Micro Electro-Mechanical Systems (MEMS) Technology: A Key for New Industry Creation Gold Coast Regional Group Technical Presentation

VENUE

Griffith University Gold Coast

Campus, Building G39 (Science,

Engineering and Architecture) Room

1.17

DATE & TIME

Wednesday 28 October 2015 6:00pm

for 6:30pm start

TICKETS (incl. GST)

Members $10.00

Students $5.00

Non-members $40.00

(Includes finger food & beverages)

REGISTRATIONS CLOSE

Monday 26 October 2015

Parking Information:

Free parking is available in the

designated outdoor "general parking"

areas on the Gold Coast campus.

Please leave this event flyer on your

car's dashboard.

Micro Electro-Mechanical Systems (MEMS) Technology: A Key for New Industry Creation

by Dr. Dzung Dao, Griffith School of Engineering, Griffith University

MEMS (Micro Electro Mechanical

Systems) are miniaturized electro-

mechanical devices fabricated using the

microfabrication techniques, an extension

of semiconductor and LSI (Large Scale

Integration) fabrication technology.

MEMS, featured by movable 3-

dimensional microstructures, are able to

process not only electrical information but

also physical, chemical, biological

information, etc.

The critical physical dimensions of MEMS can vary from well

below one micrometer to several millimeters. The most

important MEMS devices are micro sensors and micro

actuators, such as temperature, pressure, inertial, biological,

chemical, magnetic fields, radiation sensors, etc. MEMS

technology has attracted a great deal of attention in worldwide

research institutions and industry to create new industry, such

as devices for automotive, portable/mobile devices, safety &

security, biomedical, harsh environments, and so on. In 2014,

MEMS sector represented an US$11.1 billion business for Si-

based devices, and MEMS industry is expected to exceed

US$20 billion by 2020 [Yole Developpement]. The vision of

MEMS whereby micro/nano sensors, micro/nano actuators and

microelectronics can be integrated onto a single microchip is

expected to be one of the most important technological

breakthroughs of the future. This will enable the development of

smart miniaturized products by augmenting the computational

ability of microelectronics with the perception and control

capabilities of micro sensors and micro actuators.

Micro Electro-Mechanical Systems (MEMS) Technology: A Key for New Industry Creation Gold Coast Regional Group Technical Presentation

This presentation will highlight MEMS technology, including our

recent research and development of various MEMS sensors,

actuators and its applications.

About the Speakers:

Dr. DAO received Bachelor’s degree in Informatics-Mechanical

Engineering and Master’s degree in Machinery Mechanics from

Hanoi University of Technology (HUT, Vietnam) in 1995 and

1997, respectively, and the Ph.D. degree in Micro Electro-

Mechanical Systems (MEMS) from Ritsumeikan University

(Japan) in 2003. He then served as a Postdoctoral Fellow from

2003 to 2006, a Lecturer from 2006 to 2007, and a Chair

Professor from 2007 to 2011 all at Ritsumeikan University. In

2011, Dr. Dao joined Griffith University as a Senior Lecturer in

the School of Engineering, Gold Coast Campus, where he has

been teaching in Mechatronics and Mechanical Engineering

disciplines. Dr. Dao has been working in the MEMS field for 15

years, and has published over 250 papers on scientific journals

and conference proceedings, and holds 15 patents. His current

research interests are the sensing effects in nanostructured

materials, MEMS sensors for harsh environments, micro

actuators, integrated MEMS/NEMS technology, and Robotics.

Dr Dao is a full member of the National Committee on

Mechatronics (Engineers Australia).