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F. Rey-García et al, Planar optical waveguides via Sol-Gel 18/10/12 24/10/10 10:00 13:36 1 1 Planar optical waveguides on soda-lime glass substrates obtained via 1 Sol-Gel 2 F. REY-GARCÍA (1) , C. GÓMEZ-REINO (1) , M.T. FLORES-ARIAS (1) , G. F. DE LA 3 FUENTE (2) , A. DURÁN (3) , Y. CASTRO (3) 4 1. Unidad Asociada de Óptica & Microóptica GRIN (CSIC-ICMA), 5 Departamento de Física Aplicada, Escola Universitaria de Óptica e 6 Optometría, Universidade de Santiago de Compostela, Campus Sur 7 s/n, E-15782 Santiago de Compostela, e-mail: [email protected] 8 2. Instituto de Ciencia de Materiales de Aragón (CSIC-Universidad de 9 Zaragoza), María de Luna 3, E-50018 Zaragoza, e-mail: 10 [email protected] 11 3. Instituto de Cerámica y Vidrio (CSIC), Kelsen 5, E-28049, Madrid, 12 e-mail: [email protected] 13 14 15 16 17 18 19 20 Corresponding author: A. Durán ([email protected]) 21 22

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Page 1: Planar optical waveguides on soda-lime glass substrates ...digital.csic.es/bitstream/10261/43555/3/Planar optical...121 cm/min on soda-lime glass slides and on 5 mm thick commercial

F. Rey-García et al, Planar optical waveguides via Sol-Gel 18/10/1224/10/10 10:0013:36 1

1

Planar optical waveguides on soda-lime glass substrates obtained via 1

Sol-Gel 2

F. REY-GARCÍA(1)

, C. GÓMEZ-REINO(1)

, M.T. FLORES-ARIAS(1)

, G. F. DE LA 3

FUENTE(2)

, A. DURÁN(3)

, Y. CASTRO(3)

4

1. Unidad Asociada de Óptica & Microóptica GRIN (CSIC-ICMA), 5

Departamento de Física Aplicada, Escola Universitaria de Óptica e 6

Optometría, Universidade de Santiago de Compostela, Campus Sur 7

s/n, E-15782 Santiago de Compostela, e-mail: [email protected] 8

2. Instituto de Ciencia de Materiales de Aragón (CSIC-Universidad de 9

Zaragoza), María de Luna 3, E-50018 Zaragoza, e-mail: 10

[email protected] 11

3. Instituto de Cerámica y Vidrio (CSIC), Kelsen 5, E-28049, Madrid, 12

e-mail: [email protected] 13

14

15

16

17

18

19

20

Corresponding author: A. Durán ([email protected]) 21

22

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Abstract 23

Inorganic and hybrid planar waveguides with different compositions (silica-titania, 24

methacrylate -silica-cerium oxide, zirconia-cerium oxide and silica-zirconia) have been 25

obtained by sol-gel synthesis followed by dip-coating. Soda-lime glass slides and 26

conventional commercial window glass were used as substrates. The thickness and 27

refractive index of the coatings were determined by profilometry and Spectroscopic 28

Ellipsometry. Waveguide efficiency was measured at ca. 70% with a He-Ne laser beam, 29

coupled with an optical microscope objective into and out of the waveguiding layer via 30

a double prism configuration. Thicknesses between 150 and 2000 nm, along with 31

refractive index values ranging between 1.45 and 1.99 ( = 633 nm) were obtained 32

depending on the sol composition and the dip-coating conditions. This wide range of 33

values allows designing multilayered guides that can be used in a variety of 34

applications. 35

Keywords: planar waveguides, inorganic coatings, hybrid coatings, sol-gel 36

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Introduction 37

Planar waveguides contain a guiding layer with a higher refractive index than the 38

substrate or the adjacent layers which confine it physically. Planar optical waveguides 39

have been prepared by ion-exchange, chemical or physical vapour deposition methods 40

[1-3]. Laser induced deposition and direct writing techniques have also been employed 41

to obtain planar waveguides on glass substrates of different compositions [4-11]. The 42

controlled local modification of the refractive index of commercial glass substrates is 43

the main target of these processing methods, which enable the preparation of coatings of 44

different thickness and composition. 45

The preparation of planar waveguides has attracted considerable attention because of 46

their potential applications in photonic devices, as well as in the field of 47

communications and data transmission. The generation of higher index paths in 48

commercial glass substrates should allow achieving effective waveguiding within any 49

established geometrical trace in an economically attractive fashion. 50

An alternative, convenient method to obtain planar waveguides is based on sol-gel 51

technology. It permits to obtain coatings with controlled thickness and refractive index. 52

A considerable number of papers dealing with planar waveguides obtained by the Sol-53

Gel method have been reported in the literature [12-22]. For example, Gonçalves et al 54

have reported on the sol-gel preparation and properties of multilayer, Er3+

doped SiO2-55

ZrO2, active planar waveguides [19] on Si (100) substrates. Maia et al have most 56

recently described the preparation of highly planar multilayer Er:YAl3(BO3)4 glass thin 57

films by the polymeric precursor and Sol-Gel methods, where the film thickness ranged 58

between 630 and 780 nm [20]. Moreover, there were previous reports on dip-coated, 59

thin lead titanate sol-gel waveguide crystalline films obtained on borosilicate glass [21], 60

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as well as on dip-coated, 9-micron thick sol-gel laponite (synthetic clay) waveguide 61

films obtained on both, borosilicate glass slides and Si wafers [22]. 62

From the previous literature it may be inferred that the sol-gel method has been 63

demonstrated convenient to control chemical composition, thus the refractive index, and 64

film thickness by single and multideposition techniques. Reduced costs and large area 65

coatings are additional advantages of sol-gel processes, as compared with other 66

techniques developed for the preparation of planar waveguides; in particular, those 67

requiring the use of vacuum chambers. Deposition techniques such as dipping, spraying 68

and spinning allow coating a wide variety of substrates and complex geometries via sol-69

gel. In addition, sol-gel techniques allow to incorporate organic molecules for obtaining 70

hybrid coatings, which have attracted considerable interest for the fabrication of sensor 71

waveguides as reviewed in [23]. 72

The microstructure of sol-gel derived coatings, thus their optical properties, is affected 73

by different parameters involved in their synthesis. These include starting materials, 74

solvent, and thermal processing conditions, among others [24-25]. The optimisation and 75

control of all these parameters should allow the production of efficient sol-gel derived 76

planar waveguides. 77

The aim of this work was to obtain waveguides on commercial glass substrates using a 78

sol-gel method and inorganic and hybrid (organic-inorganic) sols previously described 79

in the literature [26-29]. The optical properties of the films as a function of the organic 80

component, thickness, refractive index and multi-deposition processes have been 81

studied. In addition, the efficiency of the waveguides has been measured using a He-Ne 82

laser and evaluating the energy input and output with a double prism configuration 83

similar to that described in [30-31]. 84

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Experimental 85

Silica-titania (SiTi sol), silica-zirconia (SiZcol, SiZrZcol sols), methacrylate-silica-86

cerium oxide (TM-Ce sol) and zirconia-cerium oxide (ZrCe sol) inorganic and hybrid 87

sols were prepared by acid catalysis following different routes. Table I summarises the 88

molar ratios, composition and final concentration of the sols. 89

The inorganic ZrCe sol was prepared by mixing tetrapropoxyzirconate (TPZ) with 90

glacial acetic acid (AcH) as complexing agent to control the hydrolysis and 91

condensation reactions; cerium nitrate (Ce(NO3)36H2O was used as cerium precursor. 92

Absolute ethanol and distilled water were added drop wise to this solution to start the 93

hydrolysis and condensation reactions. Two different compositions were prepared: 94

90ZrO2:10CeO2 and 70ZrO2:30CeO2, both with final concentrations of 100 g/L. 95

On the one hand, two types of hybrid inorganic-organic sols were synthesised. Low-96

hybrid sols (SiTi, SiZcol, SiZrZcol sols) incorporate methyl groups as the organic part 97

responsible for increasing the critical thickness of the coatings. On the other hand, 98

highly organic hybrid sols (TM-Ce sol) are obtained from a hybrid alkoxide, 3-99

methacryloxypropyl trimethoxysilane (MPS), where methacrylate groups can be 100

partially polymerised in the liquid in order to develop two interpenetrating and bonded 101

organic and inorganic networks. 102

SiZcol and SiZrZcol sols were prepared using a zirconia colloidal suspension (Nyacol 103

suspension, 20% zirconia in water), methyl-triethoxysilane (MTES), tetraethyl 104

orthosilicate (TEOS) and TPZ (only in the case of SiZrZcol sol). The synthesis of SiZcol 105

sol was reported previously [26]. In the case of SiZrZcol sol, a new process was 106

followed: TPZ was first mixed with ethanol and acetic acid under stirring for 1 hour to 107

produce a chelate complex. In a subsequent step, MTES, TEOS and zirconia colloidal 108

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suspension were incorporated under vigorous stirring; concentrated HNO3 (0.6 vol %) 109

was then added to attain a final pH between 2 and 3. 110

SiTi sols were prepared by complexing tetraisopropoxytitanate (TISP) with acetic acid 111

and adding MTES in different molar ratios (Table 1) and acidified water in a dropwise 112

manner, to complete the synthesis reactions. 113

Finally, highly organic hybrid sol (TM-Ce sol) was prepared following the process 114

described in [27]. The methacrylate groups were partially polymerised in liquid using 115

2,2´-azobis(isobutyro)nitrile (AIBN) as initiator. This synthesis process may yield 116

thicker ( 5 µm) and more flexible coatings. 117

The stability of the sols was followed by measuring the evolution of viscosity with time 118

using the Ostwald method [28-26]. 119

Coatings were deposited by dip-coating varying the withdrawal rate between 10 and 50 120

cm/min on soda-lime glass slides and on 5 mm thick commercial window glass. The 121

substrates were cleaned in an ultrasonic bath with absolute ethanol for 15 min. The 122

coatings were heat-treated at 450ºC for 30 min in air, except those obtained from TM-123

Ce sol, which were cured at 150ºC during 1 h. 124

Multilayer coatings were prepared for the compositions specified in Table II. Substrates 125

were dip-coated with five-layers of the SiTi sol containing 70:30 and 50:50 molar 126

ratios, and with four-layers of the ZrCe sol (70:30 molar ratio) at a constant withdrawal 127

rate of 25 cm/min. Intermediate heat treatments at 450ºC during 15 min were applied 128

between coatings, followed by a final treatment at 450ºC during 30 min. 129

On the other hand, two sandwich type multilayer coatings were prepared by deposition 130

of alternate sols, with the objective of obtaining an intermediate layer with a lowhigher 131

refractive index, convenient for optical wave-guiding. This was achieved by depositing 132

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alternatively a coating of 133 nm from the ZrCe (70:30) sol, followed by a second layer 133

of 350 nm from the SiTi (70:30) sol, and finishing with a third layer of 133 or 138 nm 134

from the ZrCe or SiTi (70:30) sol, respectively. The latter procedure was similar to the 135

one described in the previous paragraph. 136

The coatings were characterised by optical microscopy (Zeiss, HP1, Germany) to 137

evaluate the homogeneity and detect possible defects and/or cracks. Thickness (e) and 138

refractive index (n) were respectively measured by profilometry (Talystep, Taylor-139

Hobson, UK) using a variable angle spectroscopic ellipsometer (Woollam M2000U). 140

The refractive index and coating thickness of coatings obtained from the different sols 141

are presented in Table II. 142

Microstructural studies were performed with a LEO435-VP optical microscope and a 143

Hitachi S4700 Field Emission Scanning Electron microscope. Semi-quantitative 144

elemental analysis was carried out with an EDX unit coupled to the FE-SEM. 145

146

Waveguide efficiency measurements 147

148

Two M multilayer SiTi (70-30) systemand a monolayer TM-Ce (95SiO2:5CeO2)s 149

systems with 1.2 and 4.15 μm in thickness and refractive index values of 1.59 and 1.48, 150

respectively, determined by variable angle ellipsometry at λ = 633 nm, were selected 151

to study the optical waveguide efficiency., SiTi (70-30) and TM-Ce (95SiO2:5CeO2) 152

with 1.2 and 4.15 μm in thickness and refractive index values of 1.59 and 1.48 153

respectively, determined by variable angle ellipsometry at λ = 633 nm. These 154

measurements were performed using the double prism method reported in [32-36], 155

illustrated in Figure 1 and described as follows: 156

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The beam of a He-Ne laser emitting at 633 nm with a nominal power of 35 mW was 157

introduced into an entry prism by focusing it through a microscope objective (20x, NA 158

0.4). The entrance angle into the prism (n = 1.779, NSFL-11, Edmund Optics) was 159

defined mathematically using Snell’s law, resulting in a value of 1º 42’ with respect to 160

the normal to the prism hypotenuse. A second exit prism was placed 2 cm away. 161

Coupling between the prisms and the waveguide was achieved with an index adjustment 162

liquid (n = 1.56). 163

A laser power meter (Beam Profiler, Thorlabs GmbH) was used to measure the entrance 164

(24 mW) and exit (17 mW) laser beam intensity, yielding a guiding efficiency value of 165

70.8%. This value is approximate, since coupling losses at the entry prism were not 166

evaluated, and it was assumed that 100% of the laser power was introduced into the 167

prism. 168

169

Results and discussion 170

Characterisation of the sols 171

Hydrolysis and condensation reactions of the sols were controlled in order to obtain 172

transparent and homogeneous inorganic and hybrid sols. While SiTi, SiZrcol and TM-Ce 173

sols were colourless, ZrCe and SiZrZcol sols appeared slightly yellow. 174

Stability studies show that the viscosity of SiTi sols increases slightly from 1.2 to 3.0 175

mPa.s when the amount of TiO2 changes from 10 to 50 molar %, these values are 176

maintained for more than one month stored at 4ºC indicating the high stability of the 177

sols. On the other hand, viscosity of SiZcol and SiZrZcol sols increases rapidly with time, 178

and precipitation was observed, indicating the de-stabilisation of the sols with the aging 179

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time. On the other hand, ZrCe and TM-Ce sols are very sensible to visible light and it is 180

necessary to keep them in amber bottles to maintain their stability, although the ZrCe 181

sol has a maximum stability for one week at 4 ºC. 182

Deposition and characterisation of coatings 183

SiO2-TiO2 coatings were deposited by dip-coating onto soda-lime slide-glass substrates, 184

using SiTi sols with different molar ratios and varying the withdrawal rate. After 185

sintering at 450ºC for 30 min, homogeneous and transparent coatings were obtained. 186

Figure 2 shows the critical thickness and refractive index as a function of SiO2 in terms 187

of mol %. These values are summarised in Table II, along with the corresponding sol-188

gel systems and molar compositions. A simultaneous decrease of the index of refraction 189

and increase of thickness is observed when SiO2 content is increased. This is related to 190

the presence of methyl groups coming from MTES and linked to the inorganic network. 191

On the other hand, the refractive index increases for increasing TiO2 contents, because 192

of its higher index (n= 2.1) with respect to that of SiO2 (n= 1.45). This binary system 193

allows the selection of suitable compositions to obtain rather high thickness and specific 194

refractive indexes. 195

Another method to attain coatings with high refractive index involves the addition of 196

zirconia in the sol precursor compositions, both as colloidal dense particles and/or 197

alkoxides. SiZcol, SiZrZcol and ZrCe sols were dip coated at different withdrawal rates. 198

Refractive indexes around 1.5 and 1.6 were obtained for SiZcol and SiZrZcol coatings, 199

respectively. On the other hand, the incorporation of colloidal zirconia does not increase 200

the refractive index as expected [37], although it has been recently reported that thermal 201

processing conditions play an important role in tailoring the index of sol-gel derived 202

films [38]. The highest refractive index, n 2.0, was found for ZrCe coatings with very 203

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low thickness. The thickness slightly increased when cerium content increased from 10 204

to 30 % molar, as observed in Table II. 205

Finally, highly organic hybrid TM-Ce sol was used to raise the coating thickness for 206

achieving better laser coupling. A lower sintering temperature was necessary to avoid 207

the degradation of organic groups. The presence of methacrylate organic chains that can 208

be polymerised in the liquid allows relaxing stresses during sintering, thus enabling an 209

increase in the final film thickness. Critical thickness was not achieved and a maximum 210

thickness of 2.3 µm at 60 cm/min was obtained for a single dip-coated layer. However, 211

an important limitation is observed in the refractive index value, which is lower than 212

that of the substrate (n = 1.47). This could inhibit light guiding in the waveguide. 213

In order to approach the fabrication of useful waveguides, coatings with high thickness 214

and high refractive index values have been sought. These have been obtained in two 215

ways: either by preparing multi-layer coatings using the SiTi sols, and/or by utilising a 216

coating architecture that combined layers with different compositions and refractive 217

index values. 218

To this respect, multilayer coatings with 5 layers were prepared using SiTi sols with 219

70:30 and 50:50 molar ratios, and 4 layers for the composition ZrCe (70:30). The final 220

multilayer coatings exhibit maximum thickness values of 1230 nm 613 nm and 489 nm 221

and refractive index values of 1.59, 1.75 and 2.04 foir SiTi 70:30, SiTi 50:50 and ZrCe 222

sols, respectively (Table II). 223

An example of the second route is the combination of SiTi (70:30 and 50:50) and ZrCe 224

(70:30) sols as in a “sandwich” configuration with intermediate films of lower higher 225

(???) refractive index with respect to adjacent layers. This structure combines layers 226

with different thickness (133-350 nm) and refractive indexxes (1.62 and 2.04) values, 227

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respectively, as gathered from the data given in Table II. These architectures were 228

explored in order to test the possibility of obtaining complex optical devices based on 229

the use of where different wavelength lasers. may be employed to induce beam 230

combination phenomena 231

Scanning Electron Microscopy and EDX analysis were used to characterise a typical 232

coating obtained from the SiTi (70:30) sol. Figure 3 (a) shows a transversal section of 233

the coating, imbedded in an epoxy resin. The multilayer coating has a thickness of ca. 234

1230 nm, and it appears to be well adhered to the substrate, as judged from the fact that 235

it has undergone a certain level of mechanical stress during sample preparation and 236

neither cracks, nor layer separations, have been observed within the sample. Figures 3 237

(b) and (c) show EDX spectra performed at points 1 and 2, as indicated in Figure 3(a). 238

These are consistent with the expected composition both, at the sol-gel layer, and at the 239

substrate. Some Ti was detected at point 1, nevertheless, close to the substrate/coating 240

interface. This is expected, since the volume analysed is of the same order in size than 241

the distance between points 1 and 2. 242

Light guiding was studied in TMCe and SiTi 70:30 different kinds of coatings (TMCe 243

and SiTi) using the output beam of a 35 mW He-Ne laser and the apparatus described in 244

ref. [10]. Initial results show that, apparently, no gradual change in index is found 245

across the coating-substrate interface; an expected result, taking into account the 246

presence of two materials with different refractive index and the absence of diffusion. 247

(hemos quitado todo lo de la difusión del Ti que no tiene sentido plantear) Esto 248

It is well established, however, that a minimum, wavelength-dependent thickness value 249

is required to guide visible or NIR light through a coating which acts as a planar 250

waveguide [37]. Multiple sol-gel dip-coatings from 70SiO2-30TiO2 and TMCe sols 251

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were thus prepared in order to increase the coating thickness to a minimum which 252

allows enables performing useful laser waveguiding measurements. 253

In Figure 4, light from a He-Ne laser output at = 633 nm is guided by a 1230 nm thick 254

planar sol-gel multilayer obtained in this work, derived from the SiO2:TiO2 (70:30) sol. 255

The image in the Figure has been captured at the exit end of the guide with a CCD 256

camera. The intense horizontal line thus corresponds to the cross-section of the Sol-Gel 257

multilayer planar waveguide at its exit end. Light from the He-Ne laser is concentrated 258

within the film thickness, although scattering is observed coming from within the glass 259

substrate and in the volume of air near it. 260

Figure 5 shows how light from a He-Ne laser (633 nm, 1 mW), coupled with a 261

microscope objective (40x, NA 0.65), is guided through a TMCe sol derived multilayer 262

of 4,15 µm. An intense region of light is clearly observed at the exit surface waveguide 263

layer, while the rest of the glass substrate is does not appear illuminated. Light is, as 264

expected, confined to the sol-gel derived, 4.15 µm multilayer waveguide which has a 265

higher refractive index than its adjacent glass substrate and air layers. 266

Both Figures, 4 and 5, demonstrate qualitatively the feasibility of the sol-gel method 267

and the combination of layers with different refractive index to attain planar waveguides 268

on commercial glass substrates. 269

Conclusions 270

Planar single and multilayer waveguides have been obtained by the sol-gel method, 271

employing the dip-coating technique. Sols of different compositions (SiO2-TiO2, SiO2-272

ZrO2, and SiO2-CeO3) were synthesised to obtain coatings with different refractive 273

index and thickness, in order to produce planar waveguides with different 274

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characteristics. Scanning electron microscopy observations allowed identifying 275

adequate coupling between the deposited layers and their corresponding soda-lime 276

commercial glass substrates. A wide range of values for the index of refraction and for 277

layer thickness have been demonstrated feasible, depending on the sol composition and 278

experimental conditions applied along the dip-coating process. This wide range of 279

refractive indexes and thickness values should allow to conveniently design and prepare 280

adequate multilayer waveguides. 281

282

Acknowledgements. 283

The authors acknowledge funding from MICINN (TEC2006-10469, CEN 2007-2014 284

and SURFALUX SOL-00030930), from DGA (Group of Excellence in Laser Material 285

Processing and Characterisation), and XUNTA DE GALICIA 286

(WCITE08PXIB206013PR). 287

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References 288

[1] J. Bohandy, B.F. Kim, F.J. Adrian, J. Appl. Phys. 60 (1986) 1538. 289

[2] K. Kordás, K. Bali, S. Leppävuori, A. Uusim{aki, L. Nánai, Appl. Surf. Sci. 154-290

155 (2000) 399. 291

[3] A.C. Tien, Z.S. Sacks, F.J. Mayer, Microelectron. Eng. 56 (2001) 273. 292

[4] H. Yamada, T. Sano, T. Nakayama, I. Miyamoto, Appli. Surf. Sci. 197-198 (2002) 293

411. 294

[5] A. Favre, E. Lee, V. Apostolopoulos, C.B.E. Gawith, C.Y. Tai, E. Taylor, Y. Kondo, 295

F. Koizumi, Opt. Mater. 27 (2004) 7. 296

[6] H. Ebbendorf-Heidepriem, Opt. Mater. 25 (2004) 109. 297

[7] A.K. Mairaj, C. Riziotis, A.M. Chardon, P.G.R. Smith, D.P. Sheperd, D.W. Hewak, 298

Appl. Phys. Lett. 81 (2002) 3708. 299

[8] F. Franzonim, S. Djambazov; Industrial Ceramics 17 (1997) 23-28. 300

[9] A. Castelo, D. Nieto, C.Bao, M.T. Flores-Arias, M.V. Pérez, C. Gómez-Reino, C. 301

López-Gascón, G.F. De La Fuente; Optics Comm. 2007, 273, 193. 302

[10] R. Rangel-Rojo, A. Castelo, M.T. Flores-Arias, C. Gómez-Reino, C. López-303

Gascón, G.F. de la Fuente; Opt. Exp. 2006, 14, 8765. 304

[11] C. N. Afonso, J. M. Ballesteros, J. Gonzalo, G. C. Righini, S. Pelli, Appl. Surf. Sci. 305

96-98 (1996) 760-763. 306

[12] M. Glugielmi, P. Colombo, L. Mancinelli Degli Esposti, G.C. Righini, S, Pelli, in: 307

Glasses for Optoelectronics II, SPIE, vol. 1513, 1991, p. 2. 308

[13] M. Glugielmi, P. Colombo, L. Mancinelli Degli Esposti, G.C. Righini, S, Pelli, V. 309

Rigato; J. Non-Cryst. Solids 147 & 148 (1992) 641. 310

[14] L. Yang, S.S. Saavedra, N.R. Armstrong, J. Hayes; Ann. Chem. 66 (1994) 1254. 311

[15] L. Weisenbach, B.J.J. Zelinski; Sol-Gel Optics III, SPIE 2288 (1994) 630. 312

Con formato: Español (alfab.internacional)

Con formato: Inglés (Estados Unidos)

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F. Rey-García et al, Planar optical waveguides via Sol-Gel 18/10/1224/10/10 10:0013:36 15

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[16] G. Brusatin, M. Guglielmi, P. Innocenzi, A. Martucci, G. Battaglin, S. Pelli, 313

G. Righini; J. Non-Cryst. Solids 220 (1997) 202. 314

[17] M. Yoshida, P.N. Prassad; Chem. Mater. 8 (1996) 353. 315

[18] Y. Sorek, R. Reisfeld, R. Tenne; Chem. Phys. Lett. 227 (1994) 235. 316

[19] R. R. Gonçalves, J. J. Guimaraes, J. L. Ferrari, L.J.Q. Maia, S. J. L. Ribeiro, 317

J. Non-Cryst. Solids 354 (2008) 4846-4851 318

[20] L.J.Q. Maia, V.R. Mastelaro, A.C. Hernandes, J. Fick, A. Ibanez, Thin Solid 319

Films 517 (2009) 6584-6587 320

[21] C. Urlacher, O. Marty, J. C. Plenet, J. Serughetti, J. Mugnier, Thin Solid 321

Films 349 (1999) 61-66 322

[22] C. Le Luyer, L. Lou, C. Bovier, J. C. Plenet, J. G. Dumas, J. Mugnier, 323

Optical Materials 18 (2001) 211-217. 324

[23] P. C. A. Jerónimo, A. N. Araújo, M. Conceiçao, B.S.M. Montenegro, Talanta 325

72 (2007) 13-27 326

[24] L.L. Hench, J.K. West; “The Sol-Gel process” Chemical Reviews 90 (1990) 327

33. 328

[25] C. Sanchez, F. Ribot; New J. Chem. 18 (1994) 1007. 329

[26] Y. Castro, B. Ferrari, R. Moreno, A. Durán; J. Sol-Gel Sci. Technol. 35(1) (2005) 330

41. 331

[27] N. C. Rosero-Navarro, S. A. Pellice, A. Durán and M. Aparicio. Corrosion 332

Sci., 50 (2008) 1283. 333

[28] S.A. Pellice, R.J.J. Williams, I. Sobrados, J. Sanz, Y. Castro, M. Aparicio, A. 334

Durán; J. Mater. Chem. 16 (2006) 3318. 335

[29] P. Innocenzi, A. Martucci, M. Guglielmi, L. Armelao, S. Pelli, G.C. Righini, G.C. 336

Battaglin; J. Non-Cryst. Solids 259 (1999) 182. 337

Con formato: Español (alfab.internacional)

Con formato: Inglés (Estados Unidos)

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F. Rey-García et al, Planar optical waveguides via Sol-Gel 18/10/1224/10/10 10:0013:36 16

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[30] J. C. Martínez-Antón, E. Bernabeu, Optics Commun. 132 (1996) 321-328. 338

[31] A. Boudrioua, J. C. Loulergue, Optics Commun. 137 (1997) 37-40. 339

[32] Tien, P.K.; Applied Optics 10 (1971) 2395. 340

[33] Okamura, Y.; Yoshinaka, S. & Yamamoto, Applied Optics 22 (1983) 3892. 341

[34] Strasser, T.A. & Gupta, M.C., Applied Optics 31 (1992) 2041. 342

[35] Ab-Rahman, M.S. & Zaman, M.H.M, Australian Journal of Basics and Applied 343

Sciences 3 (2009) 2901. 344

[36] Okamoto, K., “Fundamentals of Optical Waveguides” Academic Press, 2000. 345

[37] F. J. Ferrer, F. Frutos, J. García-López, A. R. González-Elipe, F. Yubero, Thin 346

Solid Films 516 (2007) 481-485. 347

[38] S. Jana, P. K. Biswas, Materials Chemistry and Physics, 117 (2009) 511-516. 348

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Captions: 349

Figure 1. Schematic drawing of the experimental double-prism set-up used to determine 350

the optical efficiency of the sol-gel waveguides obtained in this work. Elements are 351

identified in the drawing. 352

Figure 2. Evolution of SiO2-TiO2 sol-gel coating thickness and its index of refraction as 353

a function of SiO2 content. The coatings were obtained on borosilicate slide-glass 354

substrates. The lines are placed as eye-guides. 355

Figure 3. FE-SEM image corresponding to a 70SiO2-30TiO2 multilayer coating 356

obtained by sol-gel: a) transversal cross-section of the coating; EDX analysis at point 1 357

(b) and at point 2 (c) indicated in the micrograph. 358

Figure 4. CCD image from 70 SiO2- 30 TiO2 multilayer coating. Light is concentred at 359

the sol-gel derived layer and appears as a bright, horizontal line. The rest of the images 360

observed are consequences of various optical phenomena deriving from the incidence of 361

the laser beam on part of the glass substrate. 362

Figure 5. Light guiding of a He-Ne laser beam, coupled via a microscope objective, 363

through a 70SiO2-30TiO2 multilayer coating deposited onto a commercial, 5 mm-thick 364

soda-lime glass substrate. The exit guided beam is observed on the photograph as a 365

bright spot opposite the microscope objective. 366

367

368

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Table I. Molar ratios, compositions and concentrations used for the preparation of the sols employed in this study and described in the text.

Sol Abbreviation Molar composition H2O/alkoxides Alkoxide/AcH

Concentration

(goxides /L)

Inorganic ZrCe* (90-70)ZrO2-(10-30) CeO2 1 1 - 2 100

Low-hybrid

SiTi* (90-80) SiO2- (10-20) TiO2 2 1 80

SiTi* (70-50) SiO2- (30-50) TiO2 1.5 1 50

SiZcol 75 SiO2-25 ZrO2 colloidal 7.3 100

SiZrZcol

65 SiO2- 25ZrO2 – 10

ZrO2colloidal 7.3 ---- 100

High hybrid TM-Ce 95 SiO2-5 CeO2 3.3 1 267

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Table II. Refractive index (λ = 633 nm) and critical thickness values for the different

coatings obtained using the sols described in Table I. The critical thickness refers to the

maximum thickness attainable by dip-coating without film breakdown. (a) internal

coating adjacent to substrate (b) intermediate coating (c) external coating.

System Molar composition Refractive index Thickness (nm)

Single layers

SiTi sols

90:10 1.45 1100

80:20 1.51 401

70:30 1.63 358

50:50 1.73 138

ZrCe sols 90:10 1.98 147

70:30 1.99 203

SiZcol sol 75:25 1.53 213

SiZrZcol sol 65:25:10 1.59 215

TM-Ce sol 95:5 1.47 2330

Multilayers

SiTi sol (5) 70:30 1.59 1230

SiTi sol (5) 50:50 1.75 613

ZrCe sol (4) 70:30 2.04 489

TMCe sol (¿???) 95:5 ---¿?? 4500

Sandwiches

#1

ZrCe (a) sol 70:30 2.04 133

SiTi (b) sol 70:30 1.62 350

ZrCe (c) sol 70:30 2.04 133

#2

ZrCe (a) sol 70:30 2.04 133

SiTi (b) sol 70:30 1.62 350

SiTi (c) sol 50:50 1.73 138

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Figure 1. Rey-García et al: Schematic drawing of the experimental double-prism set-up

used to determine the optical efficiency of the Sol-Gel waveguides obtained in this

work. Elements are identified in the drawing.

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F. Rey-García et al, Planar optical waveguides via Sol-Gel 18/10/1224/10/10 10:0013:36 22

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Figure 2. Rey-García et al: Evolution of SiO2-TiO2 Sol-Gel coating thickness and its

index of refraction as a function of SiO2 content. The coatings were obtained on

borosilicate slide-glass substrates. The lines are placed as eye-guides.

1.40

1.45

1.50

1.55

1.60

1.65

1.70

1.75

0

200

400

600

800

1000

1200

30 50 70 90 110

Re

fra

ctive

inde

x (

= 6

33 n

m)

Th

ickn

ess (

nm

)

mol % SiO2

Thickness (nm)

Refractive index

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Figure 3. Rey-García et al: FE-SEM image corresponding to a 70SiO2-30TiO2 multilayer

coating obtained by Sol-Gel: a) transversal cross-section of the coating; EDX analysis at

point 1 (b) and at point 2 (c) indicated in the micrograph.

1

2

Coating

Resin

b)

c)

a)

Glass-slide

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Figure 4. Rey-García et al: CCD image from 70 SiO2- 30 TiO2 multilayer coating. Light

is concentred at the sol-gel derived layer and appears as a bright, horizontal line. The

rest of the images observed are a consequence of light scattering phenomena deriving

from the incidence of the laser beam on part of the glass substrate.

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Figure 5. Rey-García et al: Light guiding of a He-Ne laser beam, coupled via a

microscope objective, through a 70SiO2-30TiO2 multilayer coating deposited onto a

commercial, 5 mm-thick soda-lime glass substrate. The exit guided beam is observed on

the photograph as a bright spot opposite the microscope objective.