Oil Rotary Vacuum Pump VD / VS / PVD / PKS seriesa McLeod vacuum gauge.) *2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water

Low VacuumPump

Oil Rotary Vacuum Pump　VD / VS / PVD / PKS series

Low Vacuum

Pump

PKS-070B

VD40C

VS650A

18/05/30 09:28:28

The oil rotary vacuum pumps are the leading vacuum pumps with high pumping efficiency and consistent pumping performance. They can operate under the pressure between atmospheric pressure to 10Pa or lower. A wide variety of product lineup is available for various kinds of operation.

Model VD Ver.C VD（Small type） PVD VS650A VS PKS

Structure Double stage rotary vane type

Double stage rotary vane type

Double stage rotary vane type

Single stage rotary vane type

Single stage rotary vane type Rotary plunger type

Driving type Direct Direct Belt Belt Direct Belt

Cooling method Air cooled Air cooled Air cooled Air cooled/Water cooled Water cooled Air cooled

/Water cooledOil circulation system Forced Forced Differential pressure Differential pressure Forced Differential pressureOil-backflow prevention device

Shutting off the oil circulation

Shutting off the oil circulation Optional Oil-backflow

prevention deviceShutting off the oil

circulationShutting off the oil

circulation

Selec t ion Guide

Detai l o f features

A vane is assembled in the rotor inside the cylinder. The vane compresses and exhausts the gas inside the cylinder.The oil lubricates and cools down the bearing part. It also has a sealing function to secure air tightness of the vane and the cylinder. Excellent in compression efficiency and low vibration. These are the most frequently used vacuum pumps for industrial use.

Rotary Vane type Explanation image

The slide vane sliding on the vane guide part performs piston motion by rotation of eccentric rotor, thereby volume of the space surrounded by slide vane and cylinder is varied and exhausted.Robust and comparatively strong for foreign materials. Workable for long term with appropriate regular maintenance.

Gas ballast is a countermeasure when handling condensable gas such as water vapor, etc. Condensable gas is compressed through compression process inside oil vacuum pump, condensed and changed to liquid which mixes with vacuum pump oil. It is left inside in the case of dry vacuum pump. In order to prevent this, it is possible to let condensable gas exhaust without changing from air state to liquid state by opening gas ballast valve and introducing certain amount of air or nitrogen to the working chamber inside pump.

Rotary Plunger type Explanation image

What is gas ballast…?

It is one of optional selections of oil rotation vacuum pump. This type is tested by the helium leak detector and has a leak tightness specification with 1x10-6 (Pa･m3/s) or below.

What is helium tight type…?

Note　 IE3 motor is higher efficient than the conventional motor so the striking current tends to be higher. For the bigger pumps with 5.5kW motor or more, there is possibility that pumps don't start running due to insufficient power voltage in case that power capacity is low. Please confirm the power capacity before using bigger pump.

Oil Mist Trap　TM / TMX series

Oil Mist Trap　Oil Return Mechanism

ULVAC, Inc. Components Division

Overseas Sales in Japan TEL +81-467-89-2261

USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC SINGAPORE PTE LTD Philippines Branch TEL +63-46-437-7700GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : TEL +84-8-6255-6762CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL (86)21-6127-6610

THAILAND : ULVAC (THAILAND) LTD TEL +66-2-7388883INDONESIA : ULVAC SINGAPORE PTE LTD Indonesia Representative Office TEL +62-21-8990-5070

TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700

This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.

ULVAC SINGAPORE PTE LTD Vietnam Representative Office

www.ulvac.co.jp/en

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1054E/2018052000SP

Specifications

Model*1 Connecting flange(pump side / outlet side) Weight [kg] Material Dimensions

[mm] For (pump model) Remarks*2

TMX-1 Special (with adapter ) / G1 x 1/2 (with screwed cover) 1.1

Main unit :soft steel (SPCC) Filter :glass wool

dia. 106 x 193 VD151, VD201, PVD-180, PVD-360TM201 VF40 / G1 x 1/2 (with screwed cover) 8.5 dia. 165.2 x 280 VD30C / VD301, VD40C / VD401 Low load type

TM401 VF40 / G1 x 1/2 (with screwed cover) 10 dia. 165.2 x 350 VD30C / VD301, VD40C / VD401 High load typeVD60C / VD601, VD90C / VD901 Low load type

TM-2 VF40 (with adapter) / G2 (with screwed cover) 9.3 dia. 285 x 520 VD60C / VD601, VD90C / VD901 High load typeVG50 / G2 (with screwed cover) dia. 285 x 450 PKS-016

TM-2F VF40 (with adapter) / VG50 9.8 dia. 285 x 525 VD60C / VD601, VD90C / VD901 High load typeVG50 / VG50 dia. 285 x 455 PKS-016

TM-3 VF50 / G3 (with screwed cover) 17 dia. 362 x 635 VS1501VG80 / G3 (with screwed cover) dia. 362 x 735 PKS-030

TM-3F VF50 / VG80 18 dia. 362 x 600 VS1501VG80 / VG80 dia. 362 x 700 PKS-030

TM-4 VF50 / G4 (with screwed cover) 35 dia. 442 x 945 VS2401VG100 / G4 (with screwed cover) dia. 442 x 1160 PKS-070

TM-4F VF50 / VG100 36 dia. 442 x 900 VS2401VG100 / VG100 dia. 442 x 1120 PKS-070

TM-4S VF50 / VG100 64 dia. 450 x 1487 VS2401 High load typeVG100 / VG100 dia. 450 x 1387 PKS-070 High load type

*1　F: Flange connection type instead of screwed cover.　*2　Select the high load when the pump repeatedly runs from atmosphere to vacuum in a short period or at the pressure higher than 10,000 Pa (100mbar / 75 Torr) for a long period .

Features

The trap to eliminate oil smoke exhausted from oil rotary vacuum pump.

Exhaust sound is reduced especially at the time of repeat operation between ultimate pressure and atmospheric pressure. Cartridge type filter makes filter replacement easy.

Features

Oil return from the oil mist trap into the oil rotary vacuum pump. Four kinds of mechanisms are available for different working pressure and operating situations.

Details Recovery method

Effect on ultimate pressure Recommended pressure range

Oil return mechanism A

Oil returns into the pump case through the check valve when the pump stops. Semi-auto Low

Oil return mechanism B

Oil returns from the gas ballast port through the needle valve. Manual Some

Oil return mechanism C

Oil returns from the inlet port side through the needle valve. Manual High

Oil return mechanism D

Oil collected in the floating type oil return returns from the inlet port side. Auto Low

Atmospheric pressure

[Pa] 1 10 102 1000 10000 [Torr / mbar] 0.01 0.1 1 10 100

Continuously-workable pressure rangeRepeatable working pressure range

Oil return mechanism A

Oil mist trap

Oil mist trap

Oil mist trap

Oil mist trap

Floating-type oil return

Check valve

Oil mist

Oil mist

Oil mist

Oil mist

Needle valve

Needle valve

Pump

Pump

Pump

Pump

Oil return mechanism B

Oil return mechanism DOil return mechanism C

* Oil return mechanism is not workable with the oil mist trap TMX-1. The TMX-1 has a check valve inside like the oil return mechanism A.

2

Double Stage Rotary Vane type　VD series Ver.C

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Specifications

Model VD30C VD40C VD60C VD90C

Designed pumping speed

50Hzm3/hr 30 40 60 90L/min 500 670 1000 1500cfm 17.66 23.54 35.31 52.97

60Hzm3/hr 36 48 72 108L/min 600 800 1200 1800cfm 21.29 28.25 42.38 63.57

Ultimate pressure *1

Gas ballast port close

Pa 0.67Torr 5×10-3

mbar 6.7×10-3

Gas ballast port open

Pa 2Torr 1.5×10-2

mbar 2.0×10-2

Maximum water vapor tolerance

Gas ballast port open 50Hz

Pa 1300 1360 1320 970Torr 9.8 10.2 9.9 7.3 mbar 13.0 13.6 13.2 9.7

Gas ballast port open 60Hz

Pa 1400 1760 2800 2820 *2

Torr 10.5 13.2 21.0 21.2 mbar 14.0 17.6 28.0 28.2

Maximum water vapor capacity


50Hz g/h 190 270 430 48060Hz g/h 250 410 1100 1650 *2

Motor *3

Type Totally enclosed fan cooled 3 phase induction motorEnergy efficiency class IE3kw (number of poles) 1.5(4) 2.2(4) 3.7(4)HP (number of poles) 2 (4) 2.95(4) 4.96(4)

Voltage *4 50Hz 200V～240V/380V～415V60Hz 200V～240V/380V～460V

Oil ULVOIL R-7Oil capacity　　L 1.0 ～ 2.5 2.5 ～ 4.0Cooling method Air cooledInlet VG40 equivalency / KF40 (optional) VG50 equivalency / KF50 (optional)Outlet VG40 equivalency / KF40 (optional) VG40 equivalency / KF40 (optional)Weight　　kg 58 60 90 133External dimensions WxDxH　　mm 210 x 660 x 324 210 x 680 x 324 280 x 761 x 371 280 x 831 x 371Applicable standard CE / cTUVusStandard accessory A dose of oil, a set of manual

Recommended oil mist trap (Optional) *5 TM201: for low load operationTM401: for high load operation

TM401: for low load operationTM-2: for high load operation

Options Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and H)

*1　 Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)

*2　 VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water vapor tolerance / maximum water vapor capacity (in the continuous operation) : 1000Pa / 600g/h

*3　 Increased safety explosion-resistant motor and pressure proof explosion-resistant motor are available as an option.

*4　 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.

*5　 High load operation means repeat pumping down between atmospheric pressure and vacuum in short term or long time operation at 10,000 Pa (75 Torr) or higher.

Features

With high efficiency (IE3) full multi-voltage motor developed by ULVAC. For various kinds of application.

Single kind high efficient (IE3) full multi-voltage covers wide range voltage from 200 to 240V / 380 to 460V. Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum. Various specification A, B and H are available in addition to standard model.

Applications

Evaporation and sputtering Vacuum filling and gas exchange Vacuum adsorption , transport and casting Vacuum molding Vacuum drying and freeze drying Automated leak testing , etc

Pumping Speed Cur ves

3

18/05/30 09:33:22

Option

Specification Model Main Seal Material Independent oil filling (oiler) He Leak Test

Standard VD30C, VD40C, VD60C, VD90C Fluorine Rubber n/a n/aSpec. A VD30C-A, VD40C-A Nitrile Rubber n/a n/aSpec. B VD30C-B, VD40C-B Silicon Rubber - n/aSpec. H VD30C-H, VD40C-H, VD60C-H, VD90C-H Fluorine Rubber - -

- - -⑥① ② ③ ④ ⑤ ⑦ ⑧ ⑨ ⑩ ⑪ ⑫ ⑬

E.g.) VD30C-02211-19030022

＊１　There is not any naming for standard type. A, B or H spec is selectable as option. Options for pump head and accessories are different depending on the type.＊２　Multiple voltage motor is not available in the case of explosion-protection and flame-proof motor. Voltage needs to be specified.

30m3/h (50Hz) / Standard / FKM / R-7 / Totally enclosed external fan motor / Multiple voltage / ISO-KF /Without gas ballast valve / Without He leak test / English Instruction manual / English Warning label

Model

VD30 C 0 2 2 1 1 1 9 0 3 0 0 2 2Rev. Naming Pump head option External option

ModelVD30：30m3/h（50Hz）VD40：40m3/h（50Hz）VD60：60m3/h（50Hz）VD90：90m3/h（50Hz）

Rev.C：Current Rev.

⑥Motor kind *2　1：Totally enclosed external 　　　fan motor【std】　2：Explosion-protection(indoor)　4：Flame-proof (indoor)⑦Motor voltage　9：Multiple voltage【std】　A：Other (specified voltage)⑧Motor frequency　0：Not select【std】　1：50Hz　2：60Hz⑨Inlet/Outlet flange　3：Inlet/Outlet ISO-KF　4：Inlet/Outlet JIS【std】　7：Inlet ISO-KF

⑩Gas ballast valve　0：None【std】　1：Manual gas ballast valve⑪He leak test　0 : Without【std】　1 : With (H type only) ⑫Instruction manual　1 : Japanese　2 : English⑬Warning label　1 ： Japanese　2 ： English　3 ： Simplified Chinese　4 ： Traditional Chinese　5 ： Korean

①Structure　0 : Standard　1 : Independent oil filling (oiler)②Seal　1 : NBR　2 : FKM【std】　5 : Silicon＋NBR③Oil 　1 : Mineral oil(R-4)　2：Mineral oil(R-7)【std】　6：Fluorine oil (J60)④Vane　1 : Resin【std】⑤Exhaust valve plate　1 : Stainless【std】

Naming *1None　：　Standard 　　A　：　Spec. A　　B　：　Spec. B　　H　：　Spec. H

Model Explanation

D imensions

VD-C

Gas ballast port G3/8

Totally enclosedfan cooled motor

Inlet port（Q）Tap depth 14

A C

L1

RN

P

M

OW2 Oil drain valve　Rc1/2

Tap depth 14Oil supply port　G1

Outlet port　VG40 Oil mist trap（option）

W1

H1

H3

H4

H5

（TM

201）

(TM

401）

(TM

-2）

H

H2

W

ＴＹＰＥＡＣＨＨ１Ｈ２Ｈ３Ｈ４Ｈ５ＬＬ１ＭＮＯＰＱＲＷＷ１Ｗ２ＶＤ３０Ｃ 73 210 324 281 287 561 631 － 660 363 395 365 150 ４－φ１１ＶＧ４０ 128 214 107 210ＶＤ４０Ｃ 73 230 324 281 287 561 631 － 680 383 395 365 150 ４－φ１１ 128 214 107 210ＶＤ６０Ｃ 88 255 371 328 324 － 678 848 761 435 390 365 230 ４－φ１１ＶＧ５０ 92 264 132 280ＶＤ９０Ｃ 88 306 371 328 348 － 678 848 831 486 570 540 ２００／２３０８－φ１１ 182 264 132 280

L

4

Small Size Double Stage Rotary Vane type　VD series

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*1　Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)*2　The energy efficiency regulation is not applicable for this motor.*3　Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.

Features

Single kind high efficient (IE3) full multi-voltage covers wide range voltage from 200 to 240V / 380 to 460V. Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum.


VD201 50Hz

Specifications

Model VD151 VD201


50Hzm3/hr 14.4 20.2L/min 240 336cfm 8.47 11.89

60Hzm3/hr 17.3 24.2L/min 288 403cfm 10.18 14.24



Pa 0.67Torr 5×10-3

mbar 6.7×10-3


Pa 6.7Torr 5×10-2

mbar 6.7×10-2

Maximum water vapor tolerance Gas ballast port open

Pa 500 1300Torr 3.8 9.8 mbar 5.0 13.0

Maximum water vapor capacity g/h 40 138

Motor

Type Totally enclosed fan cooled 3 phase induction motorEnergy efficiency class IE1 *2 IE3kw (number of poles) 0.55 (4) 0.75 (4)HP (number of poles) 0.75 (4) 1 (4)

Voltage *350Hz 200V～240V/380V～415V60Hz 200V～240V/380V～460V

Oil ULVOIL R-7Oil capacity　L 0.7 〜 1.1Cooling method Air cooledInlet KF25 equivalencyOutlet G1Weight　kg 29 34.5External dimensions WxDxH　mm 170 x 513 x 240 170 x 536 x 265Applicable standard CEStandard accessory A dose of oil, a set of manualRecommended oil mist trap (Optional) TMX-1 + adapter flangeOptions Oil mist trap

Applications

Vacuum filling and gas exchange Vacuum adsorption , transport and casting Vacuum molding Vacuum drying and freeze drying

5

Small Size Double Stage Rotary Vane type　PVD series

18/05/30 09:33:22

*1　PVD-B models (with oil back-flow prevention mechanism) are designated as PVD-180-B for the PVD-180 model and PVD-360-B for the PVD-360 models. *2　Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)*3　The energy efficiency regulation is not applicable for this motor.

Features

Legacy and small size double stage oil rotary vane pump. Quiet and low speed rotation. Enclosed belt cover for safety.


Specifications

Model *1 PVD-180 PVD-360


50Hzm3/hr 9 19L/min 155 310cfm 5.3 11.2

60Hzm3/hr 11 22L/min 186 372cfm 6.5 13



Pa 0.67Torr 5.0×10-3

mbar 6.7×10-2


Pa 6.7Torr 5×10-2

mbar 6.7×10-2

Motor

Type Totally enclosed fan cooled 3 phase induction motorEnergy efficiency class IE1*3 IE3kw (number of poles) 0.4 (4) 0.75 (4)HP (number of poles) 0.54 (4) 1 (4)

Voltage50Hz 200V60Hz 200V / 220V 200V / 220V / 230V

Oil ULVOIL R-7Oil capacity　　L 0.3 0.5Cooling method Air cooledInlet dia.28×dia.19 dia.34×dia.27Outlet G3/4 G1Weight　　Kg 33.5 43External dimensions WxDxH　mm 265 x 470 x 321 303 x 488 x 321Applicable standard -Standard accessory A dose of oil, a set of manualRecommended oil mist trap (Optional) TMX-1 + adapter flange

Options Oil mist trap, other oil types, explosion-resistant motor, special type for special application (spec B and H)

Applications

Vacuum filling and gas exchange Vacuum adsorption , transport and casting Vacuum molding Vacuum drying and freeze drying

6

Small Size Double Stage Rotary Vane type　VD / PVD series

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D imensions

VD

PVD


FG E D

AB

L

Inlet port KF25

Oil supply port G3/4

Outlet（Ｊ）

Oil mist trapTMX-1（Option）

H1

H3

H

H2

H4W C

L

L

B

C D

A


Outlet pipe screw(J)Outlet

Oil drain port　M12

Inlet portO･D（M）／ I･D（N）Screw（P）

（Oil supply port）

Solenoid valve（B-type）

Oil mist trapTMX-1（Option）

HH2

H4

H3

W2

WG

W1

H1

ＴＹＰＥＡＢＣＤＥＦＧＨＨ１Ｈ２Ｈ３ＪＬＬ２ＭＮＰＷＷ１Ｗ２ＰＶＤ－１８０ 65 90 420 15 150 15 27 321 315 － 177 Ｇ３／４ 470 450 φ２８ φ１９Ｇ３／４ 265 65 180ＰＶＤ－１８０Ｂ 65 90 420 15 150 15 27 321 315 321 177 Ｇ３／４ 470 450 φ２８ φ１９Ｇ３／４ 265 65 180ＰＶＤ－３６０ 85 90 440 15 190 15 30.5 321 315 － 195.5 Ｇ１ 488 470 φ３４ φ２７Ｇ１ 303.5 80 220ＰＶＤ－３６０Ｂ 85 90 440 15 190 15 30.5 321 315 327 195.5 Ｇ１ 488 470 φ３４ φ２７Ｇ１ 303.5 80 220

Drain valve Rc3/8

ＴＹＰＥＡＢＣＤＥＦＧＨＨ１Ｈ２Ｈ３Ｈ４ＬＷＶＤ１５１ 238 154 33 260 120 130 65 － 240 213 228 396 513 170ＶＤ２０１ 258 143 31.5 260 136 130 65 271 265 254 233 439 535.5 181

EF４－φ12 L2

7

Single Stage Oil Rotary Vane type　VS series

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*1　Measured with a Pirani gauge. (Apprx. 5.3X10-1Pa when measured with a McLeod vacuum gauge.)

Features

Lower ultimate pressure even it is single stage oil rotary vane pump. Lower vibration structure compared with Rotary plunger model. Suitable when installing at upper floor. Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum.

0

50

100

150

200

250

300

1 10 100 1000 10000 100000

Pum

ping

Spe

ed [m

3/ho

ur]

Pressure [Pa]

VS2401 60Hz

VS1501 50Hz

VS1501 60Hz

VS2401 50Hz

Gas Ballast ClosedGas Ballast Open


Specifications

Model VS1501 VS2401


50Hzm3/hr 150 240L/min 2500 4000cfm 88.2 141.2

60Hzm3/hr 180 288L/min 3000 4800cfm 105.9 169.4



Pa 5.3Torr 3.9×10-2

mbar 5.3×10-2


Pa 80Torr 0.6mbar 0.8

Motor

Type Totally enclosed fan cooled 3 phase induction motorEnergy efficiency class IE3kw (number of poles) 5.5 (4) 7.5 (4)HP (number of poles) 7.5 (4) 10 (4)

Voltage50Hz 200V～240V/380V～415V60Hz 200V～240V/380V～460V

Capacity(kVA)

50Hz 40 5560Hz 35 50

Oil ULVOIL R-7Oil capacity　L 8.0 ～ 10.5Cooling method Water cooledInlet VG80 equivalencyOutlet VG50 equivalencyWeight　kg 232 271External dimensions WxDxH　mm 330×941×460 333×1061×460Applicable standard -Standard accessory A dose of oil, a set of manualRecommended oil mist trap (Optional) TM-2（F） + adapter flange TM-3（F） + adapter flange

Options *2Oil mist trap, other oil types, gas ballast valve,

ISO flange,explosion-resistant motor, special type for special application (spec H and R)

Applications

Evaporation and sputtering Vacuum filling and gas exchange Vacuum adsorption , transport and casting Vacuum molding Vacuum drying and freeze drying Automated leak testing , etc

8

Single Stage Oil Rotary Vane type　VS650A / VS750A

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0

100

200

300

400

500

600

700

800

900

1 10 100 1000 10000 100000

Pum

ping

Spe

ed ［

m3 /h

］

Pressure ［Pa］

VS650 50Hz

VS650 60Hz( VS750 50Hz )

Gas Ballast ClosedGas Ballast Valve 1 OpenedGas Ballast Valve 1+2 Opened

Pumping Speed Cur ves*1　 Measured with a Pirani vacuum gauge.

（Approx. 0.8Pa when measured with a McLeod vacuum gauge.)*2　 Water vapor tolerance and capacity are measured under following

cooling water capacity. Cooling water temperature at inlet port is 26℃ (78.8F).

VS650A-W VS750A-W

GP1 open50Hz 3 L/min. 5 L/min.60Hz 5 L/min. -

GP1・2 open50Hz 3 L/min. 5 L/min.60Hz 5 L/min. -

*3　 Increased safety explosion-resistant motor and pressure proof explosion-resistant flange motor are available as option. However, multiple voltage cannot be selected.

*4　At ultimate pressure*5　 Factory shipment setup is 200V class Δ delta connection. Please

change it to Y connection if working voltage is 400V class.*6　 Size to connect pipe changes when JIS flange is selected for inlet/

outlet port.

Features

Large size and low vibration single stage oil rotary vane pump. Selectable from air and water cooled type. Oil cooler is used for oil temperature cooling for a air cooled model. Equipped with a cartridge-type oil mist filter inside the oil tank. Cleaning of the inside of the oil tank and replacement of the oil mist filter are easy.

Specifications

Model VS650A-A VS650A-W VS750A-A VS750A-W

Max. pumping speed 50Hz

m3/h 650 750L/min 10833 12500cfm 383 441

60Hzm3/h 750 n/aL/min 12500 n/acfm 441 n/a


GP close

Pa 8Torr 6×10-2

mbar 8×10-2

GP1 open

Pa 70Torr 0.52 mbar 0.7

GP1･2 open

Pa 200Torr 1.5 mbar 2.0

Max. water vapor tolerance *2

GP1 open50Hz

Pa 4500 2500 5500 2500Torr 33.8 18.8 41.4 18.8 mbar 45 25 55 25

60HzPa 5500 2500 n/aTorr 41.4 18.8 n/ambar 55 25 n/a

GP2 open50Hz

Pa 6000 3800 7500 4000Torr 45.1 28.6 56.4 30.1 mbar 60 38 75 40

60HzPa 7500 4000 n/aTorr 56.4 30.1 n/ambar 75 40 n/a

Max. water vapor capacity *2

GP1 open 50Hz kg/h 17 11 24 1360Hz kg/h 24 13 n/a

GP2 open 50Hz kg/h 26 15 34 1960Hz kg/h 34 19 n/a

Motor *3

Type Totally enclosed external fan 3 phase AC motorkw (poles) 22 （4）HP (poles) 29.5 (2)Power consumption *4

50Hz kW 8 1160Hz kW 11 n/a

Voltage *5 50Hz V 200V～240/380V～415 200V～240/380V～41560Hz V 200V～240/380V～460 n/a

Capacity 50Hz kVA 130 20060Hz kVA 200 n/a

Oil ULVOIL R-7Oil capacity　L 23～27 25～30 23～27 25～30Cooling method Air cooled Water cooled Air cooled Water cooled

Cooling water

Primary side pressure MPa － ≦ 0.5 － ≦ 0.5psi － ≧ 72.5 － ≧ 72.5

Inlet/outlet differential pressure

MPa － ≧ 0.1 － ≧ 0.1psi － ≧ 14.5 － ≧ 14.5

Capacity L/min － ≧ 3.0 － ≧ 3.0Temperature ℃ － 5～30 － 5～30

F － 41～86 － 41～86Inlet DN 100 ISO-KOutlet DN 100 ISO-KWeight　kg 806 800 802 796External dimensions WxDxH　mm 1490×905×705 1490×841×705 1490×905×705 1490×841×705Applicable standard －Standard accessories Oil for one pump, 1 set of instruction manual

Options other oil types, flame-proof motor, specified voltage motor,JIS flange *6, gas ballast valve 2 (manual)

9

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- - -⑥① ② ③ ④ ⑤ ⑦ ⑧ ⑨ ⑩ ⑪ ⑫ ⑬

E.g.) VS650A-W-02222-192211131

＊1 VS750A is only 50Hz. It is impossible to run at 60Hz.＊2 Explosion-resistant is available with only motor. Not attached thermostat and electrical box in the case of selecting explosion-resistant motor.＊3 Multiple voltage motor is not available with Explosion-resistant motor.

650m3/h (50Hz) [750m3/h (60Hz)] / totally enclosed external fan motor / multiple voltage / ISO-K flangeWater cooling / 1 gas ballast valve (manual) / Japanese & English Instruction manual / Japanese Warning label

ModelVS650 A W 0 2 2 2 2 1 9 2 1 1 1 1

⑭

13Rev. Naming Pump head option External option

Model650：650m3/h（50Hz）　 750m3/h（60Hz）　750：750m3/h（50Hz）*1

Rev.A : Current Rev.

⑥Motor kind　1 : Totally enclosed external fan motor　4 : Flame-proof (indoor) *1 *2

⑦Motor voltage　9 : Multiple voltage　A : Other (specified voltage)⑧Inlet/Outlet flange　2 : ISO-K flange　4 : JIS flange⑨Cooling method　1 : Air cooling　2 : Water cooling⑩Gas ballast valve　1 : 1 gas ballast valve (Manual)　3 : 2 gas ballast valves (Manual)

⑪Oil filter　 1 : With oil filter ⑫Back flow prevention valve　 1 : With spring⑬Instruction manual　3 : Japanese ＆ English⑭Warning label　1 : Japanese　2 : English　3 : Simplified　Chinese　4 : Traditional 　Chinese　5 : Korean

①Structure　0 : Standard②Seal　2 : FKM③Oil　2 : Mineral oil(R-7)④Vane　2 : Resin⑤Exhaust valve vane　2 : Stainless

Namingequal option ⑨ A : Air coolingW : Water cooling

1. Inlet2. Anti Suckback Valve3. Cylinder4. Rotor5. Vane6. Oil Feed Line7. Gas Ballast8. Exhaust Valve9. Oil Tank

10. Oil Filter11. Oil Level Gauge12. Oil Mist Filter Elements13. Oil Return Valve14. Oil Return Line15. Outlet

Model Explanation

Dimensions

VS650A

Explanation image

●②

●③ ●⑪●④

●⑫●⑤

●⑬

●⑥●⑭

●⑦

●⑮

●⑧●⑨

●①

●⑩

Outlet port

Inlet port

DN100 ISO-K

DN 100 ISO-K Oil suppy plag G1

Water outlet G1/2

Water inlet G1/2（Water cooling type）

（Water cooling type）

HH1

G FED

B

C

A

L

H2

Oil drain plug　Rc1

WW

1

ＴＹＰＥＡＢＣＤＥＦＧＨＨ１Ｈ２ＬＷＷ１ＶＳ６５０/VS750 887 951 308 1170 127 386.5 257 774 705 505 1541 850 486.5

10

Rotary Plunger type　PKS series

18/0

5/30

09:

33:2

2

*1　 The PKS-070B model is improved with the change on cast iron shape, a larger oil level gauge, a larger capacity oiler, and an enclosed belt cover with an inspection hole. It has the same mounting dimension and performance as the conventional model.

*2　Measured with a Pirani gauge. (Apprx.2.7 × 10-1Pa when measured with a McLeod vacuum gauge. )*3　Expected to obtain in March 2018


Features

PKS series models are extremely durable rotary plunger vacuum pumps with very stable pumping .

Robust and long-life and low-speed-rotatation pump with less rotary sliding parts. Materials in the pump is highly resistant to abrasion. The high-efficiency (IE3) multi-voltage motor, fully developed by ULVAC. The enclosed belt cover and the inspection hole to check the rotation direction and belt tension in safe. (PKS-070B)

Specifications

Model PKS-016 PKS-030 PKS-070B *1

Designed pumping speed m3/hr 96 180 420L/min 1600 3000 7000cfm 57 106 247


Gas ballast port closePa 2.7Torr 2×10-2

mbar 2.7×10-2

Gas ballast port openPa 30 170 300Torr 0.2 1.3 2.3 mbar 0.3 1.7 3.0

Maximum water vapor tolerance Gas ballast port openPa 650 900 6000Torr 4.9 6.8 45.1 mbar 6.5 9.0 60.0

Maximum water vapor capacity Gas ballast port open g/h 5 7 12

Motor

Type Totally enclosed fan cooled 3 phase induction motorEnergy efficiency class IE3kw (number of poles) 2.2(4) 3.7(4) 11(6)HP (number of poles)

Voltage50Hz 200V～240V/380V～415V60Hz 200V～240V/380V～460V

Capacity(kVA)

50Hz10 15

6560Hz 75

Oil ULVOIL R-7Oil capacity　L 6.5 8 20Cooling method Air cooled Water cooledInlet VG50 VG80 VG100Outlet VF50 VF80 VF100Weight　kg 225 380（W/O moter） 900（W/O moter）External dimensions WxDxH　mm 587×884×572 721×675×973 971×983×1190Applicable standard CE、cTUVus *3

Standard accessory A dose of oil, a set of manualRecommended oil mist trap (Optional) TM-2 TM-3 TM-4、TM-4S

Options Oil mist trap, other oil types, ISO flange, explosion-resistant motor,special type for special application (spec H and L)

Applications

Vacuum heat treatment furnaces , sintering fumaces , brazing fumaces Vacuum molding Evaporation and sputtering Vacuum drying and freeze drying Vacuum distillation solvent and powder

11

VS1501 / VS2401 / PKS series

18/05/30 09:33:22

Dimensions

ＴＹＰＥＡＢＣＤＥＦＧＨＨ１Ｈ２Ｈ３Ｈ４Ｈ５Ｈ６ＪＫＬＭＮＷＷ１ＰＫＳ－０１６ 70 260 190 440 60 700 ４－Φ１９ 572 550 350 1025 －－－ＶＧ５０ＶＦ５０ 884 Ｒｃ３／８Ｇ３／４ 587 247ＰＫＳ－０３０ 80 485 112.5 225 25 470 ４－Φ２２ 973 624 －－ 1345 － 610 ＶＧ８０ＶＦ８０ 675 Ｒｃ１／２Ｇ３／４ 712 137ＰＫＳ－０７０ 93 655 173 346 25 537 ４－Φ２２ 1190 743 987 －－ 1887 727 ＶＧ１００ＶＦ１００ 983 Ｒｃ３／４Ｇ１・１／４ 971 200

VS

PKS

Oil drain port（Ｍ）


Inlet port（Ｊ）

Outlet port（Ｋ）

Oil drain valve


Oil supply port（Ｎ）

Water outlet

Water inlet

Rc3／8

Rc3／8

Tap depth18

D

L

F

B

GCE

（For anchor bolt）（For anchor bolt）

Tap depth25/070

（M）G

Tap depth18/030

Oil supply port（Ｎ）

Outlet port（Ｋ）Inlet port（Ｊ）

Tap depth16Tap depth20

Oil mist trap（Option）

PKS-030/PKS-070BPKS-016H5

H4

H3

H2

H1 H

H2

H

W

W

DC W

1

W1

H1H6

（TM

－4）

（TM

－3）

（TM

－2）

L

93

F E（For anchor bolt）

（Fo

r anc

hor b

olt）

A


Oil mist trap（Option）

External filter port inlet

External filter port outlet

G3/8

G3/8

Water outlet G3/8

Water inlet G3/8

Outlet port VG50Gas ballast port G3/8Inlet port VG80Tap depth 17Tap depth 22

Oil supply port G1Oil return port G1/4

W

W1

MP

H4

H3

（TM

－4）

（TM

－3）

H2

L1

BA

H

H1ＴＹＰＥＡＢＨＨ１Ｈ２Ｈ３Ｈ４ＬＬ１ＭＮＰＷＷ１ＶＳ１５０１ 116 340 460 420 391 1035 1365 941 571 394 286 77 333.5 163ＶＳ２４０１ 116 422 460 420 393 1035 1365 1061 653 476 286 77 333.5 163

４－φ15L

N

Oil drain plug　Ｇ３／４

B A

Documents

Oil Rotary Vacuum Pump VD / VS / PVD / PKS seriesa McLeod vacuum gauge.) *2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water