Upload
thuyet
View
40
Download
1
Tags:
Embed Size (px)
DESCRIPTION
PEEM III Endstation Design Review. Endstation Layout Support System Vessel Magnetic Shielding. PEEM III Endstation Design Review. Endstation Layout – Sector 11. PEEM III Endstation Design Review. Endstation Layout. PEEM III Endstation Design Review. Sample Prep and transfer - PowerPoint PPT Presentation
Citation preview
PEEM III Endstation Design Review
• Endstation Layout• Support System • Vessel • Magnetic Shielding
PEEM III Endstation Design Review
Endstation Layout – Sector 11
PEEM III Endstation Design Review
Endstation Layout
PEEM III Endstation Design Review
MicroscopeSample Prep and transfer
General HV – UHV in Sample and Mirror Sections
< 2x10-7 Gauss AC Field
Nanometer Scale Stability-Sample to Optics
“Easy” access to internal components
PEEM III Endstation Design Review
Microscope - Details
5-Axis Sample Manipulator
Fiber-Optic Laser
90 degree Optics and Mirror
Internal Support
CCD Cameras
UHV Sub-Chamber
Separator Replacement Optics
PEEM III Endstation Design Review
Support System
High stiffness - vibration isolated internal support
•Semi-kinematic mounting
•Epoxy-granite filled base
•Visco-elastic damping
•Isolated chamber and external components
PEEM III Endstation Design Review
Support System - AssemblyInstall/Align base stand with visco-elastic damping pads
Install/align filled base•Side mounting pads for jacks/ball plates
Mount internal table support legs and align fiducialized table (or plate)
Install/align struts and chamber
PEEM III Endstation Design Review
Vacuum Vessel
PEEM III Endstation Design Review
Vacuum Vessel - Details
HV required – UHV desirable
SS plate weldment
Differentially pumped, double o-ring, window frame to lid seal
“Standard” conflat ports
PEEM III Endstation Design Review
UHV Sub-Chamber - Details
Aluminum conductance limited UHV-HV sub-chambers
•O-Ring base/lid seal
•Glass viewing window
•Be-Cu sheet interface
PEEM III Endstation Design Review
UHV Sub-Chamber - Details
Main PEEM3 vacuum tank
Outgassing rate 100hrs Area Gas load fraction
torr l/s/cm^2 cm^2 torr l/s %
Al tank 1.00E-10 33500 3.35E-06 4
Mu metal 1.00E-10 203225 2.03E-05 27
Al optic table 1.00E-10 5000 5.00E-07 1
Separator magnet 1.00E-10 3500 3.50E-07 0
Epoxy Castal E301-KT,RT75 2.56E-07 173 4.43E-05 59
kapton wires 1.00E-09 2000 2.00E-06 3
Viton O-ring double (cm) 3.00E-10 300 9.00E-08 0
Viton O-ring 20 KF40(cm) 1.80E-08 251 4.52E-06 6
Total outgas rate 7.54E-05 torr l/s
Main tank pump l/s 880.95
Pressure in main tank torr 8.56E-08 torr
Table 5. Gas loading on the Main Peem3 chamber and pressure after 100 hours with 10" OD tee pumping system, 800 l/s ion pump + 1000 l/s turbo
Main microscope tank
Mu metal Stove Pipe
UHV sub-chamber
MainPumping
TeeMain
PumpingAdaptor
Turbo
Valve
Ion Pump 1Ion Pump 2
MainPumpingBellows
Hole for electronsCu/Be rolled
sheet
UHV Pump Tee
UHV Pump bellows
Schematic arrangement of Peem3 pumping for UHV sub-section and main tank
Window
Sub UHV chamber Box 20x20x20cm - 1/2" Al plate with viton O ring seals
Outgassing rate 100hrs Area Gas load fraction
torr l/s/cm^2 cm^2 torr l/s %Al sub chamber tank 1.00E-10 2400 2.40E-07 36Lenses 5.00E-10 180 9.00E-08 14Ceramic 2.30E-10 180 4.14E-08 6Sample manipulator 2.30E-10 400 9.20E-08 14Viton O-ring (cm) baked 3.00E-10 240 7.20E-08 11
Total outgass rate 5.35E-07 81
Leaks from main tank area cm^2 length cmConductance l/s
25um gaps in overlap sleeve walls 0.25 1.2 1.12038
(2x4" and 3x1.5" sleeves)
2mm Aperture for electrons 0.0314 0 0.36688
total leak conductance 1.48726 l/s
Gas load of leak torr l/s 1.27E-07 19
Total gas load 6.63E-07 100
UHV sub-ch pump l/s 269.65 l/s
P in UHV sub-cham torr 2.46E-09 torr
Table 7. Gas loading on the UHV sub-chamber and pressure after 100 hours with 8" OD tee pumping system and 800 l/s ion pump. Pressure in main tank = 8.5e-8 torr.
PEEM III Endstation Design Review
Magnetic Shielding
Magnetic Shielding requirements
- require < 2x10-7 Gauss AC-AC field on the floor of +-0.3mGauss (1Hz)- Need attenuation of ~ 2500- Crude cylinder model indicate
-2 layers attenuate ~1600-3 layers attenuate ~ 26000
-Better calculation by Amuneal suggest 3 layer attenuation ~ 7000-Thickness of shield = 3mm for mechanical
rigidity- Shield spacing = 25mm – as large as possible given space constrains-Degaussing of inner shield with AC and
internal coils
Magnetic field at Peem3 location
Model of mu metal shields with Vacuum chamberremoved
PEEM III Endstation Design Review
Magnetic Shielding
3 Concentric boxes with ~ 1’’ gap
Assembled from outside – in
Separated with aluminum spacers/handle mounts
PEM fasteners @ ~3.5” spacing
No penetrations > 5 diameters in critical areas - tubulations
~ 3 diameters in 2 pump sections
PEEM III Endstation Design Review
Magnetic ShieldingTubulation Details
PEEM III Endstation Design Review
The End (Hopefully)