NXE pellicle progress update

EUV Mask Pellicle TWG

Maastricht, The Netherlands

October 4, 2015

Dan Smith

Slide 2

Public

Contents

• Introduction: a look back

• NXE pellicle roadmap

• NXE pellicle concept & integration status

• Mask shop tooling

• Summary

7-Oct-15

Slide 3

PUBLICOct’12 May’13 Nov’13 Feb’14 Mar’14 Jun’14 Dec’14

11mmx11mm

50mmx50mmHalf size proto

Full size proto

(attached to wafer)Full size proto

50mm x 50mm Half size

protoFull size proto11mm x 11mm

EUV pellicle development overview

50mm x 50mm Half size

proto11mm x11mm Full size proto

Mach

ine

tes

tin

g

Film

sc

ali

ng

Imag

ing

tes

tin

g

Next EUV pellicle update from ASML, at Photomask Japan 2015,

see “EUV pellicle development update” Carmen Zoldesi, paper reference 0024

As shown: Mask TWG 22 Feb 2015

Slide 4

Public

ASML committed to demonstrate complete pellicle

solution for EUV and support the industry to implement 2H 2012 2013 2014 2015 2016 2017

Research

&scoping

of work

Phase 0

done

Phase 2

Phase 1

done

1. Prototype phase completed full size pellicle film incl. lithographic

performance demonstrated

2.1 Pilot phase demonstrate complete EUV

pellicle solution including

scanner readiness

2.2 Production phase industry adoption of EUV

pellicles & ramp up

3. HVM phase

a b testing

highly interactive

engagements

Investigation of pellicle film only

• NXE Pellicle

• Pellicle tooling (mask shops)

• Scanner readiness (fab)

Slide 5

Public

NXE pellicle road mapPhase approach of pellicles, tooling and scanner readiness

Activity 2015 2016 2017 2018 2019 2020

Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4

NXE:3XX0B

NXE:3300B

NXE:3350B

NXE:3400B

NXE Pellicle

Pellicle prototype

Pellicle pilot

Pellicle product

Pellicle

tooling

(for mask

shops)

Early integration

Manually assisted

Fully automated

Scanner

readiness

(for fab)

Early customer access

Upgrade field NXE:33X0B

Production NXE:3400B

Dev Pellicle product release

Pellicle pilot release

Prototype & early customer

access

Dev

@ ASML

α & β

testingDev

Dev Product release

NXE:3300B

NXE:3350B

NXE:3400B

Dev

Dev

Dev Field release

Product release

Dev

α & β

testing

β testing

Field release

Field release

α testing

α testing

α & β

testing

Development

α & β testing

Product releaseUnder study

Slide 6

Public

NXE pellicle frame components in manufacturing phase All designs frozen, production of parts ongoing, first hardware coming in

February ’15:

• Initial design & first concept introduced

• First demonstrator built

NXE pellicle concept

NXE pellicle demonstration model

September ’15:

• Design optimized & finalized

• Pellicle frame parts being manufactured

Pellicle frame

Studs (interface to reticle) Fixtures

Slide 7

Public

NXE Pellicles are being integrated at ASML Pellicle work center to support early integration phase available

Early integration tool

Pellicle work center setup in the ASML cleanroom

Working area for pellicle integration

Slide 8

Public

1st NXE pellicle assembled at ASML Pellicle work center Pellicle assembly performed by trained operators

Slide 9

Public

Mask shop tools to support NXE pellicle under development

1. SFT-100 : Stud Fixation Tool to glue studs onto reticles

2. MDR-100: Mount Demount Remount tool (re)mount and

demount NXE pellicle to/from reticles

3. SRT-100: Stud Removal Tool to remove studs from reticles

Designs frozen, manufacturing started; ready for α testing by end of 2015

Slide 10

Public

Mask shop tools to support NXE pellicle under development

1. SFT-100 : Stud Fixation Tool to glue studs onto reticles

2. MDR-100: Mount Demount Remount tool (re)mount and

demount NXE pellicle to/from reticles

3. SRT-100: Stud Removal Tool to remove studs from reticles

Designs frozen, manufacturing started; ready for α testing by end of 2015

Mock-up flow cabinet

Slide 11

Public

Activity 2015 2016 2017 2018 2019 2020

Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4

NXE:3XX0B

NXE:3300B

NXE:3350B

NXE:3400B

NXE Pellicle

Pellicle prototype

Pellicle pilot

Pellicle product

Pellicle

tooling

(for mask

shops)

Early integration

Manually assisted

Fully automated

Scanner

readiness

(for fab)

Early customer access

Upgrade field NXE:33X0B

Production NXE:3400B

Dev Pellicle product release

Pellicle pilot release

Prototype & early customer

access

Dev

@ ASML

α & β

testingDev

Dev Product release

NXE:3300B

NXE:3350B

NXE:3400B

Dev

Dev

Dev Field release

Product release

Dev

α & β

testing

β testing

Field release

Field release

α testing

α testing

α & β

testing

Development

α & β testing

Product releaseUnder study

NXE pellicle road mapPhase approach of pellicles, tooling and scanner readiness

Slide 12

Public

ASML committed to demonstrate complete pellicle solution

for EUV and support the industry to implement Activity 2015 2016 2017 2018 2019 2020

Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4

NXE:3XX0B

NXE:3300B

NXE:3350B

NXE:3400B

NXE Pellicle

Pellicle prototype

Pellicle pilot

Pellicle product

Pellicle

tooling

(for mask

shops)

Early integration

Manually assisted

Fully automated

Scanner

readiness

(for fab)

Early customer access

Upgrade field NXE:33X0B

Production NXE:3400B

Dev Pellicle product release

Pellicle pilot release

Prototype & early customer

access

Dev

@ ASML

α & β

testingDev

Dev Product release

NXE:3300B

NXE:3350B

NXE:3400B

Dev

Dev

Dev Field release

Product release

Dev

α & β

testing

β testing

Field release

Field release

α testing

α testing

α & β

testing

Development

α & β testing

Product releaseUnder study

NXE pellicle integrated at ASML; initial manufacturing capability established.

Pellicle tooling under development; designs frozen, manufacturing started.

NXE pellicle testing for early learning on NXE scanners will start this year.