(Gas Sensors)

Entertainments Health Care Security Sports Fitness Others


5/19

What MEMS Sensors are Most Required?

Entertainments Health Care Security Sports Fitness Others

MEMS Sensors for Smart Living

Environment Motion Physiologic RF Others

Accelerometer

Gyroscope

Magnetometer

IMU (Inertial

Measurement Unit)

MEMS Microphone

Barometer (P)

IR Sensor (T)

Moisture Sensor

Gas Sensors, …

Pressure Sensor

Bio Sensors (ex.

HbO2, ECG,EEG, Glucose,

PPG etc.), …

FBAR

Oscillator

MEMS Switch

MEMS Varicap

IPD, …

Apparently, motion and environmental sensors play as the key

roles for smart living applications.


6/19

Smart Living Megatrend Herald Next Wave of MEMS

Sensors for M otion & Envirement

(Source: Yole developpement )


7/19(Source: Yole developpement )

Huge Market Opportunities on Smart Living:

IMU, MEMS Microphone and Pressure Sensor


8/19

Magnetometer

Low-res.

Acc.

3-axis

Gyro.

6-DoF

9 DoF/

10 DoF

High-res.

Acc.

New

Process

Develop.

WLP

TSV

CMOS

MEMS

Low Power

Mode

Sensor

HUB

Sensor

Fusion

Specific

Algorithms

Smaller Size, Lower Cost,Higher Performance

MoreSensors

More

Software

Sensor Fusion is Driving

Combo Sensors

Low-drift

Gyro.

10mm2

2011

2012

2014

4 x 4 x 0.9 mm3

Size mm2

15mm2

20mm2

3 x 4.5 x 0.95 mm3

2015

3.0 x 3.0 x1.0 mm3

2013

(6-DoF IMU Size)

2.0 x 2.0 x0.9 mm3

Inertial Combo will Dominate the Future Market!


9/19

MEMS Technologies in ITRI


10/19

Total Solutions on MEMS

Processes

&

Materials

Circuit Design

Softwares

&

Applications

Advanced Tech

MEMS Design

Package

&

Testing


11/19

ITRI’s Smart Sensors

Optical Devices

• Electrostatic Mirror

• Magnetic Mirror

RF Devices

• Variable Capacitor

• MEMS Oscillator

Fluidic Devices

• Gas Sensor

• Lab on a Chip

Inertial Sensors

• Low-g Accelerometer

• Medium-g Accelerometer

• High-Rate Gyroscope

• Medium-Rate Gyroscope

• Inertial Measurement Unit

MEMS Microphones

• Analog Microphone

• Digital Microphone

Pressure Sensors

• High Resolution Barometer

• 0.3-1.3 Barometer

• 0.5-10 Bar Pressure Sensor

Magnetic Sensors

• High Res. Compass

• Magnetometer

Fluidic

RF

Pressure

Inertial

Magnetic

Optical

Acoustic


12/19

X-axis Y-axis Z-axisNewton’s 2nd Law of Motion

Low-noise Accelerometer

Low-power Gyroscope

Capacitive E-compass

3-axis Parts Share Same Mechanical Structure

Low Off-axis Sensitivity & High Shock Survival

Compatible with Inertial MEMS Platform

Low Noise & Programmable Digital Calibration

Single-axis Dual-axis Tri-axis

Low Power Consumption (


13/19

Ultra-compact 6-DOF IMU

3-axis Gyro.

3-axis Acc.

Acc. & Gyro Hermetic Sealed in

a Same Cap

Electrical Isolation of Acc. & Gyro.

Analog / Digital Pulse / Digital

Data Output Options

Mechanical Decoupling of Acc. &

Gyro.

(Source: Internet)


14/19

x

yz

Gyroscope Accelerometer

Magnetometer

The World’s First

Single Chip 9-DOF IMU!

Single Chip Integrated 9-DOF IMU

Small Size, Low Power & Low Cost

One Chip Integration of 9-DOF Sensor

Lorentz Force Sensing Mechanism

for M-Sensor

All Capacitive Interfacing for 9-DOF

Sensor

Acc., Gyro. & M-Sensor Hermetic

Sealed in a Same Cap

Current

Direction

Sensing Electrode

Turning

Driving Electrode

B

3-Axis M-Sensor 3-Axis Acc.-Axis Gyro.

http://3.bp.blogspot.com/_zqFoq3qej2c/TA1jap_5FdI/AAAAAAABYiM/8Spo0DI2BfY/s1600/gyroscope.jpg


15/19

MEMS Microphone

Meas. Item Test Condition Specification

Freq. Response 100 ~ 10kHz 100 ~ 10kHz

Sensitivity@1kHz

(0dB=1V/Pa)-38+/- 3dB

SNR [A weight]

(Typical)

@1kHz

(0dB=1V/Pa)> 6 dB

THDAt 94dB SPL


16/19

- Gas Sensors

- MEMS Tactile Ar ray- PPG Sensor (Healthcare)

- H ighly Sensitive IR Array

Smart Sensors for the Future


17/19

Roadmap toward Smart Living

(Source: Internet)

MEMS Microphone (Acoustic)

Inertial Combo (Motion)

Barometer (Positioning)

Gas Sensors (Environment)

PPG Module (Healthcare)

IR Image Sensor (Safety)

Tactile Array (Service Robot)


18/19

Summary

Motion and environmental sensors look to play

as the key roles for smart living applications.

The three devices Inertial combo, MEMS

microphone and pressure sensor are with very

huge market opportunities currently.

Driven by the sensing needs of smart living, a

new wave of MEMS is coming

ITRI is committed to be the total-solution

provider for smart living, leading Taiwan’s

MEMS industry to win in this booming era.


19/19

Thank you for you r at tent ion !

Chris Chen

Office: +886 6 3847050

E-mail: [email protected]
mailto:[email protected]:[email protected]

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Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL