Nikon Industrial Instruments and Application

8/12/2019 Nikon Industrial Instruments and Application

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Instruments Company

Nikon Industrial Instruments and Applications

CONFIDENTIAL

Nikon Corporation Instruments Company

November 2013


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NIKON CORPORATION

Instruments CompanyPrologue(1)

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

CONFIDENTIAL

Camera is not the whole product of Nikon

Prologue(2)


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NIKON CORPORATION

Instruments Company

CONFIDENTIAL

Nikon contributes to the advancement of society

on the basis ofOptical and Precise Technology

Prologue(3)


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NIKON CORPORATION

Instruments Company

Nikon Industrial Instruments and applications

1. Introduction of Nikon Corporation

2. Industrial Instruments business

3. Microscope lineup for the industrial field and

application

4. Measuring Instruments lineup and application

CONFIDENTIAL

Contents


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Instruments Company

1. Introduction of Nikon Corporation

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

CONFIDENTIAL

Nikon contributes to the advancement of society

on the basis ofOptical and Precise Technology

Introduction of Nikon Corporation(1)


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NIKON CORPORATION

Instruments Company

CONFIDENTIAL

Optical and PreciseTechnology

Imaging business

Instruments

business

Precision Equipment

business



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NIKON CORPORATION

Instruments Company

CONFIDENTIAL


Imaging business

Instruments

Company

Precision Equipment

Company

Digital CameraFilm Camera

Interchangeable lens

SpeedlightFilm Scanner

Photographic accessories

Software



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NIKON CORPORATION

Instruments Company

CONFIDENTIAL


Imaging Company

Instruments

Company

Precision Equipment

business

IC Stepper and Scanner

LCD Stepper and Scanner



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NIKON CORPORATION

Instruments Company

CONFIDENTIAL


Imaging business

Instruments

businessPrecision Equipmentbusiness

Industrial MicroscopeStereoscopic Microscope

Digital Microscope

Measuring Instruments3D Metrology Solution

SEMI Inspection Equipment

Biological Microscope



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NIKON CORPORATION

Instruments Company

Others

CONFIDENTIAL


Binoculars Surveying Instruments Glasses

Photonics materials Customized telescopes


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Instruments Company

2. Industrial Instruments business

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

CONFIDENTIAL

Industrial Instruments

Microscopes

(for Inspection / Analysis)

Measuring Instruments

for Measurement

Stereoscopic Microscope

- SMZ series

Industrial Microscope

-L/LV series

-MA series

Digital Microscope

-ShuttlePix P-400R

Profile Projector

-V-24B, V-20B, V-12B series

Measuring Microscope-MM series

CNC Video Measuring System

-VMA, VMR series, VMZ series

Digimicro

Autocollimator

Industrial Instruments business(1)

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

CONFIDENTIAL


Microscopes

(for Inspection / Analysis)

Measuring Instruments

for Measurement


- SMZ series


-L/LV series

-MA series

Digital Microscope

-ShuttlePix P-400R

Profile Projector

-V-24B, V-20B, V-12B series



-VMA, VMR series

Digimicro

Autocollimator

Industrial Instruments business(1)

CONFIDENTIAL


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Instruments Company

3.Microscopes lineup and applications

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

20,000X

10X

15,000X

10,000X

1,000X

100X

Industrial

Microscope

L/LV series

MA seriesStereoscopicMicroscope

SMZ series

Magnification

Microscopes lineup and Applications

Digital

MicroscopeSuttlePixP-400R

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

20,000X

10X

15,000X

10,000X

1,000X

100X

Industrial

Microscope

L/LV series

MA series

Magnification

Stereoscopic Microscope(1)

Digital


StereoscopicMicroscope

SMZ series

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

SMZ series Stereoscopic Microscope

Stereoscopic Optical Image

Long Working Distance Wide Field of View

Working

Distance

Good Operability


CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

Wide field of View

Stereoscopic Optical Image

Image by SMZ800

(Zoom: 1X)

Image by LV150

(Obj Mag: 5X)

Image by SMZ800(Zoom: 1X)


Image by LV150(Obj Mag: 5X)

Sample: PCB

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

Long Working Distance

Watch Assembly

Soldering


Working

Distance

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

Wire Bonding System

PCB Inspection Equipment

Embedded Use


CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

Application Appearance Check / Inspection

Electronic Components, Precision Mold, PCB,Metallic Components, Printing condition Very wide range!!


CONFIDENTIAL


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NIKON CORPORATION

Instruments CompanyStereoscopic Microscope(7)

Working Distance (mm)

Zoom magnification

0.63x15.75x

1.06.3X

0.88.0X

0.675.0X

0.675.0X

0.83.5X

0.73.0X

0 5.0X 10.0X

0.84.0X

SMZ800

SMZ1000

SMZ445/460

SMZ-2

SMZ745 SMZ745T

115

100

78

77.5

70

60SMZ18/25

25.0XCONFIDENTIAL


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NIKON CORPORATION

Instruments Company

20,000X

10X

15,000X

10,000X

1,000X

100X

Magnification

Industrial Microscope(1)

Digital


Stereoscopic

Microscope

SMZ series

Industrial

Microscope

L/LV seriesMA series

CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

L / LV series Upright Industrial Microscope

MA seriesInverted Industrial Microscope

Various Observation Method Color Image in High Magnification

Extend your vision


CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

Bright Field

Dark Field

Simple POL

DIC

Fluorescence

Various Observation Methods


CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

Bright FieldThe most standard observation method

The difference of the reflection indices and/or

colors of the lighted object as contrast


Circuit Pattern ChipCONFIDENTIAL


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NIKON CORPORATION

Instruments Company

Bright field Dark field

Dark FieldEnable to detect small particles, scratches, and etc.


CONFIDENTIAL


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NIKON CORPORATION

Instruments Company

Bright field POL observation POL observation

plate

Observing rocks

Simple POL Changing the specimens color depending on itspolarization characteristic


CONFIDENTIAL

I d i l Mi (7)


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NIKON CORPORATION

Instruments Company

Bright field DIC

DICPossible to observe the slightly gapped surfacenot to detect by bright field


CONFIDENTIAL

I d t i l Mi (8)


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NIKON CORPORATION

Instruments Company

Bright field

Through hole of a print circuit board

Fluorescence (B-2A)

FluorescencePossible to detect the defects or colors depending on thefluorescence characteristics of the samples.


CONFIDENTIAL

I d t i l Mi (9)


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NIKON CORPORATION

Instruments Company

Bright field Fluorescence (BV-2A)

Possible to recognize the color (RGB) by fluorescence

OLED


CONFIDENTIAL

NIKON CORPORATIONI d t i l Mi (10)


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NIKON CORPORATION

Instruments Company

Color Image in High Magnification

Obj Mag: 5X Obj Mag: 10X Obj Mag: 20X

Obj Mag: 50X Obj Mag: 100X


CONFIDENTIAL

NIKON CORPORATIONIndustrial Microscope(11)


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NIKON CORPORATION

Instruments Company

Application Appearance Inspection / Defects Analysis

Electronic Components, Semiconductor, FPD, PCB.

Metallic Components, Rocks, Mold, Ceramic


CONFIDENTIAL

NIKON CORPORATIONIndustrial Microscope(11)


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NIKON CORPORATION

Instruments Company

BF,

Simple POLEPI170x230mmInvertedCFI60-2MA100

BF, DF, DIC,Simple POL

EPI50x50mmInvertedCFI60-2MA200

BF, DF, DIC,

Simple POL, FLEPI & DIA150x100mmUprightCFI60-2LV100ND

BF, DF, DIC,

Simple POL, FLEPI150x150mmUprightCFI60-2LV150N(A)

BF, DF, DIC,

Simple POL, FLEPI & DIA200x200mmUprightCFI60-2L200ND

BF, DF, DIC,

Simple POLEPI200x200mmUprightCFI60-2L200N

BF, DF, DIC,

Simple POLEPI & DIA300x300mmUprightCFI60-2L300D

BF, DF, DIC,

Simple POLEPI300x300mmUprightCFI60-2L300

ObservationMethod

IlluminationStage size(Max)

Upright /Inverted

ObjectiveLens


CONFIDENTIAL

NIKON CORPORATIONDigital Sight series


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NIKON CORPORATION

Instruments CompanyDigital Sight series

Color Camera Head DS-Vi1 Color Camera Head DS-Fi2

Control Unit DS-U3 Control Unit DS-L3CONFIDENTIAL

NIKON CORPORATIONDigital Microscope Shuttlepix (1)


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Instruments Company

20,000X

10X

15,000X

10,000X

1,000X

100X

Industrial

Microscope

L/LV series

MA series

Stereoscopic

Microscope

SMZ series

Magnification

Digital Microscope Shuttlepix (1)

Digital

Microscope

SuttlePixP-400R

CONFIDENTIAL

NIKON CORPORATIONDigital Microscope Shuttlepix (2)


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Instruments Company

Shuttlepix P-400R Digital Microscope

Portability (Anytime, Anywhere)

Easy to use

Digital Microscope Shuttlepix (2)

Motorized stand set Handheld set

CONFIDENTIAL


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NIKON CORPORATION

Instruments CompanySummary of Microscope(2)


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Instruments Company

20,000X

10X

15,000X

10,000X

1,000X

100X

Industrial

Microscope

L/LV series

MA series

Stereoscopic

Microscope

SMZ series

Magnification

Summary of Microscope(2)

Digital

Microscope

SuttlePixP-400R

We can provide instruments to meet

your demands for inspection and analysis

CONFIDENTIAL


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4. Measuring Instruments lineup

and applications

CONFIDENTIAL

NIKON CORPORATION

Instruments CompanyMeasuring Instruments and Applications(1)


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Instruments Company

CONFIDENTIAL


Industrial Microscopes(for Inspection / Analysis)

Measuring Instrumentsfor Measurement


- SMZ series


-L/LV series

-MA series

Profile Projector

-V24B, V20B, V12B series



-VMA, VMR series

Digimicro

Autocollimator

Measuring Instruments and Applications(1)

NIKON CORPORATION

Instruments Company



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p y

CONFIDENTIAL


Industrial Microscopes(for Inspection / Analysis)

Measuring Instrumentsfor Measurement


- SMZ series


-L/LV series

-MA series

Table Top SEM

-Neoscope

Profile Projector

-V24B, V20B, V12B series



-VMA, VMR series

Digimicro

Autocollimator

DP-E1

E-MAX

Data Processing System


NIKON CORPORATION



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Use for

Length / angle measurement

Tolerance judgment

Manufacturer for

Electronics, Automotive, Machinery, Metal,Fiber, Steel, Mold

Gear Connector


CONFIDENTIAL

NIKON CORPORATION



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Flexible PCB IC lead frame

Mold

Precision MoldMold

easu g st u e ts a d pp cat o s( )

CONFIDENTIAL

NIKON CORPORATION



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Accuracy

Dimension

1um

10um

100um

1D 2D 3D

CaliperMicro Meter

Profile Projector

Video

Measuring

System

DigimicroDigimicro

MeasuringMicroscope

g pp ( )

CONFIDENTIAL

NIKON CORPORATION



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Accuracy

Dimension

1um

10um

100um

1D 2D 3D

CaliperMicro Meter

Profile Projector

Video

Measuring

System

DigimicroDigimicro

MeasuringMicroscope

Manual Auto

g pp ( )

CONFIDENTIAL

NIKON CORPORATION

Instruments CompanyDigimicro(1)


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Accuracy

Dimension

1um

10um

100um

1D 2D 3D

CaliperMicro Meter

Profile Projector

Video

Measuring

System

DigimicroDigimicro

MeasuringMicroscope

g ( )

CONFIDENTIAL

NIKON CORPORATION



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MF-1001, MF-501, MH-15M Digimicro

1 Dimension

Height / Depth of Samples Higher Accuracy

g ( )

CONFIDENTIAL

NIKON CORPORATION



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Digimicro

1 Dimension Height / Depth of the Samples Higher Accuracy

Measure

the Height

CONFIDENTIAL

NIKON CORPORATION

Instruments CompanyProfile Projector(1)


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CaliperMicro Meter

Profile Projector

Video

Measuring

System

DigimicroDigimicro

Measuring

Microscope

Accuracy

Dimension

1um

10um

100um

1D 2D 3D

CONFIDENTIAL

NIKON CORPORATION



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V-24B, V-20B, V-12B seriesProfile Projector

2 Dimension (X. Y), Angle Wide field of viewAccurate Magnification

Stage ReadingChart Comparison

CONFIDENTIAL

NIKON CORPORATION



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Wide Field of ViewAccurate Magnification

Image on the Screen

Try to measure

the distance between

one line and another linePut on the stage

CONFIDENTIAL

NIKON CORPORATION



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X-axis movement

Y-axis movement

Accurate Measurement is possible

Stage reading

CONFIDENTIAL

NIKON CORPORATION



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Image on the Screen

Measure the Angle

Try to measure the angle

Put on the stage

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NIKON CORPORATION



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Chart Comparison

Image on

the Screen

Chart Image

Chart Image w/ Tolerance

CONFIDENTIAL

NIKON CORPORATION



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external counter

attachable12inchVVVV----12BS12BS12BS12BS

12inchVVVV----12BSC12BSC12BSC12BSC

external counter

attachable12inchVVVV----12BD12BD12BD12BD

5X, 10X, 20X, 25X,

50X, 100X, 200X

12inchVVVV----2BDC2BDC2BDC2BDC

10x6,8x6,

6x4,

4x4,2x2,

O3L

20inchVVVV----20B20B20B20B

5X, 10X, 20X,

50X, 100X

9V stageexternal counter

attachable24inchVVVV----24B24B24B24B

Projection lens

3 lens attachableStage

Built in

digital protractor

Built in

digital counter

Screen

Size

CONFIDENTIAL

NIKON CORPORATION

Instruments CompanyMeasuring Microscope(1)


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CaliperMicro Meter

Profile Projector

Video

Measuring

System

DigimicroDigimicro

MeasuringMicroscope

Accuracy

Dimension

1um

10um

100um

1D 2D 3D

CONFIDENTIAL

NIKON CORPORATION



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MM-200, MM-400, MM-800Measuring Microscope

3 Dimension (X, Y, Z)Accurate Magnification + Stage Reading

System ExpandabilityConfigured with DSC

CONFIDENTIAL

NIKON CORPORATION



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Accurate Magnification + Stage Reading

Image via Eyepieces

X-axis movement

Y-axis movement

Try to measure

the distance between

one line and another line

Put on the stage

CONFIDENTIAL

NIKON CORPORATION



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System Expandability / Configured with DSC

8-segment LED Ring Light w/ industrial microscope unit Foot switch

Color Camera Head DS-2Mv w/ PC unit (E-MAX installed)CONFIDENTIAL

NIKON CORPORATION



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ManualNoYes2x2MMMMMMMM----200200200200

NoMMMMMMMM----400S400S400S400SManualNo

MMMMMMMM----400SL400SL400SL400SL

MotorizedMMMMMMMM----400LM400LM400LM400LM Yes

MMMMMMMM----400L400L400L400LManual

No

Yes

6x4, 4x4, 2x2

MMMMMMMM----400400400400

NoMMMMMMMM----800S800S800S800SManualNo

MMMMMMMM----800SL800SL800SL800SL

MotorizedMMMMMMMM----800LM800LM800LM800LM YesMMMMMMMM----800L800L800L800L

ManualNo

Yes

12x8, 10x6, 8x6

MMMMMMMM----800800800800

Motorized / ManualFocusing Mount

Z-axis ScaleMeasurementController

MountableStage Size

Main Body Type

CONFIDENTIAL

NIKON CORPORATION

Instruments Company

U t i t R t bilit d/ R d ibilit

Data Processing System(1)


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Uncertainty Repeatability and/or Reproducibility

Machine factor

error of indication

aberrationprobing error

non-synchronization error

self-sustained oscillation

Environment Factor

change in temperature

temperature inclinationfloor vibration

disturbance light

electromagnetism

Human factor

skill

attentiondistress

operation mistake

writing mistake

CONFIDENTIAL


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NIKON CORPORATION

Instruments CompanyData Processing System(3)


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DP-E1

Data Processor

E-MAXData Processing Software

CONFIDENTIAL

NIKON CORPORATION



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DP-E1Data Processor

*Built-in Counter Display

*Automatic Calculation*Memorizing Teaching Steps

*Out put results by printer

Reduction of

-Calculation error

-Data difference from measurement proceduresamong operators

-Writing error of results

CONFIDENTIAL

NIKON CORPORATION



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E-MAXData Processing Software

*Configured with DSC Unit + PC

*Sub-pixel Image Processing*Automated Edge Detection

*Automatic Calculation

*Memorizing Teaching Steps

*Storing of Results in PC

Reduction of

-Calculation error

Data difference from measurement proceduresamong operators

-Writing error of results

-Uncertainty due to different skills of operatorsCONFIDENTIAL

NIKON CORPORATION

Instruments Company

CNC Video Measuring System(1)


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Avoidance of Human

Factor

ManualVisual Observation

Focusing

Detecting Measuring Point

Match Edge Image withCross Line

Moving Stage

Selecting Magnification

Adjusting Illuminator

Reading and recordingresults

Calculating / Evaluating ofpass / fail

Statistical Control

AutomatedDigital Image (CCD)

Auto Focus

Auto Search

Edge Filter

CNC Drive

CNC Zoom

CNC Light Control

Application Software

(Ditto)

(Ditto)

Possibility of Human Factor

in Each ProcessCONFIDENTIAL

NIKON CORPORATION

Instruments CompanyCNC Video Measuring System(2)


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Accuracy

Dimension

1um

10um

100um

1D 2D 3D

Caliper Micro Meter

Profile Projector

Video

Measuring

System

DigimicroDigimicro

MeasuringMicroscope

Manual Auto

CONFIDENTIAL

NIKON CORPORATION



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NEXIV VMA, VMZ-R(VMR) seriesCNC Video Measuring System

3 Dimension (X, Y, Z)Automatedteaching step, edge detection, focusing,

results output, light control

CONFIDENTIAL

NIKON CORPORATION



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NEXIV VMA, VMZ-R(VMR) seriesCNC Video Measuring System

3 Dimension (X, Y, Z)Automatedteaching step, edge detection, focusing,

results output, light control

Higher Accuracyand

Higher Productivity

CONFIDENTIAL

NIKON CORPORATION

Instruments Company

Zoom Optics Illuminator Main Body



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Type1

Type2

Type3

VMZ-R6555

py

VMZ-R3020

VMZ-R4540

LED episcopic and diascopic illuminators

with 50-degree incident angle

TypeTZ

TZ has LED episcopic, diascopic (for

higher magnification) and darkfield

illuminators

Type4

LED episcopic and diascopic illuminators

with three incident angles

LED episcopic and diascopic illuminators,

with LED 8-segment ring illuminator with

an 18-degree incident angleTypeA

CONFIDENTIAL

NIKON CORPORATION

Instruments Company



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iNEXIV VMA-2520

0.11NA

73.5 mmW.D.

RENISHAW (Option)Touch Probe

250 x 200 x 200 mmXYZ stroke

Size / Weight

FOV

Magnification

Max.

work piece weight

0.35 3.5 x

13.3 x 10 1.33 x 1 mm

15 kg

570 x 700 x 740 mm / 72kg

Long Working Distance, Wide field of View

Space savingCONFIDENTIAL

NIKON CORPORATION

Instruments Company



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iNEXIV VMA-2520

0.11NA

73.5 mmW.D.

RENISHAW (Option)Touch Probe

250 x 200 x 200 mmXYZ stroke

Size / Weight

FOV

Magnification

Max.

work piece weight

0.35 3.5 x

13.3 x 10 1.33 x 1 mm

15 kg

570 x 700 x 740 mm / 72kg

Long Working Distance, Wide field of View

Space saving

Components of Machinery, Mold,Automotive, Medical Device etc.

CONFIDENTIAL

NIKON CORPORATION

Instruments Company

Summary(1)


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Nikon Measuring InstrumentsNikon Measuring Instruments

Auto

Most

Highest

Operation

Accuracy

Function

Semi-AutoManual

LowestPrice

CNC Video Measuring SystemsCNC Video Measuring Systems

NEXIVNEXIVVMZVMZ--R3020R3020

VMZVMZ--R4540R4540

VMZVMZ--R6555R6555

CNC Video Measuring SystemCNC Video Measuring System

iNEXIViNEXIVVMAVMA--25202520

Measuring MicroscopesMeasuring Microscopes

MMMMMMMM--200200MMMM--400400

MMMM--800800

w Ew E--MAXMAX

w DPw DP--E1E1

Profile ProjectorProfile Projector

PPPPVV--24B24B

VV--20B20B

VV--12B12B

w Ew E--MAXMAX

w/ DPw/ DP

--E1E1

NIKON CORPORATION

Instruments CompanySummary(2)


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We provide our instruments

to meetyour needs for inspection and measurement


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Thank you !!

Documents

Nikon Industrial Instruments and Application