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Innovative Particle-Monitoring Technologies
Nano-particle analysis using dark laser beam sensor
In the Semicon industry with patterns down to the 10 nm range, nano-particles contamination affects yield. The detection of these particles down to 20 nm and below is critical for the process.
The core technology of PML is based upon the use of a structured dark laser beam which contains a dark line where the light intensity is zero. This structured dark laser beam allows us to mitigate the diffraction limit imposed by the wavelength of the illuminating light, which makes it impossible to detect single particles smaller than this wavelength.
A nano-particle analyzer extending into the deep nanometer region is presented
The “Individual Particle - Sensing Approach” (IPSA™)
Tel: +1-780-378-2862 Cell: +1-780-680-2930 e-mail: [email protected] website: www.anms.ca
Meir Teichner & Joseph Shamir
Signal classification for different particles. The numbers beside the “c” indicates the number of events.
The Need
The Patented Technology
Particle classification20 nano -particle detection
Concluding remarksDark beam illumination was found useful for high resolution particle detection and sizing.Single particle detection is superior to ensemble analysis in terms of resolution and analysis of poly-disperse samples.The ability of the technology to detect 20 nano particles was demonstratedSuitable for in-line operation.
Process flow
Measurement cell
detectorParticle flow
L E M B
C O P
D1
D3
D2
The Solution
Alberta Nano-Monitoring Systems Ltd.
