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POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY. Chuanfeng Liu Supervisors: Andrew Martin EGI KTH Aapo Sääsk Xzero AB Henrik Dolfe Xzero AB. Heat and Power Technology, Stockholm, Sweden. - PowerPoint PPT Presentation
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1
POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY
Chuanfeng Liu
Supervisors: Andrew Martin EGI KTH Aapo Sääsk Xzero AB Henrik Dolfe Xzero AB
Heat and Power Technology, Stockholm, Sweden
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Content
Heat and Power Technology, Stockholm, Sweden
1. Objectives of thesis
2. Current UPW system in semiconductor industry
3. Principle of air gap membrane distillation
4. Xzero test facility of Air Gap Membrane Distillation
5. Integrated MD in cogeneration cycle
6. Conclusion
3
Objectives
•Integrate MD technology into traditional heat and power cogeneration cycle to produce UPW for semiconductor industry
•Theoretical study of membrane distillation
•Experimental study of air gap membrane distillation
•Economic analysis
4
UPW Consumption in Semiconductor Industry
Heat and Power Technology, Stockholm, Sweden
•50% of total UPW market worldwide.
• More than 6000 liters UPW for one eight-inch wafer
•1.4-4.8 million liters UPW per day
•The cost of a UPW system in a fab is more than $10 million.
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Present UPW Production System
Heat and Power Technology, Stockholm, Sweden
•Reverse osmosis (RO) and Electro-deionization (EDI)
•10-20 KWH per cubic meter UPW
•2-3MW-- 6% of total fab energy consumption
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Make-up Section
RawWater
Tank
MultiMedia
Filter
Carbon
Filter Heat
Exchanger Cartridge
Filter
ReverseOsmosisand EDI
BreakTank with NitrogenBlanket
Degas
Primary MixedBed
Exchange
UVSystem
Cartridge
Filter
RejectTo Polishing Loop Section
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UPW Polishing Loop Section
UPWWater Tank
With nitrogenblanket
TOCUV
Heat Exchanger
Polishing Mixed
BedIon
Exchange
GermicidalUV
CartridgeFilter
Ultra Filter
FabTool Use
UPW return line
Drains & Rinse
From Make up section
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Principle of Membrane Distillation
Membrane
Hot
Sid
e
Cold side
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Advantages of MD
Heat and Power Technology, Stockholm, Sweden
• 100% (theoretical) rejection of non-volatile matters
• lower operating temperatures
• lower operating pressure
• reduced chemical interaction
• reduced vapor spaces compared distillation processes
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Flow Diagram Of Xzero Test Facility
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Computer Simulation of Membrane Distillation
Hot side
Membrane
Cold Side
Ultra Pure Water
Feed water in
Feed water out
Cold water in
Coldwater out
Heat exchangerHeat Exchanger
Expansion tank
Water_tank
Heatin
Heatout
Module emplyed in Aspen Utilites
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Integrated Cogeneration of MD in the Semiconductor Industry
• The power requirement of one typical semiconductor fabrication plant is equal to what 7500 single-family homes consume.
• The average power consumption for the fab is 2.18 KW/m2, and the average cooling load is 1.53 KW/m2.
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Combined Heat Recovery Chiller With MD Units
P
Compressor
Expansion Valve
CondenserEvaperator
Air conditioner system MD Water Purification
Heat recovery chiller
Waste Heat From Fab
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Combined MD With Waste Heat From Fab
• Total 35-40 MW
• Air conditioner system 4-5MW
• Condenser side 12 MW
• 20,000 l/hour possible with readily available waste heat sources
• About 1/3 of fab UPW requirement
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Integrated MD With Power Production
HTCA
JW
LO
LTCA
Membrane Module:
Gas Engine
heat recorvery
JW heat exchanger
LO heat exchanger
Layout for the combined Gas Engine with MD unitGas Engine: 18v34sgA2, WÄRTSILÄ
MD unit: AGMD,XzeroLayout NO.1 with flue gas heat recovery
STAGE1
STAGE2
STAGE3STAGE4STAGE5
STAGE6
Pure Water
Cooling water in
Coolin water out
H eat R ecovery
C oolingW a te r O ut
•36 Mwei (fab electricity demand covered )
•48,000 L/hr (2/3 UPW demand)
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Conclusion
• Polygeneration is promising in semiconductor industry.
• With CHP and waste heat utilization , up to 65 m3/hr UPW possible for a fab with 5000 wafers production per week.
• Capital cost is around $3 per cubic meter UPW.