Part 2 Figures and Photos

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High-Power X-ray Laboratory, Tokyo Univ.

PHI 5000 VersaProbe Manual Part 2 Figures and Photos

High-Power X-ray Laboratory, Tokyo Univ. 2011/11/07 Version 0.39E

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Contents

Photographs (Hardware)

Photo 1 Nitrogen gas cylinder and liquid nitrogen dewar. 1

Photo 2 The vicinity of nitrogen gas cylinder. 1

Photo 3 General view of ULVAC-PHI PHI5000 VersaProbe. 2

Photo 4-1 The body of PHI 5000 VersaProbe. #1. 2



Photo 5 The vicinity of sample introduction chamber. 4

Photo 6 One-inch sample holder. 4

Photo 7 The vicinity of Ar ion gun. 5

Photo 8 Sample holder hanger. 5

Photo 9 Console and computer for controlling the apparatus. 6

Photo 10 'AVG050C' unit for controlling Ar gas flow. 6

Photo 11 Sample stage viewed through the window. 7

Figures (Softwares)

1. Icons on the desktop of the windows

Fig. 1 Software icons on the desktop of the computer. 7

2. Software for measurement, 'PHI SUMMITT'. Fig. 2 Main menu and vacuum watcher window. 8

3. Software for viewing the measuring chamber, 'Image Viewer'. Fig. 3 CCD Image Window. 9

4. Normal mode measurement Fig. 4-1 Main menu window. 10

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Fig. 4-2 Folder window 11

Fig. 4-3 Three windows displayed by clicking “Acquire button”. 11

Fig. 4-3-1 Acquisition setting window. 12

Fig. 4-3-1-1 Element table window. 13

Fig. 4-3-2 Image Window 14

Fig. 4-3-2-1 Image window. Stage (H/C) tag has been clicked. 15

Fig. 4-3-2-2 Image window. X-ray tag has been clicked. 16

Fig. 4-3-2-3 Image window. SXI/Auto-Z tag has been clicked. 17

Fig. 4-3-2-4 Image window. Neutralizer tag has been clicked. 18

Fig. 4-3-2-5 Image window. Ion Gun tag has been clicked. 19

Fig. 4-4-1 Image window (Point mode). #1. 20

Fig. 4-4-2 Image window (Point mode). #2. 20

Fig. 4-4-3 Spectral Viewer window (Point mode). 21

Fig. 4-5-1 Image window (Line mode). #1. 21

Fig. 4-5-2 Image window (Line mode). #2. 22

Fig. 4-5-3 Spectral Viewer window. (Line mode). 22

Fig. 4-6-1 Image window (mapping mode). #1. 23

Fig. 4-6-2 Image window (mapping mode). #2. 23

Fig. 4-6-3 Image Viewer window (Mapping mode). 24

Fig. 4-7-1 Image window (Sputtering point mode). #1. 24



Fig. 4-7-4 Acquisition Setting window (Sputtering point mode). 26

Fig. 4-7-5 Spectrum window (Sputtering point mode). 26

Fig. 4-7-6 Integrated intensity window (Sputtering point mode). 27

5. Data Analysis Fig. 5 The initial window of MultiPak 28

Fig. 5-1-1 File Open window of MultiPak 28

Fig. 5-1-2 Window of MultiPak ('SPE' data opened) 29

Fig. 5-1-3 Window of MultiPak (Assigned spectral peak） 29

Fig. 5-1-4 Exported text data (Point mode data) 30

Fig. 5-1-5 Exported text data (Sputtering point mode data) 30

Fig. 5-2-1 Window of MultiPak ('LIN' data opened) 31

Fig. 5-3-1 Window of MultiPak ('MAP' data opened) 32

Fig. 5-3-2 Exported graphical data of tif style (Mapping mode data) 32

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Fig. 5-4-1 Window of MultiPak ('PRO' data opened) 33

Fig. 5-5-1 Hide Multipak window. 34

Fig. 5-5-2 Show Multipak window. 34

Fig. 5-6-1 Automatic peak assignment. 35

Fig. 5-6-2 Quantitative analysis. 36

6. Macro mode measurement Fig. 6 Windows displayed by clicking the Macro button. 37

Fig. 6-1-1 Macro Setting window. #1. 38

Fig. 6-1-2 Stage Setting window. #1. 38


Fig. 6-1-4 Image window. #1. 39


Fig. 6-1-6 Acquisition Setting window . #1. 40


Fig. 6-2-2 Stage Setting window . #2. 41




Fig. 6-2-6 Acquisition Setting window. #2. 43

Fig. 6-2-7 Macro Setting window . #5. 44



Fig. 6-2-10 Acquisition Setting window. #3. 45

Fig. 6-3 Macro Setting window. #6. 46

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1 Nitrogen gas cylinder

5 Nitrogen gas regulator

4 Liquid nitrogen dewar

2 Gas cylinder carrier

3 Liquid nitrogen vessel

4 H-shaped wrench

3 First-order pressure gauge

2 Second-order pressure gauge

1 Nitrogen gas supply valve

5 Secon-order pressure adjusting handle. Note that this is reversed screw.

Photo 1 Nitrogen gas cylinder and liquid nitrogen dewar.

Photo 2 The vicinity of nitrogen gas cylinder.

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Photo 3 General view of ULVAC-PHI PHI5000 VersaProbe.

Photo 4-1 The body of PHI 5000 VersaProbe. #1.

1 Electron analyzer 2 Pico ammeter 5 Introduction chamber

10 Illumination light

6 Sample introduction cylinder

7 Sample introduction grip

2 Control unit 3 Main body of the apparatus

9 Emergency stop button

4 Measuring chamber 3 Ar ion gun

8 Turbo molecular pump

1 Computer for control and data analysis

11 Measuring chamber observing window

4 Measuring chamber observing window

3

2 Measuring chmber


3 Sample introduction chamber

7 Pico ammeter 5 Sample introduction grip

1 Electron analyzer


8 Ar ion gun

4 Emergency Stop button


1 Mg, Zr ion guns

3 Sample holder driving stage


5 Measuring chamber (in which X-ray source and focusing monochromator are set)

4 Sample introduction cylinder

2 Switch of cooling water circulator

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Photo 6 One-inch sample holder.

2 Cupper tape

1 One-inch sample holder

3 Sample (silver foil)

Photo 5 The vicinity of sample introduction chamber.

2 Sample introduction fork

3 Mark Screw

1 Sample introduction chamber

4 Cover of introduction chamber

4 Upper grrove

5 Lower groove

6 Round cutout

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Photo 7 The vicinity of Ar ion gun. Before opening the leak valve, open by 180 degree for a few seconds and necessarily close completely again.

1 Leak valve (Turn this large outer knob only !)

2 Ar cylinder valve: Before opening the leak valve, open by 180 degree for a few seconds and necessarily close completely again.

Photo 8 Sample holder hanger.

1 This part can be grasped by hand.

2 Hang the sample holder by clipping the upper groove of the sample holder.

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Photo 9 Console and computer for controlling the apparatus.

2 Emergency stop button

1 Temperature control unit

3 Vacuum level indicator

Photo 10 'AVG050C' unit for controlling Ar gas flow. Do not touch switch and knobs other than set point switch and power switch that have been properly

4 Ar gas flow control unit. (RVG050C) Refer also to Photo 10.

2 Power switch

1 Set point switch

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Fig. 1 Software icons on the desktop of the computer.

1 PHI SUMMITT icon: Measuring software

2 Watcher icon: Vacuum watcher

3 MultiPak icon: Software for data analysis

4 Model 32-097 icon: Do not use this icon

5 Image viewer icon: Image monitoring with a CCD camera in the measuring chamber

Photo 11 Sample stage viewed through the window. Positions of upper dot and lower dot should be adjusted to be identical after initialization of the sample stage

1 Upper dot

2 Lower dot

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1 Main menu window: Window to control the

2 Vacuum watcher window: Window to control the vacuum system

3 Valve indicator: Indicating the status of vacuum valves

12 Valve indicator: Indicating the status of valves by signal ('green' is open. 'red' is closed)

8 Vacuum level indicator: indicating the vacuum level in the sample introduction chamber and the measuring chamber

4 Backfill Intro button: to purge the sample introduction

5 Diff Viv Open button: to start the differential vacuuming

6 Transfer vessel button: used when the transfer vessel is attached

9 Close V2 valve button: to close V2 valve for nitrogen purging the sample introduction

7 Transfer sample button: By clicking this button, V1 valve between the sample introduction chamber and the measuring chamber can be

11 Pump intro button: Starting the vacuuming the sample introduction

Fig. 2 Main menu and vacuum watcher window. By double-clicking PHI SUMMITT icon (see Fig. 1), These two windows are displayed

10 Message box: Status of vacuum system is described

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Fig. 3 CCD Image Window. This window can be displayed by double-clicking “Image viewer icon” in Fig. 1. Please adjust the brightness of illumination in Fig. 4-1 on page 2 for clearly observing the measuring chamber.

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Fig. 4-1 Main menu window. This window is displayed about 10 seconds after the general view of the apparatus is displayed by clicking “PHI SUMMITT icon”. Please refer to Fig. 2 about the “Vacuum watcher window” that sometimes appears simultaneously with this window.

1 File button: to call measurement condition saved in a file whose extension is “pdt”

2 Acquire button: to open the measurement window of normal mode

3 Macro button: to open the measurement window of macro mode

4 More button: to do measurement with the same condition as saved in a file whose extension is “pdt”.

8 Cycle stop button: to stop the measurement after finishing the present

7 Abort button: to abort measurement. The data files are not saved.

6 Sequence stop button: to stop the macro measurement after finishing the measurement of the present cycle.

5 Macro abort button: to abort macro measurement. The data files are

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Fig. 4-2 Folder window. This window is displayed by clicking the “folder button”.

1 Drive pull down menu: to select the drive (partition) in which the data files are saved.

6 Present folder: to show the folder presently chosen

2 New folder making button: to make a new folder

3 Prefix of the data file box: to describe the prefix of the data file.

5 Comment box: arbitrary comments can be described in this window

4 Starting number of the data file box: to describe the starting number of the data

Fig. 4-3 Three windows displayed by clicking “Acquire button”.

5 Acquisition setting window: measurement condition should be set here.

4 Stage controller window: X-Y stages or rotation stage can be moved during the arrow buttons are clicked.

1 Main menu 2 Acquire button: These three windows have been displayed by clicking this button.

3 Image window: Secondary electron images are displayed here.

6 Foleder button: The folder in which the data files are saved, can be set by clicking this button.

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Fig. 4-3-1 Acquisition setting window.

9 Region setting pull dwon menu: Region name setting can be selected or set by clicking this button.

⑩Continuous ボタン：スパッターのモー

ドを，連続してスパッターを行い続ける

モードにします。

11 Alterrnate button: Alternative sputtering and measurement can be selected by clicking this

12 No sputter button: The measurement mode without sputtering can be selected by clicking this button.

13 AR button: Angle-Resolved measurement qualitatively to determine the depth profile of the elements can be selected by clicking this button.

14 Energy scan mode button: The normal Scan measurement is done by changing the decelerating voltage for electrons emitted from the sample. Unscan measurement is done without changing the decelerating voltage for electrons emitted from the sample by using energy resolution of 16-channel electron analyzer. Point mode measurement (normal spectroscopy) is done with scan mode. Line and mapping modes use

8 Neutralizer button: The use of neutralizer can be selected to do or not to do.

5 Acquire button: The measurement can be started by clicking this button. (The measurement is being done during this button is green).

4 Auto-Z button: Auto adjustment of the height of sample can be selected to do or not to do.

1 Check box: Region name whose check box are checked, are measured.

2 All check box: All region name can be checked or unchecked by checking this box.

6 Element table button: Region names can be selected from the element table displayed by clicking this

7 Test acquire buton: Heigh speed test measurement can be done by clicking this button. The users

3 Hardware button: for hardware setting. Not so frequently used.

15 Folder button: The folder in which the data files are saved, can be set by clicking this button.

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Fig. 4-3-1-1 Element table window.

1 Survey button: Wide range scanning can be selected by clicking this button. The default energy range is set to be 1000~0 eV.

2 Add button: Region name selected from the region list can be added to the schedule by clicking this button.

3 Region list: Region name can be selected from this region list.

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Fig. 4-3-2 Image Window.

3 Auto-Z button: automatically to adjust the sample

4 SXI button: Secondary electron image taken by scanning the position of X-ray focus on the sample is

5 Refresh button: to refresh the image.

2 Secondary electron image window: Scanning X-ray Image (SXI) is displayed when SXI button is clicked.

9 Mapping mode button: to measure two-dimensional mapping of photoelectron whose energy range has been

8 Line mode button: to do line profile of photoelectron whose energy range has been set.

7 Point mode button: to measure photoelectron spectra on one or

6 Marker button: to make a mark in the image

10 Image size pull down box: Image size can be selected from this pull down menu.

11 Imaging mode pull down box: Imaging mode can be selected from ‘Average’, ‘Fast’ and ‘Slow’. Integrated image is displayed with the ‘Average’ mode. However, image is refreshed with an interval of one and two seconds with ‘Fast’ and ‘Slow’ modes, respectively.

1 Sample position display window: The position on the sample holder on which the X-rays are incident, is displayed by the blue cross

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Fig. 4-3-2-1 Image window. Stage (H/C) tag has been clicked.

1 Stage tag: This tag has been clicked to control the position and angles of the sample stage.。

9 Move button: to move the sample stage to the position indicated by the position indicator

10 Stage position indicator: Position and angle of the sample stage are indicated

8 Stop button: to stop the sample satge

Introduce button: to move the sample stage to the introduction position

6 Extract button: to move the sample stage to the extraction position

7 Initialize button: to initialize the position of the sample stage

3 Holder change button: this button should be clicked when the sample holder was changed. ‘Thickness’ should be selected such as to be just larger than the sample height.

4 Rotation mode button: to set the rotation mode of the sample stage. ‘Normal’ is the mode to rotate only R-axis. ‘Eucentric’ mode is the mode to move also X and Y axes such that the the sample stage rotates around the point of observation.

2 Position Setting button: to name and save the sample position. Sample position can be named by clicking Add/Update button.

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Fig. 4-3-2-2 Image window. X-ray tag has been clicked.

1 X-ray tag: This tag has been clicked to set the X-rays exciting the secondary electrons.

3 UPS radio button: to select ultraviolet source. This option is not equipped with this apparatus.

4 Conventional X-ray source radio button: to select magnesium or zirconium X-ray source. These X-ray source are prepared for avoiding the overwrap of photoelectron and Auger electron peaks. These sources are not equipped

5 Focused X-ray source radio button: to select focused and monochromatized X-ray source of aluminum. The most recommended and usually used X-ray source.

2 X-ray focus size setting pull down menu: from which X-ray focus size can be selected when the point, line and mapping mode measurement is done.

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1 SXI / Auto-Z tag: This tag has been clicked to set conditions when the Scanning X-ray Imaging (SXI) and Auto-Z are done.

11 X-ray focus size setting pul down menu: X-ray

focus size when the SXI is done can be selected

from this pull down menu.

12 Neutralize ON/OFF button: to set the neutralizer

when the Scanning X-ray Imaging (SXI) is done.

‘Pulse’ mode is recommended.

10 File name box: Header of file name of

Scanning X-ray Imaging (SXI) can be typed.

Please note that SXI files are not automatically

saved.

9 File number box: Number of SXI file can be typed.

4 X-ray focus size setting pull down menu: to set the

fucus size of X-rays when the Auto-Z is done.

5 Viewer-Auto-Z button: to display a graphic chart during the Auto-Z is done.

6 Point mode check box: This box should be always checked.

7 electron netralizer check box: Please check here when eleectron neutralizer is ON when Auto-Z is

done.

8 Ar ion neutralizer check box: Please check here when

Ar ion neutralizer is ON when Auto-Z is done.

Fig. 4-3-2-3 Image window. SXI/Auto-Z tag has been clicked.

2 Save button: tosave

SXI images.

3 Copy button: tocopy

the SXI image to the

clipboard.

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Fig. 4-3-2-4 Image window. Neutralizer tag has been clicked.

5 Setting pull down box: this setting should not be changed.

1 Neutralizer tag: This tag has been clicked to set the condition of the neutralizer during the measurement.

4 Off button: not to nuetralize when the sample is not an insulator.

2 ON button:

to neutralize

always. not

usually used.

3 Standby button: to standby the electron neutralizer and start the neutralizer during the

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Fig. 4-3-2-5 Image window. Ion Gun tag has been clicked.

1 Ion gun tag: This tag has been clicked to set the conditions of Ar ion gun.

5 Standby button: to satadby the Ar ion gun and operate it during the measurement is done.

6 Off button: to set such that Ar ion sputtering nor Ar ion neutralizing are not done.

3 Timer check box: to operate the Ar ion gun for the set time.

2 Balncking button: Do not click this button.

10 Sputter pull down menu: Sputteirng voltage can

be selected from this pul down menu.

9 Neutralize pull down menu: to select the voltage of the Ar ion neutralizer. ‘Nuetralize’should be always selected.

4 Ext. Pressure check box: to display extractor pressure of Ar gas in the window just bellow.

8 Sputter button: to change the sputtering condition. Do not change the settings.

7 Neutralizebutton: to change the neutralizing condition. Do not change the settings.

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Fig. 4-4-2 Image window (Point mode). #2. X-ray tag has been clicked. X-ray focus size can be selected from the ‘X-ray setting’pull down menu.

Fig. 4-4-1 Image window (Point mode). #1. Point/Area tag has been clicked. Two points to be mesured are set on the SXI window.

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Fig. 4-4-3 Spectral Viewer window (Point mode). This window is displayed durng the point mode measurement is done. This window can be minimized but cannot be deleted.

Fig. 4-5-1 Image window (Line mode). #1. Verticaland horizontal lines are drawn on the SXI window. Line style (vertical, horizontal, etc) can be changed by right-clicking the line.

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Fig. 4-5-3 Spectral Viewer window. (Line mode). This window is displayed during the line mode measurement. This window can be minimized but cannot be deleted.

Fig. 4-5-2 Image window (Line mode). #2. X-ray tag has been clicked. X-ray focus size can be selected from the ‘X-ray setting’ pull down menu. The smallest size is recommended for high spatial resolution.

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Fig. 4-6-1 Image window (Mapping mode). #1. Field size can be set by clicking ‘coordinate’ after right-clicking the frame.

2 Points/Line Pull down menu: Number of pixel/line can be selected from this pull down menu.

1 Mapping field size frame: Field size can be set by right-clicking this frame.

Fig. 4-6-2 Image window (mapping mode). #2. ‘X-ray’ tag has been clicked. X-ray focus size can be selected from the pull down menu. The smallest focus size is recommended for high spatial resolution. Checking ‘Park Mode’ is recommended when the focus size is small.

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Fig. 4-6-3 Image Viewer window (Mapping mode). During the mapping mode measurement is done, these windows are displayed. In the right window, a photoelectron spectrum measured with the 'Unscan' mode is displayed. The energy range shoul be set such that a peak is found at the central position in the spectrum measured with 'UnScan' point mode.

Fig. 4-7-1 Image window (Sputtering point mode) #1. Point mode has been selected and "Stage (H/C)" tag has been clicked. The central point has been selected by clicking "Point Center Add button".

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Fig. 4-7-2 Image window (Sputtering point mode). #2. X-ray tag has been clicked. X-ray focus size can be selected from the "X-ray setting pull down menu".

Fig. 4-7-3 Image window (Sputtering point mode). #3. "Ion gun tag" has been clicked. "Standby button" should be clicked to be green. Sputtering voltage can be selected from the pull down menu.

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Fig. 4-7-4 Acquisition Setting window (Sputtering point mode). Sputtering measurement has been selected by clicking "Alternate button" to be green. Sputtering time has been set such that sputtering for 2 minutes and photoelectron spectroscopy in the vicinity of Cu3p peak are alternatively repeated by ten times. Then, the total sputtering time has been set to be 20 minutes. The sputtering measurement can be started by clicking "Acquire button" at the right upper corner of the window.

Fig. 4-7-5 Spectrum window (Sputtering point mode). The above spectrum has been measured after the first sputtering. The spectrum before sputtering should be measured by using the normal point mode measurement before the sputtering measurement.

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Fig. 4-7-6 Integrated intensity window (Sputtering point mode). Graphical chart is also displayed to show integrated intensity of photoelectron during the sputtering measurement.

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Fig. 5 The initial window of MultiPak to analyze the data can be opened by double-clicking the "MultiPak icon" on the desktop. The data analysis can be started by clicking "Open submenu" or "Open Last Acquisition submenu" in "File menu".

Fig. 5-1-1 "File Open window" is displayed after clicking "Open submenu" in "File menu". At first in many cases, "Browse button" is clicked to find the folder the data files were saved. Many files can be opened by pushing 'Ctrl' or 'Shift' key.

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Fig. 5-1-3 Several peaks in the photoelectron spectrum were assigned by clicking "ID button" at the upper left of the window. The assigned peaks can be magnified by clicking radio buttons at the lower position of the window. By clicking "XY button", the whole spectrum is displayed again. The spectrum and the window can be exported as a plane text file or a tif file by clicking "Export To submenu" in "File menu".

Fig. 5-1-2 A photoelectron spectrum diplayed in the window of MultiPak after a data file whose extension is 'SPE'.

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Fig. 5-1-5 An exported text data file taken with the sputtering point measurement. The first column is the electron energy. The nth (n > 1) columns are number of electrons per second measured after the nth sputtering. This file has been opened by the Excel.

Fig. 5-1-4 An exported text data file of the spectrum. The first and second columns are electron energy and number of electrons counted per second. The spectrum can be drawn by using graphic software.

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Fig. 5-2-1 These windows have been displayed by opening a data file whose extension is 'LIN' measured by the line mode measurement. The ordinate and abscissa of the left chart are number of electrons counted per second and electron biding energy. The ordinate and abscissa of the right chart are number of electrons counted per second and position on the line.

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Fig. 5-3-1 These windows have been displayed by opening a data file whose extension is 'MAP' measured by the mapping mode measurement. The left window shows the electron spectrum measured with the 'UnScan' mode. The right window shows a map of integrated number of electrons in the energy range shown in the left window.

The color can be selected.

Fig. 5-3-2 An exported tif file exported from the right window of Fig. 5-3-1. When exporting, 'current image + annotation' was selected. A text data whose number of columns and raws are 256 * 256, can also be expoted

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Fig. 5-4-1 These windows have been displayed by opening a data file whose extension is 'PRO' measured by the sputtering point mode. In the left window, photoelectron spectrum is shown. The ordinate and abscissa of the right window are integrated number of electrons and number of times of sputtering.

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Fig. 5-5-2 Show Multipak window. Multipak can be displayed again by clicking the above small window.

Fig. 5-5-1 Hide Multipak window. Multipak can be hidden by clicking the above samll window.

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Fig. 5-6-1 Automatic peak assignment. (see also text for detail).

2 Peak assign button

6 Cu2p3 radio button

3 Element table window 1 XY auto scale button

4 Clear button

5 Dsiplay stile pull down menu

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Fig. 5-6-2 Quantitative analysis. (see the text for detail).

1 %ABC button 2 % button

3 right ruler 4 left ruler 5 Cu2p3 radio button

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2 Macro button: This button has been clicked to display other three windows.

7 Acquisition Setting window: to set the measurement condition. 6 Set button is placed at the upper right corner of the window in place of Acquire button in Acquisition Setting window (Fig. 3-3-1) for normal measurement. Please refer to Fig. 4-3-2 - 4-3-2-5 for the usage.

4 Stage controller window: to move X, Y and rotation axes.

1 Main menu

3 Image window: Refer to Fig. 4-3-2 - 4-3-2-5 for the usage.

6 Set button: This button should be clicked after setting all conditions of measurement. The setting of measurement whose both sides are red in the sequence map (Acquisition) field in 5 Macro setting window, can be determined by clicking this button.

Fig. 6 Windows displayed by clicking the Macro button (see Fig. 4-1).

5 Macro setting window: in which sequence of automatic measurement is described.

8 Folder button: to set folder and header of file name. All data files are saved in this folder. The extension of data file changes depending on the measurement mode.

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Fig. 6-1-1 Macro Setting window. #1.

1 Sequence Map (Position) field: This field has been activated by clicking anywhere in the field. The item 'Position' in the sequence field has been dragged and dropped here.

Fig. 6-1-2 Stage Setting window. #1.

File Select pull down menu: This window has been displayed by selecting 'Setting' after right-clicking the 'Position 1' in Fig. 6-1-1. 'Sputtered' is the name of position that has been registered by clicking "2 Position setting button" in Fig. 4-3-2-1 on page 15. The name of position can be selected from the pull down menu. This window can be closed by clicking 'OK' button. If a warning message that the position is out of range appears, do not click 'OK' but click x-mark at the right upper corner of the message box to close the message.

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1 Sequence Map field (Acquisition): This field has been activated by clicking anywhere in the field. The item 'Map' in the sequence field has been dragged and dropped here. The mapping mode measurement is done at the position 'Sputtered'.

Fig. 6-1-4 Image window. #1.

2 Points/Line pull down menu: Number of pixels (Max: 256 * 256) can be selected from the pull down menu.

1 Mapping field frame: After right-clicking this frame, please select 'coordinate' to set the field size.

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1 X-ray Settingpull down menu: 'X-ray' tag has been clicked. X-ray focus size can be selected from this pull down menu. Smaller size is recommended for high spatial resolution. Check box 'Park Mode' is recommended to be checked when a small focus size is selected.

Fig. 6-1-6 Acquisition Setting window . #1.

2 Folder button: Folder and header of data files should be set. The extension of file changes depending on the measuring mode.

1 Acquisition Setting window: Energy range with which the mapping mode measurement is done should be set. The energy scan mode when the mapping measurement is done is 'UnScan' only. Energy range can be changed by changing the path energy.

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1 Sequence Map field (Position): This field has been activated by clicking anywhere of this field. The item 'Position' in the sequence field has been dragged and dropped here.

Fig. 6-2-2 Stage Setting window . #2.

1 File Select pull down menu: This window has been displayed by selecting 'Setting' after right-clicking 'Position 2' in Fig. 6-2-1. 'CuMesh' is the name of position that has been registered by clicking "2 Position setting button" in Fig. 4-3-2-1 on page 15. The name of position can be selected from the pull down menu. This window can be closed by clicking 'OK' button. If a warning message that the position is out of range appears, do not click 'OK' but click x-mark at the right upper corner of the message box to close the message.

42

1 Sequence Map field (Acquisition): The position 'CuMesh' is activated. (The both sides are red). Then, this field has been activated by clicking anywhere in this field. The item 'Spectra' has been dragged and dropped here. 'Spectra' should be left-clicked to set the measuring condition in the next step.



1 Point Center Add button: When the point mode is selected, 'Point/Area' tag has been clicked to displayed this window. The central position of the field is recommended to be measured by clicking this button because the Auto-Z is done at this point.

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1 X-ray Setting pull down menu: X-ray focus size can be selected from this pull down menu (10~100 µm). When small focus size is selected, 'Park Mode' is recommended to be checked.

Fig. 6-2-6 Acquisition Setting window. #2.

1 Acquisition Setting window: Energy region to be measured can be set in this window. "Element table button" can be clicked to display the element periodic table. Region name can be selected from region list which is displayed by clicking the chemical symbol in the element table. Energy Scan Mode should be set 'Scan' usually for point mode measurement. "Set button" should be clicked after the all parameters are set.

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Fig. 6-2-7 Macro Setting window . #5.

1 Sequence Map field (Acquisition): The item 'line' in the sequence field has been dragged and dropped here to do the line measurement at the position 'CuMesh'. 'Line' should be left-clicked to set measurement condition in the following steps.


3 Line check box: Two lines have been selected to be measured.

2 Measuring field frame: The measurements are done on these two blue lines. Line style can be changed by right-clicking the lines.

1 Points/Line pull down menu: Number of points measured on the line can be selected. (Max: 256).

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Fig. 6-2-10 Acquisition Setting window. #3.

1 Acquisition Setting window: Electron energy range to be measured with the line mode can be set here. Energy scan mode can be selected only to be 'Unscan'. Energy range to be measured can be changed by changing the path energy. "Set button" should be clicked after setting all parameters.


1 X-ray Setting pull down menu: 'X-ray' tag has been clicked. X-ray focus size can be selected from this pull down menu. Smaller size is recommended for high spatial resolution. Check box 'Park Mode' is recommended to be checked when a small focus size is selected.

46

Fig. 6-3 Macro Setting window. #6.

1 Acquire button: The macro measurement can be started by clicking this button.

Documents

Part 2 Figures and Photos