Nikon Report CardNikon Report CardQuick look at where we were & Quick look at where we were &

where we arewhere we are

EX14’s

EX14 UPH is trending in a positive direction but still not quite up to levels of 1st half 2004.

EX14’s

MAINT Rate is highest on 401 & 511 but overall Up Rate has greatly improved.

i12’s

Continuous improvement seen in UPH through optics replacement & PM improvements.

i12’s

Up Rate continues to improve. 103 & 104 had highest MAINT due to hard

drive fail & lens leak repair.

i11’s

UPH has greatly improved on the i11’s and continuing.

i11’s

Up Rate is higher but continue to struggle with WL Type 2 problems (parts & experience). 411 SP-FP errors and 306 inline arm #1 issues.

Future Plans

Technician training: #1 item for coming year! Decrease reliance on Nikon Improved Up Rate on nights/weekends

Continue to replace old i-line optics Ellipsoidal mirror (~10% improvement) First reflection mirror/collector lens/input lens (~5% improvement)

Software upgrade 2.42B Korea reports 10% improvement with Cascade option

301 & 306 2kW lamp upgrade!!