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PHASED: a Faster, Smarter & More Affordable Analysis Device - UpdatePHASED: a Faster, Smarter & More Affordable Analysis Device - Update
U.Bonne, J.Detry, R.Higashi, K.Newstrom-Peitso, H.Pham, T.Rezachek and S.Swanson
Honeywell Labs, Plymouth, MN 55441, [email protected]
Definition: PHASED (= Phased Heater Array Structure for Enhanced Detection) presently integrates multi-stage pre-concentration, separation, flow sensing and detection of gas components on one chip.
Project Objectives: Develop and demonstrate the operation of a PHASED sensor, via: - Thermophysical analysis and simulations - Design and assemble a setup to check out the individual components - Design and fabricate a preliminary version of PHASED, with PCB electronics - Design and fabricate an integrated version of PHASED-on-a-chip
Acknowledgment: This work is supported by ORNL/DoE
PHASED: Micro Gas Analyzer SystemPHASED: Micro Gas Analyzer SystemPhased Heater Array Structure for Enhanced Detection
Goal: Sensitivity <10 ppb, < 3 sec, ~ 1 in.3, < 1 J/analysis, wireless output.
Multi-Stage Pre-concentrationMulti-Stage Pre-concentration
To
Separator
Multi-stage release of analyte increases its concentration:
~100-fold with 1st stage
~100 x n-fold after n stages
Cross section of PHASED structure
Side Views of PHASED structure and Operation
PHASED: Physical Principle of Multi-Stage Pre-Concentr.PHASED: Physical Principle of Multi-Stage Pre-Concentr.
Phased Heater Array Structure for Enhanced Detection
Schematic Views of the Phased Heater Array with Individual Heaters, H1, Hn,….Hn-1, Hn, and a Thermal Conductivity Sensor, TC
PHASED: Operation, Structure, Envisioned outputOperation, Structure, Envisioned outputPHASED: Operation, Structure, Envisioned outputOperation, Structure, Envisioned output
• Simulations predicted: Speed, Separation, Flow control and # of PreConc.Elements•1st gen. PHASED chips fabricated• Stat. film material survives 200-250ºC in air Patterning demonstrated and
Specific surface area ~800 m2/g unaffected• Heater FET switch chips fabricated • 1st gen. electronic circuit designed & built• Millisecond desorption response time feasible
PHASED: Technical ProgressPHASED: Technical Progress
=600
PHASED: TC Detector Response Time PHASED: TC Detector Response Time
PHASED TC Capability TC Sensor Length: 0.03 cm Gas Velocity: 100 cm/s Response Time: < 1 ms
PHASED Output: (tR 100 ms)
Resolution, t½~ tR/R 3 ms
Top View of Honeywell Microbridge Flow or TC Sensor
PHASED LayoutPHASED Layout
Proposed layout of 20-Element Concentrator.
Die: 7.3 x 8 mm
PHASED LayoutPHASED Layout
20 Elements
100 mm Wafer
Honeywell Confidential and Proprietary
20-Element Pre-Concentrator, Diff. TC, 20-Element SeparatorIntegrated Version of PHASED, Showing Sensors, Concentrator and Separator.
PHASED: Progress with Chip FabricationPHASED: Progress with Chip Fabrication
PHASED: Progress with Chip FabricationPHASED: Progress with Chip Fabrication
Predicted Output for Air Sample AnalysisPredicted Output for Air Sample Analysis
Gas Chromatograph: Outputs of C1-C3 in HeGas Chromatograph: Outputs of C1-C3 in He
k’ = (tR - to) / to
PHASED: Simulated Outputs for C1-C3 Gases in AirPHASED: Simulated Outputs for C1-C3 Gases in Air
PHASED: Simulated Outputs for C1-C3 Gases in AirPHASED: Simulated Outputs for C1-C3 Gases in Air
Status of PHASED as of Jan. ‘2003 Status of PHASED as of Jan. ‘2003
Conclusions: • Demonstrated: PHASED-I MEMS fabrication and flow control; operational demonstration is next • Operational feasibility risk reduction: Simulations, Materials, Fabrication: 1,000-10,000:1-concentration gain, 15:1-Resolution, 3-sec, 10-ppb • Resolution: Adjust gas velocity for max. (=min. plate height) • Min. Time: Minimize film thickness w/o starving the capillary’s gasvolume
MEMS Enablers Thin-film stationary phase enhances resolution and shortens analysis time Thin-film substrate reduces power MEMS enables integration GC components, multi-stage pre-con. & electr. injection Compatibility with NeSSI
Challenges Most power is consumed by column temperature ramping
Selectivity & peak ID; then pump and valve
PHASED Flow CalibrationPHASED Flow Calibration
