National Institute for Research and Development

in Microtechnologies

IMT-Bucharest(www.imt.ro)

Contact: Phone: +40 21 269 0770; Fax: + 40 21 269 0772

Erou Iancu Nicolae 126A St., 077190, Voluntari- Ilfov, Romania

IMT- the Institute of Microtechnology was founded in 1993, being the first

institute with this profile in Eastern Europe. Since 1994, microtechnologies

(i.e. microsystem technologies, or MST) have been included in EU

programmes

-since 1996 became National Institute for Research and Development in

Microtechnologies - IMT Bucharest (meging with ICCE)

● Mission: Integrating R&D with education and training and with support

for industry (services, technology transfer); networking at national and

international level (including interaction with European Technological

Platforms), innovation, in the field of micro-nanotechnologies (RF- MEMS,

photonics, sensors, bio-nano-info technologies, CNT and graphene based sensors and

nanodevices)

Supervised by the National Authority for Scientific Research (ANCS), Ministry

of Education, Research, Youth and Sport;

Acting autonomously, like a scientific company; Having the status of a public

institution

Employers: 181 Technical and scientific personnel: 110

Researchers: 74 (52% PhDs, 20% PhD students etc.)

IMT has become in the last years an attraction for valuable

researchers through the new infrastructures, the multitude of

European projects and opening of new positions.

Some figures:

about 50% of researchers and engineers has a PhD

► this figure has doubled in the last year due to both existing and

new personnel (hired in the last interval)

► 8 from the 23 new doctors (i.e. 35% of total) obtained their Ph.D.

in Universities abroad (Europe, U.S.A., Singapore and Japan)

► the new 23 doctors have a different background: engineering

(electronics, automation, electrical, mechanical), physics, chemistry,

mathematics.

► the average age of this 23 doctors in IMT is only 37 years

2005: Starting the investments in the first clean room;

2006-2009: about 7 millions of Euro in equipments only;2010-2013: a new campaign of investments, based mainly on

structural funding

a new clean room (200 sqm, operational since September 2008);

inauguration of the experimental facility IMT- MINAFAB, an open

Centre of micro- and nanofabrication (April 2009):

-Interdisciplinary research;

-Education and training (M.Sc., Ph.D., postdoctoral etc.);

-Access for companies.

Starting with 2009: Accommodating a new generation of scientists- young

people getting their PhD abroad

► Extending cooperation with industry

- In European consortia (especially within ENIAC-JU, FP7): Thales TRT, France;

NXP (Philips)

► Partnerships with Infineon Technologies Romania and Honeywell

Romania

IMT MINAFAB Infrastructure: (http://www.imt.ro/MINAFAB/)- ISO9001:2008

is a unique experimental facility in micro- and nanotechnologies, open to:

multidisciplinary research, education and industry.

This infrastructure has a unique position in this region of Europe, due to the

following features:

integrates “micro” with “nano” in a complete facility, providing tools

from computer-aided simulation and design, to wafer fabrication and

reliability testing.

is an “open” facility, following the best known models of interaction in

the so-called “knowledge triangle”.

Organization:

Department for scientific and technological research

4 centers, grouping 10 R&D laboratories

MIMOMEMS- European Research Centre of Excellence “Micro- and nanosystems

for radiofrequency and photonics”

► CNT-IMT “Centre of Nanotechnologies” (under the aegis of the Romanian

Academy)

► CINTECH “Research centre for integration of technologies” (micro-nano-

biotechnologies)

► CENASIC R&D centre for nanotechnologies and carbon –based nanomaterials”

• Main facilities:

–A class 1000 clean room (220 sqm) for the mask shop and the most demanding technological processes (in use since September 2008);

–A class 100,000 clean room, the so called “Grey Area” (200 sqm), mostly for the characterization equipments (in use since September 2008);

–A class 10,000 clean room (105 sqm) for thin layer deposition by CVD techniques, DRIE, RTP etc.

Clean room,

class 1,000

Grey Area: Microphysical characterisation and nanoscale structuring

Infrastructure

Clean room: Micro and nanolithography; Nanoprinting• Mask lithography system - DWL 66 fs, Heidelberg Instruments Mikrotechnik

• Electron Beam Lithography and nanoengineering workstation - e_Line, Raith

• Pattern Generator - Elphy Plus, Raith

• Double Side Mask Aligner - MA6/BA6, Suss MicroTec

• Dip Pen Nanolithography Writer - NSCRIPTOR, NanoInk

Technological Processes• Electron Beam Evaporation an DC sputtering system - AUTO 500, BOC Edwards

• PECVD - LPX-CVD, with LDS module, STS

• LPCVD - LC100, AnnealSys

• RIE Plasma Etcher - Etchlab, SENTECH Instruments

• Rapid thermal processing/annealing - AS-One, AnnealSys

• Micro-Nano Plotter - OmniGrid, Genomic Solution

• CharacterizationVector Network Analyzer (VNA) up to 110 GHz and on wafer characterization system

Spectrum analyzer up to110GHz

Frequency generator synthesiser up to 110GHz

Semiconductor Characterization System, Wafer Probing Station - 4200-SCS/Keithley; Suss

MicroTec

Field Emission Gun Scanning Electron Microscope (FEG-SEM) - Nova NanoSEM, FEI

Company

XRD, WLI, SNOM, SPM, High Resolution Raman Spectrometer, Nanoindenter

► Hardware facilities

Dual IBM 3750 Server, 8 quad-core Intel Xeon MP 2.93 GHz processors, 196 GByte

RAM and 1 TByte HDD + 876 GByte external storage; • Computer network for training

►Software facilities: for MEMS, Optical and Microwave devices and

circuitsCOVENTORWARE 2011: Computer aided design and simulation of MEMS and

microfluidic components used in microsystems for bio-medical applications:

ANSYS Multiphysics 12.1: provides high-fidelity engineering analysis tools

that enable the accurate simulation of complex coupled-physics behavior.

Combine industry-leading solver technology for all physics disciplines -

structural mechanics, heat transfer, fluid flow and electromagnetics - with

flexible coupled-physics simulation methods, and parallel scalability.

COMSOL Multiphysics 4.2 (enabling parallel computation)- a powerful

interactive environment for modeling and solving all kinds of scientific and

engineering problems based on partial differential equations (PDEs)

Opti FDTD 8.1, Opti-HS, OptiBPM 9.0, OptiGrating, Optiwave,

IE3D, FIDELITY from Zeland, CST

IMT and European Cooperation

IMT has an active participation in European Technological Platforms:

- ENIAC (Nanoelectronics)

- Nanomedicine, EPoSS (Smart Integrated Systems)

- MINAM (Micro- And nanotechnologies for conventional industries).

IMT was coordinated the MEMSWAVE project (1997-2000), the

first European project coordinated by a country outside EU (at

this time), which was nominated for the Descartes Prize (the

best European R&D project).

IMT was involve in 15 FP6 European projects

► IMT was and is involved in 11 FP7 projects

► IMT is involved 4 ENIAC (nanaoelectronics) projects

► IMT was and is involved in 5 MNT ERA-NET projects and

1 COST project

► IMT is involved in 3 Structural Funds projects

started in 2011

started projects

related FP 7 projects

Other International Partnerships

• A common European virtual lab LEA in RF- MEMS, affiliated to CNRS, was created in 2009, including:

• LAAS/CNRS, Toulouse, France;

• IMT-Bucharest, Romania

• FORTH, Heraklion, Greece

This lab is the second common CNRS, French- Romanian lab (the first one being created in the field of mathematics).

• Apart of cooperation with dozens of organizations from Europe in EU projectsIMT- Bucharest was and is involved in a great number of bilateral European projects (especially with Italy, France, Belgium, Slovakia), as well

• Outside Europe, IMT- Bucharest has also cooperation with organizations from:

– Japan

– Korea

– Singapore;

– South – Africa.

Cooperations with multinational companies, from Romania

Honeywell Romania

Agreement of coperation, IMT offering scientific service

Access to technology and host of equipments

► INFINEON Technologies Romania

Partners in ENIAC project : MOTORBRAIN: Nanoelectronics for Electric

Vehicle Intelligent Failsafe Drive Train;

Coordinator: Infineon AG, Germany - IMT role: partner

Organization of common actions in Romania as:

- NanoElRei Summit: „NanoElectronics in Romania: Research-education-

industry 2010, 2011

- Workshop New trends in Automotive electronics and semiconductor”

Workshop on Automotive Electronics” - satellite event to CAS 2010

- Co-organizer of the European Semiconductor Device Research Conference

(EUROPEAN SOLID–STATE DEVICE RESEARCH CONFERENCE – ESSDERC)

and the European Conference on Semiconductor Circuits (EUROPEAN SOLID–

STATE CIRCUITS CONFERENCE – ESSCIRC) 2013

The experience of IMT in cooperation with industrial companies

in European projects

Thales Research and Technology (TRT), Paris in

- FP7: SMARTPOWER, NANOTECH,

- ENIAC: MERCURE, NANOCOM,

► NXP Semiconductor Netherlands BV (Philips) in: ENIAC:SE2A

► IMST GmbH, Germany in: FP7 MEMS4MMIC

In the period 27 Feb 2012- 2 Feb 2012, two FP7 meetings are

organized at IMT – Bucharest

SMART POWER –IP, coordinator Thales TRT, Paris, 15 partners

MEMS4MMIC- STREP coordonator IMST, Germany, 8 partners

The research laboratories of IMT-Bucharest are involved in joint research with international

and national partners, including companies, based on a multidisciplinary approach,

promoting the convergence of micro-nano-bio- info technologies. Main topics:

MEMS based microsensors and actuators for bio-medical, environmental applications and

robotics: pressure sensors, accelerometers, microgrippers

► RF-MEMS devices and circuits: design, modelling and manufacturing of dielectric

membrane supported inductors, capacitors, filters and antennae based on silicon and GaAs

micromachining; micromachined millimetre and sub millimetre wave receiver modules, SAW

interdigitated traducers

► Photonic devices and MOEMS (waveguides, optical couplers, µring filters and resonators;

grating-based microstructures, tuneable interferometers based on movable micromirrors,

optical sensors), photonic circuits for optical interconnections

The research laboratories of IMT-Bucharest are also developing:

►CNT and graphen based micro-nanostructures for sensing and interconnections

►microfluidic devices

►biochips for biological materials investigation and detection (proteins, DNA, enzymes) on

various substrates (silicon, glass, polymers), microarrays, biosensors

► silicon nanoelectrode arrays, porous silicon layers (El, PL and bio-active properties); field

emission nanostructures;

► magnetic nanostructures

Research topics and results

GaN SAW structure with digits and

interdigits 300 nm wide resonating at a

frequency close to 4 GHz

MSM photodetector based

on 200 nm wide electrodes

(digits and interdigits)

Experimental PCs optical

waveguide divisor

configuration integrtated

with an optical waveguide,

using EBL nanolithography

Ground speed sensor at 77 GHz

EXAMPLESBiosensors

SAW structure on GaN having digits and

interdigits 150 nm wide, patterned in IMT on the

“E-Beam” equipment

7 GHz resonance on GaN

IMT- FORTH 2009

Optical image of the

test structure

SAW devices for GHz applications with

nanolithographic IDTs

EXAMPLES

Thank you for your attention !