7

New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes

Embed Size (px)

Citation preview

Page 1: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 2: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 3: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 4: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 5: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 6: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 7: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes