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OverViz Suite 2.2Flexible multiphysics framework for solving hybrid plasma-fluid-electromagnetics-particle simulations

New Release Announcement

VizGlow Non-equilibrium cold plasma systems

VizSpark Thermal (arc) plasma systems

VizGrain Gas-DSMC, hybrid-plasma / macro-particle kinetics

VizMesh Hybrid unstructured 2D mesh generation tool

ChemZoneGeneralized 0D fast reactor model for complex

chemical reactive systems

VizDataComprehensive database of finite-rate chemistries and

equilibrium thermodynamics

VizFlowRobust flow modeling of applications ranging from

incompressible to high-Mach compressible flows

under-dense over-dense

VizEMStatic and wave electromagnetic fields in both time and

frequency domains

Esgee Technologies Inc. is excited to announce the release of OverViz

Simulation Suite v2.2. OverViz is a validated multiphysics tool suite that

provides industry leading plasma simulation capabilities. OverViz 2.2 includes

the first release of VizGrain with full integration into the OverViz framework,

enabling macro-particle dynamics with hybrid plasma-fluid-electromagnetics

simulations. Version 2.2 also includes usability enhancements, improved

multiphysics coupling, and new features to meet customer specific needs.

OverVizParallelized, scalable framework for creating

1D/2D/3D, coupled simulations using a comprehensive suite of multiphysics modules

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New Simulation Capabilities

New capabilities are continually added to expand the fidelity and robustness of multiphysics simulations and help address specific customer challenges. New features introduced in version 2.2 include:

• New, more robust compressible flow solver applicable across of Mach numbers from low speed incompressible to high speed compressible (VizFlow)

• Non-equilibrium plasma simulations now support multiple background species (VizGlow)

• New nonlinear solver to improve accuracy and robustness of convergence on complex meshes

• New capability to model electrostatic fields within conductive dielectrics (VizEM)

• Added Bohm diffusivity term for electrons to account for magnetized plasma turbulence (VizGlow)

• New Tensorial permittivity model added for ferrite materials in the electromagnetics frequency domain solver (VizEM)

• Improved ability to predict intensification of electric field within high permeability materials

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New Particle Modeling in Gas/Plasma

A new direct simulation Monte-Carlo (DSMC) method has been added for solving gas-dynamics, macro-particle kinetics, and hybrid-plasma simulations. Particle modeling features include:

• Ion energy and angular distributions (IEADF) at surfaces

• Dust particles charge-up and transport in a plasma

• High-speed and microscale gas-flows using DSMC

• Particle-laden aerodynamic flows resulting in static charge buildup at dielectric surfaces

Particle modeling using VizGlow and VizGrain enables the prediction of dust particle trajectories

and charge-up in low pressure CCP reactor

VizGlow simulation of inductively coupled plasma reactor to explore plasma composition and

uniformity on a semiconductor wafer surface

VizGrain-DSMC simulation of low pressure rarefied flow in a reactor

Average Particle Velocity

Average Number Density

Electrostatic Potential

Temperature Pressure

VizSpark simulation of argon plasma torch

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Process

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Advanced Simulation Capabilities

OverViz Suite 2.2 maintains many additional simulation capabilities that enable customers to solve complex problems accurately and efficiently.

• High performance parallel computing to accelerate simulation execution

• Expansive library of properties and chemistries of solids, liquids, and gases that offers convenience and flexibility for defining a wide range of problems.

• Particle In Cell (PIC) method for plasma particle motions

• Moving body dynamics for material ablation modeling

• Advanced state-of-the-art solvers to ensure accurate, robust convergence on complex meshes

• Custom-User-Functions (CUF) allow users to expand and customize complex simulations

• Customizable AC/DC external circuit modeling

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User Interface and Simulation Performance Enhancements

OverViz Suite 2.2 delivers enhanced usability and simulation performance to give users more flexibility and efficiency in solving complex multiphysics problems. Examples include:

• Up to a 10X speed-up in mesh import times for large meshes

• Graphical user interface updates to improve workflow and setup flexibility

• Enhanced error checking and output diagnostics during simulation execution

• Extended Custom User Function (CUF) capabilities allow users to add source terms to any equation and create new variables in both boundaries and subdomains

• Improved data structures in the chemistry libraries offer speedup of 1.25x for large chemistries

Flow Velocity Streamlines HBr Density

VizGlow, VizFlow, and VizEM coupled simulation of an ICP for

metal/poly-silicon etch reactor including 51 gas reactions,

simple quench surface chemistry, and flow effects

Ion Density

3D, parallel VizGlow simulation of DC sputter deposition for thin film application

Mesh Partition

Engineering ServicesEsgee Technologies Inc. is dedicated to helping customers leverage the OverViz Suite to meet technical challenges, improve design performance, reduce product timelines, and improve manufacturing quality. This is accomplished through:

• Customized training to help get customers up to speed quickly and enable them to maximize the utility of the OverViz tool suite. Training is offered in-person at the Esgee office in Austin, TX, in-person at a customer sites, or remotely via WebEx.

• Dedicated technical support for all licensed customers. We are highly committed to customer satisfaction and work closely with customers to help them work effectively and efficiently in achieving their simulation goals.

• Consulting services, utilizing a team of highly specialized domain experts in plasmas, reactive flows, gas and surface chemistries, thermal fluids, electromagnetics and integrated hybrid plasma systems to help customers solve complex multiphysics problems.

For more information about the OverViz Suite contact us at info@esgeetech.com

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Ion Density Ion IEADF at Wafer EdgeElectron Temperature

Electrostatic Potential Absorbed Electron Power Ion IEADF at Wafer Center

VizGlow, VizEM and VizGrain coupled particle-fluid simulation of ion impact energies and angular distribution functions (IEADFs) on a wafer surface for semiconductor etching processes. Particles are created by sampling the ionization rate of the

dominant gas. Ions interact with the electric field and the background gas.

VizSpark, VizFlow, and VizEM coupled simulation of spark plug channel with crossflow, conjugate heart transfer, and electrode vapor ablation. Simulation predicts arch strike locations and erosion depth verses time

Electric PotentialIron Vapor AblationTemperature

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Email: info@esgeetech.com6

VizGlow, VizGrain, VizFlow, VizEM coupled simulation of dielectric surface charging of

space launch vehicle

Molded case circuit breaker model with VizSpark, VizFlow and VizEM including moving

solid and material ablation

VizGlow, VizGrain, and VizFlow coupled simulation of a satellite interacting with ambient particles

VizSpark, VizFlow, and VizEM coupled simulation of plasma-combustion ignition in advanced igniters to

improve combustion efficiency and improve reliability