Professor Ming C. Wu Faculty Director Dr. Bill Flounders ...nanolab.berkeley.edu/public/process/reports/Update_2018.pdf · Staff Services $84.60 $86.40 + 2%. Annual PI Meeting May

Annual PI Meeting May 11, 2018

Professor Ming C. Wu Faculty Director

Dr. Bill Flounders Executive Director


AgendaMembership Status, Internal / External Usage Trends

Staffing Status

NanoLab High School Intern Program (3 min video)

New Equipment Qualification Categories

New Equipment / Capabilities

FY 18/19 Rates Overview

Summary of Support from VCR’s Office `


Lab Members by Department FY 17 Total = 370

EECS (125),33.8%

MECHE (46),12.4%

Physics (36), 9.7%

MSE (16),4.3%

CHEM(15), 4.1%

CHEMENG(12), 3.2%

CE (1),0.3%

MCB (1), 0.3%

BNLA (69),18.6%

UC (external)(26), 7%

LBNL (14), 3.8%

Univ. Non-UC (9),2.4%


The NanoLab 2017

Analysis of the Top 20

Top 20 by Dept Δ Δ

EECS 10 -1 All Academic $2.09 M -$190 K

Mech Eng 2 -1 Top 20 Academic $1.81 M -$ 50 K

Chemistry 2 0 All BNLA $1.91 M $250 K

Physics 2 0

MSE 2 1 Top 10 Academic

UC Davis EE 2 1 Top 10-20

Financial

> $72K each

> $23K each


Lab Members Historical Analysis

FY 2010 2011 2012 2013 2014 2015 2016 2017

Total 466 474 497 471 462 441 420 370

UCB 367 353 370 340 326 280 297 252*

Ext Acad 48 67 68 59 66 87 55 49

BNLA 51 54 59 72 70 74 68 69

EECS 122 132 138 126 139 135 142 125

Physics 42 36 45 39 35 31 38 36

MSE 21 27 31 23 21 23 17 16

Mech Eng 102 99 106 95 87 59 62 46

BioEng 12 10 7 8 4 4 4 1

Chem/ChE 65 47 42 49 30 28 34 27* ~25 service accounts removed from member count


Danny PestalFacilities & Equipment

Manager

Greg

Mullins

Anthony

Bielecki

Dustin

Hall

Susan

Kellogg-Smith

Steven Scott

Brenton Haslam

Joanna Bettinger

Sharon Norris

AdministrativeManager

Allison Dove

Ryan Rivers

Richelieu Hemphill

Glenn

Kewley

Sam

Tsitrin

Jason

ChukesJay

Morford

Ed Hester

Brian McNeil

Olek Proskurowski

Computer Systems Manager

Yuliya

JacksonAl Briggs

David Lo

Dave Taosaka

Erin Hancock

R&D 3

TBN

Emily Beeman

Amara Johnson

Process E Engineers

1

4

2

3

Staff Organizational Chart

13 / 26 < 5 Years

1 / 26 > 20 Years


NanoLab High School Intern Program for Young Women – Now Linked to Berkeley High School

Overview Video (Just 3 minutes) available here:

http://citris-uc.org/berkeley-high-suits-marvell-nanolab/

Program on going since 2001.

http://citris-uc.org/berkeley-high-suits-marvell-nanolab/


New Equipment Qualification Categories46 51 67 13 11

simple metrology / etch bond / furnaces sinks / PVD dual plasma / SEM EBL AFM


Park AFM In The NanoLabPrevious afm Microlab ~ 1988 - 1992

Initial training was completed by 51 lab members representing 22 faculty and 9 affiliate companies. Sustained use of the tool by 32 lab members representing 21 faculty and 6 affiliate companies.


New Raman Microscope

Tool owned by BNLA company. Approved for shared lab placement 2015BNLA default $40K.Demo tool purchase $65 K; quote for new $130KResidual debt traded for tool title transfer to NanoLab.


New spectroscopic Ellipsometer

Former instrument from Prof Spanos 1998 UC Discovery grantNew equipment purchased with BNLA fees ~$40K


New wet sink installed – metal etch.One side wafer / One side chip

Equipment Depreciation Fund: ~ $50K


Another ebeam evaporatorToshiba Donation May 2016. Released Sep 2017

Initial release May 2017, announced last yearMultiple rebuilds required.

NanoLab / Machine shop provided:- Rebuilt pump package- Rebuilt 6 pocket e-gun- Ebay planetary rotation susceptor- Spare QCM- Custom 6” and 4” wafer holders

~ Spare parts, good shopping, gradualattention and ~$35K yields:New high performance box coat systemfor evaporation of oxides


Academic Recharge RatesFiscal Year FY 2018 FY 2019

Access Fee per month $89.00 $84.90 - 5%

General Laboratory Rate$43.20/hr

Cap: $1,400.00/month$43.80

Cap: $1,400.00/month+ 1%----

Special Equip Rate Tier 1wire bonder, HF vapor, polymer, metrology

Tier 1: $21.00/hrTier 1 cap: $200.00 / monthRate over Tier 1 Cap: $0/hr

Tier 1: $21.00/hrTier 1 cap: $200.00 / monthRate over Tier 1 Cap: $0/hr

----- 1%----

Special Equip Rate Tier 2LPCVD, PECVD, DRIE, generalpurpose SEM

Tier 2: $43.80/hrTier 2 cap: $1,400.00/month

Rate over Tier 2 cap: $5.70/hour



0%----

- 7%

Special Equip Rate Tier 3DUV, 50kV ebeam lithoSEM, epi-SiGe



Tier 3: $ 61.80/hrTier 3 cap: $1,500.00/month


+ 3%----

- 1%

Special Equip Rate Tier 4130 kV ebeam litho

Tier 4: $101.40 Tier 4: $84.00 - 17%

Staff Services $84.60 $86.40 + 2%


BNLA Recharge RatesFiscal Year FY 2018 FY 2019 Academic

Access Fee per month $123.60 $123.60 --- $84.90

General Laboratory Rate$47.40/hr

Cap: $2,450.00/month$49.20/hr

Cap: $2,450.00/month+ 3%

---43.80

$1,400

Special Equip Rate Tier 1wire bonder, HF vapor, polymer, metrology

Tier 1: $21.00/hrTier 1 cap: NA


--------

$21.00$200

Special Equip Rate Tier 2LPCVD, PECVD, DRIE, general purpose SEM



+ 2%----

$43.80$1,400

Special Equip Rate Tier 3DUV, 50kV ebeam lithoSEM, epi-SiGe



+ 0.7%----

$61.80$1,500

Special Equip Rate Tier 4130 kV ebeam litho

Tier 4: $214.80 Tier 4: $186.60 - 15% $84.00

Staff Services $84.60 $86.40 + 2% $86.40


FY 17/18 FY 18/19

Lab Members

Per CompanyAnnual Rates

Lab Members

Per CompanyAnnual Rates

1

2

3

4

5

6*

$18,500

$28,500

$38,500

$42,500

$55,000

$65,000

1

2

3

4

5

6 *

$18,500

$28,500

$38,500

$42,500

$55,000

$65,000

BNLA Annual Membership Fees

** Non-Core Access Program

• 6th member = restricted access

• max 20hours/month 10am – 8pm

• unlimited non-core 8pm – 10am


VCR Investment in the NanoLab FY15 $250K

• NanoLab obtains $650K Gift In Kind as match for 2year VCR Investment

• Purchased 2chamber PECVD and 2chamber PVD for $300K

FY16 $250K• $150K to new ebeam down payment

• $100K to new aligned wafer bonder

FY17 $100K; NanoLab to Match. $200K AFM selected• $100K to new AFM / $100K BNLA

FY18 $100K; NanoLab to Match.• Investment to support MaskLess Litho purchase

• Tool review underway – Heidelberg is most established; Microwriter, Kloe

• Tool selection to emphasize robust instrument to meet heavy use by widest range of NanoLab members.


Summary Academic Rates kept flat or decreased

• Overall membership modest decrease

• EECS, Physics, MSE Dept use steady

• Mech Eng, Bio Eng, Chem Dept use decline

Modest increases to BNLA • Non-core hour access program avaialable, not used

NanoLab continues to expand services and capabilities• Efforts to streamline training continue; process staff add

• AFM up and in heavy demand

• Negotiated financial solution yields new metrology

• Foundation infrastructure maintained: sink and ellips replacement

VCR investment in NanoLab to support MaskLess Litho purchase

Annual PI Meeting May 11, 2018Thank you

The shared lab model is

alive and well thanks to

your support.

The NanoLab responds

to your issues and works

to control your costs.

Chancellor Christ Tour June 16, 2017

Documents

Professor Ming C. Wu Faculty Director Dr. Bill Flounders ...nanolab.berkeley.edu/public/process/reports/Update_2018.pdf · Staff Services $84.60 $86.40 + 2%. Annual PI Meeting May