NiP の真空特性と光学特性の評価

2004.9.28 @高エネ機構1, 東大宇宙線研2, 国立天文台3, アンリツ㈱4○都丸隆行1, 斉藤芳男1, 久保富夫1, 佐藤吉博1, 徳成正雄2, 高橋竜太郎3, 鈴木敏一1, 東保男1, 新冨孝和1, 山本明1, 内藤悦伸4

コンテンツ

┘

㈻

1. ┘

ゝ

LCGTゝ Requirement LCGT

!

2 "10#7Pa

々 よ10ppm

!

"10#21m/ Hz @30Hz 1

さ

@ ├ 900mm 50mm∞ 80 DLC

@ 30

フ

1 1

22

UB-NiP- よ

◢

488 550nm 99.8%

み㈻

フ

2.

Φ50 × 1

!"#$%&'(%#'%)(*+,,-.!"#$%&'(%#'%)(*+,,-.!/!(,*0(1%&""-(23%-4'#!"#$%&'(%#'%)(*+,,-.

!/!!/!(,*0(1%&""-(23%-4'#(,*0(1%&""-(23%-4'#

!"#$%&'(%#'%)(!"#$%&'(%#'%)(*+,,-*+,,-..

!5677678(9:;:#<%"8'

!5677678(9:;:#!5677678(9:;:#<%"8'<%"8'=>(<%"8'

=>(<%"8'=>(<%"8'?"#4:(@"-5A**(BCD'&

?"#4:(@"-5?"#4:(@"-5A**(A**(BBCD'&CD'&9:;%#E(@"-5 9:;%#E(@"-59:;%#E(@"-5F#6$6&'GH*--

F#6$6&'F#6$6&'GGH*--H*--!%-5I'

!%-5I'!%-5I'J%DD!5'&;#:-';'#

J%DDJ%DD!5'&;#:-';'#!5'&;#:-';'#

!

Q =C"P

s

Am3Pa/m

2/s[ ]

C = 628 " So/ M [m

3/s]

10 5

250° 24h 3×10-6 torr

㈻

m/e=2

m/e=18

10-13

10-12

10-11

10-10

10-9

10-8

Arb

itra

ry U

nit

0.12 4

12 4

102 4

100Time [hour]

m/e=1 m/e=2 m/e=17 m/e=18 m/e=28

10-7

10-6

10-5

10-4

10-3

Outg

ass

ing R

ate

[Pa m

3/se

c/m

2]

2 4 6

12 4 6

102 4 6

100Time [h]

Before After

H2: 7

m/e=2m/e=18

!

Q" t#1

㈻

H22

3.

!"#$%&'()*+,

!"!"#$%&'()*+,#$%&'()*+,-./+,'0123+,

-./+,'0123+,-./+,'0123+,-4

-4-4-156'788

-156'788-156'788(+9*

(+9*(+9*:;882+

:;882+:;882+-4

-4-4<93+=,)319='>?@+,+

<93+=,)319='>?@+,+<93+=,)319='>?@+,+>)A?2+

>)A?2+>)A?2+

!

Pabs =1" Pref

1.064µm Nd:YAG100mW

0.5mm1mm 5×5mm ゝ

2 3 21

2 399.9

!

"

#

$

%

&&

!"#$%&&

%'$#%

%'$$(

%'$$%

%'$%(

%'$%%

SEM

7. ㈻

UB-NiP RaydentPhosblack llSS41

㈻

ECB+DLC

Fluoride RubberAlumite

UB-NiP (non-baked)

Raydent PolyethylenePhosblack IIMACOR

UB-NiP (baked)

SS41SUS ECBECB+DLC

1.064µm

Raydent: Phosblack ll: NiPECB+DLC: み

p み40° 95%

IR

UB-NiP

(KEK

UB-NiP み み

-83%65%85%99.89%

RaydentECB+DLCPhosblack IIUB-NiP

IR 98.5%

8. ├H2

H22

99.9

250° 24h 2

ふⅤ ┘ DLC

10-13

10-12

10-11

10-10

10-9

10-8

Arb

itra

ry U

nit

0.12 4

12 4

102 4

100Time [hour]

m/e=1 m/e=2 m/e=17 m/e=18 m/e=28

m/e=2m/e=1 m/e=18

m/e=1

1. H2O ┷ ゝ ㈻H

2. H2H

3. H

m/e=2ぜH2 DLC m/e=2

H2 SUS m/e=1m/e=18

m/e=1 H2O H2O