Nanotechnology Today & Tomorrow

promise of broad societal benefit from pursuing nanotechnology R&D, including an anticipation of $1 trillion per year by 2015 of products where nanotechnology plays a key role, which would require 2 million workers with nanotechnology-related skills. .....the rate of market increase is expected .... a 25% increase per year .... estimate that by 2020, there will be about $3 trillion in products that incorporate nanotechnology as a key performance component. The nanotechnology markets and related jobs are expected to double each three years.

Mihail Roco 9-30-10

Center for Nanotechnology Education and Utilization

•Home of the Pa Nanofabrication Manufacturing Technology Partnership

•National NSF Center for Nanotechnology Applications and Career Knowledge (NACK) since September 2008

The Commonwealth`s Land Grant institution sharing its World-class Expertise and Facilities to create a Nanotechnology Workforce in PA. Applying the Morrill Act to 21st century technology and economics

A joint effort among Pennsylvania (PA) post-secondary institutions, industry, and the State with the mission of developing a PA nanotechnology workforce and of incorporating nanotechnology into PA secondary education, post-secondary education, and industry.

What is the Pennsylvania NMT Partnership?

• Develop a workforce for existing and emerging micro- and nanotechnology-based PA industries

• Bring the high-paying jobs of nanotechnology to Pennsylvanians

• Encourage the use of nanotechnology by PA industry

• Create a nanotechnology-knowledgeable PA citizenry

PA NMT Overarching Goals

The Pennsylvania Nanofabrication Manufacturing Technology(NMT) Partnership

“Hands - On” Capstone Semester @ PSU

PA Associate & Baccalaureate Students Grads to local PA

Industry

Semester long - 18 credit hands-on experience offered at Penn State Integral part of the 37 associate and 21 baccalaureate degree programs at partner institutions across PA Covers broad applications of micro- and nanotechnology Cost effective means of bringing nanotechnology training to every corner of Pennsylvania Student pays their home school tuition and partial room and board

remainder of the true cost is covered by the PA DCED 626 Capstone Semester graduates to date 99 PA Institutions have hired Capstone grads for micro- and nanotechnology jobs 1132 Educators & Industry personnel have completed nanotechnology workshops

A National Model for Nanotechnology Education

Basic Nanotechnology EHS AwarenessBasic Nanotechnology EHS Awareness Basics of Chemical and Material Properties—Role of ScaleBasics of Chemical and Material Properties—Role of Scale Chemical and Materials Handling, Storage, and DisposalChemical and Materials Handling, Storage, and Disposal Nanotechnology Health, Safety, and Environmental issuesNanotechnology Health, Safety, and Environmental issues

Nanotechnology Equipment and Processing Foundation SkillsNanotechnology Equipment and Processing Foundation Skills Chemical Hoods and Glove Boxes: Use and MaintenanceChemical Hoods and Glove Boxes: Use and Maintenance Cleanrooms: Use and MaintenanceCleanrooms: Use and Maintenance Pumps, Flow Control Systems, Scrubbers, Sensors: Use Pumps, Flow Control Systems, Scrubbers, Sensors: Use

and Maintenanceand Maintenance Vacuum Systems: Use and MaintenanceVacuum Systems: Use and Maintenance Plasma Generating Systems: Use and MaintenancePlasma Generating Systems: Use and Maintenance Furnaces, Ovens, and Rapid Thermal Annealing Equipment: Furnaces, Ovens, and Rapid Thermal Annealing Equipment:

Use and MaintenanceUse and Maintenance Chemical Facilities and MaintenanceChemical Facilities and Maintenance Contamination ControlContamination Control Process IntegrationProcess Integration Introduction to Statistical Process ControlIntroduction to Statistical Process Control

NanotechnologyNanotechnology Patterning: Foundation SkillsPatterning: Foundation Skills Optical, e-beam, and Ion Beam LithographyOptical, e-beam, and Ion Beam Lithography Stamping and Imprinting LithographyStamping and Imprinting Lithography Block co-polymer and SAM techniques Block co-polymer and SAM techniques

Nanotechnology Fabrication Skills Nanotechnology Fabrication Skills Top-down FabricationTop-down Fabrication

Reactive Ion, Sputter, and Wet EtchingReactive Ion, Sputter, and Wet Etching Chemical Vapor and Physical Vapor Deposition SystemsChemical Vapor and Physical Vapor Deposition Systems Ion Beam, Plasma, and Chemical Materials Modification Ion Beam, Plasma, and Chemical Materials Modification Nanoparticles: Etching and Grinding Approaches Nanoparticles: Etching and Grinding Approaches

Bottom-up FabricationBottom-up Fabrication Chemical, Physical, and Biological Self-AssemblyChemical, Physical, and Biological Self-Assembly Nanoparticles: Colloidal ChemistryNanoparticles: Colloidal Chemistry Nanoparticles: Plasma ApproachesNanoparticles: Plasma Approaches Nanoparticles: Chemical Vapor Deposition Approaches Nanoparticles: Chemical Vapor Deposition Approaches

Nanotechnology Characterization SkillsNanotechnology Characterization Skills Optical MicroscopyOptical Microscopy Scanning Probe MicroscopyScanning Probe Microscopy

Atomic Force MicroscopyAtomic Force Microscopy Electron Microscopy Electron Microscopy

Scanning Electron Microscopy (SEM and FE-SEM)Scanning Electron Microscopy (SEM and FE-SEM) Transmission Electron Microscopy (TEM and FE-TEM) Transmission Electron Microscopy (TEM and FE-TEM)

Chemical Characterization Chemical Characterization X-ray (EDS)X-ray (EDS) Secondary Ion Mass Spectroscopy Secondary Ion Mass Spectroscopy Auger Electron Spectroscopy Auger Electron Spectroscopy Fourier Transform Infrared SpectroscopyFourier Transform Infrared Spectroscopy

Electrical Characterization Electrical Characterization Current-Voltage MeasurementsCurrent-Voltage Measurements Capacitance MeasurementsCapacitance Measurements Opto-electronic Device MeasurementsOpto-electronic Device Measurements

Physical Characterization Physical Characterization SpectrophotometerSpectrophotometer ProfilometerProfilometer X-ray DiffractionX-ray Diffraction

Nanotechnology Professional SkillsNanotechnology Professional Skills Team BuildingTeam Building Problem SolvingProblem Solving Project Organization and PlanningProject Organization and Planning Research SkillsResearch Skills Assessing Cost of OwnershipAssessing Cost of Ownership Presentation SkillsPresentation Skills Technical Reporting and DocumentationTechnical Reporting and Documentation Handling and Generating Intellectual PropertyHandling and Generating Intellectual Property

Summary of Skills Taught in the PA Capstone Semester

Diversity & Growth of Disciplines Housing Degree Programs in Nanotechnology

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2001 2005 Jul-08

Technology Mgmt

Mathematics

Biology

Chemistry

Physics

NanoScience / AppliedScience

Manufacturing / IndustrialTechnology

Electronics / Enginneering

PA Institutions That Have Hired NMT Capstone Semester Graduates For Micro- and Nanotechnology Jobs

II-VI CorporationAccellentAdhesives ResearchAdvanced Acoustic ConceptsAdvanced Gas TechnologiesAdvanced Powder Products AdvantechAgereAlcoaAllied ElectronicsAlden ProductsAMAX MineralsAmedeoApogee PhotonicsArrow InternationalAvail TechnologiesBioElectroSpecB. BraunCabotCarbon NanoProbesChemcutCorrege SensorsCosmos TechnologiesCrystalplexCyopticsDana CorporationDoucette IndustriesDrexel UniversityDRS Laurel TechnologiesEast Penn ManufacturingEastman Chemical CompanyEx OneFairchild Semiconductor

PPGPPLProbes UnlimitedProconexPSU Applied Research LabPSU DuboisPSU Electro Optics CenterPSU CNEUQorTekRhetechRohm and Haas Ross TechnologiesRJ LeeSchroeder IndustriesScientific SystemsSeagate TechnologiesSI InternationalSolar InnovatioinsSolaritySpectrum TechnologiesStrategic PolymersStructure ProbesSynthes Textron LycomingThermo Electric PATranseneTyco Electronics University of PittsburghVectron InternationalWestern DigitalWestfalia TechnologiesWestmoreland Mech. Testing & ResearchXactix

Fincor AutomationFirst EnergyF.S. ElliottGlaxoSmithKlineGTSHale ProductsHershey Medical CenterIlluminexInfineraIQEJohnson & JohnsonJohnson MattheyJudson Technologies Keystone Communications Keystone EngineeringKongsberg DefenseKurt J. LeskerKyowa AmericaLCM TechnologiesLehighton ElectronicsLockheed MartinLucent TechnologiesLutron ElectronicsMaxima TechnologiesMeadow Burke ProductsMembrane AssaysMerckNanoHorizonsNorth American HoganasOptelliosPhilips Medical SystemsPhilips RespironicsPlextronics

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PA NMT Results

PA Companies who have hired Capstone Grads

PA NMT CONTACTS

Stephen J. FonashDirector112 Lubert Building814-865-4931sfonash@psu.edu

Osama AwadelkarimAssociate Director407D EES Building814-863-7697ooaesm@engr.psu.edu

Terry KuzmaNMT Instructor114 Lubert Building814-863-5484txk107@psu.edu

Dave JohnsonLaboratory Coordinator 114 Lubert Building814-865-3019

duj123@psu.edu

Sebastien MaederOutreach / Research Associate114 Lubert Building814-867-2948abm123@psu.edu

Lisa DaubAdministrative Assistant112 Lubert Building814-865-9635ldaub@engr.psu.edu

Susan BargerAdministrative Support Assistant112 Lubert Building814-863-2955sbarger@engr.psu.edu

Robert EhrmannDirector of Education & Outreach112 Lubert Building814-865-7558rke2@psu.edu

Bringing Nanotechnology to Education & Industry! www.nano4me.org/PaNMT

The Pennsylvania State University Nanofabrication Laboratory ,An NSF National Nanotechnology Infrastructure Network Site

Website: http://www.nnin.org/nnin_psu.html Director of Operations: William M. Mansfield (wmm14@psu.edu)

our process and characterization engineers and NNIN technical liaisons

Introduction: The Penn State Nanofab, located in the MRI building at Innovation Park, and soon moving to a new facility in the Millennium Science Complex on the University Park campus, is a full service micro- and nanofabrication user facility supporting all aspects of ‘top-down’ and ‘bottom up’ fabrication. The site provides users with access to facilities that enable fabrication of a wide range of electrical, optical, and micromechanical devices to support fundamental and applied research in diverse fields spanning electronics to medicine.CapabilitiesLithography: Electron beam, Nanoimprint, Optical Step and Repeat, Optical contact, Optical contact with backside IR alignment.

Deposition/growth: Atomic Layer Deposition, Thermal and e-gun Evaporation with ion assist, Low pressure chemical vapor deposition (CVD), Plasma enhanced CVD, Standard and high temperature sputtering, Parylene polymer depositionEtching: Reactive Ion Etching, Magnetically enhanced RIE, Inductively coupled plasma, Wet chemical etching, Focused ion beam etching

Characterization: SEM, FESEM, four-point probe, optical microscopy,I-V/C-V,FTIR, probe station, ellipsometry, profilometry

Substrate, deposited and processed materials: Si, poly and amorphous doped and undoped Si, Ge, SiO2, SixNy, low stress SixNy, porous Si, AlGaAs, InGaAsP, PMN-PT, PZT, LiNbO3, sapphire, glass, quartz, PDMS, spin-on dielectrics and others.

Millennium Science ComplexUser Interaction, Fees:Company employees trained to work in cleanroom or remote use of contractors or Nanofab staff. Daily cleanroom access fee with per run and hourly equipment charges. Intellectual Property:All IP developed by the user belongs to the user. All IP developed by the user and staff is jointly owned with PSU.Training:Extensive training and education on equipment operation and processing is available to any user if needed.

Contact Information:Jaime ReishAdministrative Assistant 188 MRI(814) 865-7348jdr15@psu.edu